KR20070116866A - 박막 제조방법 및 제조장치 - Google Patents

박막 제조방법 및 제조장치 Download PDF

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Publication number
KR20070116866A
KR20070116866A KR1020077022903A KR20077022903A KR20070116866A KR 20070116866 A KR20070116866 A KR 20070116866A KR 1020077022903 A KR1020077022903 A KR 1020077022903A KR 20077022903 A KR20077022903 A KR 20077022903A KR 20070116866 A KR20070116866 A KR 20070116866A
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KR
South Korea
Prior art keywords
substrate
particles
nanotube
deposited
filter
Prior art date
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Abandoned
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KR1020077022903A
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English (en)
Korean (ko)
Inventor
라오프 오. 루트피
알렉산더 피. 모라브스키
찰스 엔. 하센
Original Assignee
테일러드 매터리얼스 코포레이션
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Publication of KR20070116866A publication Critical patent/KR20070116866A/ko
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Filtering Materials (AREA)
KR1020077022903A 2005-03-10 2006-03-10 박막 제조방법 및 제조장치 Abandoned KR20070116866A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66041205P 2005-03-10 2005-03-10
US60/660,412 2005-03-10

Publications (1)

Publication Number Publication Date
KR20070116866A true KR20070116866A (ko) 2007-12-11

Family

ID=36992275

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077022903A Abandoned KR20070116866A (ko) 2005-03-10 2006-03-10 박막 제조방법 및 제조장치

Country Status (6)

Country Link
US (1) US7771784B2 (enExample)
EP (1) EP1877255A4 (enExample)
JP (1) JP4993642B2 (enExample)
KR (1) KR20070116866A (enExample)
CA (1) CA2600524C (enExample)
WO (1) WO2006099156A2 (enExample)

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FI20075482L (fi) 2007-06-25 2008-12-26 Canatu Oy Kuituverkostot sekä menetelmä ja laite kuituverkostojen jatkuvasti tai erinä tapahtuvaan tuotantoon
WO2009008291A1 (ja) * 2007-07-06 2009-01-15 National Institute Of Advanced Industrial Science And Technology カーボンナノチューブ成膜方法、成膜装置及びカーボンナノチューブ膜
WO2009021069A1 (en) 2007-08-07 2009-02-12 Nanocomp Technologies, Inc. Electrically and thermally non-metallic conductive nanostructure-based adapters
JP5205672B2 (ja) * 2007-08-29 2013-06-05 独立行政法人物質・材料研究機構 フラーレン細線付き基盤とその製造方法
CN101450288B (zh) * 2007-11-30 2012-08-29 清华大学 过滤膜及其制备方法
FI20085085A0 (fi) * 2008-01-31 2008-01-31 Jyrki Maekelae Rullalta rullalle -menetelmä ja pinnoituslaite
KR100922399B1 (ko) * 2008-02-29 2009-10-19 고려대학교 산학협력단 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법
GB0805837D0 (en) * 2008-03-31 2008-06-04 Qinetiq Ltd Chemical Vapour Deposition Process
US10358535B2 (en) * 2008-04-25 2019-07-23 The University Of Kentucky Research Foundation Thermal interface material
WO2009137725A1 (en) 2008-05-07 2009-11-12 Nanocomp Technologies, Inc. Nanostructure-based heating devices and method of use
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US20100071098A1 (en) * 2008-05-13 2010-03-18 Northwestern University Scanning probe epitaxy
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KR101162686B1 (ko) 2008-12-01 2012-07-05 주식회사 나노베이스 탄소 나노튜브 코팅 장치 및 그 방법
FI124440B (fi) * 2009-01-28 2014-08-29 Canatu Oy Rakenteita, jotka käsittävät korkean aspektisuhteen omaavia molekyylirakenteita, ja valmistusmenetelmiä
US20100224129A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation System and method for surface treatment and barrier coating of fibers for in situ cnt growth
AU2010233113A1 (en) * 2009-04-10 2011-10-13 Applied Nanostructured Solutions Llc Method and apparatus for using a vertical furnace to infuse carbon nanotubes to fiber
JP2010254494A (ja) * 2009-04-22 2010-11-11 Nec Corp ナノチューブ状物質の分離方法、製造方法及び分離装置
CN101920955B (zh) 2009-06-09 2012-09-19 清华大学 碳纳米管膜保护结构及其制备方法
TWI462838B (zh) * 2009-06-18 2014-12-01 Hon Hai Prec Ind Co Ltd 奈米碳管膜保護結構及其製備方法
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JP5823393B2 (ja) 2009-08-03 2015-11-25 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーＡｐｐｌｉｅｄ Ｎａｎｏｓｔｒｕｃｔｕｒｅｄｓｏｌｕｔｉｏｎｓ， Ｌｌｃ 複合繊維へのナノ粒子の組み込み
JP2013540683A (ja) 2010-09-14 2013-11-07 アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー 成長したカーボン・ナノチューブを有するガラス基材及びその製造方法
WO2012040004A1 (en) 2010-09-22 2012-03-29 Applied Nanostructured Solutions, Llc Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
JP6014603B2 (ja) 2011-01-04 2016-10-25 ナノコンプ テクノロジーズ インコーポレイテッド ナノチューブベースの絶縁体
TWI441940B (zh) * 2011-06-09 2014-06-21 Shih Hua Technology Ltd 圖案化導電元件的製備方法
CN102994980B (zh) * 2012-12-13 2015-01-14 苏州汉纳材料科技有限公司 高导电碳纳米管薄膜的制备方法及装置
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US10614966B2 (en) 2014-08-11 2020-04-07 Arizona Board Of Regents On Behalf Of The University Of Arizona Aligned graphene-carbon nanotube porous carbon composite
JP6821575B2 (ja) 2015-02-03 2021-01-27 ナノコンプ テクノロジーズ，インク． カーボンナノチューブ構造体およびその生成のための方法
US10758936B2 (en) 2015-12-08 2020-09-01 The Boeing Company Carbon nanomaterial composite sheet and method for making the same
US11021369B2 (en) 2016-02-04 2021-06-01 General Nano Llc Carbon nanotube sheet structure and method for its making
US10581082B2 (en) 2016-11-15 2020-03-03 Nanocomp Technologies, Inc. Systems and methods for making structures defined by CNT pulp networks
US11279836B2 (en) 2017-01-09 2022-03-22 Nanocomp Technologies, Inc. Intumescent nanostructured materials and methods of manufacturing same
CN109295451B (zh) * 2018-10-12 2021-04-09 哈尔滨工业大学 等离子体辅助气溶胶沉积成膜方法及气溶胶沉积装置
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Also Published As

Publication number Publication date
JP2008535752A (ja) 2008-09-04
EP1877255A2 (en) 2008-01-16
CA2600524A1 (en) 2006-09-21
JP4993642B2 (ja) 2012-08-08
WO2006099156A2 (en) 2006-09-21
US7771784B2 (en) 2010-08-10
US20080308209A1 (en) 2008-12-18
EP1877255A4 (en) 2011-03-30
WO2006099156A3 (en) 2007-02-15
CA2600524C (en) 2013-12-03

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