JP2008533719A5 - - Google Patents

Download PDF

Info

Publication number
JP2008533719A5
JP2008533719A5 JP2008500769A JP2008500769A JP2008533719A5 JP 2008533719 A5 JP2008533719 A5 JP 2008533719A5 JP 2008500769 A JP2008500769 A JP 2008500769A JP 2008500769 A JP2008500769 A JP 2008500769A JP 2008533719 A5 JP2008533719 A5 JP 2008533719A5
Authority
JP
Japan
Prior art keywords
laser diode
heat sink
diode assembly
electrically insulating
coolant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008500769A
Other languages
English (en)
Other versions
JP2008533719A (ja
Filing date
Publication date
Priority claimed from US11/077,466 external-priority patent/US7305016B2/en
Application filed filed Critical
Publication of JP2008533719A publication Critical patent/JP2008533719A/ja
Publication of JP2008533719A5 publication Critical patent/JP2008533719A5/ja
Withdrawn legal-status Critical Current

Links

Claims (10)

  1. レーザーダイオード組立体であって、
    放射面及び該放射面と対向する反射面を有するレーザーダイオードにして、前記放射面及び反射面間に第1及び第2の側面を有する前記レーザーダイオードと、
    前記レーザーダイオードの前記第1の側面に第1の半田接合部を介して取付けられた第1の電気絶縁性ヒートシンクにして、第1の冷却流路を有する前記第1の電気絶縁性ヒートシンクと、
    前記レーザーダイオードの前記第2の側面に第2の半田接合部を介して取付けられた第2の電気絶縁性ヒートシンクにして、第2の冷却流路を有する前記第2の電気絶縁性ヒートシンクと、
    頂部側を有する基板にして、前記頂部側は前記第1の電気絶縁性ヒートシンクの第1の底部側及び前記第2の電気絶縁性ヒートシンクの第2の底部側と連通し、かつ前記第1の冷却流路及び前記第2の冷却流路に冷却剤(coolant)を送る流れ流路システムを有する、前記基板と、
    前記第1の電気絶縁性ヒートシンク及び前記第2の電気絶縁性ヒートシンクに取付けられた金属化層にして、前記レーザーダイオードに電気的に連結されて該レーザーダイオードに電流を伝導し、かつ前記冷却剤から分離される前記金属化層とを備える、前記レーザーダイオード組立体。
  2. レーザーダイオード組立体であって、
    放射面及び該放射面と対向する反射面を有するレーザーダイオードにして、前記放射面及び反射面間に第1及び第2の側面を有する前記レーザーダイオードと、
    前記レーザーダイオードの前記第1の側面に取付けられた第1のヒートシンクにして、第1の冷却流路を作り出す第1の組の接合層を有する前記第1のヒートシンクと、
    前記レーザーダイオードの前記第2の側面に取付けられた第2のヒートシンクにして、第2の冷却流路を作り出す第2の組の接合層を有する前記第2のヒートシンクと、
    前記第1のヒートシンク及び前記第2のヒートシンクと連通する少なくとも1つの基板にして、前記第1の冷却流路及び前記第2の冷却流路に冷却剤を送る流れ流路システムを有する前記少なくとも1つの基板と、
    前記レーザーダイオードに電気的に連結されて該レーザーダイオードに電流を伝導する金属通路とを備える、前記レーザーダイオード組立体。
  3. 請求項1又は2に記載のレーザーダイオード組立体において、前記基板と連通する流体マニホールドをさらに含み、該流体マニホールドは前記基板に前記冷却剤を分配する、前記レーザーダイオード組立体。
  4. 請求項1に記載のレーザーダイオード組立体において、前記第1の電気絶縁性ヒートシンク及び前記第2の電気絶縁性ヒートシンクは電気絶縁性シリコンの接合層から形成される、前記レーザーダイオード組立体。
  5. 請求項1又は2に記載のレーザーダイオード組立体において、前記流れ流路システムは、入口と、出口と、バイパス領域とを有し、前記入口は前記第1のヒートシンクに前記冷却剤を提供し、前記バイパス領域は前記第1のヒートシンクから前記第2のヒートシンクに前記冷却剤を送り、かつ前記出口は前記第2のヒートシンクから前記冷却剤を受取る、前記レーザーダイオード組立体。
  6. 請求項に記載のレーザーダイオード組立体において、前記基板は、共に溶着されて前記バイパス領域を作り出す複数の層から製作される、前記レーザーダイオード組立体。
  7. 請求項1又は2に記載のレーザーダイオード組立体において、前記第1及び第2のヒートシンクの少なくとも一方は、衝突ノズルを有し、且つ前記レーザーダイオードの前記2つの側面の一方の近くにある壁部に前記冷却剤の複数の流れを衝突させる衝突領域を含む、前記レーザーダイオード組立体。
  8. 請求項1に記載のレーザーダイオード組立体において、前記金属化層は前記第1及び第2の電気絶縁性ヒートシンクの外面に位置する、前記レーザーダイオード組立体。
  9. 請求項に記載のレーザーダイオード組立体において、前記第1及び前記第2の組の接合層は銅板であり、かつ前記金属通路は該銅板により提供される、前記レーザーダイオード組立体。
  10. 請求項に記載のレーザーダイオード組立体において、前記第1及び前記第2の組の接合層はシリコン層であり、前記金属通路は前記第1及び第2のヒートシンク上の金属化層により提供される、前記レーザーダイオード組立体。
JP2008500769A 2005-03-10 2006-03-01 両側冷却型レーザーダイオード Withdrawn JP2008533719A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/077,466 US7305016B2 (en) 2005-03-10 2005-03-10 Laser diode package with an internal fluid cooling channel
PCT/US2006/007567 WO2006098897A1 (en) 2005-03-10 2006-03-01 Laser diode with double sided cooling

Publications (2)

Publication Number Publication Date
JP2008533719A JP2008533719A (ja) 2008-08-21
JP2008533719A5 true JP2008533719A5 (ja) 2009-04-02

Family

ID=36354130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008500769A Withdrawn JP2008533719A (ja) 2005-03-10 2006-03-01 両側冷却型レーザーダイオード

Country Status (4)

Country Link
US (2) US7305016B2 (ja)
EP (1) EP1867016A1 (ja)
JP (1) JP2008533719A (ja)
WO (1) WO2006098897A1 (ja)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7529286B2 (en) * 2005-12-09 2009-05-05 D-Diode Llc Scalable thermally efficient pump diode systems
US7551656B2 (en) * 2006-03-29 2009-06-23 Lockheed Martin Coherent Technologies, Inc. Low stress optics mount using thermally conductive liquid metal or gel
US7724791B2 (en) * 2008-01-18 2010-05-25 Northrop Grumman Systems Corporation Method of manufacturing laser diode packages and arrays
US20090185592A1 (en) * 2008-01-18 2009-07-23 Jan Vetrovec Laser diode system with reduced coolant consumption
DE102008026801B4 (de) 2008-06-02 2012-05-31 Jenoptik Laser Gmbh Wärmeübertragungsvorrichtung zur doppelseitigen Kühlung eines Halbleiterbauelementes und Verfahren zu seiner Montage
DE102008051081B4 (de) 2008-10-09 2012-09-27 Dirk Lorenzen Wärmeableitmodul und Anordnung mit einem solchen Wärmeableitmodul
US8345720B2 (en) * 2009-07-28 2013-01-01 Northrop Grumman Systems Corp. Laser diode ceramic cooler having circuitry for control and feedback of laser diode performance
DE102009040835A1 (de) * 2009-09-09 2011-03-10 Jenoptik Laserdiode Gmbh Verfahren zum thermischen Kontaktieren einander gegenüberliegender elektrischer Anschlüsse einer Halbleiterbauelement-Anordnung
US7990711B1 (en) 2010-02-24 2011-08-02 International Business Machines Corporation Double-face heat removal of vertically integrated chip-stacks utilizing combined symmetric silicon carrier fluid cavity and micro-channel cold plate
US8514901B2 (en) * 2010-11-02 2013-08-20 Gerald Ho Kim Silicon-based cooling package for laser gain medium
WO2012151694A1 (en) 2011-05-10 2012-11-15 Obzerv Technologies Inc. Low inductance laser diode bar mount
US8518814B2 (en) 2011-12-02 2013-08-27 Northrop Grumman Systems Corporation Methods of fabrication of high-density laser diode stacks
US9089075B2 (en) * 2012-03-27 2015-07-21 Gerald Ho Kim Silicon-based cooling package for cooling and thermally decoupling devices in close proximity
US8937976B2 (en) 2012-08-15 2015-01-20 Northrop Grumman Systems Corp. Tunable system for generating an optical pulse based on a double-pass semiconductor optical amplifier
US8804782B2 (en) 2012-10-29 2014-08-12 Coherent, Inc. Macro-channel water-cooled heat-sink for diode-laser bars
US8804781B2 (en) * 2012-10-29 2014-08-12 Coherent, Inc. Macro channel water-cooled heat-sink for diode-laser bars
JP5534067B1 (ja) * 2013-03-06 2014-06-25 日本電気株式会社 電子部品、および電子部品冷却方法
US8987892B2 (en) * 2013-05-10 2015-03-24 Raytheon Company Method for creating a selective solder seal interface for an integrated circuit cooling system
DE112013007453T5 (de) * 2013-09-23 2016-08-04 Academy Of Opto-Electronics, Chinese Academy Of Science Lasermodul mit großer Apertur und gleichmäßiger Verstärkung
WO2015153183A1 (en) * 2014-03-29 2015-10-08 Parviz Tayebati High-power laser diode isolation and thermal management
US9762018B2 (en) 2014-12-09 2017-09-12 Raytheon Company System and method for cooling a laser gain medium using an ultra-thin liquid thermal optical interface
US9825428B2 (en) * 2015-09-25 2017-11-21 TeraDiode, Inc. Coating process for laser heat sinks
US10211590B2 (en) 2015-11-25 2019-02-19 Raytheon Company Dual-function optical bench and cooling manifold for high-power laser system
US9865988B2 (en) 2015-11-25 2018-01-09 Raytheon Company High-power planar waveguide (PWG) pumphead with modular components for high-power laser system
US10056731B2 (en) 2015-11-25 2018-08-21 Raytheon Company Planar waveguide (PWG) amplifier-based laser system with adaptive optic wavefront correction in low-power beam path
US10297968B2 (en) 2015-11-25 2019-05-21 Raytheon Company High-gain single planar waveguide (PWG) amplifier laser system
US11114813B2 (en) 2015-11-25 2021-09-07 Raytheon Company Integrated pumplight homogenizer and signal injector for high-power laser system
US10069270B2 (en) 2016-02-11 2018-09-04 Raytheon Company Planar waveguides with enhanced support and/or cooling features for high-power laser systems
US10411435B2 (en) 2016-06-06 2019-09-10 Raytheon Company Dual-axis adaptive optic (AO) system for high-power lasers
DE112017003061T5 (de) * 2016-06-20 2019-03-07 TeraDiode, Inc. Gehäuse für Hochleistungs-Lasergeräte
US11095091B2 (en) 2016-06-20 2021-08-17 TeraDiode, Inc. Packages for high-power laser devices
EP3454370B1 (en) * 2017-09-11 2020-09-09 Nokia Technologies Oy Package, and method of manufacturing a package comprising an enclosure and an integrated circuit
DE102017122575B3 (de) 2017-09-28 2019-02-28 Rogers Germany Gmbh Kühlvorrichtung zum Kühlen eines elektrischen Bauteils und Verfahren zur Herstellung einer Kühlvorrichtung
US10511135B2 (en) 2017-12-19 2019-12-17 Raytheon Company Laser system with mechanically-robust monolithic fused planar waveguide (PWG) structure
US11133639B2 (en) 2018-07-24 2021-09-28 Raytheon Company Fast axis thermal lens compensation for a planar amplifier structure
US10732265B1 (en) 2019-04-11 2020-08-04 Analog Devices, Inc. Optical illuminator module and related techniques
US20200381894A1 (en) * 2019-05-31 2020-12-03 Trumpf Photonics, Inc. Uniform Cooling of Laser Diode
CN112066347B (zh) * 2020-08-26 2022-06-28 广州和光同盛科技有限公司 一种多单元水冷板及其制作方法
US11962129B2 (en) 2021-04-09 2024-04-16 Lawrence Livermore National Security, Llc Systems and methods for laser diode array having integrated microchannel cooling

Family Cites Families (104)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590248A (en) * 1965-04-13 1971-06-29 Massachusetts Inst Technology Laser arrays
US3339151A (en) * 1966-01-12 1967-08-29 Ibm Beam deflecting lasers
US3303432A (en) * 1966-04-18 1967-02-07 Gen Electric High power semiconductor laser devices
US3654497A (en) * 1969-12-01 1972-04-04 Bell Telephone Labor Inc Semiconductor lasers utilizing internal saturable absorbers
US3683296A (en) * 1970-10-13 1972-08-08 Texas Instruments Inc High efficiency laser cavity
US3802967A (en) * 1971-08-27 1974-04-09 Rca Corp Iii-v compound on insulating substrate and its preparation and use
US3771031A (en) * 1973-03-05 1973-11-06 Texas Instruments Inc Header assembly for lasers
US3958263A (en) * 1973-11-12 1976-05-18 Bell Telephone Laboratories, Incorporated Stress reduction in algaas-algaasp multilayer structures
US3896473A (en) * 1973-12-04 1975-07-22 Bell Telephone Labor Inc Gallium arsenide schottky barrier avalance diode array
GB1458544A (en) * 1974-03-21 1976-12-15 Standard Telephones Cables Ltd Semiconductor laser stacks
DE2542174C3 (de) * 1974-09-21 1980-02-14 Nippon Electric Co., Ltd., Tokio Halbleiterlaservorrichtung
US4057101A (en) * 1976-03-10 1977-11-08 Westinghouse Electric Corporation Heat sink
US4219072A (en) * 1978-02-10 1980-08-26 Barlow Donald W Sr Phase change material heat exchanger
US4228406A (en) * 1978-05-10 1980-10-14 The University Of Rochester Laser apparatus
US4233567A (en) * 1978-12-13 1980-11-11 General Electric Company Face-cooled laser device having increased energy storage and output
US4393393A (en) * 1979-08-13 1983-07-12 Mcdonnell Douglas Corporation Laser diode with double sided heat sink
US4315225A (en) * 1979-08-24 1982-02-09 Mcdonnell Douglas Corporation Heat sink laser diode array
US4383270A (en) * 1980-07-10 1983-05-10 Rca Corporation Structure for mounting a semiconductor chip to a metal core substrate
US4673030A (en) * 1980-10-20 1987-06-16 Hughes Aircraft Company Rechargeable thermal control system
US4573067A (en) * 1981-03-02 1986-02-25 The Board Of Trustees Of The Leland Stanford Junior University Method and means for improved heat removal in compact semiconductor integrated circuits
US4415234A (en) * 1981-04-02 1983-11-15 Eastman Kodak Company Passive cooling of mirrors
US4454602A (en) * 1982-03-26 1984-06-12 Mcdonnell Douglas Corporation Conductively cooled laser diode array
JPS58209147A (ja) * 1982-05-31 1983-12-06 Toshiba Corp 樹脂封止型半導体装置
US4716568A (en) * 1985-05-07 1987-12-29 Spectra Diode Laboratories, Inc. Stacked diode laser array assembly
US4709750A (en) * 1986-04-10 1987-12-01 Internorth, Inc. Phase change heat exchanger
US4730324A (en) * 1986-10-02 1988-03-08 General Electric Company Method and apparatus for compensating for wave front distortion in a slab laser
US4847848A (en) * 1987-02-20 1989-07-11 Sanyo Electric Co., Ltd. Semiconductor laser device
GB2203891A (en) * 1987-04-21 1988-10-26 Plessey Co Plc Semiconductor diode laser array
US4963741A (en) * 1987-06-22 1990-10-16 Molectron Detector, Inc. Large area pyroelectric joulemeter
FR2616976B1 (fr) * 1987-06-22 1989-10-13 Lasag Ag Laser avec systeme de refroidissement perfectionne
US4831629A (en) * 1987-09-01 1989-05-16 Xerox Corporation Incoherent, optically coupled laser arrays with increased spectral width
US4782222A (en) * 1987-09-03 1988-11-01 Power Spectra Bulk avalanche semiconductor switch using partial light penetration and inducing field compression
DE3732433A1 (de) * 1987-09-26 1989-04-06 Standard Elektrik Lorenz Ag Lasermodul und verfahren zum ankoppeln einer glasfaser
US4899204A (en) * 1987-12-01 1990-02-06 General Electric Company High voltage switch structure with light responsive diode stack
US5256164A (en) * 1988-02-02 1993-10-26 Massachusetts Institute Of Technology Method of fabricating a microchip laser
US5115445A (en) * 1988-02-02 1992-05-19 Massachusetts Institute Of Technology Microchip laser array
US4877641A (en) * 1988-05-31 1989-10-31 Olin Corporation Process for plasma depositing silicon nitride and silicon dioxide films onto a substrate
US4901330A (en) * 1988-07-20 1990-02-13 Amoco Corporation Optically pumped laser
US4881237A (en) * 1988-08-26 1989-11-14 Massachusetts Institute Of Technology Hybrid two-dimensional surface-emitting laser arrays
US4852109A (en) * 1988-12-02 1989-07-25 General Electric Company Temperature control of a solid state face pumped laser slab by an active siderail
US5099448A (en) * 1989-06-28 1992-03-24 Nippon Sheet Glass Co., Ltd. Matrix-vector multiplication apparatus
DE3914492A1 (de) * 1989-05-02 1990-11-08 Adlas Gmbh & Co Kg Festkoerperlaser mit pump-laserdioden
US5005640A (en) * 1989-06-05 1991-04-09 Mcdonnell Douglas Corporation Isothermal multi-passage cooler
DE3925201A1 (de) * 1989-07-29 1991-02-07 Messerschmitt Boelkow Blohm Optische bank zur halterung optischer, elektrischer u.a. komponenten
US4949346A (en) * 1989-08-14 1990-08-14 Allied-Signal Inc. Conductively cooled, diode-pumped solid-state slab laser
US5001355A (en) * 1989-09-25 1991-03-19 General Electric Company Photon energy activated radio frequency signal switch
US5099214A (en) * 1989-09-27 1992-03-24 General Electric Company Optically activated waveguide type phase shifter and attenuator
US5073838A (en) 1989-12-04 1991-12-17 Ncr Corporation Method and apparatus for preventing damage to a temperature-sensitive semiconductor device
JPH03203386A (ja) * 1989-12-29 1991-09-05 Hoya Corp コンポジット・スラブ型レーザ媒体
US5040187A (en) * 1990-01-03 1991-08-13 Karpinski Arthur A Monolithic laser diode array
US5284790A (en) * 1990-01-03 1994-02-08 Karpinski Arthur A Method of fabricating monolithic laser diode array
US5076348A (en) 1990-01-25 1991-12-31 United Technologies Corporation Solid-to-liquid phase change cooled mirror arrangement
US5031187A (en) * 1990-02-14 1991-07-09 Bell Communications Research, Inc. Planar array of vertical-cavity, surface-emitting lasers
EP0458469A1 (en) 1990-05-24 1991-11-27 Nippon Steel Corporation Composite lead frame and semiconductor device using the same
US5156999A (en) * 1990-06-08 1992-10-20 Wai-Hon Lee Packaging method for semiconductor laser/detector devices
US5105429A (en) * 1990-07-06 1992-04-14 The United States Of America As Represented By The Department Of Energy Modular package for cooling a laser diode array
JP3035852B2 (ja) * 1990-07-18 2000-04-24 富士通株式会社 半導体レーザモジュール
US5022042A (en) * 1990-09-10 1991-06-04 General Dynamics Corp. High power laser array with stable wavelength
US5216263A (en) * 1990-11-29 1993-06-01 Xerox Corporation High density, independently addressable, surface emitting semiconductor laser-light emitting diode arrays
KR940005764B1 (ko) * 1991-02-06 1994-06-23 삼성전자 주식회사 레이저 다이오드 어레이 및 그 제조방법
US5128951A (en) * 1991-03-04 1992-07-07 Karpinski Arthur A Laser diode array and method of fabrication thereof
US5099488A (en) 1991-03-27 1992-03-24 Spectra Diode Laboratories, Inc. Ribbed submounts for two dimensional stacked laser array
US5351259A (en) * 1991-10-24 1994-09-27 Mitsubishi Denki Kabushiki Kaisha Semiconductor laser-pumped solid-state laser with plural beam output
US5323411A (en) * 1991-11-22 1994-06-21 The Furukawa Electric Co., Ltd. Laser diode array device
US5253260A (en) * 1991-12-20 1993-10-12 Hughes Aircraft Company Apparatus and method for passive heat pipe cooling of solid state laser heads
US5325384A (en) * 1992-01-09 1994-06-28 Crystallume Structure and method for mounting laser diode arrays
JPH05244097A (ja) * 1992-02-12 1993-09-21 Nec Corp E/oアレイの駆動方式
US5327442A (en) * 1992-02-19 1994-07-05 Coherent, Inc. Solid state laser with dual cooling loops
US5337325A (en) * 1992-05-04 1994-08-09 Photon Imaging Corp Semiconductor, light-emitting devices
US5311535A (en) * 1992-07-28 1994-05-10 Karpinski Arthur A Monolithic laser diode array providing emission from a minor surface thereof
US5311536A (en) * 1992-09-22 1994-05-10 Xerox Corporation Vertically stacked, accurately positioned diode lasers
US5220954A (en) * 1992-10-07 1993-06-22 Shape, Inc. Phase change heat exchanger
US5394426A (en) * 1992-11-13 1995-02-28 Hughes Aircraft Company Diode laser bar assembly
US5520244A (en) * 1992-12-16 1996-05-28 Sdl, Inc. Micropost waste heat removal system
US5305344A (en) * 1993-04-29 1994-04-19 Opto Power Corporation Laser diode array
US5315154A (en) * 1993-05-14 1994-05-24 Hughes Aircraft Company Electronic assembly including heat absorbing material for limiting temperature through isothermal solid-solid phase transition
US5438580A (en) * 1993-09-24 1995-08-01 Opto Power Corporation Laser package and method of assembly
US5485482A (en) * 1993-12-08 1996-01-16 Selker; Mark D. Method for design and construction of efficient, fundamental transverse mode selected, diode pumped, solid state lasers
US5402436A (en) * 1993-12-29 1995-03-28 Xerox Corporation Nonmonolithic array structure of multiple beam diode lasers
US5388755A (en) * 1994-01-28 1995-02-14 Polaroid Corp. Apparatus and method of bonding isolation grooves of a ridge wave-guide laser diode
US5394427A (en) * 1994-04-29 1995-02-28 Cutting Edge Optronics, Inc. Housing for a slab laser pumped by a close-coupled light source
US5526373A (en) * 1994-06-02 1996-06-11 Karpinski; Arthur A. Lens support structure for laser diode arrays
US5764675A (en) * 1994-06-30 1998-06-09 Juhala; Roland E. Diode laser array
US5548605A (en) * 1995-05-15 1996-08-20 The Regents Of The University Of California Monolithic microchannel heatsink
US5834840A (en) * 1995-05-25 1998-11-10 Massachusetts Institute Of Technology Net-shape ceramic processing for electronic devices and packages
FR2741208B1 (fr) * 1995-11-13 1997-12-05 Commissariat Energie Atomique Assemblage de barrettes de diodes laser refroidies
US5663979A (en) * 1995-11-22 1997-09-02 Light Solutions Corporation Fiber stub end-pumped laser
US5898211A (en) * 1996-04-30 1999-04-27 Cutting Edge Optronics, Inc. Laser diode package with heat sink
US5734672A (en) * 1996-08-06 1998-03-31 Cutting Edge Optronics, Inc. Smart laser diode array assembly and operating method using same
US5835518A (en) * 1997-01-31 1998-11-10 Star Medical Technologies, Inc. Laser diode array packaging
US6295307B1 (en) * 1997-10-14 2001-09-25 Decade Products, Inc. Laser diode assembly
US5987043A (en) * 1997-11-12 1999-11-16 Opto Power Corp. Laser diode arrays with offset components
US5913108A (en) * 1998-04-30 1999-06-15 Cutting Edge Optronics, Inc. Laser diode packaging
US6351478B1 (en) * 1998-09-11 2002-02-26 Cutting Edge Optronics, Inc. Passively cooled solid-state laser
US6307871B1 (en) * 1998-09-11 2001-10-23 Cutting Edge Optronics, Inc. Laser system using phase change material for thermal control
US6636538B1 (en) * 1999-03-29 2003-10-21 Cutting Edge Optronics, Inc. Laser diode packaging
US6421364B2 (en) * 1999-05-24 2002-07-16 Robert W. Lubrano Solid state optical pumping laser with shielded laser cavity insert
DE10047020C1 (de) * 2000-09-22 2002-02-07 Trumpf Lasertechnik Gmbh Laser mit wenigstens zwei Elektrodenrohren und einer Kühleinrichtung, Verfahren zur Herstellung eines Lasers sowie Vorrichtung zur Durchführung eines derartigen Verfahrens
US20020110165A1 (en) 2001-02-14 2002-08-15 Filgas David M. Method and system for cooling at least one laser diode with a cooling fluid
US6397618B1 (en) * 2001-05-30 2002-06-04 International Business Machines Corporation Cooling system with auxiliary thermal buffer unit for cooling an electronics module
JP3878869B2 (ja) * 2002-03-06 2007-02-07 浜松ホトニクス株式会社 半導体発光装置
US7156159B2 (en) 2003-03-17 2007-01-02 Cooligy, Inc. Multi-level microchannel heat exchangers
US6845110B2 (en) * 2002-11-14 2005-01-18 Honeywell International Inc. Vapor cycle system (VCS) with thermal reservoirs for reducing requisite VCS power and size with intermittent heat loads
JP2005085824A (ja) * 2003-09-04 2005-03-31 Fanuc Ltd 冷却装置、その製造方法および半導体レーザ装置

Similar Documents

Publication Publication Date Title
JP2008533719A5 (ja)
JP5711459B2 (ja) チャネル型冷却構造を備える冷却装置
JP5801996B2 (ja) 両面冷却式電力用被覆層付き電力モジュール
TWI482244B (zh) 熱交換器以及半導體模組
US8266802B2 (en) Cooling apparatus and method of fabrication thereof with jet impingement structure integrally formed on thermally conductive pin fins
US8199505B2 (en) Jet impingement heat exchanger apparatuses and power electronics modules
EP2731128B1 (en) Low profile surface mount package with isolated tab
JP5515947B2 (ja) 冷却装置
CN1976573A (zh) 传热装置,被冷却的电子模块及其制造方法
JP2010538465A5 (ja)
JPH05102362A (ja) 半導体モジユール用の一体化放熱器
US8305755B2 (en) Power modules, cooling devices and methods thereof
WO2020248905A1 (zh) 一种晶圆级三维堆叠微流道散热结构及其制造方法
EP2559063A1 (en) A flow distributor
JP5349572B2 (ja) 放熱装置及び放熱装置の製造方法
CN108682660A (zh) 一种微型冷却单元及其集成方法和装置
CN207800592U (zh) 功率半导体模块
JP2016092222A (ja) 半導体装置
US20100206536A1 (en) Method for producing a composite including at least one non-flat component
KR102617133B1 (ko) 반도체 소자 직접 냉각을 위한 패키징 유닛 및 그 제조 방법
TWM565942U (zh) 可連續接合的液冷換熱片
JP2013032898A (ja) 積層型ヒートシンク
JP2005221091A (ja) 放熱器および受熱体の形成方法
JPH10229148A (ja) 放熱装置