JP2008527683A5 - - Google Patents

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Publication number
JP2008527683A5
JP2008527683A5 JP2007544430A JP2007544430A JP2008527683A5 JP 2008527683 A5 JP2008527683 A5 JP 2008527683A5 JP 2007544430 A JP2007544430 A JP 2007544430A JP 2007544430 A JP2007544430 A JP 2007544430A JP 2008527683 A5 JP2008527683 A5 JP 2008527683A5
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JP
Japan
Prior art keywords
bandwidth
attenuation
functions
time constant
laser system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007544430A
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English (en)
Japanese (ja)
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JP2008527683A (ja
JP5265921B2 (ja
Filing date
Publication date
Priority claimed from US11/000,571 external-priority patent/US20060114956A1/en
Priority claimed from US11/254,282 external-priority patent/US7643522B2/en
Application filed filed Critical
Publication of JP2008527683A publication Critical patent/JP2008527683A/ja
Publication of JP2008527683A5 publication Critical patent/JP2008527683A5/ja
Application granted granted Critical
Publication of JP5265921B2 publication Critical patent/JP5265921B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007544430A 2004-11-30 2005-11-28 ガス放電レーザ帯域幅及び中心波長制御の方法及び機器 Expired - Fee Related JP5265921B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US11/000,571 US20060114956A1 (en) 2004-11-30 2004-11-30 High power high pulse repetition rate gas discharge laser system bandwidth management
US11/000,571 2004-11-30
US11/254,282 2005-10-20
US11/254,282 US7643522B2 (en) 2004-11-30 2005-10-20 Method and apparatus for gas discharge laser bandwidth and center wavelength control
PCT/US2005/043059 WO2006060361A2 (en) 2004-11-30 2005-11-28 Method and apparatus for gas discharge laser bandwidth and center wavelength control

Publications (3)

Publication Number Publication Date
JP2008527683A JP2008527683A (ja) 2008-07-24
JP2008527683A5 true JP2008527683A5 (https=) 2009-01-22
JP5265921B2 JP5265921B2 (ja) 2013-08-14

Family

ID=36565614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007544430A Expired - Fee Related JP5265921B2 (ja) 2004-11-30 2005-11-28 ガス放電レーザ帯域幅及び中心波長制御の方法及び機器

Country Status (4)

Country Link
US (1) US7643522B2 (https=)
JP (1) JP5265921B2 (https=)
TW (1) TWI283093B (https=)
WO (1) WO2006060361A2 (https=)

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US7746913B2 (en) 2005-11-01 2010-06-29 Cymer, Inc. Laser system
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US7715459B2 (en) * 2005-11-01 2010-05-11 Cymer, Inc. Laser system
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US7659529B2 (en) * 2007-04-13 2010-02-09 Cymer, Inc. Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element
US8144739B2 (en) * 2008-10-24 2012-03-27 Cymer, Inc. System method and apparatus for selecting and controlling light source bandwidth
US8837536B2 (en) * 2010-04-07 2014-09-16 Cymer, Llc Method and apparatus for controlling light bandwidth
JP5755068B2 (ja) * 2011-07-27 2015-07-29 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整装置
JP6113426B2 (ja) 2011-09-08 2017-04-12 ギガフォトン株式会社 マスタオシレータシステムおよびレーザ装置
JP5832581B2 (ja) * 2014-04-28 2015-12-16 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整装置
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JP6585174B2 (ja) 2015-08-07 2019-10-02 ギガフォトン株式会社 狭帯域化レーザ装置
CN108475896B (zh) * 2016-02-02 2020-12-11 极光先进雷射株式会社 窄带化激光装置
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US12374853B2 (en) 2019-05-22 2025-07-29 Cymer, Llc Control system for a plurality of deep ultraviolet optical oscillators
CN115485625B (zh) * 2020-05-20 2025-12-16 极光先进雷射株式会社 窄带化气体激光装置、波长控制方法和电子器件的制造方法
WO2021252103A1 (en) * 2020-06-09 2021-12-16 Cymer, Llc Systems and methods for controlling a center wavelength
JP7841957B2 (ja) 2022-06-16 2026-04-07 ギガフォトン株式会社 Ｅｕｖ光生成システム、及び電子デバイスの製造方法

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