JP2008521258A5 - - Google Patents

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Publication number
JP2008521258A5
JP2008521258A5 JP2007543381A JP2007543381A JP2008521258A5 JP 2008521258 A5 JP2008521258 A5 JP 2008521258A5 JP 2007543381 A JP2007543381 A JP 2007543381A JP 2007543381 A JP2007543381 A JP 2007543381A JP 2008521258 A5 JP2008521258 A5 JP 2008521258A5
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JP
Japan
Prior art keywords
substrate
process chamber
exposed surface
support means
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007543381A
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English (en)
Japanese (ja)
Other versions
JP4912316B2 (ja
JP2008521258A (ja
Filing date
Publication date
Priority claimed from US10/991,554 external-priority patent/US7771563B2/en
Application filed filed Critical
Publication of JP2008521258A publication Critical patent/JP2008521258A/ja
Publication of JP2008521258A5 publication Critical patent/JP2008521258A5/ja
Application granted granted Critical
Publication of JP4912316B2 publication Critical patent/JP4912316B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007543381A 2004-11-18 2005-11-18 超小型電気機械システムの作成に用いられる基板の等温バッチ処理を行うためのシステム Expired - Lifetime JP4912316B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/991,554 US7771563B2 (en) 2004-11-18 2004-11-18 Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems
US10/991,554 2004-11-18
PCT/US2005/042232 WO2006055937A2 (en) 2004-11-18 2005-11-18 Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical systems

Publications (3)

Publication Number Publication Date
JP2008521258A JP2008521258A (ja) 2008-06-19
JP2008521258A5 true JP2008521258A5 (enExample) 2009-01-15
JP4912316B2 JP4912316B2 (ja) 2012-04-11

Family

ID=36384952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007543381A Expired - Lifetime JP4912316B2 (ja) 2004-11-18 2005-11-18 超小型電気機械システムの作成に用いられる基板の等温バッチ処理を行うためのシステム

Country Status (7)

Country Link
US (1) US7771563B2 (enExample)
EP (1) EP1859077B1 (enExample)
JP (1) JP4912316B2 (enExample)
KR (1) KR101154272B1 (enExample)
AT (1) ATE499702T1 (enExample)
DE (1) DE602005026581D1 (enExample)
WO (1) WO2006055937A2 (enExample)

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US8639489B2 (en) 2003-11-10 2014-01-28 Brooks Automation, Inc. Methods and systems for controlling a semiconductor fabrication process
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KR101874901B1 (ko) * 2011-12-07 2018-07-06 삼성전자주식회사 기판 건조 장치 및 방법
US20150155188A1 (en) * 2013-11-29 2015-06-04 Semes Co., Ltd. Substrate treating apparatus and method
US10347516B2 (en) 2014-11-11 2019-07-09 Applied Materials, Inc. Substrate transfer chamber
US10945313B2 (en) * 2015-05-27 2021-03-09 Applied Materials, Inc. Methods and apparatus for a microwave batch curing process
KR102358561B1 (ko) 2017-06-08 2022-02-04 삼성전자주식회사 기판 처리 장치 및 집적회로 소자 제조 장치
KR102238028B1 (ko) * 2020-10-22 2021-04-08 주식회사 한화 기판 처리용 밀폐형 열처리 장치

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