JP2008511836A5 - - Google Patents

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Publication number
JP2008511836A5
JP2008511836A5 JP2007530286A JP2007530286A JP2008511836A5 JP 2008511836 A5 JP2008511836 A5 JP 2008511836A5 JP 2007530286 A JP2007530286 A JP 2007530286A JP 2007530286 A JP2007530286 A JP 2007530286A JP 2008511836 A5 JP2008511836 A5 JP 2008511836A5
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JP
Japan
Prior art keywords
flow
sensing element
substrate
fluid
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007530286A
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English (en)
Japanese (ja)
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JP2008511836A (ja
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Publication date
Priority claimed from US10/930,546 external-priority patent/US7258003B2/en
Application filed filed Critical
Publication of JP2008511836A publication Critical patent/JP2008511836A/ja
Publication of JP2008511836A5 publication Critical patent/JP2008511836A5/ja
Pending legal-status Critical Current

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JP2007530286A 2004-08-31 2005-08-31 自己整合流れチャネルを有する流量センサ Pending JP2008511836A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/930,546 US7258003B2 (en) 1998-12-07 2004-08-31 Flow sensor with self-aligned flow channel
PCT/US2005/030887 WO2006026633A2 (en) 2004-08-31 2005-08-31 Flow sensor with self-aligned flow channel

Publications (2)

Publication Number Publication Date
JP2008511836A JP2008511836A (ja) 2008-04-17
JP2008511836A5 true JP2008511836A5 (enExample) 2008-05-29

Family

ID=36000696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007530286A Pending JP2008511836A (ja) 2004-08-31 2005-08-31 自己整合流れチャネルを有する流量センサ

Country Status (5)

Country Link
US (2) US7258003B2 (enExample)
EP (1) EP1800091B1 (enExample)
JP (1) JP2008511836A (enExample)
CN (2) CN100538284C (enExample)
WO (1) WO2006026633A2 (enExample)

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