JP2008507397A5 - - Google Patents
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- Publication number
- JP2008507397A5 JP2008507397A5 JP2007522659A JP2007522659A JP2008507397A5 JP 2008507397 A5 JP2008507397 A5 JP 2008507397A5 JP 2007522659 A JP2007522659 A JP 2007522659A JP 2007522659 A JP2007522659 A JP 2007522659A JP 2008507397 A5 JP2008507397 A5 JP 2008507397A5
- Authority
- JP
- Japan
- Prior art keywords
- gas stream
- high purity
- ultra high
- purified material
- contacting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58969504P | 2004-07-20 | 2004-07-20 | |
| PCT/US2005/025608 WO2006014655A1 (en) | 2004-07-20 | 2005-07-19 | Removal of metal contaminants from ultra-high purity gases |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008507397A JP2008507397A (ja) | 2008-03-13 |
| JP2008507397A5 true JP2008507397A5 (cg-RX-API-DMAC10.html) | 2008-09-04 |
Family
ID=35058312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007522659A Withdrawn JP2008507397A (ja) | 2004-07-20 | 2005-07-19 | 超高純度ガスからの金属汚染物の除去 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080107580A1 (cg-RX-API-DMAC10.html) |
| EP (1) | EP1799329A1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP2008507397A (cg-RX-API-DMAC10.html) |
| KR (1) | KR20070043792A (cg-RX-API-DMAC10.html) |
| CN (1) | CN1988948A (cg-RX-API-DMAC10.html) |
| TW (1) | TW200609031A (cg-RX-API-DMAC10.html) |
| WO (1) | WO2006014655A1 (cg-RX-API-DMAC10.html) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7179323B2 (en) | 2003-08-06 | 2007-02-20 | Air Products And Chemicals, Inc. | Ion transport membrane module and vessel system |
| US7425231B2 (en) * | 2003-08-06 | 2008-09-16 | Air Products And Chemicals, Inc. | Feed gas contaminant removal in ion transport membrane systems |
| US7771519B2 (en) | 2005-01-03 | 2010-08-10 | Air Products And Chemicals, Inc. | Liners for ion transport membrane systems |
| DE102007018016A1 (de) * | 2007-04-17 | 2008-10-30 | Bayer Materialscience Ag | Absorptionsprozess zur Entfernung anorganischer Komponenten aus einem Chlorwasserstoff enthaltenden Gasstrom |
| EP2432857A4 (en) | 2009-05-22 | 2015-04-29 | Univ Wyoming | EFFICIENT GASIFICATION AND COMBUSTION OF LOW-GRADE CARBON AND PROCESSING SYSTEMS AND METHODS THEREFOR |
| US20140227152A1 (en) * | 2013-02-08 | 2014-08-14 | Basf Se | Removal of metal compounds of metalloid compounds from the gas phase by complexation |
| CN104733337B (zh) * | 2013-12-23 | 2017-11-07 | 有研半导体材料有限公司 | 一种用于分析硅片体内金属沾污的测试方法 |
| CN110548364B (zh) * | 2019-10-17 | 2024-12-13 | 昆明先导新材料科技有限责任公司 | 一种回收分子筛吸附的特种气体的方法和装置 |
| CN113702585A (zh) * | 2021-08-26 | 2021-11-26 | 山东非金属材料研究所 | 高纯气体中痕量金属元素自动捕获消解器 |
| CN117347148A (zh) * | 2022-06-29 | 2024-01-05 | 江苏鲁汶仪器股份有限公司 | 一种晶圆表面贵金属元素的富集方法及分析方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4713224A (en) | 1986-03-31 | 1987-12-15 | The Boc Group, Inc. | One-step process for purifying an inert gas |
| US4671803A (en) * | 1986-06-26 | 1987-06-09 | Texaco Development Corp. | Process for producing synthesis gas free-from volatile metal hydrides |
| US5637544A (en) * | 1991-06-06 | 1997-06-10 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Reactive membrane for filtration and purification of gases of impurities and method utilizing the same |
| US6059859A (en) * | 1997-09-19 | 2000-05-09 | Aeronex, Inc. | Method, composition and apparatus for water removal from non-corrosive gas streams |
| US6241955B1 (en) * | 1998-10-02 | 2001-06-05 | Aeronex, Inc. | Method and apparatus for purification of hydride gas streams |
| US6395070B1 (en) * | 1998-10-06 | 2002-05-28 | Matheson Tri-Gas, Inc. | Methods for removal of impurity metals from gases using low metal zeolites |
| US6391090B1 (en) * | 2001-04-02 | 2002-05-21 | Aeronex, Inc. | Method for purification of lens gases used in photolithography |
| US6425265B1 (en) | 2001-09-26 | 2002-07-30 | Praxair Technology, Inc. | Process and apparatus for purifying hydrogen bromide |
| US6733734B2 (en) * | 2001-10-31 | 2004-05-11 | Matheson Tri-Gas | Materials and methods for the purification of hydride gases |
| EP1641553A1 (en) * | 2003-06-23 | 2006-04-05 | Entegris, Inc. | Apparatus and method for purification of corrosive gas streams |
| WO2005009593A1 (en) * | 2003-07-21 | 2005-02-03 | Entegris, Inc. | Hydride gas purification for the semiconductor industry |
-
2005
- 2005-07-19 CN CNA2005800245313A patent/CN1988948A/zh active Pending
- 2005-07-19 JP JP2007522659A patent/JP2008507397A/ja not_active Withdrawn
- 2005-07-19 EP EP05774612A patent/EP1799329A1/en not_active Withdrawn
- 2005-07-19 WO PCT/US2005/025608 patent/WO2006014655A1/en not_active Ceased
- 2005-07-19 US US11/631,985 patent/US20080107580A1/en not_active Abandoned
- 2005-07-19 KR KR1020077001361A patent/KR20070043792A/ko not_active Withdrawn
- 2005-07-20 TW TW094124495A patent/TW200609031A/zh unknown
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