JP2008505355A5 - - Google Patents

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Publication number
JP2008505355A5
JP2008505355A5 JP2007519200A JP2007519200A JP2008505355A5 JP 2008505355 A5 JP2008505355 A5 JP 2008505355A5 JP 2007519200 A JP2007519200 A JP 2007519200A JP 2007519200 A JP2007519200 A JP 2007519200A JP 2008505355 A5 JP2008505355 A5 JP 2008505355A5
Authority
JP
Japan
Prior art keywords
alignment mechanism
waveguide
pattern
mechanism pattern
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007519200A
Other languages
English (en)
Other versions
JP2008505355A (ja
Filing date
Publication date
Priority claimed from US10/879,716 external-priority patent/US20050284181A1/en
Application filed filed Critical
Publication of JP2008505355A publication Critical patent/JP2008505355A/ja
Publication of JP2008505355A5 publication Critical patent/JP2008505355A5/ja
Pending legal-status Critical Current

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Claims (3)

  1. 光学デバイスのための一体型整列機構を有する導波路を形成するための方法であって、以下の順序で
    基板上に整列機構パターンを設ける工程と、
    導波路を前記整列機構パターンの上に作製する工程と、
    前記導波路の一部を除去して、前記整列機構パターンと前記基板を露わにする工程と、
    前記光学デバイス整列機構を、前記露わになった基板に形成する工程と
    を含む方法。
  2. 導波路を作製する工程が、
    下部クラッディング層を前記整列機構パターンの上に堆積させる工程と、
    導波路コア層を前記下部クラッディング層の上に堆積させる工程と
    を含む、請求項１に記載の方法。
  3. 前記導波路の一部を除去して、前記整列機構パターンを露わにする工程が、整列機構パターンを前記導波路に形成する工程を含む、請求項１に記載の方法。
JP2007519200A 2004-06-29 2005-04-28 一体型整列機構を有する光導波路アセンブリを製造するための方法 Pending JP2008505355A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/879,716 US20050284181A1 (en) 2004-06-29 2004-06-29 Method for making an optical waveguide assembly with integral alignment features
PCT/US2005/014609 WO2006007022A1 (en) 2004-06-29 2005-04-28 Method for making an optical waveguide assembly with integral alignment features

Publications (2)

Publication Number Publication Date
JP2008505355A JP2008505355A (ja) 2008-02-21
JP2008505355A5 true JP2008505355A5 (ja) 2008-06-19

Family

ID=34971934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007519200A Pending JP2008505355A (ja) 2004-06-29 2005-04-28 一体型整列機構を有する光導波路アセンブリを製造するための方法

Country Status (6)

Country Link
US (1) US20050284181A1 (ja)
EP (1) EP1761812A1 (ja)
JP (1) JP2008505355A (ja)
KR (1) KR20070045204A (ja)
CN (1) CN1977198A (ja)
WO (1) WO2006007022A1 (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7365321B2 (en) * 2004-03-22 2008-04-29 Kla-Tencor Technologies Corp. Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis
KR20090130153A (ko) * 2004-06-16 2009-12-17 히다치 가세고교 가부시끼가이샤 광도파로구조체, 광도파로형 광모듈 및 광파이버 어레이
US8447157B2 (en) * 2005-06-24 2013-05-21 3M Innovative Properties Company Optical device with cantilevered fiber array and method
US7491287B2 (en) * 2006-06-09 2009-02-17 3M Innovative Properties Company Bonding method with flowable adhesive composition
JP5156502B2 (ja) * 2007-06-26 2013-03-06 パナソニック株式会社 光モジュール
US7822300B2 (en) * 2007-11-20 2010-10-26 Aptina Imaging Corporation Anti-resonant reflecting optical waveguide for imager light pipe
CN101910899A (zh) * 2007-11-30 2010-12-08 3M创新有限公司 用于制备光学导波器的方法
CH700471B1 (de) * 2009-02-17 2013-07-31 Vario Optics Ag Verfahren zur Herstellung einer elektro-optischen Leiterplatte mit Lichtwellenleiterstrukturen.
US12057332B2 (en) 2016-07-12 2024-08-06 Ayar Labs, Inc. Wafer-level etching methods for planar photonics circuits and devices
CN107655923B (zh) * 2017-10-13 2019-05-03 电子科技大学 一种实现输出方向大角度可调的太赫兹波传输聚束系统
US11101617B2 (en) 2018-07-16 2021-08-24 Ayar Labs, Inc. Wafer-level handle replacement
EP3983840A4 (en) * 2019-06-17 2023-03-15 Aayuna Inc. PASSIVELY ALIGNED FIBER ARRAY TO WAVEGUIDE CONFIGURATION
US11774689B2 (en) 2021-10-25 2023-10-03 Globalfoundries U.S. Inc. Photonics chips and semiconductor products having angled optical fibers
CN117561464A (zh) * 2021-11-22 2024-02-13 华为技术有限公司 一种芯片、光纤阵列单元及通信系统

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3765969A (en) * 1970-07-13 1973-10-16 Bell Telephone Labor Inc Precision etching of semiconductors
US3774987A (en) * 1972-06-27 1973-11-27 Bell Electric Research Ltd Coupling of lasers to optical fibres
US3994559A (en) * 1975-12-22 1976-11-30 International Business Machines Corporation Bidirectional guided mode optical film-fiber coupler
US4210923A (en) * 1979-01-02 1980-07-01 Bell Telephone Laboratories, Incorporated Edge illuminated photodetector with optical fiber alignment
JPS5784408A (en) * 1980-11-13 1982-05-26 Nec Corp Optical distributing circuit
US5046763A (en) * 1990-02-01 1991-09-10 Teleflex Incorporated Quick connect hose coupling assembly
JPH04313710A (ja) * 1990-03-14 1992-11-05 Fujitsu Ltd 光導波路部品の製造方法
FR2661516B1 (fr) * 1990-04-27 1992-06-12 Alcatel Fibres Optiques Composant d'optique integree et procede de fabrication.
US5175781A (en) * 1991-10-11 1992-12-29 United Technologies Corporation Attaching optical fibers to integrated optic chips
US5217568A (en) * 1992-02-03 1993-06-08 Motorola, Inc. Silicon etching process using polymeric mask, for example, to form V-groove for an optical fiber coupling
DE59306756D1 (de) * 1992-03-07 1997-07-24 Minnesota Mining & Mfg Verfahren zum Herstellen von Bauelementen für Lichtwellenleiternetze und nach diesem Verfahren hergestellte Bauelemente
JP3484543B2 (ja) * 1993-03-24 2004-01-06 富士通株式会社 光結合部材の製造方法及び光装置
JP2798583B2 (ja) * 1993-06-08 1998-09-17 日本電気株式会社 光デバイスの製造方法
EP0631159A1 (de) * 1993-06-18 1994-12-28 Siemens Aktiengesellschaft Anordnung zur optischen Kopplung eines planaren optischen Wellenleiters und einer optischen Faser und Verfahren zur Herstellung eines für eine solche Anordnung geeigneten planaren Wellenleiters
US5357593A (en) * 1993-10-12 1994-10-18 Alliedsignal Inc. Method of attaching optical fibers to opto-electronic integrated circuits on silicon substrates
US5432338A (en) * 1993-10-28 1995-07-11 Alliedsignal Inc. Silicon opto-electronic integrated circuit for fiber optic gyros or communication
JPH0829638A (ja) * 1994-05-12 1996-02-02 Fujitsu Ltd 光導波路・光ファイバ接続構造及び光導波路・光ファイバ接続方法並びに光導波路・光ファイバ接続に使用される光導波路基板及び同基板の製造方法並びに光導波路・光ファイバ接続に使用されるファイバ基板付き光ファイバ
US5611014A (en) * 1994-12-07 1997-03-11 Lucent Technologies Inc. Optoelectronic device connecting techniques
JP2964941B2 (ja) * 1996-01-12 1999-10-18 日本電気株式会社 光デバイスの製造方法及び実装構造
US5600745A (en) * 1996-02-08 1997-02-04 Industrial Technology Research Institute Method of automatically coupling between a fiber and an optical waveguide
KR100265789B1 (ko) * 1997-07-03 2000-09-15 윤종용 광섬유수동정렬방법
US6756185B2 (en) * 2000-05-09 2004-06-29 Shipley Company, L.L.C. Method for making integrated optical waveguides and micromachined features
US20030035643A1 (en) * 2001-08-17 2003-02-20 Photon-X, Inc. Structure for attaching an optical fiber to a planar waveguide and method thereof

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