JP2008308572A5 - - Google Patents

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Publication number
JP2008308572A5
JP2008308572A5 JP2007157107A JP2007157107A JP2008308572A5 JP 2008308572 A5 JP2008308572 A5 JP 2008308572A5 JP 2007157107 A JP2007157107 A JP 2007157107A JP 2007157107 A JP2007157107 A JP 2007157107A JP 2008308572 A5 JP2008308572 A5 JP 2008308572A5
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JP
Japan
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general formula
repeating unit
unit represented
mass
curing
Prior art date
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Application number
JP2007157107A
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English (en)
Japanese (ja)
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JP5115045B2 (ja
JP2008308572A (ja
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Priority to JP2007157107A priority Critical patent/JP5115045B2/ja
Priority claimed from JP2007157107A external-priority patent/JP5115045B2/ja
Publication of JP2008308572A publication Critical patent/JP2008308572A/ja
Publication of JP2008308572A5 publication Critical patent/JP2008308572A5/ja
Application granted granted Critical
Publication of JP5115045B2 publication Critical patent/JP5115045B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007157107A 2007-06-14 2007-06-14 ポリイミドワニス Expired - Fee Related JP5115045B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007157107A JP5115045B2 (ja) 2007-06-14 2007-06-14 ポリイミドワニス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007157107A JP5115045B2 (ja) 2007-06-14 2007-06-14 ポリイミドワニス

Publications (3)

Publication Number Publication Date
JP2008308572A JP2008308572A (ja) 2008-12-25
JP2008308572A5 true JP2008308572A5 (ru) 2010-07-29
JP5115045B2 JP5115045B2 (ja) 2013-01-09

Family

ID=40236465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007157107A Expired - Fee Related JP5115045B2 (ja) 2007-06-14 2007-06-14 ポリイミドワニス

Country Status (1)

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JP (1) JP5115045B2 (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102276783B1 (ko) * 2013-06-26 2021-07-14 닛산 가가쿠 가부시키가이샤 치환된 가교성 화합물을 포함하는 레지스트 하층막 형성 조성물
WO2016171179A1 (ja) * 2015-04-24 2016-10-27 東レ株式会社 樹脂組成物、それを用いた半導体素子の製造方法および半導体装置
JP7097803B2 (ja) * 2018-12-20 2022-07-08 信越ポリマー株式会社 導電性高分子含有液及びその製造方法、並びに導電性フィルム及びその製造方法
CN115826360B (zh) * 2022-12-23 2023-09-12 江苏艾森半导体材料股份有限公司 感光性聚酰亚胺组合物、图形的制造方法、固化物和电子部件
CN115947648A (zh) * 2022-12-28 2023-04-11 北京彤程创展科技有限公司 一种交联剂及其制备方法、光刻胶

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003252991A (ja) * 2002-02-28 2003-09-10 Dow Corning Toray Silicone Co Ltd アクリルもしくはメタクリル官能性シリコーン変性ポリイミド樹脂、その製造方法および感光性樹脂組成物
JP4374840B2 (ja) * 2002-08-30 2009-12-02 東レ株式会社 ポジ型感光性樹脂組成物、半導体素子の製造方法および、半導体装置
JP4834949B2 (ja) * 2003-07-24 2011-12-14 東レ株式会社 熱硬化性樹脂組成物およびそれを用いた電子部品
JP4677887B2 (ja) * 2004-11-24 2011-04-27 東レ株式会社 感光性樹脂組成物
JP4826415B2 (ja) * 2005-10-12 2011-11-30 東レ株式会社 感光性樹脂組成物

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