JP2008290816A - 浮上搬送装置 - Google Patents
浮上搬送装置 Download PDFInfo
- Publication number
- JP2008290816A JP2008290816A JP2007135982A JP2007135982A JP2008290816A JP 2008290816 A JP2008290816 A JP 2008290816A JP 2007135982 A JP2007135982 A JP 2007135982A JP 2007135982 A JP2007135982 A JP 2007135982A JP 2008290816 A JP2008290816 A JP 2008290816A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle member
- nozzle
- levitation
- hole
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
【解決手段】装置本体に複数配置されたノズル部材22に形成されたノズル22dの各先端から噴射された圧力気体によって板状の被搬送体を浮上させつつ所定方向に搬送すると共に、ハニカム状に構成された天板31に臨むノズル部材22を水平面内で回転可能な円柱体から構成した。
【選択図】図4
Description
11…コントロールバルブ
12…供給管
22…ノズル部材
22d…ノズル
23…電磁弁
30…基板
31…天板
Claims (2)
- 装置本体に複数配置されたノズル部材に形成されたノズルの各先端から噴射された圧力気体によって板状の被搬送体を浮上させつつ所定方向に搬送する浮上搬送装置において、
前記ノズル部材を水平面内で回転可能な円柱体から構成すると共に、前記装置本体の天板を前記ノズル部材が臨むハニカム状に構成したことを特徴とする浮上搬送装置。 - 前記ノズル部材は、その外壁が前記ハニカム状の内壁に接していることを特徴とする請求項1に記載の浮上搬送装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007135982A JP5336708B2 (ja) | 2007-05-22 | 2007-05-22 | 浮上搬送装置 |
PCT/JP2008/059249 WO2008143261A1 (ja) | 2007-05-22 | 2008-05-20 | 浮上搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007135982A JP5336708B2 (ja) | 2007-05-22 | 2007-05-22 | 浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008290816A true JP2008290816A (ja) | 2008-12-04 |
JP5336708B2 JP5336708B2 (ja) | 2013-11-06 |
Family
ID=40031957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007135982A Expired - Fee Related JP5336708B2 (ja) | 2007-05-22 | 2007-05-22 | 浮上搬送装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5336708B2 (ja) |
WO (1) | WO2008143261A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005154057A (ja) * | 2003-11-25 | 2005-06-16 | Watanabe Shoko:Kk | 浮上搬送装置、この浮上搬送装置を用いた浮上搬送ユニット、及び浮上搬送ユニットを用いた浮上搬送方法 |
JP2005200174A (ja) * | 2004-01-16 | 2005-07-28 | Mitsubishi Materials Techno Corp | エアフロー整列キャップ供給器 |
-
2007
- 2007-05-22 JP JP2007135982A patent/JP5336708B2/ja not_active Expired - Fee Related
-
2008
- 2008-05-20 WO PCT/JP2008/059249 patent/WO2008143261A1/ja active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005154057A (ja) * | 2003-11-25 | 2005-06-16 | Watanabe Shoko:Kk | 浮上搬送装置、この浮上搬送装置を用いた浮上搬送ユニット、及び浮上搬送ユニットを用いた浮上搬送方法 |
JP2005200174A (ja) * | 2004-01-16 | 2005-07-28 | Mitsubishi Materials Techno Corp | エアフロー整列キャップ供給器 |
Also Published As
Publication number | Publication date |
---|---|
JP5336708B2 (ja) | 2013-11-06 |
WO2008143261A1 (ja) | 2008-11-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101124135B (zh) | 用于输送和支承板形物品、特别是玻璃板的装置 | |
EP1770032A1 (en) | Levitation transportation device and levitation transportation method | |
JP2003063643A (ja) | 薄板の搬送方法及び装置 | |
JP5336708B2 (ja) | 浮上搬送装置 | |
CN103579062A (zh) | 基板输送装置 | |
KR20060051701A (ko) | 기판의 처리 장치 | |
JP2007204278A (ja) | 基板浮上搬送装置 | |
KR102588108B1 (ko) | 유리판의 제조 방법 및 그 제조 장치 | |
CN102001834A (zh) | 基板的处理装置及处理方法 | |
JP2009050959A (ja) | 板状物搬送装置 | |
JP5336707B2 (ja) | 浮上搬送装置 | |
JP4376641B2 (ja) | エア浮上式コンベア | |
RU2744838C1 (ru) | Установка для термической обработки металлических изделий | |
JP2007298071A (ja) | 弁装置 | |
JP4208931B2 (ja) | 板状体の反転機構 | |
JP2005154057A (ja) | 浮上搬送装置、この浮上搬送装置を用いた浮上搬送ユニット、及び浮上搬送ユニットを用いた浮上搬送方法 | |
WO2011129152A1 (ja) | 旋回流形成体及び非接触搬送装置 | |
JP2008290815A (ja) | 浮上搬送システム | |
KR101784802B1 (ko) | 챔버의 대기압 공정 중 압력 유지장치 | |
KR101786800B1 (ko) | 기판 이송장치 | |
JP4830339B2 (ja) | 搬送装置 | |
WO2017043307A1 (ja) | ガラス板の製造方法及びその製造装置 | |
KR101088793B1 (ko) | 부양 이송 장치 | |
JP3183651U (ja) | フルフラット式回路板加工輸送装置 | |
TWI449653B (zh) | Non - contact delivery device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100512 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121003 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121203 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130703 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130802 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |