JP2008277743A5 - - Google Patents
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- Publication number
- JP2008277743A5 JP2008277743A5 JP2008013984A JP2008013984A JP2008277743A5 JP 2008277743 A5 JP2008277743 A5 JP 2008277743A5 JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008277743 A5 JP2008277743 A5 JP 2008277743A5
- Authority
- JP
- Japan
- Prior art keywords
- variable
- layer
- substrate
- lower electrode
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 13
- 239000003990 capacitor Substances 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008013984A JP2008277743A (ja) | 2007-04-05 | 2008-01-24 | 可変素子回路およびその製造方法 |
US12/052,396 US7894205B2 (en) | 2007-04-05 | 2008-03-20 | Variable device circuit and method for manufacturing the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007099104 | 2007-04-05 | ||
JP2008013984A JP2008277743A (ja) | 2007-04-05 | 2008-01-24 | 可変素子回路およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008277743A JP2008277743A (ja) | 2008-11-13 |
JP2008277743A5 true JP2008277743A5 (fi) | 2010-03-11 |
Family
ID=40055301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008013984A Withdrawn JP2008277743A (ja) | 2007-04-05 | 2008-01-24 | 可変素子回路およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2008277743A (fi) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010135614A (ja) * | 2008-12-05 | 2010-06-17 | Fujitsu Ltd | 可変容量素子 |
TW201140637A (en) * | 2009-11-26 | 2011-11-16 | Taiyo Yuden Kk | Mems switch |
JP2011159953A (ja) * | 2010-01-05 | 2011-08-18 | Fujitsu Ltd | 電子回路及び電子機器 |
JP2012195829A (ja) | 2011-03-17 | 2012-10-11 | Seiko Epson Corp | 発振回路 |
JP5681545B2 (ja) * | 2011-03-29 | 2015-03-11 | 日本信号株式会社 | プレーナ型電磁アクチュエータ及びその製造方法 |
JP2012222718A (ja) | 2011-04-13 | 2012-11-12 | Seiko Epson Corp | 発振器 |
JP5831905B2 (ja) * | 2012-02-06 | 2015-12-09 | エヌ・ティ・ティ・アドバンステクノロジ株式会社 | 微細素子およびその製造方法 |
KR101980032B1 (ko) * | 2015-03-30 | 2019-05-17 | 가부시키가이샤 무라타 세이사쿠쇼 | 고주파 필터, 프론트엔드 회로 및 통신 기기 |
-
2008
- 2008-01-24 JP JP2008013984A patent/JP2008277743A/ja not_active Withdrawn
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