JP2008277743A - 可変素子回路およびその製造方法 - Google Patents

可変素子回路およびその製造方法 Download PDF

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Publication number
JP2008277743A
JP2008277743A JP2008013984A JP2008013984A JP2008277743A JP 2008277743 A JP2008277743 A JP 2008277743A JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008013984 A JP2008013984 A JP 2008013984A JP 2008277743 A JP2008277743 A JP 2008277743A
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Japan
Prior art keywords
variable
layer
substrate
line
lower electrode
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Withdrawn
Application number
JP2008013984A
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English (en)
Japanese (ja)
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JP2008277743A5 (fi
Inventor
Shiyaku Ri
相錫 李
Yukihisa Yoshida
幸久 吉田
Tamotsu Nishino
有 西野
Hiromoto Inoue
博元 井上
Shinnosuke Soda
真之介 曽田
Moriyasu Miyazaki
守泰 宮崎
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2008013984A priority Critical patent/JP2008277743A/ja
Priority to US12/052,396 priority patent/US7894205B2/en
Publication of JP2008277743A publication Critical patent/JP2008277743A/ja
Publication of JP2008277743A5 publication Critical patent/JP2008277743A5/ja
Withdrawn legal-status Critical Current

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  • Micromachines (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2008013984A 2007-04-05 2008-01-24 可変素子回路およびその製造方法 Withdrawn JP2008277743A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008013984A JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法
US12/052,396 US7894205B2 (en) 2007-04-05 2008-03-20 Variable device circuit and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007099104 2007-04-05
JP2008013984A JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法

Publications (2)

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JP2008277743A true JP2008277743A (ja) 2008-11-13
JP2008277743A5 JP2008277743A5 (fi) 2010-03-11

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JP2008013984A Withdrawn JP2008277743A (ja) 2007-04-05 2008-01-24 可変素子回路およびその製造方法

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JP (1) JP2008277743A (fi)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
WO2011065192A1 (ja) * 2009-11-26 2011-06-03 太陽誘電株式会社 Ｍｅｍｓスイッチ
JP2011159953A (ja) * 2010-01-05 2011-08-18 Fujitsu Ltd 電子回路及び電子機器
JP2012210055A (ja) * 2011-03-29 2012-10-25 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ及びその製造方法
JP2013158882A (ja) * 2012-02-06 2013-08-19 Ntt Advanced Technology Corp 微細素子およびその製造方法
US8648663B2 (en) 2011-04-13 2014-02-11 Seiko Epson Corporation Oscillator having a plurality of switchable MEMS vibrators
US8669824B2 (en) 2011-03-17 2014-03-11 Seiko Epson Corporation Oscillator having a plurality of switchable MEMS vibrators
WO2016158954A1 (ja) * 2015-03-30 2016-10-06 株式会社村田製作所 高周波フィルタ、フロントエンド回路、および、通信機器

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
WO2011065192A1 (ja) * 2009-11-26 2011-06-03 太陽誘電株式会社 Ｍｅｍｓスイッチ
JP5301682B2 (ja) * 2009-11-26 2013-09-25 太陽誘電株式会社 Ｍｅｍｓスイッチ
JP2011159953A (ja) * 2010-01-05 2011-08-18 Fujitsu Ltd 電子回路及び電子機器
US8669824B2 (en) 2011-03-17 2014-03-11 Seiko Epson Corporation Oscillator having a plurality of switchable MEMS vibrators
JP2012210055A (ja) * 2011-03-29 2012-10-25 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ及びその製造方法
US8648663B2 (en) 2011-04-13 2014-02-11 Seiko Epson Corporation Oscillator having a plurality of switchable MEMS vibrators
JP2013158882A (ja) * 2012-02-06 2013-08-19 Ntt Advanced Technology Corp 微細素子およびその製造方法
WO2016158954A1 (ja) * 2015-03-30 2016-10-06 株式会社村田製作所 高周波フィルタ、フロントエンド回路、および、通信機器
KR20170124571A (ko) * 2015-03-30 2017-11-10 가부시키가이샤 무라타 세이사쿠쇼 고주파 필터, 프론트엔드 회로 및 통신 기기
CN107431477A (zh) * 2015-03-30 2017-12-01 株式会社村田制作所 高频滤波器、前端电路以及通信设备
JPWO2016158954A1 (ja) * 2015-03-30 2017-12-21 株式会社村田製作所 高周波フィルタ、フロントエンド回路、および、通信機器
US10224899B2 (en) 2015-03-30 2019-03-05 Murata Manufacturing Co., Ltd. High-frequency filter, front-end circuit, and communication device
KR101980032B1 (ko) * 2015-03-30 2019-05-17 가부시키가이샤 무라타 세이사쿠쇼 고주파 필터, 프론트엔드 회로 및 통신 기기
CN107431477B (zh) * 2015-03-30 2020-09-29 株式会社村田制作所 高频滤波器、前端电路以及通信设备

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