JP2008241338A - 位置検出装置 - Google Patents
位置検出装置 Download PDFInfo
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- JP2008241338A JP2008241338A JP2007079339A JP2007079339A JP2008241338A JP 2008241338 A JP2008241338 A JP 2008241338A JP 2007079339 A JP2007079339 A JP 2007079339A JP 2007079339 A JP2007079339 A JP 2007079339A JP 2008241338 A JP2008241338 A JP 2008241338A
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- 238000001514 detection method Methods 0.000 claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 241000668842 Lepidosaphes gloverii Species 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 230000000737 periodic effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
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- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
【解決手段】移動体20の移動方向Xに沿ってスケール1を配置し、移動体20に取付21を介して受光素子2を設けた。スケール1には、移動方向Xに沿って複数の孔部11を形成し、各孔部11に発光素子3を配置した。受光素子2は、スケール1の上面に対向し、各孔部11の間隔よりも長い検出範囲で発光素子3の光を受光する。孔部11の絶対位置を予め記憶しておき、発光素子3をスケール1の一端側から順次駆動することで、受光素子2が光を受光した時に駆動中の発光素子3の絶対位置と、受光素子2の検出範囲におけるピーク値の位置と、から移動体20の絶対位置を算出する。
【選択図】図1
Description
2 受光素子
3 発光素子
5 制御部
20 移動体
52 メモリ(記憶部)
Claims (5)
- 所定の移動方向に沿って移動する移動体の絶対位置を検出する位置検出装置であって、
前記移動方向に沿って配置され、複数の発光素子が前記移動方向に沿って互いの間に間隔を設けて配置されたスケールと、
前記移動体に取り付けられ、前記移動方向に沿って前記間隔の最大値よりも長い所定の検出範囲内で前記複数の発光素子の少なくとも1つの発光素子から照射された光を検出し、前記検出範囲内における受光位置に応じた受光信号を出力するセンサと、
前記スケールにおける前記複数の発光素子のそれぞれの配置位置を記憶する記憶部を有し、前記複数の発光素子のそれぞれを個別に駆動するとともに、前記センサから前記受光信号が入力される制御部と、を備え、
前記制御部は、前記受光信号が入力された時に前記複数の発光素子のうち駆動中の発光素子の配置位置を前記記憶部から読み出し、前記読み出した配置位置と前記受光信号とに基づいて移動体の位置を算出する位置検出装置。 - 前記制御部は、前記記憶部に前記スケールにおける前記複数の発光素子の配置位置を更新的に記憶する請求項1に記載の位置検出装置。
- 前記制御部は、前記複数の発光素子のうちで隣接する2つの発光素子を駆動した時の前記受光信号の内容に基づいて前記記憶部の記憶内容を更新する請求項2に記載の位置検出装置。
- 前記受光信号の出力周期は、前記移動体が前記一定間隔の1/2を移動する時間よりも短い請求項1乃至3の何れかに記載の位置検出装置。
- 前記制御部は、前記移動体の移動開始前に前記複数の発光素子のそれぞれを順次駆動し、前記移動体の移動開始後に前記複数の発光素子のうち前記センサが受光した光を照射している主発光素子と前記主発光素子に隣接する副発光素子とを駆動する請求項4に記載の位置検出装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007079339A JP4922033B2 (ja) | 2007-03-26 | 2007-03-26 | 位置検出装置 |
KR1020080003983A KR100929444B1 (ko) | 2007-03-26 | 2008-01-14 | 위치 검출 장치 |
US12/025,804 US7601945B2 (en) | 2007-03-26 | 2008-02-05 | Position detecting device for detecting the absolute value of a position of a movable member which has a sensor mounted thereon |
CN2008100861861A CN101275859B (zh) | 2007-03-26 | 2008-03-18 | 位置探测装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007079339A JP4922033B2 (ja) | 2007-03-26 | 2007-03-26 | 位置検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008241338A true JP2008241338A (ja) | 2008-10-09 |
JP4922033B2 JP4922033B2 (ja) | 2012-04-25 |
Family
ID=39792614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007079339A Active JP4922033B2 (ja) | 2007-03-26 | 2007-03-26 | 位置検出装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7601945B2 (ja) |
JP (1) | JP4922033B2 (ja) |
KR (1) | KR100929444B1 (ja) |
CN (1) | CN101275859B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013083590A (ja) * | 2011-10-12 | 2013-05-09 | Canon Inc | エンコーダシステム |
JP2021085816A (ja) * | 2019-11-29 | 2021-06-03 | 三男 眞鍋 | 位置測定装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0902547D0 (en) * | 2009-02-16 | 2009-04-01 | Renishaw Plc | Encoder scale member and method for mounting |
CN105444667B (zh) * | 2014-07-07 | 2018-07-06 | 南京南瑞继保电气有限公司 | 一种高速开关位置的测量方法和设备 |
EP3276310B1 (de) * | 2016-07-27 | 2018-09-19 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
NL2025089A (en) * | 2019-04-01 | 2020-10-06 | Asml Netherlands Bv | A lithographic apparatus and related methods |
CN115184365A (zh) * | 2022-07-13 | 2022-10-14 | 中国船舶重工集团公司第七一九研究所 | 一种弯管全域无损腐蚀监测装置与方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254120A (ja) * | 1985-09-03 | 1987-03-09 | Toshiba Corp | 変位検出装置 |
JPS6396502A (ja) * | 1986-10-14 | 1988-04-27 | Toshiba Mach Co Ltd | 変位測定装置 |
JPH0247514A (ja) * | 1988-07-08 | 1990-02-16 | Parker Hannifin Corp | 位置検出方法及び装置 |
JPH03185312A (ja) * | 1989-12-15 | 1991-08-13 | Sumitomo Heavy Ind Ltd | リニアスケール |
JP2000230806A (ja) * | 1999-02-09 | 2000-08-22 | Sony Corp | 位置認識装置、位置認識方法及び仮想画像立体合成装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4786803A (en) * | 1987-06-01 | 1988-11-22 | Hewlett-Packard Company | Single channel encoder with specific scale support structure |
JP2004191267A (ja) | 2002-12-13 | 2004-07-08 | Kinichi Ogawa | 位置検出装置 |
KR100480081B1 (ko) * | 2003-06-18 | 2005-04-07 | 엘지전자 주식회사 | 음향 추적 장치를 구비한 이동 통신 단말기 |
KR100578657B1 (ko) * | 2004-08-24 | 2006-05-11 | 엘지전자 주식회사 | 방위각 검출방법 |
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2007
- 2007-03-26 JP JP2007079339A patent/JP4922033B2/ja active Active
-
2008
- 2008-01-14 KR KR1020080003983A patent/KR100929444B1/ko active IP Right Grant
- 2008-02-05 US US12/025,804 patent/US7601945B2/en not_active Expired - Fee Related
- 2008-03-18 CN CN2008100861861A patent/CN101275859B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6254120A (ja) * | 1985-09-03 | 1987-03-09 | Toshiba Corp | 変位検出装置 |
JPS6396502A (ja) * | 1986-10-14 | 1988-04-27 | Toshiba Mach Co Ltd | 変位測定装置 |
JPH0247514A (ja) * | 1988-07-08 | 1990-02-16 | Parker Hannifin Corp | 位置検出方法及び装置 |
JPH03185312A (ja) * | 1989-12-15 | 1991-08-13 | Sumitomo Heavy Ind Ltd | リニアスケール |
JP2000230806A (ja) * | 1999-02-09 | 2000-08-22 | Sony Corp | 位置認識装置、位置認識方法及び仮想画像立体合成装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013083590A (ja) * | 2011-10-12 | 2013-05-09 | Canon Inc | エンコーダシステム |
JP2021085816A (ja) * | 2019-11-29 | 2021-06-03 | 三男 眞鍋 | 位置測定装置 |
Also Published As
Publication number | Publication date |
---|---|
US7601945B2 (en) | 2009-10-13 |
CN101275859A (zh) | 2008-10-01 |
CN101275859B (zh) | 2010-12-08 |
KR20080087645A (ko) | 2008-10-01 |
JP4922033B2 (ja) | 2012-04-25 |
KR100929444B1 (ko) | 2009-12-03 |
US20080237504A1 (en) | 2008-10-02 |
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