JP2008234981A5 - - Google Patents

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Publication number
JP2008234981A5
JP2008234981A5 JP2007072355A JP2007072355A JP2008234981A5 JP 2008234981 A5 JP2008234981 A5 JP 2008234981A5 JP 2007072355 A JP2007072355 A JP 2007072355A JP 2007072355 A JP2007072355 A JP 2007072355A JP 2008234981 A5 JP2008234981 A5 JP 2008234981A5
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JP
Japan
Prior art keywords
anode
electron
ray
electron source
magnetic lens
Prior art date
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Granted
Application number
JP2007072355A
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English (en)
Japanese (ja)
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JP5458472B2 (ja
JP2008234981A (ja
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Application filed filed Critical
Priority to JP2007072355A priority Critical patent/JP5458472B2/ja
Priority claimed from JP2007072355A external-priority patent/JP5458472B2/ja
Publication of JP2008234981A publication Critical patent/JP2008234981A/ja
Publication of JP2008234981A5 publication Critical patent/JP2008234981A5/ja
Application granted granted Critical
Publication of JP5458472B2 publication Critical patent/JP5458472B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007072355A 2007-03-20 2007-03-20 Ｘ線管 Expired - Fee Related JP5458472B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007072355A JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007072355A JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

Publications (3)

Publication Number Publication Date
JP2008234981A JP2008234981A (ja) 2008-10-02
JP2008234981A5 true JP2008234981A5 (de) 2010-04-30
JP5458472B2 JP5458472B2 (ja) 2014-04-02

Family

ID=39907554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007072355A Expired - Fee Related JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

Country Status (1)

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JP (1) JP5458472B2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2911179B1 (de) 2012-10-22 2017-11-29 Shimadzu Corporation Röntgenröhrenvorrichtung
JP6218403B2 (ja) * 2013-03-15 2017-10-25 株式会社マーストーケンソリューション 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置
US9984847B2 (en) 2013-03-15 2018-05-29 Mars Tohken Solution Co., Ltd. Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same
CN105140088B (zh) * 2015-07-24 2017-10-17 北京航空航天大学 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法
JP6705507B2 (ja) * 2016-10-07 2020-06-03 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JP4306110B2 (ja) * 2000-10-04 2009-07-29 株式会社島津製作所 開放型ｘ線管
JP4029209B2 (ja) * 2002-10-17 2008-01-09 株式会社東研 高分解能ｘ線顕微検査装置
US7428298B2 (en) * 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source

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