JP2008234981A5 - - Google Patents

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Publication number
JP2008234981A5
JP2008234981A5 JP2007072355A JP2007072355A JP2008234981A5 JP 2008234981 A5 JP2008234981 A5 JP 2008234981A5 JP 2007072355 A JP2007072355 A JP 2007072355A JP 2007072355 A JP2007072355 A JP 2007072355A JP 2008234981 A5 JP2008234981 A5 JP 2008234981A5
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JP
Japan
Prior art keywords
anode
electron
ray
electron source
magnetic lens
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Application number
JP2007072355A
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Japanese (ja)
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JP2008234981A (en
JP5458472B2 (en
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Priority to JP2007072355A priority Critical patent/JP5458472B2/en
Priority claimed from JP2007072355A external-priority patent/JP5458472B2/en
Publication of JP2008234981A publication Critical patent/JP2008234981A/en
Publication of JP2008234981A5 publication Critical patent/JP2008234981A5/ja
Application granted granted Critical
Publication of JP5458472B2 publication Critical patent/JP5458472B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (4)

電子線を放出する電子源、前記電子源から放出された電子ビームを加速するアノード、及び前記アノードによって加速された電子ビームが照射されるＸ線ターゲットが真空系内に配置され、前記アノードとＸ線ターゲットの間には、前記電子ビームをＸ線ターゲット上に集束させる電子光学系を備えたＸ線管において、
磁界を前記電子源とＸ線ターゲットとの間に発生させる磁界レンズを前記真空系の外側に配置し、前記磁界レンズのヨークの上端面とＸ線ターゲットの間に前記アノードの電子入射側の面を配置していることを特徴とするＸ線管。 An electron source that emits an electron beam, an anode that accelerates an electron beam emitted from the electron source, and an X-ray target that is irradiated with an electron beam accelerated by the anode are disposed in a vacuum system, and the anode and the X Between X-ray targets, in an X-ray tube provided with an electron optical system for focusing the electron beam on the X-ray target,
A magnetic lens for generating a magnetic field between the electron source and the X-ray target is disposed outside the vacuum system, and the surface on the electron incident side of the anode between the upper end surface of the yoke of the magnetic lens and the X-ray target. An X-ray tube characterized by being arranged. 前記アノードの電子入射側の面は前記磁界レンズのギャップの下端よりも前記電子源側に配置されている請求項１に記載のＸ線管。   2. The X-ray tube according to claim 1, wherein the surface of the anode on the electron incident side is disposed closer to the electron source than the lower end of the gap of the magnetic lens. 前記アノードは前記磁界レンズの内径よりも小さく、かつ、前記電子源方向に凸型となっている請求項１又は２に記載のＸ線管。 The anode is smaller than the inner diameter of the magnetic lens, and, X-rays tube according to claim 1 or 2 has a Totsugata the electron source direction. 前記アノードの外径は前記電子源から前記アノードまでの距離の５０〜１００％である請求項３に記載のＸ線管。 The X-ray tube according to claim 3 , wherein an outer diameter of the anode is 50 to 100% of a distance from the electron source to the anode.
JP2007072355A 2007-03-20 2007-03-20 X-ray tube Expired - Fee Related JP5458472B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007072355A JP5458472B2 (en) 2007-03-20 2007-03-20 X-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007072355A JP5458472B2 (en) 2007-03-20 2007-03-20 X-ray tube

Publications (3)

Publication Number Publication Date
JP2008234981A JP2008234981A (en) 2008-10-02
JP2008234981A5 true JP2008234981A5 (en) 2010-04-30
JP5458472B2 JP5458472B2 (en) 2014-04-02

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ID=39907554

Family Applications (1)

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JP2007072355A Expired - Fee Related JP5458472B2 (en) 2007-03-20 2007-03-20 X-ray tube

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JP (1) JP5458472B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9437390B2 (en) 2012-10-22 2016-09-06 Shimadzu Corporation X-ray tube device
JP6218403B2 (en) * 2013-03-15 2017-10-25 株式会社マーストーケンソリューション X-ray tube equipped with a field emission electron gun and X-ray inspection apparatus using the same
US9984847B2 (en) 2013-03-15 2018-05-29 Mars Tohken Solution Co., Ltd. Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same
CN105140088B (en) * 2015-07-24 2017-10-17 北京航空航天大学 The focusing arrangement and its application method of big beam deflection target practice X-ray source with microbeam
WO2018066135A1 (en) * 2016-10-07 2018-04-12 株式会社ニコン Charged particle beam device, electron beam generation device, x-ray source, x-ray device, and method for manufacturing structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JP4306110B2 (en) * 2000-10-04 2009-07-29 株式会社島津製作所 Open X-ray tube
JP4029209B2 (en) * 2002-10-17 2008-01-09 株式会社東研 High resolution X-ray microscope
US7428298B2 (en) * 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source

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