JP2008219237A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2008219237A5 JP2008219237A5 JP2007051232A JP2007051232A JP2008219237A5 JP 2008219237 A5 JP2008219237 A5 JP 2008219237A5 JP 2007051232 A JP2007051232 A JP 2007051232A JP 2007051232 A JP2007051232 A JP 2007051232A JP 2008219237 A5 JP2008219237 A5 JP 2008219237A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- thickness
- temperature compensation
- bulk acoustic
- piezoelectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007051232A JP2008219237A (ja) | 2007-03-01 | 2007-03-01 | バルク音響振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007051232A JP2008219237A (ja) | 2007-03-01 | 2007-03-01 | バルク音響振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008219237A JP2008219237A (ja) | 2008-09-18 |
| JP2008219237A5 true JP2008219237A5 (cg-RX-API-DMAC7.html) | 2010-04-08 |
Family
ID=39838788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007051232A Withdrawn JP2008219237A (ja) | 2007-03-01 | 2007-03-01 | バルク音響振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008219237A (cg-RX-API-DMAC7.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI20095988A0 (fi) * | 2009-09-28 | 2009-09-28 | Valtion Teknillinen | Mikromekaaninen resonaattori ja menetelmä sen valmistamiseksi |
| CN101895269B (zh) * | 2010-07-30 | 2012-09-05 | 中国科学院声学研究所 | 一种压电薄膜体声波谐振器的制备方法 |
| JP5360432B2 (ja) * | 2011-01-27 | 2013-12-04 | 株式会社村田製作所 | 圧電デバイス |
| KR101959204B1 (ko) * | 2013-01-09 | 2019-07-04 | 삼성전자주식회사 | 무선 주파수 필터 및 무선 주파수 필터의 제조방법 |
| JP6336712B2 (ja) | 2013-01-28 | 2018-06-06 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
| JP6325798B2 (ja) | 2013-11-11 | 2018-05-16 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
| JP6325799B2 (ja) * | 2013-11-11 | 2018-05-16 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
| KR102029503B1 (ko) * | 2014-12-08 | 2019-11-08 | 삼성전기주식회사 | 체적 음향 공진기 및 필터 |
| US20250088166A1 (en) * | 2022-08-29 | 2025-03-13 | Beijing Boe Technology Development Co., Ltd. | Bulk acoustic wave resonator, manufacturing method thereof and electronic device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3715831B2 (ja) * | 1999-05-24 | 2005-11-16 | 京セラ株式会社 | 圧電共振子 |
| JP3979073B2 (ja) * | 2000-12-06 | 2007-09-19 | 株式会社村田製作所 | 圧電共振子、圧電フィルタおよびデュプレクサ |
| JP2005159402A (ja) * | 2003-11-20 | 2005-06-16 | Matsushita Electric Ind Co Ltd | 音響共振器 |
| JP4096888B2 (ja) * | 2004-02-09 | 2008-06-04 | 株式会社村田製作所 | 圧電薄膜フィルタ、分波器、通信機 |
| JP2007028594A (ja) * | 2005-06-17 | 2007-02-01 | Matsushita Electric Ind Co Ltd | 多重モード薄膜弾性波共振器フィルタ、並びにそれを備える、ラダー型フィルタ、共用器、及び通信機器 |
-
2007
- 2007-03-01 JP JP2007051232A patent/JP2008219237A/ja not_active Withdrawn