JP2008219237A - バルク音響振動子 - Google Patents

バルク音響振動子 Download PDF

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Publication number
JP2008219237A
JP2008219237A JP2007051232A JP2007051232A JP2008219237A JP 2008219237 A JP2008219237 A JP 2008219237A JP 2007051232 A JP2007051232 A JP 2007051232A JP 2007051232 A JP2007051232 A JP 2007051232A JP 2008219237 A JP2008219237 A JP 2008219237A
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Japan
Prior art keywords
temperature compensation
compensation film
film
bulk acoustic
planar region
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Withdrawn
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JP2007051232A
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English (en)
Japanese (ja)
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JP2008219237A5 (enExample
Inventor
Makoto Furuhata
誠 古畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007051232A priority Critical patent/JP2008219237A/ja
Publication of JP2008219237A publication Critical patent/JP2008219237A/ja
Publication of JP2008219237A5 publication Critical patent/JP2008219237A5/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007051232A 2007-03-01 2007-03-01 バルク音響振動子 Withdrawn JP2008219237A (ja)

Priority Applications (1)

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JP2007051232A JP2008219237A (ja) 2007-03-01 2007-03-01 バルク音響振動子

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JP2007051232A JP2008219237A (ja) 2007-03-01 2007-03-01 バルク音響振動子

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JP2008219237A true JP2008219237A (ja) 2008-09-18
JP2008219237A5 JP2008219237A5 (enExample) 2010-04-08

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JP2007051232A Withdrawn JP2008219237A (ja) 2007-03-01 2007-03-01 バルク音響振動子

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JP (1) JP2008219237A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101895269A (zh) * 2010-07-30 2010-11-24 中国科学院声学研究所 一种压电薄膜体声波谐振器的制备方法
CN102577118A (zh) * 2009-09-28 2012-07-11 Vtt技术研究中心 微机械谐振器
JP2012156907A (ja) * 2011-01-27 2012-08-16 Murata Mfg Co Ltd 圧電デバイス
US20140191825A1 (en) * 2013-01-09 2014-07-10 Samsung Electronics Co., Ltd. Radio frequency filter and manufacturing method thereof
US20150130559A1 (en) * 2013-11-11 2015-05-14 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer
US9344059B2 (en) 2013-01-28 2016-05-17 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter, and duplexer including a film inserted into the piezoelectric film
US20160164489A1 (en) * 2014-12-08 2016-06-09 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic wave resonator and filter
US9787282B2 (en) 2013-11-11 2017-10-10 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer
WO2024044874A1 (zh) * 2022-08-29 2024-03-07 北京京东方技术开发有限公司 体声波谐振器及其制备方法、电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000332570A (ja) * 1999-05-24 2000-11-30 Kyocera Corp 圧電共振子
JP2002237738A (ja) * 2000-12-06 2002-08-23 Murata Mfg Co Ltd 圧電共振子、圧電フィルタおよびデュプレクサ
JP2005159402A (ja) * 2003-11-20 2005-06-16 Matsushita Electric Ind Co Ltd 音響共振器
JP2005223808A (ja) * 2004-02-09 2005-08-18 Murata Mfg Co Ltd 圧電薄膜フィルタ、分波器、通信機
JP2007028594A (ja) * 2005-06-17 2007-02-01 Matsushita Electric Ind Co Ltd 多重モード薄膜弾性波共振器フィルタ、並びにそれを備える、ラダー型フィルタ、共用器、及び通信機器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000332570A (ja) * 1999-05-24 2000-11-30 Kyocera Corp 圧電共振子
JP2002237738A (ja) * 2000-12-06 2002-08-23 Murata Mfg Co Ltd 圧電共振子、圧電フィルタおよびデュプレクサ
JP2005159402A (ja) * 2003-11-20 2005-06-16 Matsushita Electric Ind Co Ltd 音響共振器
JP2005223808A (ja) * 2004-02-09 2005-08-18 Murata Mfg Co Ltd 圧電薄膜フィルタ、分波器、通信機
JP2007028594A (ja) * 2005-06-17 2007-02-01 Matsushita Electric Ind Co Ltd 多重モード薄膜弾性波共振器フィルタ、並びにそれを備える、ラダー型フィルタ、共用器、及び通信機器

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102577118A (zh) * 2009-09-28 2012-07-11 Vtt技术研究中心 微机械谐振器
JP2013506334A (ja) * 2009-09-28 2013-02-21 テクノロギアン トゥトキムスケスクス ヴェーテーテー マイクロメカニカル共振器
CN102577118B (zh) * 2009-09-28 2016-03-16 芬兰国家技术研究中心股份公司 微机械谐振器
CN101895269B (zh) * 2010-07-30 2012-09-05 中国科学院声学研究所 一种压电薄膜体声波谐振器的制备方法
CN101895269A (zh) * 2010-07-30 2010-11-24 中国科学院声学研究所 一种压电薄膜体声波谐振器的制备方法
JP2012156907A (ja) * 2011-01-27 2012-08-16 Murata Mfg Co Ltd 圧電デバイス
US9954511B2 (en) * 2013-01-09 2018-04-24 Samsung Electronics Co., Ltd. Radio frequency filter and manufacturing method thereof
US20140191825A1 (en) * 2013-01-09 2014-07-10 Samsung Electronics Co., Ltd. Radio frequency filter and manufacturing method thereof
US9344059B2 (en) 2013-01-28 2016-05-17 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter, and duplexer including a film inserted into the piezoelectric film
US20150130559A1 (en) * 2013-11-11 2015-05-14 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer
US9787282B2 (en) 2013-11-11 2017-10-10 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer
US9356573B2 (en) * 2013-11-11 2016-05-31 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film
US20160164489A1 (en) * 2014-12-08 2016-06-09 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic wave resonator and filter
US10110197B2 (en) * 2014-12-08 2018-10-23 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic wave resonator and filter
WO2024044874A1 (zh) * 2022-08-29 2024-03-07 北京京东方技术开发有限公司 体声波谐振器及其制备方法、电子设备

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