JP2008183658A5 - - Google Patents

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Publication number
JP2008183658A5
JP2008183658A5 JP2007018810A JP2007018810A JP2008183658A5 JP 2008183658 A5 JP2008183658 A5 JP 2008183658A5 JP 2007018810 A JP2007018810 A JP 2007018810A JP 2007018810 A JP2007018810 A JP 2007018810A JP 2008183658 A5 JP2008183658 A5 JP 2008183658A5
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JP
Japan
Prior art keywords
thin
elastic body
piezoelectric body
vicinity
close contact
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Granted
Application number
JP2007018810A
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English (en)
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JP5123532B2 (ja
JP2008183658A (ja
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Publication date
Application filed filed Critical
Priority to JP2007018810A priority Critical patent/JP5123532B2/ja
Priority claimed from JP2007018810A external-priority patent/JP5123532B2/ja
Priority to US12/018,109 priority patent/US7847469B2/en
Publication of JP2008183658A publication Critical patent/JP2008183658A/ja
Publication of JP2008183658A5 publication Critical patent/JP2008183658A5/ja
Application granted granted Critical
Publication of JP5123532B2 publication Critical patent/JP5123532B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (2)

  1. 一方の面上のほぼ全面に上部電極が形成され他方の面上のほぼ全面に下部電極が形成された略長方形の板状の圧電体と、前記圧電体の前記下部電極形成面に機械的に一体になるように密着させた板状の弾性体と、前記圧電体と前記弾性体を密着させて形成された駆動部材の長さ方向の一端近傍を片持ち梁状に支持する支持体と、を有するマイクロカンチレバーにおいて、
    前記駆動部材の前記支持体に支持された根元部分の近傍に、前記駆動部材の他の部分の厚みよりも薄い薄肉部を有し、前記薄肉部は、前記上部電極の一部がスリット状または切り欠き状になっている部分である
    ことを特徴とするマイクロカンチレバー。
  2. 前記薄肉部において前記弾性体の厚みが薄くなっていることを特徴とする請求項１に記載のマイクロカンチレバー。
JP2007018810A 2007-01-30 2007-01-30 マイクロカンチレバー Expired - Fee Related JP5123532B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007018810A JP5123532B2 (ja) 2007-01-30 2007-01-30 マイクロカンチレバー
US12/018,109 US7847469B2 (en) 2007-01-30 2008-01-22 Micro-cantilever

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007018810A JP5123532B2 (ja) 2007-01-30 2007-01-30 マイクロカンチレバー

Publications (3)

Publication Number Publication Date
JP2008183658A JP2008183658A (ja) 2008-08-14
JP2008183658A5 true JP2008183658A5 (ja) 2010-02-12
JP5123532B2 JP5123532B2 (ja) 2013-01-23

Family

ID=39727020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007018810A Expired - Fee Related JP5123532B2 (ja) 2007-01-30 2007-01-30 マイクロカンチレバー

Country Status (2)

Country Link
US (1) US7847469B2 (ja)
JP (1) JP5123532B2 (ja)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2109931B1 (en) * 2007-01-29 2015-03-11 Drexel University Energy harvesting device
WO2010061363A2 (en) * 2008-11-26 2010-06-03 Freescale Semiconductor, Inc. Electromechanical transducer device and method of forming a electromechanical transducer device
JP5316203B2 (ja) 2009-04-24 2013-10-16 ミツミ電機株式会社 圧電アクチュエータ及びその製造方法
WO2011001293A2 (en) 2009-06-29 2011-01-06 Freescale Semiconductor, Inc. Method of forming an electromechanical transducer device
US8441172B2 (en) * 2009-10-26 2013-05-14 Honeywell International Inc. Nonlinear oscillator for vibration energy harvesting
US8956903B2 (en) 2010-06-25 2015-02-17 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
KR101906589B1 (ko) * 2011-08-30 2018-10-11 한국전자통신연구원 압전 에너지 하베스팅/저장 장치 및 그 제조 방법
JP2013118234A (ja) * 2011-12-02 2013-06-13 Taiyo Yuden Co Ltd 圧電アクチュエータ及びその製造方法
JP6044989B2 (ja) * 2013-03-27 2016-12-14 国立大学法人福井大学 アクチュエーターにおける発生駆動力の評価方法
WO2016007791A1 (en) * 2014-07-09 2016-01-14 Emx, International Llc Micro-bolometer having an adjustable dynamic range
RU2572051C1 (ru) * 2014-12-31 2015-12-27 Открытое акционерное общество "Научно-исследовательский институт физических измерений" Способ изготовления интегрального микромеханического реле
KR101793225B1 (ko) * 2015-06-10 2017-11-03 한국과학기술연구원 곡면형 압전장치
CN107923371B (zh) 2015-08-31 2020-03-31 皇家飞利浦有限公司 基于电活性或光活性聚合物的致动器或传感器设备
KR20180053031A (ko) * 2016-11-11 2018-05-21 삼성전자주식회사 압전 미소 기계식 공진기
US10532922B2 (en) * 2017-11-27 2020-01-14 Stmicroelectronics S.R.L. Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
JP6382409B2 (ja) * 2017-07-25 2018-08-29 京セラ株式会社 触感呈示装置
KR102084975B1 (ko) * 2018-09-27 2020-03-05 안준형 원자 현미경용 마이크로 캔틸레버 구조체 및 그 제작방법
US11696507B2 (en) * 2018-12-14 2023-07-04 Stmicroelectronics S.R.L. Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492307A (en) * 1977-12-29 1979-07-21 Sony Corp Driving circuit of electrostrictive converter
US4342936A (en) * 1980-12-19 1982-08-03 Eastman Kodak Company High deflection bandwidth product polymeric piezoelectric flexure mode device and method of making same
US5914507A (en) * 1994-05-11 1999-06-22 Regents Of The University Of Minnesota PZT microdevice
DE69517417T2 (de) * 1994-12-27 2000-10-26 Seiko Epson Corp., Tokio/Tokyo Piezoelektrische dünnschichtanordnung, verfahren zur herstellung derselben und einen diese anordnung enthaltenden tintenstrahldruckkopf
DE69714251T2 (de) * 1996-04-23 2003-03-27 Xaar Technology Ltd., Cambridge Tröpfchenablageapparat
DE19739877C2 (de) * 1997-09-11 2003-04-17 Eurocopter Deutschland Mechanischer Resonator mit variabler Resonanzfrequenz
US20020074897A1 (en) * 2000-12-15 2002-06-20 Qing Ma Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
US6479920B1 (en) * 2001-04-09 2002-11-12 Wisconsin Alumni Research Foundation Direct charge radioisotope activation and power generation
GB0126372D0 (en) * 2001-11-02 2002-01-02 1 Ltd Curved electro-active actuators
US7098577B2 (en) * 2002-10-21 2006-08-29 Hrl Laboratories, Llc Piezoelectric switch for tunable electronic components
US6895645B2 (en) * 2003-02-25 2005-05-24 Palo Alto Research Center Incorporated Methods to make bimorph MEMS devices
JP4408266B2 (ja) * 2004-04-22 2010-02-03 日本碍子株式会社 マイクロスイッチ及びその製造方法
SG118264A1 (en) * 2004-06-29 2006-01-27 Sony Corp A magnetic material and a MEMS device using the magnetic material
JP4571488B2 (ja) * 2004-12-22 2010-10-27 日本電信電話株式会社 微細構造体
JP2006187060A (ja) * 2004-12-27 2006-07-13 Nikon Corp マイクロアクチュエータ及びその製造方法、並びに、光学装置及び光スイッチ
JP4799059B2 (ja) * 2005-06-27 2011-10-19 株式会社東芝 半導体装置
US7420318B1 (en) * 2006-03-20 2008-09-02 The United States Of America As Represented By The Secretary Of The Army Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device

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