JP2008170255A - Substrate inspection device, substrate inspection jig, and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-probe substrate inspection device, substrate inspection jig and its manufacturing method for inspecting the continuity of wiring, existing of short circuits and measuring the resistance of wiring formed on the substrate by making a plurality of probes contact with the inspection points on the objective substrate while communicating electric signals. <P>SOLUTION: The substrate inspection device for inspecting the continuity or short circuit of the wiring by communicating the inspection signal by bringing into contact with an end of linear probe and the inspection point of the objective substrate includes: a probe holder in which one ends of the plurality of probes is made contact with the inspection points of the objective substrate, and the other ends are made contact with the electrodes; and an electrode plate capable of connecting with the probe holder which has a plurality of electrodes being in contact with the other ends of the probes as well as connecting with the operation/control device. The electrodes are flush and concentrically provided with the conductive internal diameter part and the conductive external diameter part. The internal diameter part is in contact with the probe on its one end and the other end of the same is connected with the operation/control device, and the electrode plate characteristically includes the stepped through hole for fitting with the external diameter part and the internal diameter part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a substrate inspection apparatus, a substrate inspection jig used in the substrate inspection apparatus, and a method of manufacturing the substrate inspection jig, and in particular, a large number of probes are brought into contact with inspection points of a substrate to be inspected, So-called multi-needle type substrate inspection device, substrate inspection jig and its manufacture for inspecting the presence or absence of continuity and short circuit of wiring formed on the substrate, and measuring the resistance value of the wiring Regarding the method.
The present invention is not limited to a printed wiring board, but includes, for example, electrical wiring on various substrates such as flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and package substrates and film carriers for semiconductor packages. In the present specification, these various wiring boards are collectively referred to as “substrates”.

  Conventionally, in a multi-needle type substrate inspection apparatus, another number of linear probes are held on a holding body so that one end of each of them is in contact with an inspection point of wiring on a board to be inspected, and the other end of the probe is held on a holding body The electrodes are connected to the operation / control circuit via lead wires, and the operation / control circuit and the wiring of the board are connected via these electrodes and the probe. In the meantime, signals for substrate inspection were exchanged. However, in the conventional apparatus, it is necessary to connect a large number of electrodes and the arithmetic / control circuit with lead wires, and the connection work requires a lot of man-hours.

  As means for solving such problems, the gazette described in Patent Document 1 discloses that one end of a lead wire is inserted into a through-hole formed in an electrode plate so that one end of the lead wire is used as an electrode. And an inspection jig in which a lead wire is fixed to the electrode plate by filling the through hole with a sealing material.

Japanese Patent No. 3690796

Although the inspection jig disclosed in Patent Document 1 uses one end of a linear member (lead wire) as an electrode, connection work between the conventional electrode and linear member can be avoided. Since the member is fixed and integrated with the electrode plate, the electrode plate is repeatedly used, and even if one of the linear members used as an electrode is worn out and does not function, the electrode plate It was necessary to replace the whole, and there was a problem that the maintenance cost was high.
The present invention has been made in view of such circumstances, and is easy to maintain and does not require connection work between the electrode and the linear member, a substrate inspection jig used in the substrate inspection device, and An object of the present invention is to provide a method for manufacturing the substrate inspection jig.

According to the first aspect of the present invention, one end of a linear probe is brought into contact with an inspection point of a substrate to be inspected on which a plurality of wirings are formed, and inspection of wiring continuity and short circuit is performed by sending and receiving inspection signals. In the substrate inspection apparatus, a probe holding body that holds one end of the plurality of probes in contact with an inspection point of the substrate to be inspected and the other end in contact with an electrode, and an operation / control device for the inspection A plurality of electrodes that are connected to each other and electrically connected to the other end of the probe, and an electrode plate that is combined with the probe holder. The electrode is formed flush with the surface of the electrode plate. And an inner diameter portion and an outer diameter portion formed concentrically with each other, one end of the inner diameter portion is in contact with the probe, the other end is electrically connected to the arithmetic / control device, and the electrode plate is When mated with the outer diameter part Providing a substrate inspection apparatus characterized by having the inside diameter portion and the mating stepped through hole also.
According to a second aspect of the present invention, a plurality of probes and a probe that holds the plurality of probes in contact with an inspection point of a substrate to be inspected and the other end in contact with an electrode connected to an arithmetic / control device. In a substrate inspection jig comprising a holding body and a plurality of electrodes and an electrode plate combined with the probe holding body, a plurality of probes, one end of which contacts the inspection point of the substrate to be inspected and the other end serves as an electrode A probe holder that holds the electrodes so as to be in contact with each other, and the electrode has a conductive inner diameter portion and an outer diameter portion that are formed concentrically with the surface of the electrode plate, and the inner diameter portion One end is in contact with the probe, the other end is conductively connected to the arithmetic / control device, and the electrode plate has a stepped through hole that fits the outer diameter portion and the inner diameter portion. Specially Providing a substrate inspecting jig to.
According to a third aspect of the present invention, there are provided a plurality of probes and probe holding for holding one end of the plurality of probes in contact with an inspection point of a substrate to be inspected and the other end in contact with an electrode connected to an arithmetic / control device. In an electrode manufacturing method for a substrate inspection jig comprising a body and an electrode plate that includes a plurality of electrodes and is combined with a probe holder, a linear conductive core and a periphery of the conductive core are covered. A part of the insulating coating part is removed from the linear member having the insulating coating part to expose the conductive core part, and an outer diameter larger than that of the insulating coating part is formed on the periphery of the exposed conductive core part. A first hole portion that fits with the outer diameter portion on the contact side with the probe, at a predetermined position on the surface of the electrode plate where the electrode is disposed, In communication with the first hole, and Forming a stepped through hole having a second hole portion to be fitted to the edge covering portion, inserting the linear member through the stepped through hole, and fitting the first hole portion and the outer diameter portion; A method for manufacturing a substrate inspection apparatus is provided, wherein the linear member is cut along the surface so that the surface of the electrode plate is flush with the linear member.
According to a fourth aspect of the present invention, there are provided a plurality of probes and a probe holding device in which one end of each of the plurality of probes is brought into contact with an inspection point of a substrate to be inspected and the other end is brought into contact with an electrode connected to an arithmetic / control device In an electrode manufacturing method for a substrate inspection jig comprising a body and an electrode plate that includes a plurality of electrodes and is combined with a probe holder, a linear conductive core and a periphery of the conductive core are covered. A part of the insulating coating part is removed from the linear member having the insulating coating part to expose the conductive core part, and an outer diameter larger than that of the insulating coating part is formed on the periphery of the exposed conductive core part. A first hole portion that fits with the outer diameter portion on the contact side with the probe, at a predetermined position on the surface of the electrode plate where the electrode is disposed, In communication with the first hole, and Forming a stepped through-hole having a second hole to be fitted with the edge covering, and having a predetermined thickness on the surface of the electrode plate and having the same diameter as the first hole at the predetermined position; A sheet member provided with a hole is placed, the linear member is inserted into the stepped through hole and the third through hole, and the first hole part, the third through hole, and the outer diameter part are fitted. A method for manufacturing a substrate inspection apparatus is provided, wherein the linear member is cut along the surface so that the surface of the sheet member is flush with the linear member.
By providing these inventions, the above problems are solved.

According to the first, second, or third aspect of the invention, since one end of the linear member is used as an electrode, in addition to the conventional operation of connecting the electrode and the linear member, the linear member Since the member is only inserted through the through hole of the electrode plate, it can be individually extracted from the electrode plate.
For this reason, when the surface of the outer diameter part of any linear member is worn out, only the worn linear member can be extracted and replaced, and maintenance is facilitated.
According to the fourth aspect of the present invention, the linear member can be formed so as to protrude from the surface of the electrode plate by a predetermined thickness using a sheet member having a predetermined thickness. For this reason, by adjusting the thickness of the sheet member, it is possible to adjust a desired amount of protrusion.

FIG. 1 is a schematic configuration diagram of a substrate inspection apparatus according to the present invention. In FIG. 1, a substrate 10 to be inspected is placed on a support 12 at a position (not shown) and conveyed to an inspection position shown in FIG. As shown in FIG. 1, the substrate 10 to be inspected is arranged so that it can be inspected with inspection jigs arranged on the front and back surfaces of the substrate 10 to be inspected.
Reference numeral 20 denotes an upper probe holder that holds a large number of linear probes 20 so that the probe 22 is brought into contact with an inspection point on the upper surface in the drawing of the substrate 10 to be inspected.
Reference numeral 40 denotes a lower probe holder that holds a large number of linear probes 42 so that the probes 42 are brought into contact with inspection points on the lower surface of the substrate 10 to be inspected.

  The upper probe holder 20 is provided with a guide plate 28 and a support plate 32 which are fixed to and supported by support columns 24 and 26 which also serve as spacers, and through holes are respectively formed at predetermined positions on these plates. The probe 22 is inserted into the through-holes, and friction between the inner wall of the through-hole and the probe 22 or the through-hole of the guide plate is reduced in diameter at the outlet so that only the bare wire portion at the tip of the probe 22 is passed through. The guide plate 28, the support plate 32, and a support body made up of support columns are held.

Reference numeral 34 denotes an electrode plate, which sends a test signal to an inspection point on the substrate through a probe, receives a detection signal from the inspection point, determines the presence or absence of a wire break or short circuit, or determines the resistance value of the wire. One end of the linear member 38 connected to the calculation control circuit 36 to be calculated is held, and the tip of the linear member 38 is joined to the support plate 32 so as to contact the multiple ends of the probe 22.
In FIG. 1, the probe 22 is connected so as to be in conductive contact with the electrode of the electrode plate 34. When an actual inspection of the inspected substrate 10 is performed, the probe 22 is connected so as to be in conductive contact with an inspection point set on the inspected substrate 10.
In FIG. 1, a conductive linear member 38 for electrically connecting the electrode plate 34 and the arithmetic / control circuit 36 is shown. This linear member 38 is provided for each electrode, and the same number of linear members 38 as the number of electrodes are provided.

FIG. 2 is a partial cross-sectional view showing the electrode plate 34 and the linear member 38 according to the embodiment of the present invention. In FIG. 2, only two linear members 38 are shown, but in actuality, as many linear members 38 as the number of probes are provided. Also, in FIG. 2, the vertical relationship is reversed from that in FIG. 1, and the upper surface of the electrode plate 34 in FIG. 2 corresponds to the lower surface of the electrode plate 34 in FIG. 1, and these surfaces serve as the probe holder. Will face each other.
In the linear member 38 according to the present invention, a cylindrical conductive core portion 38a is disposed, and the coaxial peripheral edge of the core portion 38a is covered with an insulating layer 38b formed of an insulating material. As the linear member 38, for example, a lead wire having enamel as the insulating layer 38b can be used.
The two electrodes 39 shown in FIG. 2 are formed by a conductive core portion 38a and a conductive outer diameter portion 38c disposed concentrically around the periphery of the core portion 38a. As shown in FIG. 2, the electrode 39 is disposed so as to be flush with the electrode plate 34 by cutting a column formed by the core portion 38 a and the outer diameter portion 38 c into a transverse section. The insulating layer 38b is stripped off from the portion of the core portion 38a where the outer diameter portion 38c is provided, and the core portion 38a and the outer diameter portion 38c are electrically connected. For this reason, the core part 38a and the outer-diameter part 38c are formed so that the electrode 39 may become a concentric circle in planar view. The outer diameter portion 38c is formed to have an outer diameter larger than that of the insulating layer 38b. Therefore, as shown in FIG. 2, the linear member 38 has different outer diameters of the outer diameter portion 38c and the insulating layer 38b.

The electrode plate 34 includes a probe side plate portion 34a and a device side plate portion 34b.
A stepped through hole 341 is formed in the probe side plate portion 34 a of the electrode plate 34. As shown in FIG. 2, the stepped through hole 341 has a large-diameter hole 34c in which a hole on the side near the probe is formed with a large diameter, and a small-diameter hole 34d in which a hole on the side far from the probe is formed with a small diameter. is doing.
The large-diameter hole 34c has a diameter (inner diameter) that is substantially the same as or slightly larger than the outer diameter of the outer diameter portion 38c, and is formed to be fitted to the outer diameter portion 38c.
The small-diameter hole 34d has a diameter (inner diameter) substantially the same as or slightly larger than the outer diameter of the insulating layer 38b of the linear member 38, and is formed so as to be fitted to the insulating layer 38b.
The large-diameter hole 34c and the small-diameter hole 34d are connected so as to penetrate the probe side plate portion 34a.

The apparatus side plate portion 34b is disposed in contact with the probe side plate portion 34a. The device side plate portion 34b is formed with a through hole 34e having substantially the same diameter as the insulating layer 38b of the linear member 38 or a slightly larger diameter (inner diameter). As shown in FIG. 2, the through hole 34 e accommodates the linear member 38 inside and fits with the insulating layer 38 b of the linear member 38.
The other end (not shown) of the linear member 38 is connected to an arithmetic / control device via an appropriate connector in the same manner as a conventional device.
The stepped through hole 341 of the probe side plate portion 34a and the through hole 34e of the device side plate portion 34b are connected in communication, and the small diameter hole 34d and the through hole 34e of the stepped through hole 341 have substantially the same diameter. Formed.

Next, production and assembly of the linear member 38 and the electrode plate 34 of the above embodiment will be described. First, as shown in FIG. 3A, the insulating layer 38b of the linear member 38 is partially peeled to expose the core portion 38a. The distance to be exposed is not particularly limited, but is formed to be longer than at least the depth of the large-diameter hole 34c.
Next, as shown in FIG. 3B, a conductive material is fixed in a cylindrical shape to the exposed core portion 38a, and an outer diameter d1 larger than the outer diameter d2 of the insulating layer 38b of the linear member 38 is set. Formed to have.
It is preferable that the conductive material can be fixed to the exposed core portion 38a by electroforming. This is because the size of the outer diameter portion 38c can be accurately adjusted by forming the outer diameter portion 38c by electrocasting. For this material, for example, a conductive material such as nickel can be fixed in a cylindrical shape by plating.
The outer diameter portion 38c forms a cylindrical conductive member, and is disposed at a position where the outer diameter portion 38c contacts the core portion 38a exposed inside the cylindrical shape.
At this time, the outer diameter portion 38c is formed so as to be fitted to a large diameter hole 34c of a stepped through hole 341 of the probe side plate portion 34a described later.

On the other hand, a stepped through hole 341 and a through hole 34e are formed in the electrode plate 34 as shown in FIG.
As described above, the stepped through hole 341 has a large diameter (large diameter hole 34c) on the upper side in FIG. 4A, that is, the side facing the probe, and the lower side, that is, the side opposite to the probe. In this case, the side leading to the arithmetic / control device has a small diameter (small diameter hole 34d).
The number and position of the through holes correspond to the number of probes and the position of the other end.
The electrode plate 34 has a probe side plate portion 34a in which a stepped through hole 341 is formed and a base plate 34b in which a through hole 34e having the same inner diameter as the small diameter hole 34e of the stepped through hole 341 is formed. The holes are laminated so that the holes are aligned.
In this embodiment, the electrode plate 34 is composed of two plates, one of which has a stepped through hole 341 and the other of which has a through hole 34e having the same inner diameter as the small diameter hole of the stepped through hole 341. By aligning both the through holes, the small diameter hole 34d of the stepped through hole 341 is formed relatively long.
Thus, the linear member 38 is reliably held by the electrode plate 34 by elongating the small diameter hole 34 e of the stepped through hole 341.

As shown in FIG. 4B, the linear member 38 having the outer diameter portion 38c formed as described above is inserted into the through holes thus formed (the stepped through holes 341 and the through holes 34e). The outer diameter portion 38 c is fitted into the large diameter hole 34 c of the stepped through hole 341.
At this time, since the thickness of the large-diameter hole 34c is shorter than the length of the outer diameter portion 38c, the outer diameter portion 38c is disposed so as to protrude from the electrode plate 34.

Next, as shown in FIG. 4C, the outer diameter portion 38 c and the core portion 38 a of the linear member 38 are arranged so that the upper surface of the outer diameter portion 38 c is flush with the upper surface of the electrode plate 34. The upper part is excised. By cutting in this way, the electrode plate 34 and the electrode 39 are formed to be flush with each other.
FIG. 4C shows a cutting means indicated by reference numeral 6.

Here, the dimensional relationship between the inner diameter of each through hole and the linear member 38 and the outer diameter portion 38c is such that the linear member 38 and the outer diameter portion 38c can be smoothly inserted into the respective through holes, and after the insertion, It is set to be held in the through hole by the frictional force with the inner wall.
For this reason, when the linear member 38 is inserted and disposed in a predetermined through hole, the linear member 38 does not come out of the through hole.
For example, the outer diameter of the insulating coating of the linear member 38 is formed to be about 200 μm, and the outer diameter of the outer diameter portion 38 c is formed to be about 100 μm, whereas the inner diameter of the small diameter hole 34 d of the stepped through hole 341 is Is formed to about 100 μm, and the inner diameter of the large-diameter hole 34 c is formed to about 200 μm.
The large diameter hole 34c and the small diameter hole 34d can be formed slightly smaller than the above dimensions. The through hole 34e is formed so as to have substantially the same inner diameter as the small diameter hole 34d.
The other end of the linear member 38 inserted through the through hole is connected to the calculation / control circuit.

The lower probe holder 40 and electrode plate 54 and the calculation / control circuit 56 have the same structure as the upper probe holder 20 and electrode plate 34 and the calculation / control circuit 36.
In FIG. 1, the probe holder 40 holds a linear probe 42 by a guide plate 48 and a support plate 52 supported by a support 46, and an electrode plate 54 is joined to the probe 42. Parts corresponding to the parts of the upper electrode plate 34 of the lower electrode plate 54 are omitted for convenience of description.

  As described above, instead of making the inspection jig consisting of the probe holder and the electrode plate the same in the upper and lower directions, one of the inspection jigs may be an inspection jig that sequentially brings a pair of movable probes into contact with the inspection points. Good.

Next, another method for manufacturing the electrode will be described. FIG. 5 is a schematic explanatory view showing another manufacturing process for manufacturing an electrode.
In the electrode manufacturing method in this other manufacturing method, the probe side plate portion 34a and the device side plate portion 34b are overlapped, and the sheet member 5 is stacked on the surface of the probe side plate portion 34a.
The sheet member 5 is formed with third through holes 51 having the same inner diameter as the large-diameter hole 34c, and is arranged at a position aligned with the corresponding large-diameter hole 34c. For this reason, the outer diameter portion 38c is formed longer by the length of the thickness d3 of the sheet member 5.

FIG. 5A shows a state in which the linear member 38 is inserted through the through hole of the electrode plate 34 on which the sheet member 5 is placed.
First, it mounts so that the through-hole of the electrode plate 34 and the 3rd through-hole 51 of the sheet | seat member 5 may match. Next, as shown in FIG. 5A, the linear member 38 is inserted into each through hole.
Next, as shown in FIG. 5B, the linear member 38 is cut by the cutting means 6 so as to be flush with the surface of the sheet member 5.

When the linear member 38 is cut, the sheet member 5 is then removed from the electrode plate 34 (see FIG. 5C). At this time, the electrode is formed so as to protrude by the thickness of the sheet member 5.
For this reason, the protrusion amount of the electrode can be adjusted by adjusting the thickness of the sheet member 5.

  Next, the operation of the insulation inspection apparatus 1 according to the present invention will be described. A substrate to be inspected 10 supported by the support 12 is conveyed and positioned at the inspection position shown by a driving device (not shown). Then, the upper and lower inspection jigs each composed of the probe holder and the electrode plate are driven toward the substrate to be inspected, the tips of the probes 22 and 42 are brought into contact with the inspection points of the substrate 10 to be inspected, and the probe is bent to Due to its own elasticity, it makes contact with the inspection point at a predetermined pressure. The opposite sides of the probes 22 and 42 are in elastic contact with the outer diameter portions 38c and / or the tips of the core portions 38a of the linear members 38 inserted through the through holes of the electrode plates 34 and 54, respectively (see FIG. 6).

  In this state, the inspection input signal is input from the arithmetic control circuits 36 and 56 to the inspection point of the substrate to be inspected via the linear member 38 and the probe, and the inspection output signal is reversed in the same path. The inspection result is judged and the measurement value is detected.

It is a schematic structure figure showing one embodiment of an insulation inspection device concerning the present invention. FIG. 2 is an enlarged view of a symbol A in FIG. 1, and shows a cross-sectional view of an electrode and a linear member. It is the schematic which shows the manufacturing process of a linear member. It is the schematic which shows the manufacturing process of an electrode. It is a schematic explanatory drawing which shows the other manufacturing process which manufactures an electrode. In addition, the linear member does not show the cross section for convenience of explanation. The schematic sectional drawing at the time of implementing the electrode structure concerning the present invention is shown.

Explanation of symbols

20... Probe holder 22... Probe 34... Electrode plate 34 c... Large diameter hole 34 d... Small diameter hole 34 e. .... Core part 38b ... Insulating layer 38c ... Outer diameter part 39 ... Electrode 5 ... Sheet member 51 ... Third through hole

Claims (4)

In a substrate inspection apparatus for inspecting wiring continuity or short circuit by bringing one end of a linear probe into contact with an inspection point of a substrate to be inspected on which a plurality of wirings are formed, and sending and receiving an inspection signal,
A probe holder that holds one end of the plurality of probes in contact with the inspection point of the substrate to be inspected and the other end in contact with the electrode;
A plurality of electrodes electrically connected to the other end of the probe and electrically connected to the calculation / control device for the inspection, and an electrode plate combined with the probe holder,
The electrode is formed flush with the surface of the electrode plate and has a conductive inner and outer diameter portion formed concentrically,
One end of the inner diameter portion is in contact with the probe, and the other end is electrically connected to the arithmetic / control device,
The substrate inspection apparatus, wherein the electrode plate has a stepped through hole that fits the outer diameter portion and the inner diameter portion. A plurality of probes, a probe holder that holds the plurality of probes in contact with an inspection point of the substrate to be inspected and the other end in contact with an electrode connected to the arithmetic / control device, and a plurality of the electrodes In a substrate inspection jig provided with an electrode plate that is provided and combined with a probe holder,
A probe holder for holding a plurality of probes such that one end thereof is in contact with an inspection point of the substrate to be inspected and the other end thereof can be in contact with an electrode;
The electrode is formed flush with the surface of the electrode plate and has a conductive inner and outer diameter portion formed concentrically,
One end of the inner diameter portion is in contact with the probe, and the other end is electrically connected to the arithmetic / control device,
The substrate inspection jig according to claim 1, wherein the electrode plate has a stepped through hole that fits the outer diameter portion and the inner diameter portion. A plurality of probes, a plurality of probes, a probe holder that holds one end of the plurality of probes in contact with an inspection point of a substrate to be inspected and the other end in contact with an electrode connected to an arithmetic / control device, and a plurality of the electrodes In the electrode manufacturing method of the substrate inspection jig comprising the electrode plate combined with the probe holder together with,
From a linear member having a linear conductive core and an insulating coating that covers the periphery of the conductive core, a portion of the insulating coating is removed to expose the conductive core,
On the periphery of the exposed conductive core portion, a conductive outer diameter portion having a larger outer diameter than the insulating coating portion is formed,
A first hole portion that fits the outer diameter portion on the contact side with the probe at a predetermined position on the surface of the electrode plate, and is connected to the first hole portion and is connected to the insulating coating. Forming a stepped through hole having a second hole to be fitted with the part,
Inserting the linear member through the stepped through-hole, fitting the first hole portion and the outer diameter portion,
A method for manufacturing a substrate inspection apparatus, comprising: cutting a linear member along the surface so that the surface of the electrode plate and the linear member are flush with each other. A plurality of probes, a plurality of probes, a probe holder that holds one end of the plurality of probes in contact with an inspection point of a substrate to be inspected and the other end in contact with an electrode connected to an arithmetic / control device, and a plurality of the electrodes In the electrode manufacturing method of the substrate inspection jig comprising the electrode plate combined with the probe holder together with,
From the linear member having a linear conductive core and an insulating coating that covers the periphery of the conductive core, a portion of the insulating coating is removed to expose the conductive core,
On the periphery of the exposed conductive core portion, a conductive outer diameter portion having a larger outer diameter than the insulating coating portion is formed,
A first hole portion that fits the outer diameter portion on the contact side with the probe at a predetermined position on the surface of the electrode plate, and is connected to the first hole portion and is connected to the insulating coating. Forming a stepped through hole having a second hole to be fitted with the part,
On the surface of the electrode plate, a sheet member having a predetermined thickness and provided with a third through hole having the same diameter as the first hole at the predetermined position is placed.
The linear member is inserted into the stepped through hole and the third through hole, and the first hole portion, the third through hole, and the outer diameter portion are fitted,
A method for manufacturing a substrate inspection apparatus, comprising: cutting a linear member along the surface so that the surface of the sheet member is flush with the linear member.

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