JP2008156735A5 - - Google Patents

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Publication number
JP2008156735A5
JP2008156735A5 JP2006349496A JP2006349496A JP2008156735A5 JP 2008156735 A5 JP2008156735 A5 JP 2008156735A5 JP 2006349496 A JP2006349496 A JP 2006349496A JP 2006349496 A JP2006349496 A JP 2006349496A JP 2008156735 A5 JP2008156735 A5 JP 2008156735A5
Authority
JP
Japan
Prior art keywords
pole piece
magnetic pole
permanent magnet
outer peripheral
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006349496A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008156735A (ja
JP4509097B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2006349496A priority Critical patent/JP4509097B2/ja
Priority claimed from JP2006349496A external-priority patent/JP4509097B2/ja
Publication of JP2008156735A publication Critical patent/JP2008156735A/ja
Publication of JP2008156735A5 publication Critical patent/JP2008156735A5/ja
Application granted granted Critical
Publication of JP4509097B2 publication Critical patent/JP4509097B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006349496A 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路 Active JP4509097B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006349496A JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006349496A JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Publications (3)

Publication Number Publication Date
JP2008156735A JP2008156735A (ja) 2008-07-10
JP2008156735A5 true JP2008156735A5 (https=) 2010-02-12
JP4509097B2 JP4509097B2 (ja) 2010-07-21

Family

ID=39657971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006349496A Active JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Country Status (1)

Country Link
JP (1) JP4509097B2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012102092A1 (ja) 2011-01-24 2012-08-02 日立金属株式会社 マグネトロンスパッタリング用磁場発生装置
DE112012001988T5 (de) * 2011-05-30 2014-02-20 Hitachi Metals Ltd. Racetrack-förmige Magnetfeld-erzeugende Vorrichtung für Magnetron-Sputtern
CN103184421A (zh) * 2011-12-30 2013-07-03 鸿富锦精密工业（深圳）有限公司 真空溅射靶磁芯
WO2013115030A1 (ja) * 2012-01-30 2013-08-08 日立金属株式会社 マグネトロンスパッタリング用磁場発生装置
WO2014010148A1 (ja) * 2012-07-11 2014-01-16 キヤノンアネルバ株式会社 スパッタリング装置および磁石ユニット
WO2014125889A1 (ja) * 2013-02-15 2014-08-21 日立金属株式会社 マグネトロンスパッタリング用磁場発生装置
KR101662659B1 (ko) * 2014-11-21 2016-10-06 에이티 주식회사 마그네트 유니트가 구성된 다극 마그네트론 캐소드
JP6261682B2 (ja) * 2016-08-09 2018-01-17 住友化学株式会社 電子デバイスの製造方法
KR102420329B1 (ko) * 2018-02-13 2022-07-14 한국알박(주) 마그네트론 스퍼터링 장치의 자석 집합체
CN108377607B (zh) * 2018-03-07 2024-05-10 中国原子能科学研究院 一种用于离子源等离子体测试实验装置的电磁铁系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163372A (ja) * 1988-12-19 1990-06-22 Mitsubishi Kasei Corp マグネトロンスパッタ装置
JPH02270963A (ja) * 1989-04-12 1990-11-06 Mitsubishi Kasei Corp マグネトロンスパッタ装置
JPH0734244A (ja) * 1993-07-16 1995-02-03 Ube Ind Ltd マグネトロン型スパッタカソード

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