JP2008156735A5 - - Google Patents

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Publication number
JP2008156735A5
JP2008156735A5 JP2006349496A JP2006349496A JP2008156735A5 JP 2008156735 A5 JP2008156735 A5 JP 2008156735A5 JP 2006349496 A JP2006349496 A JP 2006349496A JP 2006349496 A JP2006349496 A JP 2006349496A JP 2008156735 A5 JP2008156735 A5 JP 2008156735A5
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JP
Japan
Prior art keywords
pole piece
magnetic pole
permanent magnet
outer peripheral
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006349496A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008156735A (ja
JP4509097B2 (ja
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Publication date
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Priority to JP2006349496A priority Critical patent/JP4509097B2/ja
Priority claimed from JP2006349496A external-priority patent/JP4509097B2/ja
Publication of JP2008156735A publication Critical patent/JP2008156735A/ja
Publication of JP2008156735A5 publication Critical patent/JP2008156735A5/ja
Application granted granted Critical
Publication of JP4509097B2 publication Critical patent/JP4509097B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006349496A 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路 Active JP4509097B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006349496A JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006349496A JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Publications (3)

Publication Number Publication Date
JP2008156735A JP2008156735A (ja) 2008-07-10
JP2008156735A5 true JP2008156735A5 (enExample) 2010-02-12
JP4509097B2 JP4509097B2 (ja) 2010-07-21

Family

ID=39657971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006349496A Active JP4509097B2 (ja) 2006-12-26 2006-12-26 マグネトロンスパッタリング用磁気回路

Country Status (1)

Country Link
JP (1) JP4509097B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103328683B (zh) * 2011-01-24 2015-04-15 日立金属株式会社 用于磁控管溅射的磁场发生装置
US9378934B2 (en) 2011-05-30 2016-06-28 Hitachi Metals, Ltd. Racetrack-shaped magnetic-field-generating apparatus for magnetron sputtering
CN103184421A (zh) * 2011-12-30 2013-07-03 鸿富锦精密工业（深圳）有限公司 真空溅射靶磁芯
WO2013115030A1 (ja) * 2012-01-30 2013-08-08 日立金属株式会社 マグネトロンスパッタリング用磁場発生装置
KR101654660B1 (ko) * 2012-07-11 2016-09-07 캐논 아네르바 가부시키가이샤 스퍼터링 장치 및 자석 유닛
DE112014000416T5 (de) * 2013-02-15 2015-10-15 Hitachi Metals Ltd. Magnetfeld-erzeugende Vorrichtung für Magnetron Sputtern
KR101662659B1 (ko) * 2014-11-21 2016-10-06 에이티 주식회사 마그네트 유니트가 구성된 다극 마그네트론 캐소드
JP6261682B2 (ja) * 2016-08-09 2018-01-17 住友化学株式会社 電子デバイスの製造方法
KR102420329B1 (ko) * 2018-02-13 2022-07-14 한국알박(주) 마그네트론 스퍼터링 장치의 자석 집합체
CN108377607B (zh) * 2018-03-07 2024-05-10 中国原子能科学研究院 一种用于离子源等离子体测试实验装置的电磁铁系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163372A (ja) * 1988-12-19 1990-06-22 Mitsubishi Kasei Corp マグネトロンスパッタ装置
JPH02270963A (ja) * 1989-04-12 1990-11-06 Mitsubishi Kasei Corp マグネトロンスパッタ装置
JPH0734244A (ja) * 1993-07-16 1995-02-03 Ube Ind Ltd マグネトロン型スパッタカソード

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