JP2008135673A5 - - Google Patents

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JP2008135673A5
JP2008135673A5 JP2007066456A JP2007066456A JP2008135673A5 JP 2008135673 A5 JP2008135673 A5 JP 2008135673A5 JP 2007066456 A JP2007066456 A JP 2007066456A JP 2007066456 A JP2007066456 A JP 2007066456A JP 2008135673 A5 JP2008135673 A5 JP 2008135673A5
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medium
laser beam
ultrafast
nanometers
visible
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JP2008135673A (ja
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JP2007066456A 2004-12-20 2007-03-15 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源 Pending JP2008135673A (ja)

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US63807204P 2004-12-20 2004-12-20

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JP2007541509A Division JP4825809B2 (ja) 2004-12-20 2005-12-20 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源

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JP2013000030A Division JP5716757B2 (ja) 2004-12-20 2013-01-04 媒体中に導波路を製造する方法およびシステム

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JP2008135673A JP2008135673A (ja) 2008-06-12
JP2008135673A5 true JP2008135673A5 (https=) 2009-03-19

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JP2007541509A Expired - Fee Related JP4825809B2 (ja) 2004-12-20 2005-12-20 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
JP2007066456A Pending JP2008135673A (ja) 2004-12-20 2007-03-15 調整可能なグレーティングコンプレッサを備えたパルスレーザ光源
JP2013000030A Expired - Fee Related JP5716757B2 (ja) 2004-12-20 2013-01-04 媒体中に導波路を製造する方法およびシステム

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US (3) US7684450B2 (https=)
EP (1) EP1851837B1 (https=)
JP (3) JP4825809B2 (https=)
WO (1) WO2007046833A2 (https=)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394591B2 (en) 2000-05-23 2008-07-01 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US9022037B2 (en) 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US8921733B2 (en) 2003-08-11 2014-12-30 Raydiance, Inc. Methods and systems for trimming circuits
US7486705B2 (en) 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US7885311B2 (en) * 2007-03-27 2011-02-08 Imra America, Inc. Beam stabilized fiber laser
US7508853B2 (en) * 2004-12-07 2009-03-24 Imra, America, Inc. Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems
US7684450B2 (en) 2004-12-20 2010-03-23 Imra America, Inc. Pulsed laser source with adjustable grating compressor
US20060207976A1 (en) * 2005-01-21 2006-09-21 Bovatsek James M Laser material micromachining with green femtosecond pulses
US8232687B2 (en) 2006-04-26 2012-07-31 Raydiance, Inc. Intelligent laser interlock system
US9130344B2 (en) * 2006-01-23 2015-09-08 Raydiance, Inc. Automated laser tuning
WO2007132182A2 (en) * 2006-05-11 2007-11-22 Spi Lasers Uk Limited Apparatus for providing optical radiation
CN101815057B (zh) * 2006-09-30 2012-06-27 中国科学院西安光学精密机械研究所 多数据率兼容型超高速自适应全光数据包速率倍增方法
JP5774277B2 (ja) * 2007-01-23 2015-09-09 イムラ アメリカ インコーポレイテッド 超短レーザ微細テクスチャ印刷
US8154793B2 (en) * 2007-05-25 2012-04-10 Cornell University Nonlinear chirped pulse fiber amplifier with pulse compression
FR2917544A1 (fr) * 2007-06-15 2008-12-19 Amplitude Systemes Sa Source d'impulsions lumineuses ultrabreves de forte energie
JP5638389B2 (ja) * 2007-08-09 2014-12-10 ヴィルヌーヴ, アランVILLENEUVE, Alain チューナブルモードロックレーザ
US7903326B2 (en) 2007-11-30 2011-03-08 Radiance, Inc. Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system
EP2252426A4 (en) 2008-03-21 2014-08-06 Imra America Inc METHOD AND SYSTEMS FOR PROCESSING A LASER BASED MATERIAL
US8498538B2 (en) 2008-11-14 2013-07-30 Raydiance, Inc. Compact monolithic dispersion compensator
JP5637669B2 (ja) * 2009-09-01 2014-12-10 浜松ホトニクス株式会社 パルス幅変換装置および光増幅システム
KR20130059337A (ko) 2010-03-30 2013-06-05 아이엠알에이 아메리카, 인코포레이티드. 레이저 기반 재료 가공 장치 및 방법들
WO2011146407A2 (en) * 2010-05-16 2011-11-24 Fianium, Inc. Tunable pulse width laser
US8884184B2 (en) 2010-08-12 2014-11-11 Raydiance, Inc. Polymer tubing laser micromachining
US9120181B2 (en) 2010-09-16 2015-09-01 Coherent, Inc. Singulation of layered materials using selectively variable laser output
US8554037B2 (en) 2010-09-30 2013-10-08 Raydiance, Inc. Hybrid waveguide device in powerful laser systems
US9491441B2 (en) 2011-08-30 2016-11-08 Microsoft Technology Licensing, Llc Method to extend laser depth map range
EP2756342B1 (en) * 2011-09-14 2016-11-30 IMRA America, Inc. Controllable multi-wavelength fiber laser source
US10239160B2 (en) 2011-09-21 2019-03-26 Coherent, Inc. Systems and processes that singulate materials
WO2013106164A1 (en) 2012-01-13 2013-07-18 Imra America, Inc. Methods and systems for laser processing of coated substrates
US8964798B2 (en) 2012-07-12 2015-02-24 Kla-Tencor Corporation Reducing the spectral bandwidth of lasers
US9048632B1 (en) 2013-03-15 2015-06-02 Board Of Trustees Of Michigan State University Ultrafast laser apparatus
US9878399B2 (en) * 2013-03-15 2018-01-30 Jian Liu Method and apparatus for welding dissimilar material with a high energy high power ultrafast laser
US20140276669A1 (en) 2013-03-15 2014-09-18 Amo Development Llc. Short pulse laser with adjustable pulse length
JP6270820B2 (ja) * 2013-03-27 2018-01-31 国立大学法人九州大学 レーザアニール装置
JP5524381B2 (ja) * 2013-03-29 2014-06-18 浜松ホトニクス株式会社 パルス幅変換装置および光増幅システム
WO2015059640A1 (en) 2013-10-21 2015-04-30 Genia Photonics Inc. Synchronized tunable mode-locked lasers
WO2015108991A2 (en) 2014-01-17 2015-07-23 Imra America, Inc. Laser-based modification of transparent materials
DE102014201752A1 (de) * 2014-01-31 2015-08-06 Siemens Aktiengesellschaft Überspannungsschutz mit einer Funkenstrecke
KR20160005802A (ko) * 2014-07-03 2016-01-18 마이크로 인스펙션 주식회사 레이저 가공장치
US9385502B1 (en) 2015-02-05 2016-07-05 Coherent, Inc. Method and apparatus for adjusting pulse parameters in a solid-state chirped-pulse amplifier system
CN105305209B (zh) * 2015-11-04 2018-07-10 南京大学 一种高重复频率的极紫外超快时间分辨光电能谱系统
US11123822B2 (en) * 2016-03-31 2021-09-21 AGC Inc. Manufacturing method for glass substrate, method for forming hole in glass substrate, and apparatus for forming hole in glass substrate
DE102016110947A1 (de) 2016-06-15 2017-12-21 Trumpf Laser Gmbh Dispersionsanpassungseinheit
US10535975B2 (en) * 2017-08-31 2020-01-14 Coherent, Inc. High power sub-400 femtosecond MOPA with solid-state power amplifier
RU2684929C1 (ru) * 2018-03-30 2019-04-16 Автономное учреждение "Технопарк - Мордовия" Устройство сжатия оптического импульса на дифракционных решетках с возможностью регулировки длительности сжатого импульса
DE102018109405B3 (de) 2018-04-19 2019-07-11 Trumpf Laser Gmbh Pulslängenanpassungseinheit, Lasersystem und Verfahren zur Pulslängenanpassung eines Laserpulses
CN109449731B (zh) * 2018-09-20 2019-09-20 深圳市大德激光技术有限公司 一种超快脉冲光纤激光器
CN112615241B (zh) * 2020-12-03 2022-10-14 天津大学 高峰值功率单频窄线宽纳秒三角形短脉冲光纤激光器
DE102021207334A1 (de) 2021-07-12 2023-01-12 Trumpf Laser Gmbh Pulsmodifikationsvorrichtung mit mindestens einer Pulsstreckungs- und/oder Pulskompressionseinrichtung
GB2628662A (en) * 2023-03-31 2024-10-02 Coherent Scotland Ltd B-integral compensation in chirped pulse amplification

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764930A (en) * 1988-01-27 1988-08-16 Intelligent Surgical Lasers Multiwavelength laser source
JP2664187B2 (ja) * 1988-03-14 1997-10-15 日本電信電話株式会社 光パレス圧縮装置
US5084880A (en) * 1990-07-02 1992-01-28 The United States Of America As Represented By The Sectretary Of The Navy Erbium-doped fluorozirconate fiber laser pumped by a diode laser source
US5329398A (en) * 1992-11-05 1994-07-12 Novatec Laser Systems, Inc. Single grating laser pulse stretcher and compressor
CA2179268A1 (en) 1992-11-05 1995-07-27 Ming Lai Single grating laser pulse stretcher and compressor
JPH09508217A (ja) * 1994-01-19 1997-08-19 ノヴァテック レーザー システムズ，インコーポレーテド 単一回折格子レーザパルスのストレッチャおよびコンプレッサ
US5499134A (en) * 1994-08-24 1996-03-12 Imra America Optical pulse amplification using chirped Bragg gratings
US5867305A (en) * 1996-01-19 1999-02-02 Sdl, Inc. Optical amplifier with high energy levels systems providing high peak powers
US5896484A (en) * 1996-02-15 1999-04-20 Corning Incorporated Method of making a symmetrical optical waveguide
JP3649835B2 (ja) 1996-03-18 2005-05-18 独立行政法人科学技術振興機構 光導波路の作製方法
US5847863A (en) * 1996-04-25 1998-12-08 Imra America, Inc. Hybrid short-pulse amplifiers with phase-mismatch compensated pulse stretchers and compressors
GB2316760A (en) * 1996-08-23 1998-03-04 Univ Southampton Fabricating optical waveguide gratings
EP2648039A3 (en) * 1997-03-21 2014-07-09 Imra America, Inc. High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications
JPH10318924A (ja) * 1997-05-19 1998-12-04 Olympus Optical Co Ltd パルスレーザを備えた光学装置
US5987538A (en) * 1997-08-15 1999-11-16 Compaq Computer Corporation Apparatus for initiating generation of an inter-processor interrupt by a peripheral device not directly connected to any of the multi-processor local interrupt controllers
JPH11167036A (ja) * 1997-12-04 1999-06-22 Japan Science & Technology Corp 光導波回路及び非線形光学装置
US6453093B2 (en) * 2000-01-07 2002-09-17 Univerisity Of Southern California Tunable optical dispersion-slope compensation based on a nonlinearly-chirped bragg grating
US5982963A (en) * 1997-12-15 1999-11-09 University Of Southern California Tunable nonlinearly chirped grating
US6272156B1 (en) * 1998-01-28 2001-08-07 Coherent, Inc. Apparatus for ultrashort pulse transportation and delivery
CA2380541A1 (en) 1999-07-29 2001-02-08 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6573026B1 (en) * 1999-07-29 2003-06-03 Corning Incorporated Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses
US6977137B2 (en) * 1999-07-29 2005-12-20 Corning Incorporated Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
US6552301B2 (en) * 2000-01-25 2003-04-22 Peter R. Herman Burst-ultrafast laser machining method
CA2296924A1 (en) 2000-01-25 2001-07-25 Peter R. Herman Burst-ultrafast laser machining method
JP2001236644A (ja) * 2000-02-21 2001-08-31 Central Glass Co Ltd 固体材料の屈折率を変化させる方法
JP3531738B2 (ja) * 2000-02-22 2004-05-31 日本電気株式会社 屈折率の修正方法、屈折率の修正装置、及び光導波路デバイス
US6885683B1 (en) * 2000-05-23 2005-04-26 Imra America, Inc. Modular, high energy, widely-tunable ultrafast fiber source
JP2002252401A (ja) * 2001-02-22 2002-09-06 Oyokoden Lab Co Ltd レーザ装置
US6928224B2 (en) * 2001-03-09 2005-08-09 Corning Incorporated Laser-induced crystallization of transparent glass-ceramics
JP2002372731A (ja) * 2001-06-15 2002-12-26 Mitsubishi Cable Ind Ltd 波長変換用、光演算用素子
US6768850B2 (en) * 2001-08-16 2004-07-27 Translume, Inc. Method of index trimming a waveguide and apparatus formed of the same
WO2003046625A1 (en) 2001-11-28 2003-06-05 Corning Incorporated Manipulating the size of waveguides written into substrates using femtosecond laser pulses
US20030099452A1 (en) * 2001-11-28 2003-05-29 Borrelli Nicholas F. Manipulating the size of waveguides written into substrates using femtosecond laser pulses
US6853785B2 (en) * 2001-12-14 2005-02-08 3M Innovative Properties Co. Index modulation in glass using a femtosecond laser
GB2385460B (en) * 2002-02-18 2004-04-14 Univ Southampton "Pulsed light sources"
US6760356B2 (en) 2002-04-08 2004-07-06 The Regents Of The University Of California Application of Yb:YAG short pulse laser system
US6739728B2 (en) * 2002-04-08 2004-05-25 The Regents Of The University Of California Short pulse laser stretcher-compressor using a single common reflective grating
DE10222491A1 (de) 2002-05-14 2003-11-27 Univ Schiller Jena Verfahren zur gezielten Erzeugung von Brechzahlmodifikationen im Volumen transparenter Materialien mittels Laserstrahlung und Vorrichtung zur Durchführung des Verfahrens
US6950591B2 (en) 2002-05-16 2005-09-27 Corning Incorporated Laser-written cladding for waveguide formations in glass
CA2396831A1 (en) 2002-08-02 2004-02-02 Femtonics Corporation Microstructuring optical wave guide devices with femtosecond optical pulses
JP2004295066A (ja) * 2002-08-27 2004-10-21 Fujikura Ltd 光導波路の製造方法
JP3987787B2 (ja) * 2002-11-25 2007-10-10 日東電工株式会社 三次元ポリイミド光導波路の製造方法
US7218443B2 (en) * 2003-02-25 2007-05-15 Toptica Photonics Ag Generation of tunable light pulses
US6979798B2 (en) 2003-03-07 2005-12-27 Gsi Lumonics Corporation Laser system and method for material processing with ultra fast lasers
US7257302B2 (en) * 2003-06-03 2007-08-14 Imra America, Inc. In-line, high energy fiber chirped pulse amplification system
US7414780B2 (en) * 2003-06-30 2008-08-19 Imra America, Inc. All-fiber chirped pulse amplification systems
US7486705B2 (en) * 2004-03-31 2009-02-03 Imra America, Inc. Femtosecond laser processing system with process parameters, controls and feedback
US7684450B2 (en) * 2004-12-20 2010-03-23 Imra America, Inc. Pulsed laser source with adjustable grating compressor
US7424185B2 (en) * 2005-01-24 2008-09-09 University Of Central Florida Research Foundation, Inc. Stretching and compression of laser pulses by means of high efficiency volume diffractive gratings with variable periods in photo-thermo-refractive glass

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