JP2008103706A5 - - Google Patents

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Publication number
JP2008103706A5
JP2008103706A5 JP2007244092A JP2007244092A JP2008103706A5 JP 2008103706 A5 JP2008103706 A5 JP 2008103706A5 JP 2007244092 A JP2007244092 A JP 2007244092A JP 2007244092 A JP2007244092 A JP 2007244092A JP 2008103706 A5 JP2008103706 A5 JP 2008103706A5
Authority
JP
Japan
Prior art keywords
insulating film
film
interlayer insulating
region
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007244092A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008103706A (ja
JP5350616B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007244092A priority Critical patent/JP5350616B2/ja
Priority claimed from JP2007244092A external-priority patent/JP5350616B2/ja
Publication of JP2008103706A publication Critical patent/JP2008103706A/ja
Publication of JP2008103706A5 publication Critical patent/JP2008103706A5/ja
Application granted granted Critical
Publication of JP5350616B2 publication Critical patent/JP5350616B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007244092A 2006-09-22 2007-09-20 半導体装置 Expired - Fee Related JP5350616B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007244092A JP5350616B2 (ja) 2006-09-22 2007-09-20 半導体装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006256902 2006-09-22
JP2006256902 2006-09-22
JP2007244092A JP5350616B2 (ja) 2006-09-22 2007-09-20 半導体装置

Publications (3)

Publication Number Publication Date
JP2008103706A JP2008103706A (ja) 2008-05-01
JP2008103706A5 true JP2008103706A5 (enExample) 2010-10-28
JP5350616B2 JP5350616B2 (ja) 2013-11-27

Family

ID=39437761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007244092A Expired - Fee Related JP5350616B2 (ja) 2006-09-22 2007-09-20 半導体装置

Country Status (1)

Country Link
JP (1) JP5350616B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010035627A1 (en) * 2008-09-25 2010-04-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP2011029610A (ja) * 2009-06-26 2011-02-10 Semiconductor Energy Lab Co Ltd 半導体装置及びその作製方法
US9287405B2 (en) * 2011-10-13 2016-03-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising oxide semiconductor
CN107134496B (zh) * 2016-02-29 2019-05-31 昆山工研院新型平板显示技术中心有限公司 薄膜晶体管及其制造方法、显示面板及显示装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5019677B2 (ja) * 2001-06-25 2012-09-05 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
JP4233307B2 (ja) * 2002-11-05 2009-03-04 シャープ株式会社 アクティブマトリクス基板および表示装置
JP5046529B2 (ja) * 2005-02-25 2012-10-10 株式会社半導体エネルギー研究所 半導体装置

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