JP2008089613A5 - - Google Patents

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Publication number
JP2008089613A5
JP2008089613A5 JP2007335609A JP2007335609A JP2008089613A5 JP 2008089613 A5 JP2008089613 A5 JP 2008089613A5 JP 2007335609 A JP2007335609 A JP 2007335609A JP 2007335609 A JP2007335609 A JP 2007335609A JP 2008089613 A5 JP2008089613 A5 JP 2008089613A5
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JP
Japan
Prior art keywords
sample
chamber
cartridge
atmosphere
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007335609A
Other languages
English (en)
Japanese (ja)
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JP2008089613A (ja
JP4508239B2 (ja
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Priority to JP2007335609A priority Critical patent/JP4508239B2/ja
Priority claimed from JP2007335609A external-priority patent/JP4508239B2/ja
Publication of JP2008089613A publication Critical patent/JP2008089613A/ja
Publication of JP2008089613A5 publication Critical patent/JP2008089613A5/ja
Application granted granted Critical
Publication of JP4508239B2 publication Critical patent/JP4508239B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007335609A 2007-12-27 2007-12-27 試料作製装置 Expired - Lifetime JP4508239B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005362596A Division JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Publications (3)

Publication Number Publication Date
JP2008089613A JP2008089613A (ja) 2008-04-17
JP2008089613A5 true JP2008089613A5 (cg-RX-API-DMAC10.html) 2008-11-13
JP4508239B2 JP4508239B2 (ja) 2010-07-21

Family

ID=39373888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007335609A Expired - Lifetime JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Country Status (1)

Country Link
JP (1) JP4508239B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113804909B (zh) * 2020-06-12 2023-12-12 中国科学院苏州纳米技术与纳米仿生研究所 真空互联样品转移组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3553318B2 (ja) * 1997-05-20 2004-08-11 日本電子株式会社 ホルダ保持装置
JP3633325B2 (ja) * 1998-11-25 2005-03-30 株式会社日立製作所 試料作製装置および試料作製方法
JP3851464B2 (ja) * 1999-03-04 2006-11-29 株式会社日立製作所 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

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