JP2008089351A5 - - Google Patents

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Publication number
JP2008089351A5
JP2008089351A5 JP2006268478A JP2006268478A JP2008089351A5 JP 2008089351 A5 JP2008089351 A5 JP 2008089351A5 JP 2006268478 A JP2006268478 A JP 2006268478A JP 2006268478 A JP2006268478 A JP 2006268478A JP 2008089351 A5 JP2008089351 A5 JP 2008089351A5
Authority
JP
Japan
Prior art keywords
inspection
recipe
wafer
appearance
condition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006268478A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008089351A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006268478A priority Critical patent/JP2008089351A/ja
Priority claimed from JP2006268478A external-priority patent/JP2008089351A/ja
Priority to CNA2007101616576A priority patent/CN101158649A/zh
Priority to US11/906,072 priority patent/US20080079932A1/en
Priority to TW096136196A priority patent/TW200822260A/zh
Publication of JP2008089351A publication Critical patent/JP2008089351A/ja
Publication of JP2008089351A5 publication Critical patent/JP2008089351A5/ja
Withdrawn legal-status Critical Current

Links

JP2006268478A 2006-09-29 2006-09-29 外観検査装置及び外観検査方法 Withdrawn JP2008089351A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006268478A JP2008089351A (ja) 2006-09-29 2006-09-29 外観検査装置及び外観検査方法
CNA2007101616576A CN101158649A (zh) 2006-09-29 2007-09-27 外观检查装置及外观检查方法
US11/906,072 US20080079932A1 (en) 2006-09-29 2007-09-28 Visual inspection apparatus and visual inspection method
TW096136196A TW200822260A (en) 2006-09-29 2007-09-28 Visual inspection apparatus and visual inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006268478A JP2008089351A (ja) 2006-09-29 2006-09-29 外観検査装置及び外観検査方法

Publications (2)

Publication Number Publication Date
JP2008089351A JP2008089351A (ja) 2008-04-17
JP2008089351A5 true JP2008089351A5 (enExample) 2009-01-15

Family

ID=39260790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006268478A Withdrawn JP2008089351A (ja) 2006-09-29 2006-09-29 外観検査装置及び外観検査方法

Country Status (4)

Country Link
US (1) US20080079932A1 (enExample)
JP (1) JP2008089351A (enExample)
CN (1) CN101158649A (enExample)
TW (1) TW200822260A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007024525B4 (de) * 2007-03-19 2009-05-28 Vistec Semiconductor Systems Gmbh Vorrichtung und Verfahren zur Bewertung von Defekten am Randbereich eines Wafers
JP2010002216A (ja) * 2008-06-18 2010-01-07 Kobelco Kaken:Kk 端面観察装置
US20110199480A1 (en) * 2009-07-09 2011-08-18 Camtek Ltd. Optical inspection system using multi-facet imaging
US8786850B2 (en) * 2012-10-29 2014-07-22 Kla-Tencor Corporation Illumination energy management in surface inspection
CN110490458A (zh) 2013-03-20 2019-11-22 生活时间品牌公司 一种移动质量管理检查系统
CN105472252B (zh) * 2015-12-31 2018-12-21 天津远度科技有限公司 一种无人机获取图像的系统及方法
TWI628428B (zh) * 2016-12-16 2018-07-01 由田新技股份有限公司 多視角影像擷取裝置、及其多視角影像檢測設備
CN108508031A (zh) * 2017-02-28 2018-09-07 上海微电子装备（集团）股份有限公司 一种双面检测装置及检测方法
CN114088724B (zh) * 2021-11-20 2023-08-18 深圳市北科检测科技有限公司 一种显示屏边缘缺陷检测装置
CN114113140B (zh) * 2021-11-26 2023-07-07 深圳市北科检测科技有限公司 一种多工位led灯板检测装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416791B1 (ko) * 2001-03-19 2004-01-31 삼성전자주식회사 반도체 웨이퍼 검사용 현미경장치 및 그 검사방법
JP3629244B2 (ja) * 2002-02-19 2005-03-16 本多エレクトロン株式会社 ウエーハ用検査装置
JP2004227671A (ja) * 2003-01-23 2004-08-12 Tdk Corp 光記録媒体製造装置

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