JP2008081630A - 摺動部材 - Google Patents
摺動部材 Download PDFInfo
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- JP2008081630A JP2008081630A JP2006264149A JP2006264149A JP2008081630A JP 2008081630 A JP2008081630 A JP 2008081630A JP 2006264149 A JP2006264149 A JP 2006264149A JP 2006264149 A JP2006264149 A JP 2006264149A JP 2008081630 A JP2008081630 A JP 2008081630A
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- dlc film
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- hydrogen content
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- 229910052799 carbon Inorganic materials 0.000 claims abstract description 52
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 73
- 229910052739 hydrogen Inorganic materials 0.000 claims description 73
- 239000001257 hydrogen Substances 0.000 claims description 73
- 239000000314 lubricant Substances 0.000 claims description 20
- 150000003752 zinc compounds Chemical class 0.000 claims description 5
- 239000005078 molybdenum compound Substances 0.000 claims description 3
- 150000002752 molybdenum compounds Chemical class 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 161
- 238000004544 sputter deposition Methods 0.000 abstract description 22
- 239000011651 chromium Substances 0.000 abstract description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052804 chromium Inorganic materials 0.000 abstract description 2
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 239000011229 interlayer Substances 0.000 abstract 2
- 125000004122 cyclic group Chemical group 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 235000019589 hardness Nutrition 0.000 description 124
- 239000000523 sample Substances 0.000 description 39
- 238000007373 indentation Methods 0.000 description 20
- 239000002344 surface layer Substances 0.000 description 19
- 239000000654 additive Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 11
- 230000000996 additive effect Effects 0.000 description 11
- 229910052750 molybdenum Inorganic materials 0.000 description 11
- 239000011733 molybdenum Substances 0.000 description 11
- 239000004519 grease Substances 0.000 description 9
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 8
- 229910052725 zinc Inorganic materials 0.000 description 8
- 239000011701 zinc Substances 0.000 description 8
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 7
- 238000003475 lamination Methods 0.000 description 7
- KHYKFSXXGRUKRE-UHFFFAOYSA-J molybdenum(4+) tetracarbamodithioate Chemical compound C(N)([S-])=S.[Mo+4].C(N)([S-])=S.C(N)([S-])=S.C(N)([S-])=S KHYKFSXXGRUKRE-UHFFFAOYSA-J 0.000 description 7
- 239000011593 sulfur Substances 0.000 description 7
- 229910052717 sulfur Inorganic materials 0.000 description 7
- 239000010687 lubricating oil Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000921 elemental analysis Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- MIMDHDXOBDPUQW-UHFFFAOYSA-N dioctyl decanedioate Chemical group CCCCCCCCOC(=O)CCCCCCCCC(=O)OCCCCCCCC MIMDHDXOBDPUQW-UHFFFAOYSA-N 0.000 description 3
- 238000004453 electron probe microanalysis Methods 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 230000001603 reducing effect Effects 0.000 description 3
- 238000009958 sewing Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- WMYJOZQKDZZHAC-UHFFFAOYSA-H trizinc;dioxido-sulfanylidene-sulfido-$l^{5}-phosphane Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([S-])=S.[O-]P([O-])([S-])=S WMYJOZQKDZZHAC-UHFFFAOYSA-H 0.000 description 2
- 239000005069 Extreme pressure additive Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000002199 base oil Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 239000003879 lubricant additive Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
- Lubricants (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【解決手段】基材5上へ、クロム層からなる中間層6を設け、当該中間層6上へは、ダイヤモンドライクカーボンからなるDLC多層膜10をUBMスパッタリング法により形成し、当該DLC多層膜10は、傾斜層12および傾斜層12側から高硬度層と低硬度層とが周期的な構造を有する積層構造層11を形成することにより、ダイヤモンドライクカーボン層の摺動部材への密着性を高め、且つ、摩擦係数を低くして、優れた摺動性を実現する。
【選択図】図1
Description
尚、潤滑剤(グリス)の添加剤としては、ジアルキルジチオリン酸亜鉛(ZnDTP)
5 基材
6 中間層
10 DLC多層膜
11 積層構造層
12 傾斜層
13 高硬度層
14 低硬度層
15 高硬度層
16 低硬度層
17 高硬度層
18 低硬度層
19 高硬度層
20 低硬度層
21 高硬度層
22 低硬度層
Claims (4)
- 基材と、
当該基材上に設けられた金属を含む中間層と、
当該中間層上に設けられ、当該中間層から離れるに従って、硬度が連続的又は段階的に増加するダイヤモンドライクカーボン層からなる第1ダイヤモンドライクカーボン層と、
当該第1ダイヤモンドライクカーボン層上に設けられ、所定硬度のダイヤモンドライクカーボン層からなる低硬度層と当該低硬度層より高い硬度のダイヤモンドライクカーボン層からなる高硬度層とが、前記第1ダイヤモンドライクカーボン層上側から、高硬度層、低硬度層の順に交互に積層された第2ダイヤモンドライクカーボン層とを備え、
前記第1ダイヤモンドライクカーボン層及び第2ダイヤモンドライクカーボン層中の水素含有量が20at%〜50at%であることを特徴とする摺動部材。 - 前記第1ダイヤモンドライクカーボン層の厚みは、50nm〜700nmであることを特徴とする請求項1に記載の摺動部材。
- 前記第2ダイヤモンドライクカーボン層の最表面は、前記低硬度層から構成され、
当該最表面の低硬度層の水素含有量が20at%〜50at%であることを特徴とする請求項1又は2に記載の摺動部材。 - 前記第2ダイヤモンドライクカーボン層の最表面に塗布される潤滑剤には、有機モリブデン化合物及び有機亜鉛化合物を含むことを特徴とする請求項1乃至3の何れかに記載の摺動部材。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006264149A JP5109320B2 (ja) | 2006-09-28 | 2006-09-28 | 摺動部材 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006264149A JP5109320B2 (ja) | 2006-09-28 | 2006-09-28 | 摺動部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008081630A true JP2008081630A (ja) | 2008-04-10 |
JP5109320B2 JP5109320B2 (ja) | 2012-12-26 |
Family
ID=39352808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006264149A Expired - Fee Related JP5109320B2 (ja) | 2006-09-28 | 2006-09-28 | 摺動部材 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5109320B2 (ja) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010126419A (ja) * | 2008-11-28 | 2010-06-10 | Kanagawa Prefecture | Dlc膜、dlcコーティング部材及びその製造方法 |
JP2010215950A (ja) * | 2009-03-16 | 2010-09-30 | Toyota Motor Corp | 摺動部材及びその製造方法 |
WO2012073717A1 (ja) * | 2010-11-30 | 2012-06-07 | 本田技研工業株式会社 | 摺動構造部材 |
CN103080003A (zh) * | 2010-11-09 | 2013-05-01 | 株式会社尼康 | 碳薄膜、光学元件成形用模具及光学元件的制造方法 |
US20130309486A1 (en) * | 2012-05-15 | 2013-11-21 | Beijing Zhongao Huicheng Biology-Tech Material Co., Ltd. | Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof |
JP2014513173A (ja) * | 2011-04-07 | 2014-05-29 | シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ | 潤滑剤組成物及び潤滑剤組成物を使用する方法 |
WO2014111294A1 (de) * | 2013-01-21 | 2014-07-24 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere kolbenring, mit einer beschichtung |
US9068597B2 (en) | 2011-12-19 | 2015-06-30 | Minebea Co., Ltd. | Sliding member and fluid dynamic pressure bearing apparatus |
US20150226260A1 (en) * | 2014-02-10 | 2015-08-13 | Daido Metal Company Ltd. | Slide member |
US9121548B2 (en) | 2011-04-15 | 2015-09-01 | Kobe Steel, Ltd. | Sliding member |
WO2016098217A1 (ja) * | 2014-12-17 | 2016-06-23 | オーエスジー株式会社 | 非晶質炭素被膜および非晶質炭素被膜被覆工具 |
US20170029935A1 (en) * | 2014-04-23 | 2017-02-02 | Zhongao Huicheng Technology Co., Ltd. | Artificial joint cup, magnetic control sputtering coating film device and preparation method thereof |
JP2017160899A (ja) * | 2016-03-08 | 2017-09-14 | 儀徴亜新科双環活塞環有限公司 | ピストンリング表面用ダイヤモンドライクカーボンコーティング層、ピストンリング及び製造プロセス |
JP6357606B1 (ja) * | 2017-03-31 | 2018-07-11 | 株式会社リケン | 摺動部材及びピストンリング |
JP6357607B1 (ja) * | 2017-03-31 | 2018-07-11 | 株式会社リケン | 摺動部材及びピストンリング |
US10030207B2 (en) | 2014-07-11 | 2018-07-24 | Toyota Jidosha Kabushiki Kaisha | Sliding machine |
WO2018179709A1 (ja) * | 2017-03-31 | 2018-10-04 | 株式会社リケン | 摺動部材及びピストンリング |
WO2018179708A1 (ja) * | 2017-03-31 | 2018-10-04 | 株式会社リケン | 摺動部材及びピストンリング |
CN113551034A (zh) * | 2021-07-28 | 2021-10-26 | 安庆帝伯格茨活塞环有限公司 | 一种双过渡层类金刚石涂层活塞环 |
CN117987773A (zh) * | 2024-02-01 | 2024-05-07 | 仪征亚新科双环活塞环有限公司 | 一种耐磨低摩擦涂层活塞环及其制备方法 |
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JP2010126419A (ja) * | 2008-11-28 | 2010-06-10 | Kanagawa Prefecture | Dlc膜、dlcコーティング部材及びその製造方法 |
JP2010215950A (ja) * | 2009-03-16 | 2010-09-30 | Toyota Motor Corp | 摺動部材及びその製造方法 |
US20130221548A1 (en) * | 2010-11-09 | 2013-08-29 | Nikon Corporation | Carbon thin film, mold for molding optical element, and method for manufacturing optical element |
CN103080003A (zh) * | 2010-11-09 | 2013-05-01 | 株式会社尼康 | 碳薄膜、光学元件成形用模具及光学元件的制造方法 |
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JP5730902B2 (ja) * | 2010-11-30 | 2015-06-10 | 本田技研工業株式会社 | 摺動構造部材 |
EP2647738A1 (en) * | 2010-11-30 | 2013-10-09 | Honda Motor Co., Ltd. | Sliding structural members |
EP2647738A4 (en) * | 2010-11-30 | 2014-08-13 | Honda Motor Co Ltd | SLIDING STRUCTURAL ELEMENTS |
US8895488B2 (en) | 2010-11-30 | 2014-11-25 | Honda Motor Co., Ltd | Sliding structural members |
CN103228817A (zh) * | 2010-11-30 | 2013-07-31 | 本田技研工业株式会社 | 滑动结构部件 |
WO2012073717A1 (ja) * | 2010-11-30 | 2012-06-07 | 本田技研工業株式会社 | 摺動構造部材 |
JP2014513173A (ja) * | 2011-04-07 | 2014-05-29 | シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ | 潤滑剤組成物及び潤滑剤組成物を使用する方法 |
US9121548B2 (en) | 2011-04-15 | 2015-09-01 | Kobe Steel, Ltd. | Sliding member |
US9068597B2 (en) | 2011-12-19 | 2015-06-30 | Minebea Co., Ltd. | Sliding member and fluid dynamic pressure bearing apparatus |
US20130309486A1 (en) * | 2012-05-15 | 2013-11-21 | Beijing Zhongao Huicheng Biology-Tech Material Co., Ltd. | Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof |
US9799498B2 (en) | 2012-05-15 | 2017-10-24 | Zhongao Huicheng Technology Co., Ltd. | Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof |
US9657390B2 (en) | 2012-05-15 | 2017-05-23 | Zhongao Huicheng Technology Co., Ltd. | Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof |
US9127347B2 (en) * | 2012-05-15 | 2015-09-08 | Zhongao Huicheng Technology Co., Ltd. | Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof |
US9488275B2 (en) | 2013-01-21 | 2016-11-08 | Federal-Mogul Burscheid Gmbh | Sliding element, in particular a piston ring, having a coating |
CN104919086A (zh) * | 2013-01-21 | 2015-09-16 | 辉门布尔沙伊德有限公司 | 滑动元件,特别是一种具有涂层的活塞环 |
WO2014111294A1 (de) * | 2013-01-21 | 2014-07-24 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere kolbenring, mit einer beschichtung |
RU2649490C2 (ru) * | 2013-01-21 | 2018-04-03 | Федерал-Могул Буршайд Гмбх | Скользящий элемент, в частности поршневое кольцо, с покрытием |
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