JP2008064666A5 - - Google Patents

Download PDF

Info

Publication number
JP2008064666A5
JP2008064666A5 JP2006244154A JP2006244154A JP2008064666A5 JP 2008064666 A5 JP2008064666 A5 JP 2008064666A5 JP 2006244154 A JP2006244154 A JP 2006244154A JP 2006244154 A JP2006244154 A JP 2006244154A JP 2008064666 A5 JP2008064666 A5 JP 2008064666A5
Authority
JP
Japan
Prior art keywords
substrate
stage
inspection apparatus
support member
appearance inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006244154A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008064666A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006244154A priority Critical patent/JP2008064666A/ja
Priority claimed from JP2006244154A external-priority patent/JP2008064666A/ja
Priority to KR1020070089794A priority patent/KR20080023142A/ko
Priority to TW096133050A priority patent/TW200822147A/zh
Priority to CNA2007101492022A priority patent/CN101140245A/zh
Publication of JP2008064666A publication Critical patent/JP2008064666A/ja
Publication of JP2008064666A5 publication Critical patent/JP2008064666A5/ja
Pending legal-status Critical Current

Links

JP2006244154A 2006-09-08 2006-09-08 外観検査装置の基板保持機構 Pending JP2008064666A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006244154A JP2008064666A (ja) 2006-09-08 2006-09-08 外観検査装置の基板保持機構
KR1020070089794A KR20080023142A (ko) 2006-09-08 2007-09-05 외관 검사용 기판 유지 장치
TW096133050A TW200822147A (en) 2006-09-08 2007-09-05 Substrate holding device for visual inspection
CNA2007101492022A CN101140245A (zh) 2006-09-08 2007-09-06 外观检查用基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006244154A JP2008064666A (ja) 2006-09-08 2006-09-08 外観検査装置の基板保持機構

Publications (2)

Publication Number Publication Date
JP2008064666A JP2008064666A (ja) 2008-03-21
JP2008064666A5 true JP2008064666A5 (enExample) 2009-10-15

Family

ID=39192283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006244154A Pending JP2008064666A (ja) 2006-09-08 2006-09-08 外観検査装置の基板保持機構

Country Status (4)

Country Link
JP (1) JP2008064666A (enExample)
KR (1) KR20080023142A (enExample)
CN (1) CN101140245A (enExample)
TW (1) TW200822147A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100942066B1 (ko) * 2008-04-30 2010-02-11 주식회사 테라세미콘 홀더 스테이지
JP2011141127A (ja) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc ガラス板の欠陥部分の目視検査方法及び目視検査装置
CN102364332B (zh) * 2011-06-10 2014-07-30 乐金化学(南京)信息电子材料有限公司 偏光板移动检测装置及方法
CN107064171A (zh) * 2017-01-26 2017-08-18 江苏东旭亿泰智能装备有限公司 检查组装件、宏观检查系统以及相关的检查方法
CN106918934A (zh) * 2017-03-27 2017-07-04 武汉华星光电技术有限公司 基板宏观检查机
US11688618B2 (en) 2020-12-10 2023-06-27 Applied Materials, Inc. Method and apparatus for continuous substrate cassette loading
US11945660B2 (en) 2021-08-09 2024-04-02 Applied Materials, Inc. Linear sorter using vacuum belt

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036971A (ja) * 1989-06-02 1991-01-14 Fuji Photo Film Co Ltd コンバータレンズ内蔵型ビデオカメラ
JP3636235B2 (ja) * 1996-01-08 2005-04-06 オリンパス株式会社 基板ホルダ
JPH1194755A (ja) * 1997-09-24 1999-04-09 Olympus Optical Co Ltd 基板の振動防止機構
JP2003270155A (ja) * 2002-03-15 2003-09-25 Olympus Optical Co Ltd 基板保持装置及び検査装置
JP4243837B2 (ja) * 2003-03-14 2009-03-25 株式会社日立ハイテクノロジーズ 透明基板の表面検査方法及び検査装置

Similar Documents

Publication Publication Date Title
DE502006005750D1 (de) Labor-roboter-anordnung
DE602005008138D1 (de) Vorflügel für ein Flugzeug und entsprechende Verfahren
CN204758549U (zh) 一种两轴驱动的可调探头角度的水浸超声标定装置
ATE539988T1 (de) Vorrichtung zum versetzen von behältern
JP2008064666A5 (enExample)
GB201316002D0 (en) Method and device for assembling or disassembling a structure under water
JP2005531765A5 (enExample)
CN204229079U (zh) 一种大尺寸显示模组组装及检测设备
ATE482084T1 (de) Siebdruckmaschine und verfahren
JP2013257409A5 (enExample)
JP2009537341A (ja) 半自動クランプ装置
TW200736777A (en) Bonding sheet applying apparatus and method
CN205670179U (zh) 一种导通测试机构
CN203031566U (zh) 翻板装置
CN106370108B (zh) 一种fpc尺寸快速测量装置
CN208688800U (zh) 一种用于检测冰箱门体开关耐久的试验装置
ATE517053T1 (de) Greifvorrichtung zum bewegen von verbrauchsprodukten, insbesondere eierkartons
DE502007003254D1 (de) Vorrichtung zum führen eines metallbandes und verfahren zu dessen betrieb
JP2010085398A5 (enExample)
CN109249684A (zh) 印刷装置以及印刷方法
CN201110907Y (zh) 一种显微镜移动载物台
CN202230031U (zh) 一种光罩检测设备
JP2006317437A5 (enExample)
CN201871386U (zh) 试验台翻转机构
CN201242588Y (zh) 开关测试结构