JP2008054277A5 - - Google Patents

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Publication number
JP2008054277A5
JP2008054277A5 JP2007045045A JP2007045045A JP2008054277A5 JP 2008054277 A5 JP2008054277 A5 JP 2008054277A5 JP 2007045045 A JP2007045045 A JP 2007045045A JP 2007045045 A JP2007045045 A JP 2007045045A JP 2008054277 A5 JP2008054277 A5 JP 2008054277A5
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JP
Japan
Prior art keywords
film
piezoelectric substrate
expansion coefficient
linear expansion
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007045045A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008054277A (ja
JP4247282B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007045045A priority Critical patent/JP4247282B2/ja
Priority claimed from JP2007045045A external-priority patent/JP4247282B2/ja
Priority to US11/880,168 priority patent/US7569976B2/en
Priority to EP07014595.8A priority patent/EP1885062B1/en
Publication of JP2008054277A publication Critical patent/JP2008054277A/ja
Publication of JP2008054277A5 publication Critical patent/JP2008054277A5/ja
Application granted granted Critical
Publication of JP4247282B2 publication Critical patent/JP4247282B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007045045A 2006-07-27 2007-02-26 圧電基板及びその製造方法 Active JP4247282B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007045045A JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法
US11/880,168 US7569976B2 (en) 2006-07-27 2007-07-20 Piezo-electric substrate and manufacturing method of the same
EP07014595.8A EP1885062B1 (en) 2006-07-27 2007-07-25 Piezo-electric substrate and manufacturing method of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006204740 2006-07-27
JP2007045045A JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008262370A Division JP4773495B2 (ja) 2006-07-27 2008-10-09 圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2008054277A JP2008054277A (ja) 2008-03-06
JP2008054277A5 true JP2008054277A5 (https=) 2008-08-21
JP4247282B2 JP4247282B2 (ja) 2009-04-02

Family

ID=39237840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007045045A Active JP4247282B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Country Status (1)

Country Link
JP (1) JP4247282B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010007805A1 (ja) * 2008-07-17 2010-01-21 株式会社 村田製作所 分波器
JP6907026B2 (ja) * 2016-05-30 2021-07-21 日東電工株式会社 透明電極付き圧電フィルムおよび圧力センサ
JP2017216450A (ja) * 2016-05-30 2017-12-07 日東電工株式会社 圧電フィルム
JP7577559B2 (ja) * 2021-02-15 2024-11-05 太陽誘電株式会社 弾性波デバイス、ウエハ、フィルタおよびマルチプレクサ

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