JP2008054276A5 - - Google Patents

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Publication number
JP2008054276A5
JP2008054276A5 JP2007045044A JP2007045044A JP2008054276A5 JP 2008054276 A5 JP2008054276 A5 JP 2008054276A5 JP 2007045044 A JP2007045044 A JP 2007045044A JP 2007045044 A JP2007045044 A JP 2007045044A JP 2008054276 A5 JP2008054276 A5 JP 2008054276A5
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JP
Japan
Prior art keywords
film
piezoelectric substrate
base material
linear expansion
substrate according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007045044A
Other languages
English (en)
Japanese (ja)
Other versions
JP4247281B2 (ja
JP2008054276A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007045044A priority Critical patent/JP4247281B2/ja
Priority claimed from JP2007045044A external-priority patent/JP4247281B2/ja
Priority to US11/880,168 priority patent/US7569976B2/en
Priority to EP07014595.8A priority patent/EP1885062B1/en
Publication of JP2008054276A publication Critical patent/JP2008054276A/ja
Publication of JP2008054276A5 publication Critical patent/JP2008054276A5/ja
Application granted granted Critical
Publication of JP4247281B2 publication Critical patent/JP4247281B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007045044A 2006-07-27 2007-02-26 圧電基板及びその製造方法 Active JP4247281B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007045044A JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法
US11/880,168 US7569976B2 (en) 2006-07-27 2007-07-20 Piezo-electric substrate and manufacturing method of the same
EP07014595.8A EP1885062B1 (en) 2006-07-27 2007-07-25 Piezo-electric substrate and manufacturing method of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006204739 2006-07-27
JP2007045044A JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008262369A Division JP4773494B2 (ja) 2006-07-27 2008-10-09 圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2008054276A JP2008054276A (ja) 2008-03-06
JP2008054276A5 true JP2008054276A5 (https=) 2008-08-21
JP4247281B2 JP4247281B2 (ja) 2009-04-02

Family

ID=39237839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007045044A Active JP4247281B2 (ja) 2006-07-27 2007-02-26 圧電基板及びその製造方法

Country Status (1)

Country Link
JP (1) JP4247281B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8997320B2 (en) 2008-01-24 2015-04-07 Murata Manufacturing Co., Ltd. Method for manufacturing acoustic wave device
JP5150648B2 (ja) * 2008-01-25 2013-02-20 株式会社村田製作所 弾性波素子及びその製造方法
JP4636292B2 (ja) 2008-08-27 2011-02-23 株式会社村田製作所 電子部品及び電子部品の製造方法
JP5304386B2 (ja) * 2009-03-27 2013-10-02 株式会社村田製作所 弾性表面波素子の製造方法
WO2014027538A1 (ja) * 2012-08-17 2014-02-20 日本碍子株式会社 複合基板，弾性表面波デバイス及び複合基板の製造方法
JP6076076B2 (ja) * 2012-12-21 2017-02-08 日東電工株式会社 組織再生促進剤
FR3079661B1 (fr) * 2018-03-29 2026-01-02 Soitec Silicon On Insulator Procede de fabrication d'un substrat pour filtre radiofrequence
JP7439415B2 (ja) * 2019-08-28 2024-02-28 住友金属鉱山株式会社 圧電性基板、圧電性基板の製造方法、及び複合基板
JP7577559B2 (ja) * 2021-02-15 2024-11-05 太陽誘電株式会社 弾性波デバイス、ウエハ、フィルタおよびマルチプレクサ

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