JP2008041910A - Wiring substrate and multicavity wiring substrate - Google Patents

Wiring substrate and multicavity wiring substrate Download PDF

Info

Publication number
JP2008041910A
JP2008041910A JP2006213790A JP2006213790A JP2008041910A JP 2008041910 A JP2008041910 A JP 2008041910A JP 2006213790 A JP2006213790 A JP 2006213790A JP 2006213790 A JP2006213790 A JP 2006213790A JP 2008041910 A JP2008041910 A JP 2008041910A
Authority
JP
Japan
Prior art keywords
substrate body
heat radiating
hole
radiating member
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006213790A
Other languages
Japanese (ja)
Inventor
Makoto Nagai
誠 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2006213790A priority Critical patent/JP2008041910A/en
Publication of JP2008041910A publication Critical patent/JP2008041910A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Structure Of Printed Boards (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wiring substrate or the like which has a heat radiator the side surface of which is reliably plated with a metal and has favorable positioning accuracy in junction between a main body of the substrate and the heat radiator. <P>SOLUTION: A wiring substrate 1a comprises a substrate main body 2 having a front surface 3 and a rear surface 4, and also having a through-hole 5 passed through the main body between the surfaces 3 and 4, and a heat radiator 10a having a column 11 and a base 17. The column 11 is inserted in the through-hole 5 of the substrate main body 2, and has an element mount a on an upper surface 12. The base 17 contacts with the rear surface 4 of the substrate main body 2 with an Ag brazing material (joining material) 20 provided therebetween. The side face 13 of the column 11 of the heat radiator 10a is spaced from the inner wall of the through-hole 5 of the substrate main body 2 to be wider than the inner wall on the side of the front surface 3 of the main body 2, and to be closer thereto on the side of the rear surface 4 of the main body 2. That is, a gap (s) is formed to be wider on the side of the front surface 3 of the main body 2, and to be narrower on the side of the rear surface 4 between the side face 13 of the column 11 of the heat radiator 10a and the inner wall of the through-hole 5 of the main body 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、発光素子やICチップなどの電子部品を柱部の上面の素子搭載部に搭載する放熱部材と、かかる放熱部材の柱部を挿入して固着する基板本体と、を備えた配線基板、およびかかる配線基板を複数個配列した多数個取り配線基板に関する。   The present invention relates to a wiring board comprising: a heat dissipating member for mounting an electronic component such as a light emitting element or an IC chip on an element mounting portion on the upper surface of a pillar portion; and a substrate body for inserting and fixing the pillar portion of the heat dissipating member. And a multi-cavity wiring board in which a plurality of such wiring boards are arranged.

セラミックからなるパッケージ本体の貫通孔に、金属製の放熱部材の上段部を挿入し、かかるパッケージ本体と放熱部材とを固着する際に、放熱部材の上段部と上記貫通孔の内側面との間に大小2種類の幅の隙間を形成して、洗浄液の環流を容易にし且つメッキ液の残留を防止した電子部品用パッケージが提案されている(例えば、特許文献1参照)。   When the upper part of the metal heat dissipating member is inserted into the through hole of the package body made of ceramic and the package body and the heat dissipating member are fixed, the space between the upper part of the heat dissipating member and the inner surface of the through hole is An electronic component package has been proposed in which gaps of two sizes are formed to facilitate the circulation of the cleaning liquid and prevent the plating liquid from remaining (for example, see Patent Document 1).

特開平10−29687号公報(第1〜7頁、図1,2)Japanese Patent Laid-Open No. 10-29687 (pages 1 to 7, FIGS. 1 and 2)

しかしながら、前記電子部品用パッケージでは、放熱部材の側面における下段部と上記貫通孔の内側面とは、互いに平行で幅の狭い隙間が全周に位置しているため、かかる放熱部材の側面に対し、メッキ液の環流が不十分となる。この結果、放熱部材の上記側面が、変色または腐食するおそれがある、という問題があった。更に、前記パッケージ本体と放熱部材との位置決め誤差を生じるおそれもあった。   However, in the electronic component package, the lower step portion on the side surface of the heat radiating member and the inner side surface of the through hole are parallel to each other and a narrow gap is located on the entire circumference. , The circulation of the plating solution becomes insufficient. As a result, there is a problem that the side surface of the heat dissipation member may be discolored or corroded. Furthermore, there is a risk of causing a positioning error between the package body and the heat radiating member.

本発明は、背景技術において説明した問題点を解決し、放熱部材の側面に対し確実に金属メッキが施され、且つ基板本体と放熱部材との接合が位置決め精度良く成された配線基板、およびをかかる配線基板を複数個配列した多数個取り配線基板を提供する、ことを課題とする。   The present invention solves the problems described in the background art, a wiring board in which metal plating is securely applied to the side surface of the heat dissipation member, and the bonding between the substrate body and the heat dissipation member is performed with high positioning accuracy, and It is an object to provide a multi-piece wiring board in which a plurality of such wiring boards are arranged.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、基板本体と放熱部材の柱部との間に開口部側が広く奥側が狭くなる隙間を形成する、ことに着想して成されたものである。
即ち、本発明の配線基板(請求項1)は、表面、裏面、および、かかる表面と裏面との間を貫通する貫通孔を有する基板本体と、かかる基板本体の貫通孔に挿入され且つ上面に素子搭載部を有する柱部および基板本体の裏面またはかかる裏面に開口する凹溝に接合材を介して接するベース部からなる放熱部材と、を備え、かかる放熱部材の柱部の側面は、上記基板本体の貫通孔の内壁に対し、かかる基板本体の表面側が離間し且つ基板本体の裏面側が接近していると共に、上記放熱部材の柱部の側面と上記基板本体の貫通孔の内壁との間には、基板本体の表面側が広く且つ裏面側が狭い隙間が形成されている、ことを特徴とする。
In order to solve the above-mentioned problems, the present invention has been conceived by forming a gap between the substrate main body and the pillar portion of the heat dissipation member so that the opening side is wide and the back side is narrow.
That is, the wiring board according to the present invention (Claim 1) includes a substrate body having a front surface, a back surface, and a through-hole penetrating between the front surface and the back surface, and a through-hole of the substrate body and the upper surface. And a heat radiating member comprising a base portion that is in contact with a back surface of the substrate main body or a concave groove opening in the back surface through a bonding material, and the side surface of the column portion of the heat radiating member is formed on the substrate. The front surface side of the substrate body is separated from the inner wall of the through hole of the main body and the back surface side of the substrate body is close to the inner wall of the through hole of the main body. Is characterized in that a gap is formed in which the front side of the substrate body is wide and the back side is narrow.

これによれば、基板本体の貫通孔の内壁と放熱部材の柱部の側面との間に形成される隙間は、基板本体の表面側が広く且つ裏面側が狭くなっており、基板本体と放熱部材とを接合材を介して接合した後で、上記隙間内にメッキ液の環流が容易となっている。このため、放熱部材の柱部の側面に対し、例えば、Niメッキ層を介してAuメッキ層を所要の厚みで確実に形成できるため、かかる放熱部材の変色や腐食を確実に防止することができる。しかも、上記隙間は、基板本体の表面側が広く且つ裏面側が狭くなっているため、基板本体の貫通孔内に放熱部材の柱部を容易に挿入できると共に、放熱部材の柱部の側面とベース部の上面と間に形成されるコーナ部と、基板本体の貫通孔の裏面側の開口縁(コーナ部)とによって、基板本体と放熱部材との位置決めが精度良く行える。このため、接合材を加熱(リフロー)して溶融した際にも、両者間にずれのない接合が可能となる。   According to this, the gap formed between the inner wall of the through hole of the substrate body and the side surface of the column portion of the heat dissipation member is wide on the front surface side and narrowed on the back surface side of the substrate body, After the bonding is performed via the bonding material, the plating solution is easily recirculated in the gap. For this reason, for example, the Au plating layer can be reliably formed with a required thickness on the side surface of the column portion of the heat dissipation member via the Ni plating layer, so that discoloration and corrosion of the heat dissipation member can be reliably prevented. . In addition, since the front surface side of the substrate body is wide and the back surface side is narrow, the column portion of the heat dissipation member can be easily inserted into the through hole of the substrate body, and the side surface and the base portion of the column portion of the heat dissipation member The substrate body and the heat dissipating member can be accurately positioned by the corner portion formed between the upper surface and the opening edge (corner portion) on the back surface side of the through hole of the substrate body. For this reason, even when the bonding material is heated (reflowed) and melted, it is possible to bond without deviation between the two.

尚、前記基板本体は、アルミナなどの高温焼成セラミック、ガラス−セラミックなどの低温焼成セラミック、エポキシ系などの樹脂などの絶縁材からなる。
また、前記放熱部材は、熱伝導率の高いCu,Al、あるいはこれらをベースとする合金からなり、前記ベース部の上面における中央部から前記柱部が立設した形態を有している。
更に、基板本体と放熱部材との接合(固着)は、基板本体の裏面と放熱部材におけるベース部の上面との間、もしくは、基板本体の裏面に開口する凹溝の天井面とベース部の上面との間、あるいは、かかる凹溝の天井面および側面とベース部の上面および側面との間を、例えば、ロウ付けにより行われる。
また、放熱部材における柱部の上面に位置する素子搭載部には、例えば、発光ダイオード素子などの発光素子またはICチップなどの電子部品が搭載され、これらが発生する熱を、かかる放熱部材を介して外部に放熱可能としている。
更に、前記隙間は、基板本体の貫通孔の内壁と放熱部材の柱部の側面との間における全周に沿ってほぼ均一に形成されている。
The substrate body is made of an insulating material such as a high-temperature fired ceramic such as alumina, a low-temperature fired ceramic such as glass-ceramic, or an epoxy resin.
Further, the heat radiating member is made of Cu, Al having high thermal conductivity, or an alloy based on these, and has a form in which the column portion is erected from a central portion on the upper surface of the base portion.
Further, the bonding (adhering) between the substrate body and the heat radiating member is performed between the back surface of the substrate body and the upper surface of the base portion of the heat radiating member, or the ceiling surface of the concave groove opened on the back surface of the substrate body and the upper surface of the base portion. Or between the ceiling surface and side surface of the concave groove and the upper surface and side surface of the base portion, for example, by brazing.
In addition, for example, a light emitting element such as a light emitting diode element or an electronic component such as an IC chip is mounted on the element mounting portion located on the upper surface of the pillar portion of the heat radiating member, and the heat generated by these elements is transmitted through the heat radiating member. Heat dissipation to the outside.
Further, the gap is formed substantially uniformly along the entire circumference between the inner wall of the through hole of the substrate body and the side surface of the column portion of the heat radiating member.

また、本発明には、前記放熱部材の柱部の側面は、前記ベース部側から前記上面に向かって、側面視で幅が狭くなるテーパ面または湾曲面である、配線基板(請求項2)も含まれる。
これによれば、基板本体の貫通孔の内壁と放熱部材の柱部の側面との間に形成される隙間は、基板本体の表面側が広く且つ裏面側に向かってほぼ連続的に狭くなる。このため、基板本体と放熱部材との接合後において、上記隙間内にメッキ液の環流を容易に行え、放熱部材の変色や腐食を一層確実に防止できる。しかも、前記基板本体と放熱部材との接合を、位置決め精度良く行うことができる。
尚、前記放熱部材の柱部には、全体がほぼ四角錐形状で且つ四側面がテーパ面または湾曲面である形態のほか、全体がほぼ円錐形状で且つ全周の側面がテーパ面または湾曲面である形態などが含まれる。
According to the present invention, the side surface of the column portion of the heat dissipation member is a tapered surface or a curved surface whose width is narrowed in a side view from the base portion side toward the upper surface (Claim 2). Is also included.
According to this, the clearance gap formed between the inner wall of the through-hole of a board | substrate body and the side surface of the pillar part of a heat radiating member becomes large continuously on the surface side of a board | substrate body, and becomes narrow continuously toward the back surface side. For this reason, after joining the substrate body and the heat radiating member, the plating solution can be easily recirculated in the gap, and discoloration and corrosion of the heat radiating member can be more reliably prevented. In addition, the substrate body and the heat dissipation member can be joined with high positioning accuracy.
The column part of the heat radiating member has a substantially quadrangular pyramid shape and four side surfaces that are tapered surfaces or curved surfaces, as well as a substantially conical shape and the entire circumferential side surface is a tapered surface or curved surface. The form etc. which are are included.

更に、本発明には、前記隙間における前記基板本体の裏面側には、かかる基板本体と前記放熱部材とを接合し、かかる放熱部材における柱部の側面に沿って張り出した接合材を備えている、配線基板(請求項3)も含まれる。
これによれば、基板本体の貫通孔の内壁と放熱部材の柱部の側面との間に形成される隙間は、基板本体の裏面側に接合材で形成されるアール面を有する形態となるため、かかる隙間内においてメッキ液の環流が一層容易に行え、放熱部材の変色や腐食を確実に防止できる。
尚、上記接合材は、例えばAgロウであり、放熱部材における柱部の側面に対する濡れ性によって、かかる柱部の側面に沿って張り出した形態(フィレット)として形成されるほか、基板本体における貫通孔の内壁に沿っても立ち上がって張り出した形態(フィレット)で、且つ中央部が凹んだ形態も含まれる。
Furthermore, the present invention includes a bonding material that joins the substrate body and the heat radiating member to the back surface side of the substrate body in the gap, and projects along the side surface of the column portion of the heat radiating member. A wiring board (claim 3) is also included.
According to this, since the clearance gap formed between the inner wall of the through-hole of a board | substrate body and the side surface of the pillar part of a heat radiating member becomes a form which has the rounded surface formed with a joining material in the back surface side of a board | substrate body. In this gap, the plating solution can be circulated more easily, and discoloration and corrosion of the heat dissipation member can be reliably prevented.
Note that the bonding material is, for example, Ag brazing, and is formed as a form (fillet) protruding along the side surface of the column portion due to wettability with respect to the side surface of the column portion in the heat radiating member. Also included is a form (fillet) that stands up and overhangs along the inner wall and has a recessed central part.

加えて、本発明には、前記配線基板を縦横に複数個配列した製品領域と、
上記製品領域の周囲に位置し、前記絶縁材からなる耳部と、を備えている、多数個取り配線基板(請求項4)も含まれる。
これによれば、前記隙間を介在させて固着された基板本体と放熱部材とを有する配線基板を、縦横の平面方向に沿って併有した多数個取り配線基板であるため、隣接する配線基板の間および配線基板と耳部との間を区画する切断予定面またはスリットに沿って切断加工することで、多数の配線基板を効率良く提供可能となる。尚、前記耳部には、製品領域の周囲の一辺または二辺にのみ隣接する形態も含まれる。
In addition, the present invention includes a product region in which a plurality of the wiring boards are arranged vertically and horizontally,
A multi-cavity wiring board (Claim 4) is also included, which is provided around the product region and includes ears made of the insulating material.
According to this, since the wiring board having the board body and the heat radiating member fixed with the gap interposed therebetween is a multi-piece wiring board having both vertical and horizontal plane directions, A large number of wiring boards can be provided efficiently by cutting along the planned cutting planes or slits that divide the gap and between the wiring boards and the ears. The ear portion includes a form adjacent to only one side or two sides around the product area.

以下において、本発明を実施するための最良の形態について説明する。
図1は、本発明の一形態である配線基板1aを示す平面図、図2は、図1中のX−X線の矢視に沿った垂直断面図、図3は、図2中の一点鎖線部分Yを拡大した部分断面図、図4は、配線基板1aに用いる放熱部材10aの斜視図である。
配線基板1aは、図1,図2に示すように、表面3、裏面4、およびかかる表面3と裏面4との中央部間を貫通する貫通孔5を有する基板本体2と、かかる貫通孔5に柱部11が挿入され、かかる柱部11の下方に連なり、基板本体2の裏面4に後述するAgロウ(接合材)20を介してロウ付け(接合)されるベース部17を有する放熱部材(ヒートシンク)10aと、を備えている。
基板本体2は、図1,図2に示すように、例えば、アルミナ(絶縁材)からなる複数のセラミック層(図示せず)を一体に積層し、平面視がほぼ正方形で全体がほぼ平板状体であり、貫通孔5は、平面視が正方形で且つ内壁が垂直面である。
尚、上記セラミック層間には、所定パターンの配線層が形成され、これらは、セラミック層を貫通するビア導体を介して、互いに導通されると共に、基板本体2の表面3や裏面4に形成されるパッド(何れも図示せず)とも導通されている。かかる配線層、ビア導体、パッドは、WまたはMoなどからなる。
In the following, the best mode for carrying out the present invention will be described.
1 is a plan view showing a wiring board 1a according to an embodiment of the present invention, FIG. 2 is a vertical sectional view taken along the line XX in FIG. 1, and FIG. 3 is a point in FIG. FIG. 4 is a perspective view of a heat dissipation member 10a used in the wiring board 1a.
As shown in FIGS. 1 and 2, the wiring board 1 a includes a substrate body 2 having a front surface 3, a back surface 4, and a through hole 5 penetrating between the center portions of the front surface 3 and the back surface 4, and the through hole 5. The base 11 is inserted into the base 11 and is connected to the lower side of the post 11 and has a base 17 that is brazed (joined) to the back surface 4 of the substrate body 2 via an Ag brazing (joining material) 20 described later. (Heat sink) 10a.
As shown in FIGS. 1 and 2, the substrate body 2 is formed by integrally laminating a plurality of ceramic layers (not shown) made of alumina (insulating material), for example, and has a substantially square shape in plan view. The through-hole 5 has a square shape in plan view and an inner wall that is a vertical surface.
A wiring layer having a predetermined pattern is formed between the ceramic layers. These wiring layers are electrically connected to each other through via conductors penetrating the ceramic layer, and are formed on the front surface 3 and the back surface 4 of the substrate body 2. The pad (not shown) is electrically connected. Such wiring layers, via conductors, and pads are made of W or Mo.

また、放熱部材10aは、Cu合金からなり、図1,図2,図4に示すように、平面視が正方形の上面12および四辺の側面13を有するほぼ四角錐形状の柱部11と、かかる柱部11の各側面13の下辺に連なる平面視が正方形のベース部17と、からなる。尚、柱部11の各側面13とベース部17の上面18との間には、これらが交差して形成する直線状のコーナ部14が位置している。
柱部11の上面12は、一点鎖線の仮想線で示す平面視が正方形の素子搭載部aを有している。また、柱部11の側面13は、図4に示すように、ベース部17側から上面12に向かって側面視で幅wが狭くなるテーパ面である。更に、柱部11の上面12および側面13と、ベース部17の上面18を除いた底面19および外側面とには、厚みが約1〜20μmのNiメッキ層と厚みが約0.1〜6μmのAuメッキ層(何れも図示せず)とがそれぞれ被覆されている。
Further, the heat radiating member 10a is made of a Cu alloy, and as shown in FIGS. 1, 2, and 4, a substantially quadrangular pyramid-shaped column portion 11 having a top surface 12 and four side surfaces 13 that are square in plan view. The base portion 17 having a square shape in plan view connected to the lower side of each side surface 13 of the column portion 11 is formed. In addition, between each side surface 13 of the column part 11 and the upper surface 18 of the base part 17, the linear corner part 14 which these cross | intersect and form is located.
The upper surface 12 of the column part 11 has an element mounting part a having a square plan view as indicated by a dashed-dotted phantom line. Further, as shown in FIG. 4, the side surface 13 of the column portion 11 is a tapered surface whose width w becomes narrower in a side view from the base portion 17 side toward the upper surface 12. Further, the upper surface 12 and the side surface 13 of the column part 11 and the bottom surface 19 and the outer surface excluding the upper surface 18 of the base part 17 have a Ni plating layer having a thickness of about 1 to 20 μm and a thickness of about 0.1 to 6 μm. Au plating layers (both not shown) are respectively coated.

図2に示すように、放熱部材10aの柱部11の側面13と基板本体2の貫通孔5の内壁との間には、基板本体2の表面3側が広く且つ裏面4(ベース部17)側が徐々に狭くなる断面ほぼ三角形の隙間sが全周に沿って形成されている。
因みに、上記隙間sの開口部(上端部)における幅(距離)は、約30μm〜200μmであり、かかる隙間sの仰角(水平面に対する角度)は、約45〜80度である。
図1,図2に示すように、放熱部材10aは、その柱部11を基板本体2の貫通孔5に挿入した際に、前記コーナ部14と貫通孔5の裏面4側の開口縁(コーナ部)とによって、基板本体2との位置決めが成される。かかる状態で、図3に示すように、ベース部17の上面18と基板本体2の裏面4との間に予め配置したAgロウ20(接合材)を加熱・溶融することで、放熱部材10aと基板本体2とは、位置決め精度良くロウ付け(接合)されている。
As shown in FIG. 2, between the side surface 13 of the column portion 11 of the heat radiating member 10a and the inner wall of the through hole 5 of the substrate body 2, the front surface 3 side of the substrate body 2 is wide and the back surface 4 (base portion 17) side is A gap s having a substantially triangular cross section that gradually narrows is formed along the entire circumference.
Incidentally, the width (distance) at the opening (upper end) of the gap s is about 30 μm to 200 μm, and the elevation angle (angle with respect to the horizontal plane) of the gap s is about 45 to 80 degrees.
As shown in FIGS. 1 and 2, when the heat radiation member 10 a is inserted into the through hole 5 of the substrate body 2, the corner portion 14 and the opening edge on the back surface 4 side of the through hole 5 (corner) Part) is positioned with respect to the substrate body 2. In this state, as shown in FIG. 3, by heating and melting Ag brazing 20 (bonding material) disposed in advance between the upper surface 18 of the base portion 17 and the back surface 4 of the substrate body 2, The substrate body 2 is brazed (joined) with high positioning accuracy.

上記Agロウ20は、柱部11の側面13に沿って立ち上がるように張り出し且つ表面がアール面であるフィレット(Agロウの張り出し部)21と、ベース部17の外側面および基板本体2の裏面4に張り出し且つ表面がアール面であるフィレット22,23を有している。隙間sには、Agロウ20における表面がアール面のフィレット21が最奥部に位置している。このため、上記ロウ付け後に露出する放熱部材10aにおける柱部11の各側面13に対し、電解Niメッキおよび電解Auメッキを施す際に、各メッキ液が容易に環流し易くなっている。
従って、以上のような配線基板1aによれば、基板本体2と放熱部材10aとのロウ付け(接合)が精度良く成されおり、且つ放熱部材10aの側面13にもNiおよびAuメッキ層が確実に形成されているため、変色や腐食を防止できる。
尚、放熱部材10aの素子搭載部aに、Au−Sn合金などのハンダを介して例えば、発光ダイオード素子(以下、LEDという)Cを搭載した場合、かかるLED:Cは、ボンデイングワイヤを介して基板本体2の表面3に形成された前記パッドと接続され、かかる状態で表面3上にほぼ半球形状に形成される封止樹脂により封止される。
The Ag row 20 projects so as to rise along the side surface 13 of the column part 11 and has a rounded surface (Ag row projecting part) 21, the outer surface of the base part 17, and the back surface 4 of the substrate body 2. And fillets 22 and 23 having a rounded surface. In the gap s, the fillet 21 having a rounded surface on the Ag solder 20 is located at the innermost part. For this reason, when performing electrolytic Ni plating and electrolytic Au plating on each side surface 13 of the column portion 11 of the heat radiation member 10a exposed after brazing, each plating solution is easily circulated.
Therefore, according to the wiring substrate 1a as described above, the substrate body 2 and the heat radiating member 10a are brazed (joined) with high accuracy, and the Ni and Au plating layers are surely provided on the side surface 13 of the heat radiating member 10a. Therefore, discoloration and corrosion can be prevented.
For example, when a light emitting diode element (hereinafter referred to as an LED) C is mounted on the element mounting portion a of the heat radiating member 10a via a solder such as an Au—Sn alloy, the LED: C is connected via a bonding wire. It is connected to the pad formed on the surface 3 of the substrate body 2 and is sealed with a sealing resin formed in a substantially hemispherical shape on the surface 3 in this state.

図5は、前記配線基板1aの変形形態である配線基板1bを示す前記図2と同様な垂直断面図、図6は、図5中の一点鎖線部分Zを拡大した部分断面図である。
配線基板1bは、図5に示すように、前記同様の貫通孔5を有する基板本体2と、貫通孔5に柱部11が挿入され、ベース部17の上面18を基板本体2の裏面4に、後述するAgロウ(接合材)20を介してロウ付け(接合)した放熱部材10bと、を備えている。
かかる配線基板1bが前記配線基板1aと相違する点は、放熱部材10bの柱部11における側面15が、ベース部17側から上面12に向かって側面視で幅wが狭くなる湾曲面となっていることである。柱部11の上面12および各側面15と、ベース部17の上面18を除いた底面19および外側面とには、前記同様のNiメッキ層とAuメッキ層とがそれぞれ被覆されている。
FIG. 5 is a vertical sectional view similar to FIG. 2 showing a wiring board 1b which is a modification of the wiring board 1a, and FIG. 6 is a partial sectional view enlarging a one-dot chain line portion Z in FIG.
As shown in FIG. 5, the wiring substrate 1 b includes a substrate body 2 having the same through-hole 5 and a column portion 11 inserted into the through-hole 5, and the upper surface 18 of the base portion 17 is connected to the back surface 4 of the substrate body 2. And a heat dissipating member 10b brazed (joined) via an Ag brazing (joining material) 20 to be described later.
The wiring board 1b is different from the wiring board 1a in that the side surface 15 of the column portion 11 of the heat radiating member 10b is a curved surface whose width w is narrowed from the base portion 17 side toward the upper surface 12 in side view. It is that you are. The upper surface 12 and each side surface 15 of the column part 11 and the bottom surface 19 and the outer surface excluding the upper surface 18 of the base part 17 are coated with the same Ni plating layer and Au plating layer, respectively.

図5に示すように、放熱部材10bの柱部11の側面15と基板本体2の貫通孔5の内壁との間には、基板本体2の表面3側が広く且つ裏面4(ベース部17)側がカーブして狭くなる断面全体がほぼ4分の1楕円形の隙間sが、全周に沿ってほぼ均一に形成されている。
図5に示すように、放熱部材10bの柱部11を基板本体2の貫通孔5に挿入すると、前記コーナ部14と貫通孔5の裏面4側の開口縁(コーナ部)とにより、基板本体2と放熱部材10bとの位置決めが成される。かかる状態で、図6に示すように、ベース部17の上面18と基板本体2の裏面4との間に予め配置したAgロウ20を加熱することで、基板本体2と放熱部材10bとが位置決め精度良くロウ付けされている。
As shown in FIG. 5, between the side surface 15 of the column portion 11 of the heat radiating member 10b and the inner wall of the through hole 5 of the substrate body 2, the front surface 3 side of the substrate body 2 is wide and the back surface 4 (base portion 17) side is A gap s having an elliptical shape of approximately a quarter of the entire cross section that is curved and narrowed is formed substantially uniformly along the entire circumference.
As shown in FIG. 5, when the column portion 11 of the heat radiating member 10 b is inserted into the through hole 5 of the substrate body 2, the substrate body is formed by the corner portion 14 and the opening edge (corner portion) on the back surface 4 side of the through hole 5. 2 and the heat radiating member 10b are positioned. In this state, as shown in FIG. 6, the substrate body 2 and the heat radiating member 10 b are positioned by heating the Ag solder 20 disposed in advance between the upper surface 18 of the base portion 17 and the back surface 4 of the substrate body 2. It is brazed with high accuracy.

図6に示すように、上記Agロウ20は、柱部11の湾曲面である側面15に沿ってカーブして立ち上がるように張り出し且つ表面がアール面であるフィレット21と、ベース部17の外側面および基板本体2の裏面4に張り出し且つ表面がアール面であるフィレット(Agロウの張り出し部)22,23を有している。
上記Agロウ20における表面がアール面のフィレット21が最奥部に位置するため、前記隙間sには、上記ロウ付け後に露出する放熱部材10bにおける柱部11の各側面15に対し、電解Niメッキおよび電解Auメッキを施す際に、各メッキ液が一層容易に環流し易くなっている。
従って、以上のような配線基板1bによっても、基板本体2と放熱部材10bとのロウ付けが位置決め精度良く成されおり、且つ放熱部材10aの側面15にもNiおよびAuメッキ層が確実に形成されているため、変色や腐食を防止できる。
As shown in FIG. 6, the Ag solder 20 has a fillet 21 that protrudes and rises along a side surface 15 that is a curved surface of the column portion 11 and has a rounded surface, and an outer surface of the base portion 17. Further, it has fillets (Ag wax projecting portions) 22 and 23 that project from the back surface 4 of the substrate body 2 and have a rounded surface.
Since the fillet 21 having a rounded surface on the Ag braze 20 is located at the innermost part, electrolytic Ni plating is applied to the gap s with respect to each side surface 15 of the column portion 11 of the heat radiation member 10b exposed after the brazing. In addition, when performing electrolytic Au plating, each plating solution is more easily circulated.
Therefore, even with the wiring board 1b as described above, the substrate body 2 and the heat radiating member 10b are brazed with high positioning accuracy, and the Ni and Au plating layers are also reliably formed on the side surface 15 of the heat radiating member 10a. Therefore, discoloration and corrosion can be prevented.

図7は、異なる変形形態の配線基板1cを示す前記図2,図5と同様な垂直断面図である。かかる配線基板1cは、図5に示すように、前記同様の貫通孔5を有する基板本体2と、貫通孔5に柱部11が挿入され、ベース部17の上面18を基板本体2の裏面4に前記同様のAgロウを介してロウ付けした放熱部材10cと、を備えている。
配線基板1cが前記配線基板1aと相違する点は、放熱部材10cの柱部11における側面16が、ベース部17側から上面12に向かって側面視で幅wが狭くなる下部のテーパ面16tと上部の垂直面(16)とからなることである。柱部11の上面12および側面16,16tと、ベース部17の上面18を除いた底面19および外側面とには、前記同様のNiメッキ層およびAuメッキ層がそれぞれ被覆されている。
FIG. 7 is a vertical sectional view similar to FIGS. 2 and 5 showing a wiring board 1c having a different modification. As shown in FIG. 5, the wiring substrate 1 c includes a substrate body 2 having the same through-hole 5 and a column portion 11 inserted into the through-hole 5, and the upper surface 18 of the base portion 17 is connected to the back surface 4 of the substrate body 2. And a heat dissipating member 10c brazed via the same Ag brazing.
The wiring board 1c is different from the wiring board 1a in that the side surface 16 of the pillar portion 11 of the heat radiating member 10c has a lower tapered surface 16t whose width w is narrowed in a side view from the base portion 17 side toward the upper surface 12. The upper vertical surface (16). The upper surface 12 and the side surfaces 16 and 16t of the column portion 11 and the bottom surface 19 and the outer surface excluding the upper surface 18 of the base portion 17 are covered with the same Ni plating layer and Au plating layer, respectively.

図7に示すように、放熱部材10cの柱部11の側面16,16tと基板本体2の貫通孔5の内壁との間には、基板本体2の表面3側が広く且つ裏面4(ベース部17)側が狭くなる断面全体がほぼ2分の1台形の隙間sが全周に沿って形成されている。
図7に示すように、放熱部材10cの柱部11を基板本体2の貫通孔5に挿入すると、前記入り隅14と貫通孔5の裏面4側の開口縁とにより、基板本体2と放熱部材10cとの位置決めが成される。かかる状態で、前記同様に、ベース部17の上面18と基板本体2の裏面4との間に予め配置した前記Agロウ(図示せず)を加熱することで、基板本体2と放熱部材10cとが位置決め精度良くロウ付けされている。
As shown in FIG. 7, the front surface 3 side of the substrate body 2 is wide and the back surface 4 (base portion 17) between the side surfaces 16 and 16 t of the column portion 11 of the heat radiating member 10 c and the inner wall of the through hole 5 of the substrate body 2. The entire cross section whose side is narrower is formed with a half trapezoidal gap s along the entire circumference.
As shown in FIG. 7, when the column portion 11 of the heat radiating member 10 c is inserted into the through hole 5 of the substrate main body 2, the substrate main body 2 and the heat radiating member are formed by the entering corner 14 and the opening edge on the back surface 4 side of the through hole 5. Positioning with 10c is performed. In this state, similarly to the above, by heating the Ag brazing (not shown) arranged in advance between the upper surface 18 of the base portion 17 and the back surface 4 of the substrate body 2, the substrate body 2 and the heat radiating member 10c Is brazed with good positioning accuracy.

上記Agロウは、柱部11のテーパ面である側面16tに沿って立ち上がるように張り出し且つ表面がアール面のフィレットと、ベース部17の外側面および基板本体2の裏面4に張り出し且つ表面がアール面のフィレットを有している。上記Agロウにおける表面がアール面のフィレットが最奥部に位置するため、前記隙間sには、上記ロウ付け後に露出する放熱部材10cにおける柱部11の各側面16,16tに対し、電解Niメッキおよび電解Auメッキを施す際に、各メッキ液が容易に環流し易くなっている。
従って、以上のような配線基板1cによっても、基板本体2と放熱部材10cとのロウ付けが位置決め精度良く成されおり、放熱部材10cの側面16,16tにもNiおよびAuメッキ層が確実に形成されているため、変色や腐食を防止できる。
The Ag solder projects so as to rise along the side surface 16t, which is the tapered surface of the column part 11, and has a rounded surface fillet, and projects from the outer surface of the base part 17 and the back surface 4 of the substrate body 2, and the surface is curved. Has a face fillet. Since the fillet having a rounded surface in the Ag brazing is located at the innermost part, electrolytic Ni plating is applied to the gaps s on the side surfaces 16 and 16t of the column portion 11 of the heat radiation member 10c exposed after the brazing. In addition, when performing electrolytic Au plating, each plating solution is easily circulated.
Therefore, even with the wiring board 1c as described above, the substrate body 2 and the heat radiating member 10c are brazed with high positioning accuracy, and the Ni and Au plating layers are reliably formed on the side surfaces 16 and 16t of the heat radiating member 10c. Therefore, discoloration and corrosion can be prevented.

図8は、異なる形態のフィレット24を有するAgロウ20aの付近を示す前記配線基板1aの部分拡大断面図である。前記同様に、ベース部17の上面18と基板本体2の裏面4との間に配置した予めAgロウ20aを加熱・溶融することで、放熱部材10aと基板本体2とが、位置決め精度良くロウ付けされる。上記Agロウ20aは、柱部11の側面13と基板本体2の貫通孔5の内壁とに沿って立ち上がるように張り出し且つ表面がアール面Rで且つ断面ほぼ三角形のフィレット24と、ベース部17の外側面および基板本体2の裏面4に張り出し且つ表面がアール面であるフィレット22,23を有している。尚、フィレット24は、例えば、隙間s側からAgロウを補填することで形成することが可能である。   FIG. 8 is a partial enlarged cross-sectional view of the wiring board 1a showing the vicinity of an Ag row 20a having a fillet 24 of a different form. In the same manner as described above, the heat radiating member 10a and the substrate body 2 are brazed with high positioning accuracy by heating and melting the Ag solder 20a disposed between the upper surface 18 of the base portion 17 and the back surface 4 of the substrate body 2 in advance. Is done. The Ag row 20a projects so as to rise along the side surface 13 of the column portion 11 and the inner wall of the through hole 5 of the substrate body 2, and has a fillet 24 having a rounded surface R and a substantially triangular cross section. It has fillets 22 and 23 that project from the outer side surface and the back surface 4 of the substrate body 2 and whose surface is a rounded surface. The fillet 24 can be formed by, for example, supplementing Ag solder from the gap s side.

図8に示すように、放熱部材10aの側面13と貫通孔5の内壁との間の隙間sには、Agロウ20aにおける表面がアール面Rのフィレット24が最奥部に位置している。このため、上記ロウ付け後に露出する放熱部材10aにおける柱部11の各側面13に対し、電解Niメッキおよび電解Auメッキを施す際に、各メッキ液が隙間sの全体に対して環流し易くなっている。
尚、表面がアール面Rで且つ断面ほぼ三角形のフィレット24を含むAgロウ20aは、前記配線基板1b,1cに対しても適用することも可能である。
As shown in FIG. 8, in the gap s between the side surface 13 of the heat radiating member 10 a and the inner wall of the through hole 5, the fillet 24 having a rounded surface R on the surface of the Ag solder 20 a is located at the innermost part. For this reason, when performing electrolytic Ni plating and electrolytic Au plating on each side surface 13 of the column portion 11 of the heat radiation member 10a exposed after the brazing, each plating solution is easily circulated through the entire gap s. ing.
Note that the Ag solder 20a including the fillet 24 having a rounded surface R and a substantially triangular cross section can be applied to the wiring boards 1b and 1c.

図9は、異なる形態の基板本体2aを有する配線基板1dを示す前記図2などと同様な垂直断面図である。基板本体2aは、表面3と裏面4との間を貫通する貫通孔5と、かかる貫通孔5と裏面4側で連通し且つ裏面4に開口する底面視が正方形の凹溝6と、を備えている。
図9に示すように、放熱部材10aの柱部11を基板本体2aの貫通孔5に挿入すると、前記入り隅14と貫通孔5の裏面4側の開口縁とにより、基板本体2aと放熱部材10aとの位置決めが成される。同時に、放熱部材10aのベース部17は、基板本体2aの凹溝6内に挿入される。
FIG. 9 is a vertical sectional view similar to FIG. 2 and the like showing a wiring board 1d having a substrate body 2a of a different form. The substrate body 2a includes a through hole 5 penetrating between the front surface 3 and the back surface 4, and a concave groove 6 communicating with the through hole 5 on the back surface 4 side and opening in the back surface 4 in a square view. ing.
As shown in FIG. 9, when the column portion 11 of the heat radiating member 10a is inserted into the through hole 5 of the substrate main body 2a, the substrate main body 2a and the heat radiating member are formed by the entrance corner 14 and the opening edge on the back surface 4 side of the through hole 5. Positioning with 10a is performed. At the same time, the base portion 17 of the heat radiating member 10a is inserted into the concave groove 6 of the substrate body 2a.

かかる状態で、前記同様に、ベース部17の上面18および外側面と基板本体2aにおける凹溝6の天井面および側面との間に予め配置した前記同様のAgロウを加熱することで、基板本体2aと放熱部材10aとが位置決め精度良くロウ付けされる。この際、基板本体2aの貫通孔5の内壁と放熱部材10aの側面13との間の隙間sには、上記Agロウにおける表面がアール面のフィレットが最奥部に位置するため、上記ロウ付け後に露出する放熱部材10aにおける柱部11の各側面13に対し、電解Niメッキおよび電解Auメッキを施す際に、各メッキ液が容易に環流し易くなっている。
尚、前記配線基板1b,1cに対して、基板本体2に替えて、貫通孔5および凹溝6を有する上記基板本体2aを適用することも可能である。
In this state, similarly to the above, by heating the same Ag solder previously disposed between the upper surface 18 and the outer surface of the base portion 17 and the ceiling surface and the side surface of the groove 6 in the substrate body 2a, 2a and the heat radiating member 10a are brazed with high positioning accuracy. At this time, in the gap s between the inner wall of the through hole 5 of the substrate main body 2a and the side surface 13 of the heat radiating member 10a, the fillet having a rounded surface is the innermost surface of the Ag brazing. When performing electrolytic Ni plating and electrolytic Au plating on each side surface 13 of the column portion 11 of the heat radiation member 10a exposed later, each plating solution is easily circulated.
In addition, instead of the substrate body 2, the substrate body 2 a having the through holes 5 and the recessed grooves 6 can be applied to the wiring boards 1 b and 1 c.

ここで、前記配線基板1aの製造方法について説明する。
予め、アルミナ粉末の粒子、樹脂バインダ、可塑剤、および溶剤などからなる原料を混合して、セラミックスラリを製作した。かかるセラミックスラリにドクターブレード法を施して、平面視が正方形であり、互いに厚みが異なる複数の大版用で平面視が長方形のグリーンシートを形成した。
次に、上記各グリーンシートに対し、パンチとダイの受入れ孔とによる打ち抜き加工を施して、断面が正方形の貫通孔を複数個形成した。
次いで、上記貫通孔が形成された複数の大版用のグリーンシートにおける各貫通孔ごとの周囲に、所要数のビアホールをそれぞれ穿孔し、それらの内部にWまたはMo粉末を含む導電性ペーストを充填して、それぞれにビア導体を形成した。
Here, a method of manufacturing the wiring board 1a will be described.
A ceramic slurry was prepared by mixing raw materials composed of alumina powder particles, a resin binder, a plasticizer, a solvent, and the like in advance. The ceramic blade was subjected to a doctor blade method to form a green sheet having a square shape in plan view and a rectangular shape in plan view for a plurality of large plates having different thicknesses.
Next, each green sheet was punched with punches and die receiving holes to form a plurality of through-holes having a square cross section.
Next, the required number of via holes are drilled around each through-hole in the green sheet for large plates in which the through-holes are formed, and a conductive paste containing W or Mo powder is filled therein. A via conductor was formed on each of them.

更に、上記複数のグリーンシートごとの表面および裏面の少なくとも一方に、導電性ペーストを所定パターンによりスクリーン印刷して、所定のパターンに倣った配線層やパッドを形成した。
上記貫通孔を有する複数のグリーンシートを、それらの貫通孔が同心で連通するように、積層および圧着してグリーンシート積層体を形成した。かかるグリーンシート積層体を所定の温度帯に加熱・焼成した。
その結果、複数のセラミック層からなり、前記表面3、裏面4、および貫通孔5を有する複数組の基板本体2からなる製品領域Aと、その周囲を囲む耳部mとを有する大判のセラミック積層体が得られた。
Further, conductive paste was screen-printed with a predetermined pattern on at least one of the front and back surfaces of each of the plurality of green sheets to form wiring layers and pads following the predetermined pattern.
A plurality of green sheets having the through-holes were laminated and pressure-bonded so that the through-holes communicated concentrically to form a green sheet laminate. The green sheet laminate was heated and fired at a predetermined temperature range.
As a result, a large ceramic laminate having a product region A composed of a plurality of sets of substrate bodies 2 composed of a plurality of ceramic layers and having the front surface 3, the back surface 4, and the through holes 5, and an ear portion m surrounding the periphery. The body was obtained.

一方、Cu合金からなる板状の素材を、雄・雌型によるプレスすることで、平面視が正方形のベース部17と、その中央部から立設し平面視が正方形の上面12および傾斜した4つの側面13を有するほぼ四角錐形状の柱部11と、からなる放熱部材10aを複数個形成した。
次に、ベース部16の上面18に図示しないAgロウ20のシートを配置した複数の放熱部材10aの柱部11を、前記セラミック積層体における製品領域Aの基板本体2ごとの貫通孔5に挿入した。その結果、各基板本体2の貫通孔5の内壁と、放熱部材10aの柱部11の側面13との間には、表面3側が広く裏面4側が狭い隙間sがそれぞれ形成された。
かかる状態で、各放熱部材10aのベース部17の上面18にセットしたAgロウ20を約700〜900℃に加熱し、上記Agロウ20を溶融して、各基板本体2と各放熱部材10aとをロウ付けにより接合した。
On the other hand, a plate-shaped material made of a Cu alloy is pressed by a male / female die, whereby the base portion 17 having a square shape in plan view and the upper surface 12 having a square shape in plan view and an inclined upper surface 12 are formed. A plurality of heat dissipating members 10a each having a substantially quadrangular pyramidal column portion 11 having two side surfaces 13 are formed.
Next, the column portions 11 of the plurality of heat radiating members 10a in which a sheet of Ag solder 20 (not shown) is arranged on the upper surface 18 of the base portion 16 are inserted into the through holes 5 for each substrate body 2 in the product region A in the ceramic laminate. did. As a result, a gap s was formed between the inner wall of the through-hole 5 of each substrate body 2 and the side surface 13 of the column portion 11 of the heat radiating member 10a and the surface 3 side was wide and the back surface 4 side was narrow.
In this state, the Ag brazing 20 set on the upper surface 18 of the base portion 17 of each heat radiating member 10a is heated to about 700 to 900 ° C., and the Ag brazing 20 is melted, and each substrate body 2 and each heat radiating member 10a Were joined by brazing.

更に、各基板本体2に固着された放熱部材10aにおける柱部11の上面12、側面13、およびベース部17の底面19に対し、NiおよびAu電解メッキを順次施した。この際、各放熱部材10における柱部11の各側面13には、前記隙間sを通じて、上記各電解メッキ用のメッキ液が十分に環流していたため、各柱部11の側面13にもNiおよびAuメッキ膜を前記厚みで確実に被覆できた。
その結果、図10の平面図と図11の断面図とに示すように、複数個の配線基板1aを縦横に配列した製品領域Aと、かかる製品領域Aの周囲にセラミック層からなる耳部mと、を備えた多数個取り配線基板K1が得られた。尚、隣接する配線基板1a,1a間、および配線基板1aと耳部mとの間には、図10,11中の破線で示すように、仮想の切断予定面cにより区画されている。
尚、図11は、図10中のV−V線の矢視に沿った垂直断面図である。
Further, Ni and Au electrolytic plating were sequentially applied to the upper surface 12 and the side surface 13 of the column portion 11 and the bottom surface 19 of the base portion 17 in the heat radiating member 10 a fixed to each substrate body 2. At this time, the plating solution for each electrolytic plating was sufficiently circulated through the gap s on each side surface 13 of the column portion 11 of each heat radiating member 10. The Au plating film could be reliably coated with the above thickness.
As a result, as shown in the plan view of FIG. 10 and the cross-sectional view of FIG. 11, a product region A in which a plurality of wiring boards 1a are arranged vertically and horizontally, and an ear m made of a ceramic layer around the product region A. A multi-piece wiring board K1 provided with In addition, as shown with the broken line in FIG. 10, 11, it divides between the adjacent wiring boards 1a and 1a and between the wiring board 1a and the ear | edge part m by the virtual cutting plan surface c.
FIG. 11 is a vertical sectional view taken along the line VV in FIG.

そして、多数個取り配線基板K1を前記切断予定面cに沿ってカッタ(図示せず)などにより、厚み方向に切断加工して分割することで、前記図1〜図4で示した配線基板1aを、複数個得ることができた。
以上のような配線基板1aの製造方法によれば、基板本体2と放熱部材10aとの平面方向における位置決めおよびロウ付け(接合)が精度良く成されている。しかも、貫通孔5の内壁と放熱部材10aの柱部11の側面13との間に前記隙間sが形成されているため、かかる隙間sを介して柱部11の側面13にもNiおよびAuメッキ膜を確実に被覆されている。従って、寸法精度が高く、放熱部材10aが腐食しにくい配線基板1aを確実に製造することができた。
Then, the multi-cavity wiring board K1 is cut and divided in the thickness direction by a cutter (not shown) along the planned cutting surface c, thereby dividing the wiring board 1a shown in FIGS. Were obtained.
According to the method for manufacturing the wiring board 1a as described above, the positioning and brazing (joining) of the board body 2 and the heat dissipation member 10a in the planar direction are performed with high accuracy. Moreover, since the gap s is formed between the inner wall of the through-hole 5 and the side surface 13 of the column portion 11 of the heat radiating member 10a, the side surface 13 of the column portion 11 is also plated with Ni and Au via the gap s. The membrane is securely coated. Therefore, it was possible to reliably manufacture the wiring board 1a that has high dimensional accuracy and is difficult to corrode the heat radiating member 10a.

尚、得られた配線基板1aにおける導体部10aの素子搭載部a上にLEDを搭載し、かかるLED:Cと基板本体2の表面3上のパッドとをボンディングワイヤで接続した後で、これらを包むように表面3上に固化前の封止樹脂が形成される。
また、前述した各工程を経ることによって、前記配線基板1b,1cを多数個取り配線基板を製造した後、前記同様に切断・分割することで、容易に製造することもできた。
更に、前記複数の大版用のグリーンシートのうち、最下層となる比較的厚めのグリーンシートに対し、前記貫通孔よりも縦横が大きな貫通孔を形成した後、前記各工程(印刷、積層、焼成、およびメッキ)を経ることで、図12の垂直断面図に示すように、複数個の配線基板1dを縦横に配列した製品領域Aと、かかる製品領域Aの周囲にセラミック層からなる耳部mと、を備えた多数個取り配線基板K2が得られた。そして、かかる多数個取り配線基板K2を前記切断予定面cに沿って、前記同様に切断加工により分割することで、前記図9で示した基板本体2aと放熱部材10aとを備えた配線基板1dを、複数個得ることができた。
この際、放熱部材10aに替えて、前記放熱部材10b,10cを用いることで、前記図5,図7で示した配線基板1b,1cを、多数個取りによって効率良く製造することも可能である。
In addition, after mounting LED on the element mounting part a of the conductor part 10a in the obtained wiring board 1a and connecting the LED: C and the pad on the surface 3 of the board body 2 with bonding wires, A sealing resin before solidification is formed on the surface 3 so as to be wrapped.
Further, through the above-described steps, the wiring boards 1b and 1c were taken in large numbers to produce a wiring board, and then cut and divided in the same manner as described above, so that it could be easily produced.
Further, among the plurality of large plate green sheets, a relatively thick green sheet as a lowermost layer is formed with a through hole that is larger in length and breadth than the through hole, and then each step (printing, lamination, As shown in the vertical sectional view of FIG. 12, a product region A in which a plurality of wiring boards 1d are arranged vertically and horizontally and an ear portion made of a ceramic layer around the product region A and a multi-piece wiring board K2 provided with m. Then, by dividing the multi-piece wiring board K2 along the planned cutting surface c by cutting in the same manner as described above, the wiring board 1d provided with the board body 2a and the heat radiating member 10a shown in FIG. Were obtained.
At this time, by using the heat radiating members 10b and 10c instead of the heat radiating member 10a, it is possible to efficiently manufacture the wiring boards 1b and 1c shown in FIGS. .

本発明は、以上において説明した各形態に限定されるものではない。
前記基板本体を形成する絶縁材は、窒化アルミニウムやムライトなどのセラミック、低温焼成セラミックの一種であるガラス−セラミック、あるいはエポキシを初めとする各種の樹脂としても良い。
また、基板本体は、平坦な表面に限らず、表面に開口するキャビティを有し、かかるキャビティの底面と裏面との間に前記貫通孔を形成した形態としても良い。上記キャビティの底面とほぼ面一となる放熱部材の素子搭載部を有する上面に、LED(C)を搭載した際には、その光は、当該キャビティの側面に反射して外部に放射される。この場合、キャビティの側面は、基板本体の表面側に広がるように傾斜したほぼ円錐形、長円錐形、長楕円形などとすることが望ましい。
The present invention is not limited to the embodiments described above.
The insulating material forming the substrate body may be a ceramic such as aluminum nitride or mullite, a glass-ceramic which is a kind of low-temperature fired ceramic, or various resins including epoxy.
Further, the substrate body is not limited to a flat surface, and may have a cavity opened on the surface, and the through hole may be formed between the bottom surface and the back surface of the cavity. When the LED (C) is mounted on the upper surface having the element mounting portion of the heat dissipating member that is substantially flush with the bottom surface of the cavity, the light is reflected to the side surface of the cavity and emitted to the outside. In this case, it is desirable that the side surface of the cavity has a substantially conical shape, a long conical shape, a long elliptical shape, or the like inclined so as to spread toward the surface side of the substrate body.

更に、前記放熱部材の柱部の上面における素子搭載部に搭載する素子には、ICチップなどのような電子部品も含まれる。
また、放熱部材における柱部の側面やベース部の側面には、Ni、Au、およびAgメッキ膜を順次被覆しても良い。
加えて、前記多数個取り配線基板は、そのままの形態または数個に分割した形態とし、複数の配線基板ごとにおける各導体部の素子搭載部にLEDを搭載することで、比較的大型の発光装置として、活用することも可能である。
Further, the element mounted on the element mounting portion on the upper surface of the pillar portion of the heat radiating member includes an electronic component such as an IC chip.
Further, Ni, Au, and an Ag plating film may be sequentially coated on the side surface of the column portion and the side surface of the base portion of the heat dissipation member.
In addition, the multi-cavity wiring board is in a form as it is or divided into several parts, and LEDs are mounted on the element mounting portions of the respective conductors in each of the plurality of wiring boards, so that a relatively large light emitting device It is also possible to utilize it.

本発明の一形態である配線基板を示す平面図。The top view which shows the wiring board which is 1 form of this invention. 図1中のX−X線の矢視に沿った垂直断面図。FIG. 2 is a vertical sectional view taken along line XX in FIG. 1. 図2中の一点鎖線部分Yの拡大断面図。The expanded sectional view of the dashed-dotted line part Y in FIG. 上記配線基板に用いる放熱部材を示す斜視図。The perspective view which shows the heat radiating member used for the said wiring board. 上記配線基板の変形形態である配線基板を示す垂直断面図。The vertical sectional view which shows the wiring board which is a deformation | transformation form of the said wiring board. 図5中の一点鎖線部分Zの拡大断面図。The expanded sectional view of the dashed-dotted line part Z in FIG. 異なる変形形態の配線基板を示す垂直断面面図。The vertical sectional view which shows the wiring board of a different deformation | transformation form. 異なる形態のロウ付け部の付近を示す拡大断面図。The expanded sectional view which shows the vicinity of the brazing part of a different form. 異なる形態の配線基板を示す垂直断面図。The vertical sectional view which shows the wiring board of a different form. 前記配線基板を複数配列した多数個取り配線基板を示す平面図。The top view which shows the multi-piece wiring board which arranged the said wiring board in multiple numbers. 図10中のV−V線の矢視に沿った垂直断面図。FIG. 11 is a vertical sectional view taken along the line VV in FIG. 10. 異なる形態の多数個取り配線基板を示す垂直断面図。The vertical sectional view which shows the multi-piece wiring board of a different form.

符号の説明Explanation of symbols

1a〜1d…………………………………配線基板
2,2a……………………………………基板本体
3……………………………………………表面
4……………………………………………裏面
5……………………………………………貫通孔
6……………………………………………凹溝
7,27……………………………………側面
10a〜10d……………………………放熱部材
11…………………………………………柱部
12…………………………………………上面
13,15,16,16t………………側面
17…………………………………………ベース部
20,20a………………………………Agロウ(接合材)
21,23,24…………………………フィレット(Agロウの張り出し部)
C……………………………………………発光ダイオード素子(発光素子)
a……………………………………………素子搭載部
w……………………………………………幅
K1,K2…………………………………多数個取り配線基板
A……………………………………………製品領域
m……………………………………………耳部
1a to 1d …………………………………… Wiring board 2, 2a …………………………………… Board body 3 ……………………………… …………… Front 4 …………………………………………… Back 5 …………………………………………… Through hole 6 ………… ………………………………… Concave groove 7, 27 …………………………………… Side 10a-10d …………………………… Heat dissipation member 11 ………………………………………… Pillar 12 ………………………………………… Top surface 13, 15, 16, 16t ……………… Side 17 ………………………………………… Base part 20, 20a ……………………………… Ag brazing (bonding material)
21, 23, 24 ………………………… Fillet (Ag wax overhang)
C ……………………………………………… Light-emitting diode element (light-emitting element)
a ……………………………………………… Element mounting part w …………………………………………… Width K1, K2 ………………… ……………… Manufacturing circuit board A …………………………………………… Product area m …………………………………………… Ear Part

Claims (4)

表面、裏面、および、かかる表面と裏面との間を貫通する貫通孔を有する基板本体と、
上記基板本体の貫通孔に挿入され且つ上面に素子搭載部を有する柱部および基板本体の裏面またはかかる裏面に開口する凹溝に接合材を介して接するベース部からなる放熱部材と、を備え、
上記放熱部材の柱部の側面は、上記基板本体の貫通孔の内壁に対し、かかる基板本体の表面側が離間し且つ基板本体の裏面側が接近していると共に、
上記放熱部材の柱部の側面と上記基板本体の貫通孔の内壁との間には、基板本体の表面側が広く且つ裏面側が狭い隙間が形成されている、
ことを特徴とする配線基板。
A substrate body having a front surface, a back surface, and a through-hole penetrating between the front surface and the back surface;
A heat dissipation member comprising a pillar portion inserted into the through hole of the substrate body and having an element mounting portion on the upper surface and a base portion contacting the back surface of the substrate body or a concave groove opening in the back surface via a bonding material,
The side surface of the column part of the heat radiating member is separated from the inner wall of the through hole of the substrate body, while the surface side of the substrate body is separated and the back side of the substrate body is approached,
Between the side surface of the column part of the heat radiating member and the inner wall of the through hole of the substrate body, a gap is formed where the front surface side of the substrate body is wide and the back surface side is narrow,
A wiring board characterized by that.
前記放熱部材の柱部の側面は、前記ベース部側から前記上面に向かって、側面視で幅が狭くなるテーパ面または湾曲面である、
ことを特徴とする請求項1に記載の配線基板。
The side surface of the column part of the heat dissipation member is a tapered surface or a curved surface whose width is narrowed in a side view from the base part side toward the upper surface.
The wiring board according to claim 1.
前記隙間における前記基板本体の裏面側には、かかる基板本体と前記放熱部材とを接合し、かかる放熱部材における柱部の側面に沿って張り出した接合材を備えている、
ことを特徴とする請求項1または2に記載の配線基板。
On the back surface side of the substrate body in the gap, the substrate body and the heat radiating member are joined, and a bonding material that protrudes along the side surface of the column portion in the heat radiating member is provided.
The wiring board according to claim 1 or 2, wherein
請求項1〜3の何れか一項に記載の前記配線基板を縦横に複数個配列した製品領域と、
上記製品領域の周囲に位置し、前記絶縁材からなる耳部と、を備えている、
ことを特徴とする多数個取り配線基板。
A product region in which a plurality of the wiring boards according to any one of claims 1 to 3 are arranged vertically and horizontally;
Located around the product area, and comprising ears made of the insulating material,
A multi-piece wiring board characterized by that.
JP2006213790A 2006-08-04 2006-08-04 Wiring substrate and multicavity wiring substrate Pending JP2008041910A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006213790A JP2008041910A (en) 2006-08-04 2006-08-04 Wiring substrate and multicavity wiring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006213790A JP2008041910A (en) 2006-08-04 2006-08-04 Wiring substrate and multicavity wiring substrate

Publications (1)

Publication Number Publication Date
JP2008041910A true JP2008041910A (en) 2008-02-21

Family

ID=39176602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006213790A Pending JP2008041910A (en) 2006-08-04 2006-08-04 Wiring substrate and multicavity wiring substrate

Country Status (1)

Country Link
JP (1) JP2008041910A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056513A (en) * 2008-07-28 2010-03-11 Kyocera Corp Method for manufacturing multi-piece wiring board, and multi-piece wiring board, wiring board and electronic device
JP2012231105A (en) * 2011-04-15 2012-11-22 Kyocera Corp Molded body and multi-piece wiring board
JP2015195672A (en) * 2014-03-31 2015-11-05 富士電機株式会社 Electric power conversion system
JP2016096329A (en) * 2014-11-14 2016-05-26 インテル・コーポレーション Heat removal from multiple optical devices
JP2018125515A (en) * 2017-02-03 2018-08-09 株式会社デンソー Electronic device
JP2020108192A (en) * 2018-12-26 2020-07-09 株式会社豊田自動織機 Circuit substrate configuration body
CN111615866A (en) * 2018-01-22 2020-09-01 海拉有限双合股份公司 Circuit board heat sink structure and method therefor
WO2020203665A1 (en) * 2019-04-02 2020-10-08 三菱電機株式会社 Composite printed wiring board, and manufacturing method for same
WO2021091144A1 (en) * 2019-11-04 2021-05-14 Hanon Systems A connecting element for connecting a circuit board to a heat sink and method of establishing the connection

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05206338A (en) * 1991-10-08 1993-08-13 Lsi Logic Corp Assembly of semiconductor device provided with heat sink
JPH06268099A (en) * 1993-03-12 1994-09-22 Shinko Electric Ind Co Ltd Ceramic package for semiconductor device
JPH0778901A (en) * 1993-06-18 1995-03-20 Sumitomo Electric Ind Ltd Semiconductor device
JPH1029687A (en) * 1996-07-12 1998-02-03 Ngk Spark Plug Co Ltd Package for electronic part
JPH10321759A (en) * 1997-05-15 1998-12-04 Ngk Spark Plug Co Ltd Package body for electronic component and package for electgronic component
JPH11251483A (en) * 1998-03-06 1999-09-17 Hitachi Ltd Semiconductor device
JP2000058714A (en) * 1998-08-12 2000-02-25 Nec Corp Carrier for microwave semiconductor element and matching circuit board and microwave semiconductor device mounted thereon
JP2004259800A (en) * 2003-02-25 2004-09-16 Kyocera Corp Wiring board
JP2006073842A (en) * 2004-09-03 2006-03-16 Hitachi Aic Inc Wiring board

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05206338A (en) * 1991-10-08 1993-08-13 Lsi Logic Corp Assembly of semiconductor device provided with heat sink
JPH06268099A (en) * 1993-03-12 1994-09-22 Shinko Electric Ind Co Ltd Ceramic package for semiconductor device
JPH0778901A (en) * 1993-06-18 1995-03-20 Sumitomo Electric Ind Ltd Semiconductor device
JPH1029687A (en) * 1996-07-12 1998-02-03 Ngk Spark Plug Co Ltd Package for electronic part
JPH10321759A (en) * 1997-05-15 1998-12-04 Ngk Spark Plug Co Ltd Package body for electronic component and package for electgronic component
JPH11251483A (en) * 1998-03-06 1999-09-17 Hitachi Ltd Semiconductor device
JP2000058714A (en) * 1998-08-12 2000-02-25 Nec Corp Carrier for microwave semiconductor element and matching circuit board and microwave semiconductor device mounted thereon
JP2004259800A (en) * 2003-02-25 2004-09-16 Kyocera Corp Wiring board
JP2006073842A (en) * 2004-09-03 2006-03-16 Hitachi Aic Inc Wiring board

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010056513A (en) * 2008-07-28 2010-03-11 Kyocera Corp Method for manufacturing multi-piece wiring board, and multi-piece wiring board, wiring board and electronic device
JP2012231105A (en) * 2011-04-15 2012-11-22 Kyocera Corp Molded body and multi-piece wiring board
JP2015195672A (en) * 2014-03-31 2015-11-05 富士電機株式会社 Electric power conversion system
JP2016096329A (en) * 2014-11-14 2016-05-26 インテル・コーポレーション Heat removal from multiple optical devices
JP2018125515A (en) * 2017-02-03 2018-08-09 株式会社デンソー Electronic device
CN111615866A (en) * 2018-01-22 2020-09-01 海拉有限双合股份公司 Circuit board heat sink structure and method therefor
CN111615866B (en) * 2018-01-22 2024-06-11 海拉有限双合股份公司 Circuit board radiator structure and method therefor
JP2020108192A (en) * 2018-12-26 2020-07-09 株式会社豊田自動織機 Circuit substrate configuration body
WO2020203665A1 (en) * 2019-04-02 2020-10-08 三菱電機株式会社 Composite printed wiring board, and manufacturing method for same
JPWO2020203665A1 (en) * 2019-04-02 2021-09-13 三菱電機株式会社 Composite printed wiring board and its manufacturing method
US20220151072A1 (en) * 2019-04-02 2022-05-12 Mitsubishi Electric Corporation Composite printed wiring board and method of manufacturing the same
US11785718B2 (en) 2019-04-02 2023-10-10 Mitsubishi Electric Corporation Composite printed wiring board and method of manufacturing the same
WO2021091144A1 (en) * 2019-11-04 2021-05-14 Hanon Systems A connecting element for connecting a circuit board to a heat sink and method of establishing the connection

Similar Documents

Publication Publication Date Title
JP4856470B2 (en) Wiring board
JP2008041910A (en) Wiring substrate and multicavity wiring substrate
JP4085917B2 (en) Circuit components for high thermal conductivity light emitting devices and high heat dissipation modules
CN107331659B (en) LED circuit board, terminal equipment and manufacturing method of LED circuit board
JP6499277B2 (en) Optical device mounting package, electronic device and electronic module
JP2009071013A (en) Mounting substrate for light emitting element
JP2007214162A (en) Wired substrate, and method for manufacturing same
KR101986855B1 (en) Circuit for a light emitting component and method of manufacturing the same
JP2008172113A (en) Wiring substrate
JP5455028B2 (en) Circuit board structure
JP2006287126A (en) Led lamp and its unit sheet manufacturing method
JP6597476B2 (en) Wiring substrate manufacturing method, wiring substrate, and light-emitting device using the same.
JP2017212316A (en) Metal-ceramic bonding substrate and manufacturing method thereof
JP2008016593A (en) Wiring board for mounting light emitting element
JP6068645B2 (en) Wiring board and electronic device
JP2008130946A (en) Multiple patterning ceramic substrate, and ceramic wiring substrate and method of manufacturing the same
JP6713890B2 (en) Wiring board and manufacturing method thereof
JP6613089B2 (en) Wiring board and manufacturing method thereof
JP2008041811A (en) Wiring circuit board, multiple-chip wiring circuit board, and method for manufacturing the wiring board
TW200529709A (en) PCB mounted a radiator and LED package using the PCB and method manufacturing them
JP2007251017A (en) Wiring substrate, multipartite wiring substrate, and manufacturing method thereof
CN217933833U (en) LED chip packaging substrate and LED chip module
JP5209856B2 (en) Wiring board
JP2013008826A (en) Wiring board for light emitting element mounting and manufacturing method of the same
JP6605973B2 (en) Electronic component mounting package, electronic device and electronic module

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090309

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090317

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090721