JP2008039766A5 - - Google Patents

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Publication number
JP2008039766A5
JP2008039766A5 JP2007175584A JP2007175584A JP2008039766A5 JP 2008039766 A5 JP2008039766 A5 JP 2008039766A5 JP 2007175584 A JP2007175584 A JP 2007175584A JP 2007175584 A JP2007175584 A JP 2007175584A JP 2008039766 A5 JP2008039766 A5 JP 2008039766A5
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JP
Japan
Prior art keywords
beam irradiation
electron beam
irradiation apparatus
light
cathode
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JP2007175584A
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English (en)
Japanese (ja)
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JP5294293B2 (ja
JP2008039766A (ja
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Priority to JP2007175584A priority Critical patent/JP5294293B2/ja
Priority claimed from JP2007175584A external-priority patent/JP5294293B2/ja
Publication of JP2008039766A publication Critical patent/JP2008039766A/ja
Publication of JP2008039766A5 publication Critical patent/JP2008039766A5/ja
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JP2007175584A 2006-07-10 2007-07-03 電子線照射装置 Active JP5294293B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007175584A JP5294293B2 (ja) 2006-07-10 2007-07-03 電子線照射装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006189627 2006-07-10
JP2006189627 2006-07-10
JP2007175584A JP5294293B2 (ja) 2006-07-10 2007-07-03 電子線照射装置

Publications (3)

Publication Number Publication Date
JP2008039766A JP2008039766A (ja) 2008-02-21
JP2008039766A5 true JP2008039766A5 (https=) 2010-07-29
JP5294293B2 JP5294293B2 (ja) 2013-09-18

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ID=39174918

Family Applications (1)

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JP2007175584A Active JP5294293B2 (ja) 2006-07-10 2007-07-03 電子線照射装置

Country Status (1)

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JP (1) JP5294293B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016048000A2 (ko) * 2014-09-22 2016-03-31 전남대학교산학협력단 광 발생 장치
JP2017053823A (ja) 2015-09-11 2017-03-16 株式会社東芝 電子線照射装置
RU2018136347A (ru) * 2016-04-14 2020-05-14 Фелдрайх Каро Руиз Аб Аппарат для радиационной терапии, включающий модуль ионизации и источник ультрафиолетового света
US9984846B2 (en) * 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
WO2018043709A1 (ja) * 2016-09-02 2018-03-08 株式会社東芝 加速器、加速器の運転方法および加速器を用いた半導体の製造方法
JP2023135506A (ja) * 2022-03-15 2023-09-28 ダイキン工業株式会社 出射装置、浄化装置及び空気調和機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0619958B2 (ja) * 1987-04-28 1994-03-16 キヤノン株式会社 電子ビーム描画装置
JP2598730B2 (ja) * 1991-09-11 1997-04-09 株式会社荏原総合研究所 微粒子の荷電方法及び装置
JP2648538B2 (ja) * 1991-10-25 1997-09-03 浜松ホトニクス株式会社 ２次元の電子源を利用した検査装置
JP2001057168A (ja) * 1999-08-19 2001-02-27 Sumitomo Heavy Ind Ltd 加速空洞を有する電子銃及び電子ビーム発生方法
JP2001143648A (ja) * 1999-11-17 2001-05-25 Hitachi Ltd 光励起電子線源および電子線応用装置
JP3810656B2 (ja) * 2001-07-23 2006-08-16 株式会社神戸製鋼所 微小ｘ線源
JP2004095311A (ja) * 2002-08-30 2004-03-25 Ishikawajima Harima Heavy Ind Co Ltd 電子線発生装置

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