JP2008032668A5 - - Google Patents

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Publication number
JP2008032668A5
JP2008032668A5 JP2006225866A JP2006225866A JP2008032668A5 JP 2008032668 A5 JP2008032668 A5 JP 2008032668A5 JP 2006225866 A JP2006225866 A JP 2006225866A JP 2006225866 A JP2006225866 A JP 2006225866A JP 2008032668 A5 JP2008032668 A5 JP 2008032668A5
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JP
Japan
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JP2006225866A
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JP2008032668A (ja
JP4888807B2 (ja
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Publication of JP2008032668A5 publication Critical patent/JP2008032668A5/ja
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JP2006225866A 2006-07-26 2006-07-26 走査型形状計測機 Expired - Fee Related JP4888807B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006225866A JP4888807B2 (ja) 2006-07-26 2006-07-26 走査型形状計測機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006225866A JP4888807B2 (ja) 2006-07-26 2006-07-26 走査型形状計測機

Publications (3)

Publication Number Publication Date
JP2008032668A JP2008032668A (ja) 2008-02-14
JP2008032668A5 true JP2008032668A5 (ja) 2009-05-07
JP4888807B2 JP4888807B2 (ja) 2012-02-29

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ID=39122234

Family Applications (1)

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JP2006225866A Expired - Fee Related JP4888807B2 (ja) 2006-07-26 2006-07-26 走査型形状計測機

Country Status (1)

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JP (1) JP4888807B2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5425451B2 (ja) * 2008-12-01 2014-02-26 株式会社ディスコ レーザ加工装置
JP2010217113A (ja) * 2009-03-18 2010-09-30 Disco Abrasive Syst Ltd 断面形状測定装置
JP2010266407A (ja) * 2009-05-18 2010-11-25 Disco Abrasive Syst Ltd 高さ検出装置
JP2010271071A (ja) * 2009-05-19 2010-12-02 Disco Abrasive Syst Ltd チャックテーブルに保持された被加工物の計測装置およびレーザー加工機
JP6236721B2 (ja) * 2013-02-12 2017-11-29 藤垣　元治 形状計測装置および形状計測方法
JP6420600B2 (ja) 2014-09-02 2018-11-07 株式会社ミツトヨ 光学観察装置及び光学観察方法
CN105865372A (zh) * 2016-06-16 2016-08-17 四川理工学院 一种管道圆度值自动检测系统及检测方法
CN106152968B (zh) * 2016-06-16 2019-01-01 四川理工学院 一种管道圆度值自动检测方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1198660B (it) * 1983-08-02 1988-12-21 Ottica Ist Naz Profilometro ottico multifocale per dispersione
JP3144661B2 (ja) * 1992-09-29 2001-03-12 富士通株式会社 立体電極外観検査装置
JPH07229720A (ja) * 1994-02-21 1995-08-29 Nec Corp ３次元形状測定装置
JP4304713B2 (ja) * 2000-07-10 2009-07-29 日立化成工業株式会社 光導波路デバイスの製造方法
JP2006078457A (ja) * 2004-09-06 2006-03-23 Oputouea Kk 高さ測定を有する基板検査装置
JP2006091507A (ja) * 2004-09-24 2006-04-06 Nikon Corp 共焦点顕微鏡

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