JP2008023723A - Method and equipment for inspection of printing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable discrimination of the cause of a printing failure at the time when it occurs in screen printing equipment. <P>SOLUTION: An X-ray image pickup device such as an X-ray inspection camera 55 which X-rays a prescribed sphere of the superposed portions of a mask sheet having an opening part of a prescribed pattern and a substrate, an image pickup device control means 67 which makes the X-ray image pickup device pick up an image after a paste filling motion for the mask sheet by a squeegee and before a substrate separating motion for the mask sheet, and an inspection means 68, are provided. The inspection means 68 judges the appropriateness of the state of filling of paste in the opening part, based on an X-ray penetration image acquired on the basis of the image pickup by the X-ray image pickup device controlled by the image pickup device control means 67. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method and apparatus for inspecting whether printing has been properly performed in a screen printing apparatus.

  Conventionally, a screen printing apparatus that prints paste such as cream solder on a printed circuit board is generally known, and this screen printing apparatus is formed by stacking a mask sheet having a predetermined pattern of openings and a substrate, After the paste supplied on the mask sheet is filled into the opening with a squeegee, the paste is applied to the substrate through the opening, and then the substrate is separated from the mask sheet, and then the paste is printed. The obtained substrate is obtained.

  A method and apparatus for inspecting the printing state of a substrate printed by such a screen printing apparatus are also known in the art.

For example, in the inspection method disclosed in Patent Document 1 below, the substrate before being carried into the screen printing apparatus and the substrate that has been carried out after being printed by the screen printing apparatus are respectively imaged and the substrate before printing is imaged. An image and an image of the printed substrate are acquired, a difference image between the two is obtained, and the application state (printing state) of the paste on the substrate is inspected from the image.
JP 2006-49845 A

  In the conventional inspection method as shown in the above-mentioned Patent Document 1, the quality of printing can be determined, but the cause cannot be specified when there is a printing defect.

  That is, the cause of printing failure is that when the paste supplied on the mask sheet is filled into the opening with a squeegee, the filling is not performed correctly, and when the substrate is separated from the mask sheet, There may be a case where it remains in the opening and is not correctly transferred to the substrate (clogging of the mask sheet), but it has been impossible to distinguish in which case the printing failure is caused. For this reason, there is a disadvantage that it is difficult to take a countermeasure according to the cause of the printing failure.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a print inspection method and a print inspection apparatus capable of determining the cause when a printing defect occurs.

  In order to solve the above-described problem, the printing inspection method of the present invention is configured such that a mask sheet having a predetermined pattern of openings and a substrate are overlaid, and then the paste supplied on the mask sheet is applied to the openings by a squeegee. In the screen printing apparatus in which the paste is applied to the substrate through the opening by the filling operation and then the substrate is separated from the mask sheet to obtain the substrate on which the paste is printed. An inspection object image obtained by capturing an X-ray transmission image by imaging a predetermined range of the overlapping portion of the mask sheet including the opening and the substrate after the operation and before the substrate separation operation by the X-ray imaging device X-ray imaging process for acquisition and filling for determining the quality of the paste filling state for the opening based on the X-ray transmission image obtained in the X-ray imaging process Those having a state inspection process.

  According to this printing inspection method, after the filling operation and before the substrate separation operation, the paste is properly filled in the opening of the mask sheet based on the X-ray transmission image picked up by the X-ray imaging device. It is possible to determine whether or not Therefore, it is possible to determine when a defective filling of the paste into the opening has occurred as a cause of the printing failure.

  In this method, after the mask sheet and the substrate are overlapped and before the filling, the predetermined range is imaged by an X-ray imaging device and an X-ray transmission image is acquired to obtain an X-ray for comparison image acquisition. A line imaging process is further provided, and in the filling state inspection process, a difference image between the image acquired in the X-ray imaging process for acquiring the comparative image and the image acquired in the X-ray imaging process for acquiring the inspection target image It is preferable to determine whether or not this difference image is in a normal range.

  In this way, the mask sheet and the wiring pattern of the substrate are canceled out of the X-ray transmission image, and only the paste filled in the opening of the mask sheet is extracted. Can be done accurately.

  Also, a pre-overlay mask sheet imaging step for imaging the predetermined range of the mask sheet before the mask sheet and the substrate are overlaid, and a post-separation mask for imaging the predetermined range of the mask sheet after the substrate separation operation A difference image between the image acquired in the sheet imaging step and the image acquired in the post-separation mask sheet imaging step and the image acquired in the pre-overlay mask sheet imaging step is obtained, and clogging of the mask sheet is determined based on the difference image. It is preferable to further include a clogging inspection step.

  In this way, when the substrate separation operation is performed, it is determined whether or not the paste detachment from the opening (transfer of the paste to the substrate) has been performed satisfactorily. This can be determined when clogging occurs. Therefore, the filling state inspection process and the clogging inspection process can accurately determine whether the cause of printing failure is paste filling failure or separation failure.

  In addition, a board imaging process for imaging the board after the board separation operation to obtain an image of the board on which the paste has been printed, and whether the printed state of the board is good or not based on the board image obtained in the board imaging process. It is preferable to further include a printing state inspection step for determining whether or not.

  If it does in this way, while the presence or absence of a printing defect will be determined by a printing state inspection process, the cause of a printing defect will be determined by the said filling state inspection process (and clogging inspection process).

  In addition, the printing inspection apparatus of the present invention includes a mask sheet having a predetermined pattern of openings and a substrate, and then a filling operation for filling the openings with the paste supplied on the mask sheet with a squeegee. In a screen printing apparatus that obtains a substrate on which a paste is printed through a substrate separation operation for separating the substrate from the mask sheet after applying the paste on the substrate through the opening, the mask sheet including the opening X-ray imaging apparatus for X-ray imaging of a predetermined range, imaging apparatus control means for performing imaging by the X-ray imaging apparatus after the filling operation and before the substrate separation operation, and imaging by the X-ray imaging apparatus Image processing for obtaining an inspection object image which is an X-ray transmission image of the predetermined range after the filling operation and before the substrate separation operation Stage and one in which and a checking means for judging the quality of the filling state of the paste with respect to the opening based on the acquired target image by the image processing means.

  According to this inspection apparatus, the above-described inspection method is effectively executed, and this can be determined when a defective filling of the paste into the opening of the mask sheet occurs as a cause of the printing failure.

  In this inspection apparatus, the imaging apparatus control means causes the X-ray imaging apparatus to perform imaging after the mask sheet and the substrate are stacked and before the filling, and the image processing means A comparison image obtained by imaging with the X-ray imaging apparatus before the filling and the inspection target image are respectively acquired, and the inspection means has a difference image between the inspection target image and the comparison image in a normal range. It is preferable to determine whether the filling state is good or not based on whether or not there is.

  In this way, when the inspection by the inspection means is performed, an image of only the paste filled in the opening of the mask sheet is extracted, so that the inspection of the filling state can be performed accurately.

  In addition, it is preferable to further include substrate imaging means for imaging the substrate in order to obtain an image of the substrate on which the paste is printed after the substrate separation operation.

  If it does in this way, while the presence or absence of a printing defect will be judged based on the picture of the substrate after printing imaged by the above-mentioned board image pick-up means, the cause of a printing defect will be judged by judging the quality of the paste filling state by the inspection means. Determined.

  As described above, according to the printing inspection method and the printing inspection apparatus of the present invention, it is possible to determine the cause of printing failure in the screen printing apparatus, and to take an appropriate countermeasure according to the cause.

  A preferred embodiment of the present invention will be described with reference to the drawings.

  1 and 2 schematically show a screen printing apparatus 1, FIG. 1 is a side view of a main part with a cover removed, and FIG. 2 shows the screen printing apparatus 1 in a front view.

  As shown in these drawings, a printing stage 10 is provided on a base 2 of a screen printing apparatus 1 (hereinafter, abbreviated as a printing apparatus 1), and on both sides of the printing stage 10, a substrate to be processed is provided. An upstream conveyor 11 and a downstream conveyor 12 for carrying a certain printed board P (hereinafter abbreviated as a board P) onto and out of the printing stage 10 are arranged along the transport line. In the following description, the conveyance direction of the substrate P by the conveyors 11 and 12 is the X-axis direction, the direction orthogonal to this on the horizontal plane is the Y-axis direction, and the direction orthogonal to both the X-axis and Y-axis directions is Z. The description will proceed as an axial direction.

  The printing stage 10 holds the substrate P and positions it from the lower side with respect to the mask sheet 35, which will be described later, and is mainly composed of a main conveyor 13, a lifting table 28, a clamp mechanism 14 and the like which will be described later. .

  The printing stage 10 is supported by a four-axis unit 20 and is moved to the X axis, the Y axis, the Z axis, and the R axis (rotation around the Z axis) by the operation of the unit 20.

  More specifically, a rail 21 is disposed on the base 2 along the Y-axis direction in a horizontal plane, and a Y-axis table 22 is slidably attached to the rail 21. A ball screw mechanism (not shown) provided on the base 2 is connected to the Y-axis table 22, and the Y-axis table 22 is moved in the Y-axis direction with respect to the base 2 by driving the ball screw mechanism. Is configured to move.

  A rail 23 is disposed on the Y-axis table 22 along the X-axis direction, and an X-axis table 24 is slidably attached to the rail 23. A ball screw mechanism (not shown) provided on the Y-axis table 22 is connected to the X-axis table 24, and the X-axis table 24 is driven with respect to the Y-axis table 22 by driving the ball screw mechanism. Configured to move in the direction.

  An R-axis table 26 is provided on the X-axis table 24 so as to be rotatable around a vertical line (Z-axis direction). The R-axis table 26 is Z with respect to the X-axis table 24 by driving means (not shown). It is designed to rotate around the axis.

  A slide column 27 is slidably attached to the R-axis table 26 along the vertical direction (Z-axis direction), and an elevation table 28 is attached to the upper portion of the slide column 27. A ball screw mechanism 29 is provided between the elevating table 28 and the R-axis table 26. The elevating table 28 is guided to the R-axis table 26 while being guided by the slide column 27 by driving the ball screw mechanism 29. It is configured to move in the Z-axis direction (vertical direction).

  Thus, the 4-axis unit 20 moves the printing stage 10 to the X axis, the Y axis, the Z axis, and the R axis (rotation about the Z axis) by individually driving the tables 22, 24, 26, and 28. It is configured to let you.

  On the elevating table 28, a pair of main conveyors 13 are provided along the X-axis direction, and a clamp mechanism 14, a positioning mechanism 15, and a placement table 30 are provided. As described above, the printing stage 10 for holding the substrate P is constituted by the lifting table 28, the main conveyor 13, and the like.

  The main conveyor 13 moves integrally with the lifting / lowering table 28, and the lifting / lowering table 28 is at a predetermined home position (a lower end position and predetermined in the X-axis, Y-axis, and R-axis directions). It is configured to be arranged in the X-axis direction with respect to the upstream conveyor 11 and the downstream conveyor 12 in a state set at the origin position). Then, when the elevating table 28 is set to the home position in this way, the substrate P is carried from the upstream conveyor 11 to the printing stage 10 (main conveyor 13), and the substrate P is sent from the printing stage 10 to the downstream conveyor 12. Is being carried out.

  The clamp mechanism 14 holds the substrate P in a fixed manner during the operation, and has a pair of clamp pieces 14a that can contact and separate in the Y-axis direction. The clamp pieces 14a sandwich the substrate P from both sides in the Y-axis direction. It is comprised so that it may fix. The clamp mechanism 14 uses an air cylinder as a drive source, and is configured to be switched between a clamped state in which the clamp pieces 14a approach each other and an unclamped state in which the clamp pieces 14a are separated from each other by the operation of the air cylinder. .

  Although not shown in detail, the positioning mechanism 15 positions the substrate P by restricting the bending of the substrate P and the like before the substrate P is clamped by the clamp mechanism 14.

  The mounting table 30 supports the substrate P by lifting the substrate P on the main conveyor 13 from below. The mounting table 30 is supported by the slide column 31 so as to be movable up and down on the lift table 28, and is connected to a ball screw mechanism (not shown) provided between the table 30 and the lift table 28. The ball screw mechanism is driven to move in the Z-axis direction (vertical direction) with respect to the lifting table 28.

  On the other hand, a mask holding unit 16, a squeegee unit 17, an imaging unit 18 and the like are arranged above the printing stage 10 and the like.

  The mask holding unit 16 holds the mask sheet 35, and includes a mask support base fixed to the frame 40 disposed above the base 2 and a mask clamp (not shown) provided thereon. The mask sheet 35 is configured to be clamped in a state of being stretched horizontally above the printing stage 10.

  The squeegee unit 17 expands while rolling (kneading) paste such as cream solder or conductive paste supplied onto the mask sheet 35 from a nozzle (not shown) on the mask sheet 35.

  The squeegee unit 17 has rails 41 extending in the Y-axis direction, a beam 42 mounted in a state straddling the rails 41 and moved in the Y-axis direction by a driving mechanism (not shown), and the paste is expanded on the mask sheet 35. A pair of squeegees 43 and 43 for moving the squeegees 43 and 43, and an elevating mechanism for individually raising and lowering the squeegees 43 and 43. During printing, the beams 42 reciprocate in the Y-axis direction. The paste is expanded on the mask sheet 35 by sliding the squeegees 43 alternately along the surface of the mask sheet 35.

  The imaging unit 18 is for imaging the substrate P and the mask sheet 35 and is provided below the mask holding unit 16.

  The imaging unit 18 includes a camera head 50 integrally including a mask recognition camera 51 and a substrate recognition camera 52, and a drive mechanism that moves the camera head 50. The camera head 50 is moved in the X-axis direction and The mask sheet 35 and the substrate P are imaged by moving in a plane in the Y-axis direction.

  The mask recognition camera 51 and the substrate recognition camera 52 are both composed of a CCD camera or the like equipped with an illumination device. Among these cameras, the mask recognition camera 51 captures a fiducial mark for position recognition provided on the lower surface of the mask sheet 35 and is provided upward. On the other hand, the substrate recognition camera 52 (substrate imaging means) images various marks such as fiducial marks and bad marks for position recognition provided on the substrate P, and at the time of inspection (print inspection) of the printed state of the substrate. The image of each print position of the substrate P is provided downward.

  Further, the printing apparatus 1 is provided with an X-ray imaging apparatus. This X-ray imaging apparatus includes an X-ray inspection camera 55 and an X-ray generator 56. The X-ray inspection camera 55 is movably disposed above the mask sheet 35 and is attached downward to the lower end portion of the squeegee unit 17, for example, as shown in FIGS. On the other hand, the X-ray generator 56 is disposed below the mask sheet 35, and is installed on a lift table 28 below the placement table 30, for example, as shown in FIG. The placement table 30 is made of a material having a high X-ray transmittance, and X-rays irradiated upward from the X-ray generator 56 can pass through the placement table 30 and the substrate P.

  As for the arrangement of the X-ray inspection camera 55 and the X-ray generator 56, the X-ray inspection camera 55 may be positioned below the mask sheet 35 and the X-ray generator 56 may be positioned above the mask sheet 35, contrary to the illustrated example. .

  FIG. 3 schematically shows a control system including a controller 60 and the like incorporated in the printing apparatus in a block diagram.

  As shown in this figure, the controller 60 provided in the printing apparatus is provided in each of the servo motors 71 such as the X-axis, Y-axis, Z-axis, and R-axis provided in the 4-axis unit 20 and the imaging unit 18. The X-axis and Y-axis servomotors 72 and the servomotor 73 provided in the squeegee unit 17 are connected, and various actuators 74 and various sensors 75 included in the printing apparatus are connected. The X-ray generator 56, the mask recognition camera 51, the substrate recognition camera 52, and the X-ray inspection camera 55 are connected. Further, a display device 76 composed of a display or the like is also connected.

  The controller 60 includes an arithmetic processing unit 61, a motor driving unit 62, an I / O processing unit 63, an image processing unit 64, a storage unit 65, and a display output unit 66.

  The motor driving unit 62 controls the servo motors 71, 72, and 73, thereby adjusting the position of the substrate P by the four-axis unit 20 prior to printing, and imaging for imaging the mask sheet 35 and the substrate P. The movement of the unit 18 and the movement of the squeegee unit 17 during printing can be controlled.

  The I / O processing unit 63 outputs a drive signal to the actuator 74 and inputs a signal from the sensor 75. The image processing unit 64 processes the images when the cameras 51, 52, and 53 are picked up. The display output unit 66 outputs a signal for causing the display device 76 to perform display.

  The arithmetic processing unit 61 comprehensively controls the motor driving unit 62 and the like and performs various arithmetic processes. Further, the arithmetic processing unit 61 includes an imaging device control unit 67 and an inspection unit 68.

  The imaging device control unit 67 controls the X-ray imaging device so as to perform X-ray imaging of a predetermined range of the mask sheet 35 including the opening at a predetermined time. In this case, in this embodiment, the X-ray generator 56 is operated, the squeegee unit 17 is moved in the Y direction above the mask sheet 35, and the X-ray inspection camera 55 attached to the squeegee unit 17 performs X-rays. Let the shoot take place. At least solder (paste) filling operation (operation of filling the opening of the mask sheet 35 with the squeegee 43 with the paste supplied on the mask sheet 35 in a state where the mask sheet 35 and the substrate P are overlapped). The X-ray imaging is performed after the substrate separation operation (operation for separating the substrate P from the mask sheet 35).

  Further, the inspection means 68 determines whether or not the solder (paste) is filled in the opening of the mask sheet 35 based on the X-ray transmission image (inspection image) acquired through the image processing unit 64 by the X-ray imaging. Determine.

  In the present embodiment, in addition to the X-ray imaging performed after the filling operation and before the substrate separation operation, immediately before the filling operation (after the mask sheet 35 and the substrate P are overlaid) Prior to the filling operation, X-rays are also taken to obtain a comparative image, and the quality of the filling state is determined based on the difference image between the inspection image and the comparative image. Further, X-ray imaging is performed both before and after the mask sheet 35 and the substrate P are overlapped, and after the substrate separation operation, and the clogging of the mask sheet 35 is also determined from the difference image of the X-ray transmission images. Like to do.

  Such an inspection by X-ray imaging may be performed for each substrate on which printing is performed, but may be performed periodically, for example, every several substrates.

  An example of printing control and inspection processing performed by the controller 60 will be described with reference to the flowchart of FIG.

  When this process starts, the controller 60 first loads the substrate P onto the printing stage 10 and fixes the substrate P by the clamp mechanism 14 in step S1. In step S2, the camera head 50 is moved so that the substrate recognition camera 52 captures and recognizes the mark on the substrate P, and the mask recognition camera 51 captures and recognizes the fiducial mark on the mask sheet 35. .

  Next, in step S3, it is determined whether or not X-ray inspection (inspection by X-ray imaging) should be performed. Here, for example, when X-ray inspection is performed periodically, it is determined whether or not it is time to perform X-ray inspection.

  If the determination in step S3 is YES, the X-ray inspection process in steps S4 to S14 is performed.

  That is, before the mask alignment described later, the first X-ray transmission imaging (X-ray imaging) is performed by controlling the X-ray imaging apparatus (operation of the X-ray generator 56 and movement and imaging of the X-ray inspection camera 55). Perform (step S4). Then, the substrate P is aligned with the mask sheet 35 and the mask is overlaid (step S5), and then the second X-ray transmission imaging is performed (step S6).

  Next, a solder filling operation (printing) is performed in which the solder (paste) supplied on the mask sheet 35 is filled into the opening of the mask sheet by the squeegee 43 (step S7), and then the third X-ray transmission is performed. Imaging is performed (step S8). Then, a difference image between the inspection target image acquired by the third X-ray transmission imaging and the comparison image acquired by the second X-ray transmission imaging is acquired (step S9), and the mask sheet is obtained by the difference image. The solder filling state in the opening of 35 is inspected (step S10). In this case, whether the filling state is good or not is determined based on whether or not the solder filling range in each opening of the mask sheet 35 is in a normal range examined in advance.

  When it is determined that there is a solder filling failure in this inspection, the fact is displayed on the display device 76 and also stored in the storage unit 65 as a history.

  Next, after performing a substrate separation operation (step S11) for separating the substrate P from the mask sheet 35 under the control of the four-axis unit 20, a fourth X-ray transmission imaging (X-ray imaging) is performed (step S12). Then, a difference image between the image acquired by the fourth X-ray transmission imaging and the image acquired by the first X-ray transmission imaging is acquired (step S13). The clogging is inspected (step S14). In this case, whether or not the solder remains in each opening of the mask sheet 35 is examined based on the difference image, so that the solder is successfully removed from the opening (transferred to the substrate P) or the solder remains. To determine if the opening is clogged.

  When it is determined in this inspection that there has been a solder separation failure, this is displayed on the display device 76 and stored in the storage unit 65 as a history.

  After the processing including the above printing and X-ray inspection, the process proceeds to step S15, and the printed state of the solder on the substrate P is inspected based on the imaging of the substrate P by the substrate recognition camera 52. Next, in step S16, the clamping of the substrate P by the clamp mechanism 14 is released, and the substrate P is carried out. Then, the production of the substrate is finished.

  When the determination in step S3 is NO, mask alignment (step S17) is performed, and then the solder filling operation (printing) to the opening of the mask sheet 35 by the squeegee 43 is performed (step S18). Next, after performing a substrate separation operation (step S19), the process proceeds to step S15.

  According to the apparatus and method of this embodiment as described above, the solder filling state is appropriately filled in the opening of the mask sheet 35 by inspection of the solder filling state based on X-ray transmission imaging after solder filling (step S10). Since it is determined whether or not it has been performed, the operator can know the cause of the printing failure.

  That is, whether or not the solder is correctly printed on the substrate P can be determined by the print inspection in step 15 (inspection based on imaging by the substrate recognition camera 52), and this print inspection has been performed conventionally. It is impossible to determine whether there is a printing defect due to poor solder filling in the mask sheet 35 or poor solder separation. On the other hand, in the present embodiment, it is possible to determine when the printing failure is due to the solder filling failure by the inspection of the solder filling state based on the X-ray transmission imaging (step S10). Then, when there is a solder filling defect, it is displayed on the display device 76 so that the operator can know this and take appropriate countermeasures.

  In this inspection, if a difference image between the third X-ray transmission imaging (imaging after solder filling) and the second X-ray transmission imaging (imaging before solder filling) is acquired as described above. In the X-ray transmission image, the mask sheet 35 and the wiring pattern of the substrate P are canceled out, and an image of only the solder filled in the opening of the mask sheet 35 is extracted. it can.

  Further, in the present embodiment, solder separation (clogging) is performed based on a difference image between the fourth X-ray transmission imaging (imaging after separating the substrates) and the first X-ray transmission imaging (imaging before mask alignment). Since this inspection (step S14) is performed, if the printing failure is caused by a solder separation failure, this can be accurately determined. Even if there is a plate separation failure, this is displayed on the display device 76, so that the operator can know this and take appropriate countermeasures.

  The specific configuration of the method and apparatus of the present invention is not limited to the above embodiment, and can be variously changed.

  For example, in the above-described embodiment, the inspection of the separation of the plate is performed together with the inspection of the filling state of the solder. The line transmission imaging (step S12) may be omitted. In this case, if it is determined in step 15 that the printing inspection is defective and if it is determined in step 10 that the solder filling state is good, the plate separation is defective. It is estimated to be.

  Alternatively, when both the inspection of the solder filling state by X-ray imaging and the inspection of the plate separation are performed, the printing inspection in step 15 can be omitted.

It is a side view which shows an example of the screen printing apparatus incorporating the printing inspection apparatus which concerns on this invention. It is a front view which shows the said screen printing apparatus. It is a block diagram which shows control systems, such as a controller, provided in the said screen printing apparatus. It is a flowchart figure which shows an example of the method of printing and a test | inspection.

Explanation of symbols

P Printed circuit board 1 Screen printing device 18 Imaging unit 35 Mask sheet 52 Substrate recognition camera 55 X-ray inspection camera 56 X-ray generation device 60 Controller 64 Image processing unit 67 Imaging device control means 68 Inspection means

Claims (7)

After a mask sheet having a predetermined pattern of openings and a substrate are overlaid, the paste is applied onto the substrate through the openings by a filling operation in which the paste supplied on the mask sheet is filled into the openings by a squeegee. Then, through a substrate separation operation that separates the substrate from the mask sheet, in a screen printing apparatus that obtains a substrate on which the paste is printed,
After the filling operation and before the substrate separation operation, an inspection is performed in which an X-ray imaging device acquires an X-ray transmission image by imaging a predetermined range of the overlapping portion of the mask sheet including the opening and the substrate. An X-ray imaging process for acquiring a target image;
A printing inspection method in a screen printing apparatus, comprising: a filling state inspection step of determining whether or not the paste is filled in the opening based on an X-ray transmission image obtained in the X-ray imaging step. An X-ray imaging process for obtaining a comparative image in which the mask sheet and the substrate are overlapped and before the filling, the predetermined range is imaged by an X-ray imaging device to obtain an X-ray transmission image. In addition,
In the filling state inspection process, a difference image between the image acquired in the X-ray imaging process for acquiring the comparison image and the image acquired in the X-ray imaging process for acquiring the inspection target image is obtained, and the difference image is obtained. The printing inspection method for a screen printing apparatus according to claim 1, wherein it is determined whether or not the value is in a normal range. A pre-loading mask sheet imaging step for imaging the predetermined range of the mask sheet before the mask sheet and the substrate are stacked, and a post-separation mask sheet imaging for imaging the predetermined range of the mask sheet after the substrate separation operation Process,
A clogging inspection step of obtaining a difference image between the image acquired in the post-separation mask sheet imaging step and the image acquired in the pre-overlay mask sheet imaging step and determining clogging of the mask sheet from the difference image; The print inspection method in the screen printing apparatus according to claim 1, further comprising: A substrate imaging step of imaging the substrate after the substrate separation operation to obtain an image of the substrate on which the paste is printed;
The screen according to any one of claims 1 to 3, further comprising a printing state inspection step of determining whether the printing state of the substrate is good or not based on the substrate image acquired in the substrate imaging step. A printing inspection method in a printing apparatus. After a mask sheet having a predetermined pattern of openings and a substrate are overlaid, the paste is applied onto the substrate through the openings by a filling operation in which the paste supplied on the mask sheet is filled into the openings by a squeegee. Then, through a substrate separation operation that separates the substrate from the mask sheet, in a screen printing apparatus that obtains a substrate on which the paste is printed,
An X-ray imaging apparatus for X-ray imaging of a predetermined range of the mask sheet including the opening;
Imaging device control means for performing imaging by the X-ray imaging device after the filling operation and before the substrate separation operation;
Image processing means for acquiring an inspection object image that is an X-ray transmission image of the predetermined range after the filling operation and before the substrate separation operation based on imaging by the X-ray imaging device;
A printing inspection apparatus in a screen printing apparatus, comprising: inspection means for determining whether or not the paste is filled in the opening based on an inspection target image acquired by the image processing means. The imaging apparatus control means causes the X-ray imaging apparatus to perform imaging after the mask sheet and the substrate are stacked and before the filling,
The image processing means acquires a comparison image obtained by imaging by the X-ray imaging apparatus before the filling and the inspection target image, respectively.
6. The screen according to claim 5, wherein the inspection means determines whether or not the filling state is good depending on whether or not a difference image between the inspection target image and the comparison image is in a normal range. Print inspection device in a printing device.   7. The printing inspection apparatus for a screen printing apparatus according to claim 5, further comprising substrate imaging means for imaging the substrate in order to obtain an image of the substrate on which the paste is printed after the substrate separation operation.

Images