JP2008023636A - Transfer system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer system capable of transferring workpieces to a downstream-side workpiece machining apparatus without any possibility of damaging the workpieces 2 even if there is a step between the workpiece machining apparatuses. <P>SOLUTION: This transfer system is arranged with a pair of X-axis linear motors transferring sliders in the X-axial direction in parallel with each other, has a Y-axis linear motor in a bridge member bridged between the sliders of the pair of X-axis linear motors, executes prescribed processing to a workpiece mounted to a sucker using a tool mounted to a slider of the X-axis linear motor, after the processing, connects a plurality of workpiece machining apparatuses for transferring the workpieces, and sequentially transferring the workpieces to the following-step workpiece machining apparatuses. This transfer system is characterized by having a lift transfer means provided in the connection part of the work machining apparatuses and, when transferring the workpiece, sucking the workpiece, lifting the workpiece by a prescribed distance upward from the transferring face and transferring it. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  In the present invention, a pair of X-axis linear motors that move a slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member that is bridged between the sliders of the pair of X-axis linear motors. The present invention relates to a transfer system having a workpiece machining apparatus that performs a predetermined process on a workpiece to be machined using a tool mounted on the machine.

  Prior art documents related to a linear motor and a workpiece transfer system include the following.

JP 63-213490 A JP 2000-065970 A JP 2006-082148 A

Hereinafter, a description will be given of JP-A-2006-082148.
FIG. 4 shows a workpiece processing in which a pair of X-axis linear motors are arranged in parallel at a predetermined distance, the sliders of each X-axis linear motor are bridged by a bridge member, and a Y-axis linear motor is provided on the bridge member. It is an external appearance perspective view of an apparatus.

  Reference numeral 1 denotes a housing of a workpiece processing apparatus. Protrusions 1a and 1b arranged in parallel in the X-axis direction are formed at both ends of the upper surface in the X-axis direction so that the cross-section is concave. The workpiece 2 is set at a predetermined position.

Reference numeral 31 denotes an X1-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1a, and 32 denotes an X2-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1b.
Reference numerals 41 and 42 denote sliders that run in the X-axis direction on the stators of these linear motors.

  Reference numeral 5 denotes a bridge member, which bridges between the sliders 41 and 42 and is arranged in parallel to the Y-axis direction orthogonal to the X-axis. Reference numeral 6 denotes a Y-axis linear motor having a stator disposed on the upper surface of the bridge member. Reference numeral 7 denotes a slider that runs on the stator 6 in the Y-axis direction.

  A tool (not shown) for executing predetermined processing (production, inspection of liquid crystal, semiconductor, electronic parts, etc.) on the workpiece 2 is mounted on the slider 7 of the Y-axis linear motor. XY positioning control for the workpiece 2 is performed.

However, the above-described workpiece machining apparatus has the following problems.
(1) A loader, an unloader, and a transfer device for loading and unloading the workpiece into and out of the stage are separately required as dedicated devices between the positioning stages, and the space occupied by these dedicated devices increases when the number of workpiece processing devices to be connected increases. The number of work processing devices that can be installed is limited, and space efficiency is reduced.

(2) Further, when the number of dedicated devices increases, incidental costs other than the work processing device increase, which becomes an obstacle factor for cost reduction for constructing the transfer system.

FIG. 5 shows a transfer system that achieves space efficiency and cost reduction, and is described in Japanese Patent Application Laid-Open No. 2004-267137 described in [Patent Document 3].
In FIG. 5, reference numerals 101, 102, and 103 denote workpiece processing apparatuses having the same structure connected in the X-axis direction. The workpiece 2 set in the workpiece machining apparatus 101 is transferred in the X-axis direction as indicated by an arrow P when machining on this stage is completed, and is set to the position indicated by 2 ′ in the workpiece machining apparatus 102 and is moved to this stage. Is processed.

  Further, when machining at this stage is completed, the workpiece is transferred in the X-axis direction as indicated by an arrow P ′, set to a position indicated by 2 ″ in the workpiece machining apparatus 103, and machining at this stage is executed. It is transferred in the direction of arrow P ″.

  The interface unit 201 in which the workpiece machining apparatus 101 and the workpiece machining apparatus 102 are coupled and the interface unit 202 in which the workpiece machining apparatus 102 and the workpiece machining apparatus 103 are coupled have the same recess shape as the recess 103 c of the workpiece machining apparatus 103. It is possible to connect and connect an arbitrary number of workpiece processing apparatuses with a common interface.

FIG. 6 is a plan view showing the arrangement of transfer means 301 and 302 formed in the housing of the workpiece processing apparatus in the interface unit 201 and the interface unit 202 in FIG.
The transfer means is realized by means having an actuator function for accessing and transferring a workpiece set in the upstream workpiece machining apparatus and transferring it to a predetermined position of the downstream workpiece machining apparatus.

FIG. 7 is a perspective view showing a configuration example of the transfer means. An actuator 800 is mounted on a slider 700 that travels on parallel rails 601 and 602, and a work is placed and transferred by operating arms 901 and 902 that are extended and contracted by the actuator.
FIG. 8 is a perspective view showing a state in which the operation arms 901 and 902 are extended.

Next, the workpiece machining apparatus of application number 2006-112373 related to the prior application filed on April 14, 2006, in which the suction plate 60 is used, will be described.
FIG. 9 is a plan view (a), a front view (b), and a side view (c) showing an embodiment of a workpiece machining apparatus. The same elements as those of the conventional example described with reference to FIG.

  In FIG. 9, the work 2 is displayed as a transparent body. The work 2 is disposed at a predetermined location on the suction disk 60. Reference numeral 30 denotes processing means that reciprocates in the Y-axis direction along the bridge member 5.

Reference numeral 50 denotes a tube. One end of the tube is attached to the back surface of the suction disk 60, and the other end is connected to a vacuum / pressure pump (not shown).
Reference numeral 70 denotes workpiece transfer means attached to the housing 1, and in the example shown in the figure, four are provided on opposing side surfaces in the vicinity of the longitudinal end of the rectangular workpiece 2.

The workpiece conveying means 70 is disposed at a position slightly away from the workpiece 2 during workpiece processing, and reciprocates in the direction of arrow A (see FIG. C).
In FIG. 9, the processing by the workpiece processing apparatus is completed, the bridge member 5 moves upstream, the suction state by the suction plate 60 is released, compressed gas is blown from the tube 50, and the workpiece is moved to the symbol K in the Z direction. And a tip of the workpiece transfer means 70a, 70a ′, 70b, 70b ′ extend in the direction of arrow A to support the side surface of the workpiece.

FIG. 10 shows a state in which the workpiece transfer means 70 moves in the direction of the arrow G while supporting the workpiece 2 and moves the workpiece 2 to a device downstream of the workpiece processing apparatus in which two workpieces are arranged.
In this case, the workpiece conveying means 70 itself is moved by the linear motor alone or the workpiece conveying means 70a, 70a ′ and the workpiece conveying means 70b, 70b ′ move as a pair, and the downstream workpiece conveying means 70c, 70c ′, 70d. , 70d ′, when the workpiece 2 comes in front of itself, extends the tip toward the side surface of the workpiece 2, supports the workpiece and moves it to a predetermined position.

In the state where the workpiece 2 is moving, the bridge member 5 stands by on the upstream side (the illustrated position) of each workpiece processing apparatus.
FIG. 11 shows a state in which the workpiece 2 is moved to a predetermined position of the workpiece processing apparatus on the downstream side, the workpiece conveying means 70 is separated from the side surface of the workpiece, and suction is started and the workpiece 2 is fixed to the suction plate 60. Yes.

  Further, in this example, a state is shown in which a new workpiece is fixed at a predetermined position of the upstream workpiece processing apparatus, and each workpiece 2 is processed by the processing means 30 mounted on the bridge member 5. ing.

FIG. 12 shows an example in which a stopper 73 is provided on the workpiece conveying means 70. When the processing of the workpiece is completed, the extending member 70x constituting the workpiece conveying means is moved upward in the direction of arrow B toward the upper end of the workpiece. Moving.
Next, the suction of the workpiece is released, and the workpiece 2 is lifted by the injection of the compressed gas from the arrow Z direction. The floated work is prevented from floating by the stopper 73.

Next, the extending means 70x moves in the direction of arrow E to support the workpiece 2, and in the supported state, the stopper 73 moves slightly upward to be in a non-contact state with the workpiece.
Next, the work conveying means 70 moves in the X direction to move the work.

  FIG. 13 is a plan view (a), a front view (b), and a side view (b) of an essential part showing another embodiment of the workpiece transfer means. In this example, the work conveying means 71 itself having the rotating member 72 is fixed to the housing 1, and the work is supported by the rotating member 72 and conveyed by the rotation of the rotating member 72.

  In FIG. 13, the processing by the work processing apparatus is completed, the bridge member 5 moves upstream, the suction state by the suction plate 60 is released, and compressed gas is blown from the tube 50 of the work transport means 70, so that the work 2 Shows a state in which it floats by a distance indicated by K in the arrow Z direction and abuts against the stopper 73.

FIG. 14 is a partial detailed explanatory view of the work conveying means 71. In this state, the rotating member 72 and the workpiece 2 are not in contact with each other.
Next, the stopper 73 moves slightly upward to be in a non-contact state with the workpiece 2, and the workpiece conveying means 71 moves in the direction of arrow E and contacts the side surface of the workpiece 2.
Then, the rotating member 72 rotates in the arrow C direction in the contact state, so that the workpiece 2 can move in the arrow D direction.

  FIG. 15 shows a state in which a plurality of such workpiece processing apparatuses (two in the illustrated example) are arranged in series, and the rotating member 72 rotates and the workpiece 2 is being transferred in the direction of arrow G. Shows the state. The workpiece 2 is supported by the rotating member 72 (see FIG. 5) of the conveying means 71a, 71a ′, 71b, 71b ′ before being transferred, but is supported by 71b, 71b ′, 71c, 71c ′ during the transfer. It will be in the state.

FIG. 16 shows a state in which the transfer is completed and the work described above with reference to FIG.
That is, the stopper 73 shown in FIG. 13 is brought into contact with the work 2, the rotating member 72 is separated from the side surface of the work 2, and the pressure of the compressed gas is lowered and placed on the suction disk 60 to be adsorbed and fixed.
The operations of these workpiece conveying members are controlled by a control device (not shown).
In addition, accurate positioning of the workpiece 2 in the XY directions is performed by another means.

Such an apparatus has the following problems.
As shown in FIGS. 17 and 18, in the transfer system for connecting two or more workpiece processing devices, when the workpiece 2 is moved from the upstream workpiece processing device to the downstream workpiece processing device, two suction disks are used. In the relationship between the height of 60 and the flying height α of the work 2, the work 2 may hit the suction plate 60 on the downstream side.

In particular, under the trend of increasing the size of the workpiece processing apparatus, the level difference of the workpiece processing apparatus increases in absolute value.
For example, in a workpiece machining apparatus having an area close to a 3 m square with respect to a workpiece machining apparatus having an area of 1 m square, there is a sufficient level difference with respect to the flying height α of the workpiece 2 due to the ejection of air from the suction plate 60. It becomes difficult to keep the amount small.

  An object of the present invention is to solve the above-described problem. Even when there is a step between the workpiece processing apparatuses when the workpiece 2 is moved, the workpiece on the downstream side does not hit the suction plate 60 on the downstream side. An object of the present invention is to provide a transfer system that can reliably transfer the workpiece 2 without damaging the workpiece 2 by the processing device.

In order to achieve such a problem, according to the present invention, in the transfer system of claim 1,
A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors. Using a mounted tool, a predetermined process is performed on the workpiece placed on the suction plate, and after the processing, a plurality of workpiece processing devices that transfer the workpiece are connected, and the workpiece is sequentially moved to the next stage. In the workpiece transfer system configured to transfer the workpiece to the workpiece processing apparatus, the workpiece is provided at a connecting portion of the workpiece processing device, and the workpiece is attracted when the workpiece is transferred, and the workpiece is pulled up a predetermined distance from the transfer surface. It is characterized by having a lifting and transferring means for transferring.

In the transfer system according to claim 2 of the present invention, the transfer system according to claim 1,
When the workpiece is transferred, the workpiece is lifted and transferred from the suction plate by the air blown from the suction plate.

In the transfer system according to claim 3 of the present invention, in the transfer system according to claim 1 or claim 2,
The pulling and transferring means sucks the tip of the workpiece in the moving direction.

In the transfer system according to claim 4 of the present invention, in the transfer system according to any one of claims 1 to 3,
The pulling and transferring means is characterized in that a suction pad that sucks the workpiece is used.

In the transfer system of Claim 5 of this invention, In the transfer system of Claim 4,
The suction pad has a bowl shape in which a surface to be sucked by the workpiece is opened.

In the transfer system according to claim 6 of the present invention, the transfer system according to claim 4 or claim 5,
One end is provided on the suction pad and the other end is connected to an air suction source, and a suction pipe for sucking the workpiece is provided.

In the transfer system of claim 7 of the present invention, in the transfer system of claim 6,
A vacuum pump is used as the air suction source.

According to claim 1 of the present invention, there are the following effects.
There is a step between the workpiece processing devices because it is provided at the connecting part of the workpiece processing device, and is provided with a lifting transfer means that attracts the workpiece when transferring the workpiece and lifts the workpiece upward by a predetermined distance from the transfer surface. However, there is no fear of damaging the workpiece, and a transfer system that can send the workpiece to the downstream workpiece processing apparatus is obtained.

According to claim 2 of the present invention, there are the following effects.
Since the workpiece is lifted and transferred by the suction disk, the entire workpiece is lifted and transferred, and a transfer system can be obtained in which the lower surface of the workpiece is not likely to be damaged.

According to claim 3 of the present invention, there are the following effects.
Since the lifting and transferring means sucks the tip of the workpiece in the moving direction, there is no risk of damaging the tip of the workpiece reliably, and a transfer system that can send the workpiece to the downstream workpiece processing apparatus is obtained. It is done.

According to claim 4 of the present invention, there are the following effects.
Since the lifting and transferring means uses a suction pad that sucks the workpiece, the workpiece can be reliably sucked and an inexpensive transfer system can be obtained.

According to claim 5 of the present invention, there are the following effects.
Since the suction pad has a bowl shape in which the surface to be sucked by the workpiece is opened, a transfer system can be obtained in which suction is more reliably obtained.

According to claim 6 of the present invention, there are the following effects.
Since one end is provided on the suction pad, the other end is connected to an air suction source, and a suction pipe for sucking the workpiece is provided, a transfer system capable of obtaining suction more strongly can be obtained.

According to claim 7 of the present invention, there are the following effects.
Since a vacuum pump is used as the air suction source, a transfer system can be obtained in which adsorption can be obtained more reliably.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention, (a) is a plan view, (b) is a side view, FIG. 2 is an explanatory diagram of the main part configuration of FIG. 1, and FIG. FIG.
It is.
This is an embodiment in which the same suction disk 60 as in FIG. 9 is used.
In the figure, the same symbols as those in FIG.
Only the differences from FIG. 9 will be described below.

In FIG. 1, the lifting and transferring means 11 is provided at a connecting portion of the workpiece processing apparatus, adsorbs the workpiece when the workpiece 2 is transferred, and transfers the workpiece 2 by lifting it up a predetermined distance from the transfer surface.
When the workpiece 2 is transferred, the workpiece 2 is lifted and transferred from the suction plate 60 by the air blown from the suction plate 60.
In this case, the lifting and transferring means 11 sucks the tip portion of the workpiece 2 in the moving direction.

As shown in FIG. 2, the pulling and transferring means 11 uses a suction pad 111 that sucks the work.
In this case, the suction pad 111 has a bowl shape in which a surface to be sucked by the work 2 is opened.
The suction pipe 112 has one end provided on the suction pad 111 and the other end connected to an air suction source to suck the work 2.
A vacuum pump is used as an air suction source.

  In the above configuration, as shown in FIG. 3, the pulling and transferring means 11 is provided at the connection portion of the workpiece processing apparatus, and adsorbs the tip portion in the moving direction of the workpiece 2 that is levitated by the suction disk 60 when the workpiece is transferred. Then, the work is pulled up a predetermined distance above the transfer surface, and the work 2 is transferred as indicated by A1 → A2 → A3 in FIG.

As a result,
Since there is provided a lifting and transferring means 11 that is provided at the connecting portion of the workpiece processing apparatus and sucks the workpiece 2 when the workpiece is transferred and lifts and transfers the workpiece 2 above the transfer surface by a predetermined distance. Even if there is a step, there is no fear of damaging the workpiece 2, and a transfer system capable of feeding the workpiece to the workpiece processing apparatus on the downstream side is obtained.

  Since the workpiece is lifted and transferred by the suction disk, the entire workpiece is lifted and transferred, and a transfer system can be obtained in which the lower surface of the workpiece is not likely to be damaged.

  The lifting and transferring means 11 sucks the tip of the workpiece 2 in the moving direction, so that there is no risk of damaging the tip of the workpiece 2 and the workpiece can be sent to the workpiece processing device on the downstream side. A system is obtained.

  Since the pulling and transferring means 11 uses the suction pad 111 that sucks the workpiece, the workpiece can be reliably sucked and an inexpensive transfer system can be obtained.

  Since the suction pad 111 has a bowl shape in which the surface to be sucked by the workpiece is opened, a transfer system that can obtain suction more reliably can be obtained.

  Since one end is provided on the suction pad 111, the other end is connected to an air suction source, and the suction pipe 112 for sucking the workpiece 2 is provided, a transfer system that can obtain suction more strongly can be obtained.

  Since a vacuum pump is used as an air suction source, a transfer system that can more reliably obtain adsorption is obtained.

In addition, the up-and-down mechanism of the pulling and transferring means 11 can be easily configured using a ball screw, a solenoid or a spring.
Moreover, the end surface shape of the upper surface of the suction disk 60 can ensure the safety | security with respect to the damage of the further workpiece | work 2 by processing an end surface into R shape.

The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

It is principal part structure explanatory drawing of one Example of this invention. It is principal part structure explanatory drawing of FIG. It is operation | movement explanatory drawing of FIG. It is structure explanatory drawing of the prior art example generally used conventionally. It is composition explanatory drawing of the other conventional example generally used conventionally. It is a top view which shows arrangement | positioning of the transfer means formed in the interface part in FIG. It is a perspective view which shows the structural example of the conventional transfer means. It is a perspective view which shows the state by which the operation arm in FIG. 7 was extended. A plan view (a), a front view (b), and a side view showing an embodiment of a workpiece processing apparatus of application number 2006-112373 related to the prior application filed on April 14, 2006, using the suction plate 60 (C). It is explanatory drawing which shows operation | movement of the workpiece conveyance means shown in FIG. It is the top view (a), front view (b), and side view (c) which show the structural example of the transfer system which shows the state which connected the two workpiece | work processing apparatuses shown in FIG. It is detailed explanatory drawing which shows the example provided with the stopper in the workpiece conveyance means. It is the top view (a), front view (b), and side view (c) of the workpiece processing apparatus in another Example. It is detail explanatory drawing which shows the example which provided the stopper in the workpiece conveyance means of the workpiece processing apparatus shown in FIG. It is a figure which shows the state in the middle of conveying the workpiece | work by the workpiece conveyance means shown in FIG. It is the top view (a), front view (b), and side view (c) which show the structural example of the transfer system which shows the state which connected the two workpiece | work processing apparatuses shown in FIG. It is explanatory drawing which shows the problem of the workpiece conveyance means shown in FIG. It is principal part detailed explanatory drawing of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Housing | casing 1a Protrusion part 1b Protrusion part 1c Concavity 2 Workpiece 31 X1-axis linear motor 32 X2-axis linear motor 41 Slider 42 Slider 5 Bridge member 6 Y-axis linear motor 7 Slider 101 Work processing apparatus 102 Work processing apparatus 103 Work processing apparatus 103c Recess 201 Interface unit 202 Interface unit 203 Interface unit 301 Transfer unit 302 Transfer unit 601 Parallel rail 602 Parallel rail 700 Slider 800 Actuator 901 Operation arm 902 Operation arm 30 Processing unit 50 Tube 60 Suction plate 70 Work transfer unit 70a Work transfer unit 70a ' Work conveying means 70b Work conveying means 70b 'Work conveying means 70x Elongating member 71 Work conveying means 71a Work conveying means 71a' Over click conveying means 71b workpiece conveying means 71b 'work transfer unit 72 rotates member 73 a stopper 11 pulling the transfer means 111 suction pad 112 sucking pipe α flying height

Claims (7)

A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors. Using a mounted tool, a predetermined process is performed on the workpiece placed on the suction plate, and after the processing, a plurality of workpiece processing devices that transfer the workpiece are connected, and the workpiece is sequentially moved to the next stage. In a workpiece transfer system configured to transfer to a workpiece processing apparatus,
A transfer system comprising a lifting transfer means provided at a connecting portion of the workpiece processing apparatus for sucking the workpiece when the workpiece is transferred and lifting the workpiece upward by a predetermined distance from the transfer surface. 2. The transfer system according to claim 1, wherein when the workpiece is transferred, the workpiece is lifted and transferred from the suction plate by air blown from the suction plate. The transfer system according to claim 1, wherein the pulling and transferring unit sucks a tip portion of the workpiece in the moving direction. The transfer system according to any one of claims 1 to 3, wherein a suction pad that sucks the workpiece is used as the lifting transfer means. The transfer system according to claim 4, wherein the suction pad has a bowl shape in which a surface to be sucked by the workpiece is opened. 6. The transfer system according to claim 4, further comprising a suction pipe having one end provided on the suction pad and the other end connected to an air suction source for sucking the workpiece. The transfer system according to claim 6, wherein a vacuum pump is used as the air suction source.

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