JP2008021640A5 - - Google Patents
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- Publication number
- JP2008021640A5 JP2008021640A5 JP2007147170A JP2007147170A JP2008021640A5 JP 2008021640 A5 JP2008021640 A5 JP 2008021640A5 JP 2007147170 A JP2007147170 A JP 2007147170A JP 2007147170 A JP2007147170 A JP 2007147170A JP 2008021640 A5 JP2008021640 A5 JP 2008021640A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- mold
- bond
- electrode
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000005192 partition Methods 0.000 claims 3
- 229910018540 Si C Inorganic materials 0.000 claims 2
- 229910008045 Si-Si Inorganic materials 0.000 claims 2
- 229910006411 Si—Si Inorganic materials 0.000 claims 2
- 229920000548 poly(silane) polymer Polymers 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910018557 Si O Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007147170A JP5010351B2 (ja) | 2006-06-14 | 2007-06-01 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006164873 | 2006-06-14 | ||
JP2006164873 | 2006-06-14 | ||
JP2007147170A JP5010351B2 (ja) | 2006-06-14 | 2007-06-01 | 半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008021640A JP2008021640A (ja) | 2008-01-31 |
JP2008021640A5 true JP2008021640A5 (enrdf_load_stackoverflow) | 2010-07-08 |
JP5010351B2 JP5010351B2 (ja) | 2012-08-29 |
Family
ID=39077438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007147170A Expired - Fee Related JP5010351B2 (ja) | 2006-06-14 | 2007-06-01 | 半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5010351B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5115277B2 (ja) * | 2008-03-31 | 2013-01-09 | Tdk株式会社 | 発光素子 |
WO2013164881A1 (ja) * | 2012-05-01 | 2013-11-07 | 信越エンジニアリング株式会社 | 表示装置の製造方法及びその製造装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3305212B2 (ja) * | 1995-11-09 | 2002-07-22 | キヤノン株式会社 | 液晶素子用の基板、液晶素子、およびそれらの製造方法 |
JP3187742B2 (ja) * | 1996-04-15 | 2001-07-11 | キヤノン株式会社 | 配線基板の製造方法、液晶素子の製造方法、及び配線基板の製造装置 |
JP3884564B2 (ja) * | 1998-05-20 | 2007-02-21 | 出光興産株式会社 | 有機el発光素子およびそれを用いた発光装置 |
JP2005013985A (ja) * | 2003-05-30 | 2005-01-20 | Seiko Epson Corp | 膜パターン形成方法、デバイス及びその製造方法、電気光学装置、並びに電子機器、アクティブマトリクス基板の製造方法、アクティブマトリクス基板 |
JP2005097371A (ja) * | 2003-09-22 | 2005-04-14 | Fuji Photo Film Co Ltd | フッ素含有樹脂組成物及び光学物品、並びにそれを用いた画像表示装置 |
JP4549751B2 (ja) * | 2004-06-17 | 2010-09-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2006007546A (ja) * | 2004-06-24 | 2006-01-12 | Matsushita Electric Works Ltd | 成形転写方法 |
JP4506460B2 (ja) * | 2004-12-28 | 2010-07-21 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置の製造方法及び電子機器 |
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2007
- 2007-06-01 JP JP2007147170A patent/JP5010351B2/ja not_active Expired - Fee Related