JP2007526351A5 - - Google Patents

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Publication number

JP2007526351A5

JP2007526351A5 JP2006517640A JP2006517640A JP2007526351A5 JP 2007526351 A5 JP2007526351 A5 JP 2007526351A5 JP 2006517640 A JP2006517640 A JP 2006517640A JP 2006517640 A JP2006517640 A JP 2006517640A JP 2007526351 A5 JP2007526351 A5 JP 2007526351A5

Authority

JP

Japan

Prior art keywords

group

optionally substituted

polymer

substituted

carbon atoms

Prior art date

2004-06-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

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• -1 alicyclic hydrocarbon Chemical class 0.000 claims description 220
• 239000000203 mixture Substances 0.000 claims description 90
• 229920000642 polymer Polymers 0.000 claims description 79
• 125000004432 carbon atoms Chemical group C* 0.000 claims description 71
• 229920002120 photoresistant polymer Polymers 0.000 claims description 70
• 125000001183 hydrocarbyl group Chemical group 0.000 claims description 60
• 239000002952 polymeric resin Substances 0.000 claims description 46
• 125000005842 heteroatoms Chemical group 0.000 claims description 41
• 125000000217 alkyl group Chemical group 0.000 claims description 28
• 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims description 26
• 125000000547 substituted alkyl group Chemical group 0.000 claims description 25
• 239000003795 chemical substances by application Substances 0.000 claims description 20
• 238000000034 method Methods 0.000 claims description 20
• 229910052799 carbon Inorganic materials 0.000 claims description 18
• 125000005017 substituted alkenyl group Chemical group 0.000 claims description 17
• 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 15
• 125000003107 substituted aryl group Chemical group 0.000 claims description 15
• 239000000178 monomer Substances 0.000 claims description 14
• 125000004185 ester group Chemical group 0.000 claims description 13
• 125000000623 heterocyclic group Chemical group 0.000 claims description 13
• FAYMLNNRGCYLSR-UHFFFAOYSA-M Triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 claims description 12
• 125000002723 alicyclic group Chemical group 0.000 claims description 12
• 238000000354 decomposition reaction Methods 0.000 claims description 11
• 125000001072 heteroaryl group Chemical group 0.000 claims description 11
• 239000001257 hydrogen Substances 0.000 claims description 11
• 229910052739 hydrogen Inorganic materials 0.000 claims description 11
• 239000004215 Carbon black (E152) Substances 0.000 claims description 10
• 125000005415 substituted alkoxy group Chemical group 0.000 claims description 10
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 9
• 125000002252 acyl group Chemical group 0.000 claims description 9
• CERQOIWHTDAKMF-UHFFFAOYSA-N methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 9
• 125000004390 alkyl sulfonyl group Chemical group 0.000 claims description 8
• 125000003435 aroyl group Chemical group 0.000 claims description 8
• OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
• 229910052698 phosphorus Chemical group 0.000 claims description 7
• OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
• 239000011574 phosphorus Chemical group 0.000 claims description 7
• 230000002441 reversible Effects 0.000 claims description 6
• 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims description 6
• ATMLPEJAVWINOF-UHFFFAOYSA-N acrylic acid acrylic acid Chemical compound OC(=O)C=C.OC(=O)C=C ATMLPEJAVWINOF-UHFFFAOYSA-N 0.000 claims description 5
• 238000007342 radical addition reaction Methods 0.000 claims description 5
• 238000004132 cross linking Methods 0.000 claims description 4
• 150000002596 lactones Chemical class 0.000 claims description 4
• 125000004644 alkyl sulfinyl group Chemical group 0.000 claims description 3
• 125000002619 bicyclic group Chemical group 0.000 claims description 3
• 125000002950 monocyclic group Chemical group 0.000 claims description 3
• 125000006574 non-aromatic ring group Chemical group 0.000 claims description 3
• 150000003254 radicals Chemical group 0.000 description 67
• 125000002827 triflate group Chemical group FC(S(=O)(=O)O*)(F)F 0.000 description 41
• YFSUTJLHUFNCNZ-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,8-heptadecafluorooctane-1-sulfonate Chemical group [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YFSUTJLHUFNCNZ-UHFFFAOYSA-M 0.000 description 40
• 239000002253 acid Substances 0.000 description 39
• 239000011347 resin Substances 0.000 description 29
• 229920005989 resin Polymers 0.000 description 29
• 125000003118 aryl group Chemical group 0.000 description 28
• 239000003999 initiator Substances 0.000 description 28
• 150000001875 compounds Chemical class 0.000 description 21
• 125000003342 alkenyl group Chemical group 0.000 description 18
• 238000006116 polymerization reaction Methods 0.000 description 17
• 239000010408 film Substances 0.000 description 16
• 125000003545 alkoxy group Chemical group 0.000 description 15
• 125000000304 alkynyl group Chemical group 0.000 description 15
• 238000003776 cleavage reaction Methods 0.000 description 14
• 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 14
• 125000004149 thio group Chemical group *S* 0.000 description 14
• 238000006243 chemical reaction Methods 0.000 description 11
• 125000001624 naphthyl group Chemical group 0.000 description 11
• 125000001424 substituent group Chemical group 0.000 description 11
• 150000002431 hydrogen Chemical class 0.000 description 9
• 239000000463 material Substances 0.000 description 9
• 229910052757 nitrogen Inorganic materials 0.000 description 9
• 239000002904 solvent Substances 0.000 description 9
• 229910052717 sulfur Inorganic materials 0.000 description 9
• 125000004453 alkoxycarbonyl group Chemical group 0.000 description 8
• 239000012298 atmosphere Substances 0.000 description 8
• 238000010526 radical polymerization reaction Methods 0.000 description 8
• 238000007792 addition Methods 0.000 description 7
• 239000000654 additive Substances 0.000 description 7
• 238000009792 diffusion process Methods 0.000 description 7
• 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
• 239000003960 organic solvent Substances 0.000 description 7
• 239000011342 resin composition Substances 0.000 description 7
• XEKOWRVHYACXOJ-UHFFFAOYSA-N acetic acid ethyl ester Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
• 239000003513 alkali Substances 0.000 description 6
• 125000004183 alkoxy alkyl group Chemical group 0.000 description 6
• 125000005194 alkoxycarbonyloxy group Chemical group 0.000 description 6
• 125000002877 alkyl aryl group Chemical group 0.000 description 6
• 239000007864 aqueous solution Substances 0.000 description 6
• 125000003710 aryl alkyl group Chemical group 0.000 description 6
• 125000005135 aryl sulfinyl group Chemical group 0.000 description 6
• DNFSNYQTQMVTOK-UHFFFAOYSA-N bis(4-tert-butylphenyl)iodanium Chemical compound C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 DNFSNYQTQMVTOK-UHFFFAOYSA-N 0.000 description 6
• OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 6
• 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
• 229910052736 halogen Inorganic materials 0.000 description 6
• 150000002367 halogens Chemical class 0.000 description 6
• 238000001459 lithography Methods 0.000 description 6
• 125000005395 methacrylic acid group Chemical group 0.000 description 6
• LRHPLDYGYMQRHN-UHFFFAOYSA-N n-butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 6
• IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
• 150000002978 peroxides Chemical class 0.000 description 6
• 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 6
• 230000002829 reduced Effects 0.000 description 6
• 239000000243 solution Substances 0.000 description 6
• 239000000126 substance Substances 0.000 description 6
• 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 6
• YXFVVABEGXRONW-UHFFFAOYSA-N toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
• SLAJLBDKTXRQBP-UHFFFAOYSA-N 1-naphthalen-1-yl-2-(thiolan-1-ium-1-yl)ethanone Chemical compound C=1C=CC2=CC=CC=C2C=1C(=O)C[S+]1CCCC1 SLAJLBDKTXRQBP-UHFFFAOYSA-N 0.000 description 5
• ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 5
• ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 5
• NQTADLQHYWFPDB-UHFFFAOYSA-N N-hydroxy-Succinimide Chemical compound ON1C(=O)CCC1=O NQTADLQHYWFPDB-UHFFFAOYSA-N 0.000 description 5
• 125000004414 alkyl thio group Chemical group 0.000 description 5
• 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 5
• 230000015572 biosynthetic process Effects 0.000 description 5
• 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 5
• 239000011248 coating agent Substances 0.000 description 5
• 238000000576 coating method Methods 0.000 description 5
• 125000004122 cyclic group Chemical group 0.000 description 5
• 238000001312 dry etching Methods 0.000 description 5
• 150000002148 esters Chemical class 0.000 description 5
• 238000005530 etching Methods 0.000 description 5
• KLGZELKXQMTEMM-UHFFFAOYSA-N hydride Chemical compound [H-] KLGZELKXQMTEMM-UHFFFAOYSA-N 0.000 description 5
• 150000002576 ketones Chemical class 0.000 description 5
• 239000000047 product Substances 0.000 description 5
• 230000035945 sensitivity Effects 0.000 description 5
• 231100000489 sensitizer Toxicity 0.000 description 5
• 125000004426 substituted alkynyl group Chemical group 0.000 description 5
• 238000006467 substitution reaction Methods 0.000 description 5
• NINIDFKCEFEMDL-UHFFFAOYSA-N sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 5
• 239000011593 sulfur Substances 0.000 description 5
• 239000004094 surface-active agent Substances 0.000 description 5
• WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 5
• 235000012431 wafers Nutrition 0.000 description 5
• CEZIJESLKIMKNL-UHFFFAOYSA-N 1-(4-butoxynaphthalen-1-yl)thiolan-1-ium Chemical compound C12=CC=CC=C2C(OCCCC)=CC=C1[S+]1CCCC1 CEZIJESLKIMKNL-UHFFFAOYSA-N 0.000 description 4
• WFQNMENFJSZTGD-UHFFFAOYSA-O 2,6-dimethyl-4-(thiolan-1-ium-1-yl)phenol Chemical compound CC1=C(O)C(C)=CC([S+]2CCCC2)=C1 WFQNMENFJSZTGD-UHFFFAOYSA-O 0.000 description 4
• OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
• TYXGWNTYNTZQLI-UHFFFAOYSA-O 4-(thiolan-1-ium-1-yl)naphthalen-1-ol Chemical compound C12=CC=CC=C2C(O)=CC=C1[S+]1CCCC1 TYXGWNTYNTZQLI-UHFFFAOYSA-O 0.000 description 4
• 239000004342 Benzoyl peroxide Substances 0.000 description 4
• 229940009976 Deoxycholate Drugs 0.000 description 4
• RAXXELZNTBOGNW-UHFFFAOYSA-N Imidazole Chemical compound C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 4
• OMPJBNCRMGITSC-UHFFFAOYSA-N Incidol Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 4
• CSCPPACGZOOCGX-UHFFFAOYSA-N acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
• XKRFYHLGVUSROY-UHFFFAOYSA-N argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
• UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 4
• 235000019400 benzoyl peroxide Nutrition 0.000 description 4
• 238000005859 coupling reaction Methods 0.000 description 4
• UKJLNMAFNRKWGR-UHFFFAOYSA-N cyclohexatrienamine Chemical group NC1=CC=C=C[CH]1 UKJLNMAFNRKWGR-UHFFFAOYSA-N 0.000 description 4
• 235000019441 ethanol Nutrition 0.000 description 4
• ZHNUHDYFZUAESO-UHFFFAOYSA-N formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 4
• 238000005755 formation reaction Methods 0.000 description 4
• 238000005227 gel permeation chromatography Methods 0.000 description 4
• 238000010438 heat treatment Methods 0.000 description 4
• KFZMGEQAYNKOFK-UHFFFAOYSA-N iso-propanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
• 238000004519 manufacturing process Methods 0.000 description 4
• OKKJLVBELUTLKV-UHFFFAOYSA-N methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 4
• 239000001294 propane Substances 0.000 description 4
• ATUOYWHBWRKTHZ-UHFFFAOYSA-N propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
• 239000012429 reaction media Substances 0.000 description 4
• 239000011780 sodium chloride Substances 0.000 description 4
• 239000000758 substrate Substances 0.000 description 4
• WYURNTSHIVDZCO-UHFFFAOYSA-N tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
• ZMANZCXQSJIPKH-UHFFFAOYSA-N triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 4
• CVGOYJZPIRCZRB-UHFFFAOYSA-N (4-cyanonaphthalen-1-yl)-diethylsulfanium Chemical compound C1=CC=C2C([S+](CC)CC)=CC=C(C#N)C2=C1 CVGOYJZPIRCZRB-UHFFFAOYSA-N 0.000 description 3
• XLQMBODNBLKPIP-UHFFFAOYSA-O (4-hydroxynaphthalen-1-yl)-dimethylsulfanium Chemical compound C1=CC=C2C([S+](C)C)=CC=C(O)C2=C1 XLQMBODNBLKPIP-UHFFFAOYSA-O 0.000 description 3
• GDFJRGCGROYZGS-UHFFFAOYSA-N 1-(4-butoxyphenyl)thiolan-1-ium Chemical compound C1=CC(OCCCC)=CC=C1[S+]1CCCC1 GDFJRGCGROYZGS-UHFFFAOYSA-N 0.000 description 3
• GHSQNVDGAOETGI-UHFFFAOYSA-N 1-(4-ethoxynaphthalen-1-yl)thiolan-1-ium Chemical compound C12=CC=CC=C2C(OCC)=CC=C1[S+]1CCCC1 GHSQNVDGAOETGI-UHFFFAOYSA-N 0.000 description 3
• FUBAYNPDUBRNJU-UHFFFAOYSA-N 1-(4-methoxynaphthalen-1-yl)thiolan-1-ium Chemical compound C12=CC=CC=C2C(OC)=CC=C1[S+]1CCCC1 FUBAYNPDUBRNJU-UHFFFAOYSA-N 0.000 description 3
• XHZFJVQQYGUCMV-UHFFFAOYSA-N 1-(4-phenylmethoxynaphthalen-1-yl)thiolan-1-ium Chemical compound C=1C=CC=CC=1COC(C1=CC=CC=C11)=CC=C1[S+]1CCCC1 XHZFJVQQYGUCMV-UHFFFAOYSA-N 0.000 description 3
• MNEFJFCBGFTMSW-UHFFFAOYSA-N 1-[4-(ethoxymethoxy)naphthalen-1-yl]thiolan-1-ium Chemical compound C12=CC=CC=C2C(OCOCC)=CC=C1[S+]1CCCC1 MNEFJFCBGFTMSW-UHFFFAOYSA-N 0.000 description 3
• LKAMDJHLFPSSAD-UHFFFAOYSA-N 1-[4-(methoxymethoxy)naphthalen-1-yl]thiolan-1-ium Chemical compound C12=CC=CC=C2C(OCOC)=CC=C1[S+]1CCCC1 LKAMDJHLFPSSAD-UHFFFAOYSA-N 0.000 description 3
• 125000001637 1-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C(*)=C([H])C([H])=C([H])C2=C1[H] 0.000 description 3
• PJSNWMUSYYVXAH-UHFFFAOYSA-N 2-[4-(thiolan-1-ium-1-yl)naphthalen-1-yl]oxyoxane Chemical compound C1CCC[S+]1C(C1=CC=CC=C11)=CC=C1OC1OCCCC1 PJSNWMUSYYVXAH-UHFFFAOYSA-N 0.000 description 3
• RWCCWEUUXYIKHB-UHFFFAOYSA-N Benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 3
• USIUVYZYUHIAEV-UHFFFAOYSA-N Diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 3
• DMBHHRLKUKUOEG-UHFFFAOYSA-N Diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 3
• 230000036499 Half live Effects 0.000 description 3
• YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 3
• XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 3
• 230000000996 additive Effects 0.000 description 3
• 150000003973 alkyl amines Chemical class 0.000 description 3
• 125000003368 amide group Chemical group 0.000 description 3
• 125000004104 aryloxy group Chemical group 0.000 description 3
• 239000002585 base Substances 0.000 description 3
• WVDDGKGOMKODPV-UHFFFAOYSA-N benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 3
• TUHVAFNHSRNRDK-UHFFFAOYSA-N butyl [4-(thiolan-1-ium-1-yl)naphthalen-1-yl] carbonate Chemical compound C12=CC=CC=C2C(OC(=O)OCCCC)=CC=C1[S+]1CCCC1 TUHVAFNHSRNRDK-UHFFFAOYSA-N 0.000 description 3
• 125000004093 cyano group Chemical group *C#N 0.000 description 3
• 125000006165 cyclic alkyl group Chemical group 0.000 description 3
• RTZKZFJDLAIYFH-UHFFFAOYSA-N diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
• LCLLDNMEVAPSAM-UHFFFAOYSA-N diethyl(naphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](CC)CC)=CC=CC2=C1 LCLLDNMEVAPSAM-UHFFFAOYSA-N 0.000 description 3
• QUAOSAXDZIKYGO-UHFFFAOYSA-O diethyl-(4-hydroxynaphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](CC)CC)=CC=C(O)C2=C1 QUAOSAXDZIKYGO-UHFFFAOYSA-O 0.000 description 3
• MVWZJDWUSDTGDE-UHFFFAOYSA-N diethyl-(4-methylnaphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](CC)CC)=CC=C(C)C2=C1 MVWZJDWUSDTGDE-UHFFFAOYSA-N 0.000 description 3
• OGTOIEVNWNMXCG-UHFFFAOYSA-N diethyl-(4-nitronaphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](CC)CC)=CC=C([N+]([O-])=O)C2=C1 OGTOIEVNWNMXCG-UHFFFAOYSA-N 0.000 description 3
• XYWUBXNONJKKSD-UHFFFAOYSA-N dimethyl(naphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](C)C)=CC=CC2=C1 XYWUBXNONJKKSD-UHFFFAOYSA-N 0.000 description 3
• OAWHEYWQBDELJO-UHFFFAOYSA-N dimethyl-(4-methylnaphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](C)C)=CC=C(C)C2=C1 OAWHEYWQBDELJO-UHFFFAOYSA-N 0.000 description 3
• POUOKOIBKJTLBX-UHFFFAOYSA-N dimethyl-(4-nitronaphthalen-1-yl)sulfanium Chemical compound C1=CC=C2C([S+](C)C)=CC=C([N+]([O-])=O)C2=C1 POUOKOIBKJTLBX-UHFFFAOYSA-N 0.000 description 3
• 238000010494 dissociation reaction Methods 0.000 description 3
• 230000005593 dissociations Effects 0.000 description 3
• 150000002170 ethers Chemical class 0.000 description 3
• 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
• FPEMQADFSSXZSB-UHFFFAOYSA-N ethyl [4-(thiolan-1-ium-1-yl)naphthalen-1-yl] carbonate Chemical compound C12=CC=CC=C2C(OC(=O)OCC)=CC=C1[S+]1CCCC1 FPEMQADFSSXZSB-UHFFFAOYSA-N 0.000 description 3
• 125000001188 haloalkyl group Chemical group 0.000 description 3
• 125000005843 halogen group Chemical group 0.000 description 3
• 239000012535 impurity Substances 0.000 description 3
• 239000010410 layer Substances 0.000 description 3
• 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
• 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 3
• 125000006606 n-butoxy group Chemical group 0.000 description 3
• 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 3
• 150000002829 nitrogen Chemical group 0.000 description 3
• UMRZSTCPUPJPOJ-KNVOCYPGSA-N norbornane Chemical compound C1C[C@H]2CC[C@@H]1C2 UMRZSTCPUPJPOJ-KNVOCYPGSA-N 0.000 description 3
• CTQNGGLPUBDAKN-UHFFFAOYSA-N o-xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
• ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
• 125000003884 phenylalkyl group Chemical group 0.000 description 3
• KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
• RRFZHSZJDWDDES-UHFFFAOYSA-N propyl [4-(thiolan-1-ium-1-yl)naphthalen-1-yl] carbonate Chemical compound C12=CC=CC=C2C(OC(=O)OCCC)=CC=C1[S+]1CCCC1 RRFZHSZJDWDDES-UHFFFAOYSA-N 0.000 description 3
• 238000000746 purification Methods 0.000 description 3
• 150000003839 salts Chemical class 0.000 description 3
• 239000004065 semiconductor Substances 0.000 description 3
• HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
• 125000004434 sulfur atoms Chemical group 0.000 description 3
• BKUKUDKXROEQFN-UHFFFAOYSA-N tert-butyl [4-(thiolan-1-ium-1-yl)naphthalen-1-yl] carbonate Chemical compound C12=CC=CC=C2C(OC(=O)OC(C)(C)C)=CC=C1[S+]1CCCC1 BKUKUDKXROEQFN-UHFFFAOYSA-N 0.000 description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
• 239000008096 xylene Substances 0.000 description 3
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