JP2007509316A5 - - Google Patents

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Publication number
JP2007509316A5
JP2007509316A5 JP2006533928A JP2006533928A JP2007509316A5 JP 2007509316 A5 JP2007509316 A5 JP 2007509316A5 JP 2006533928 A JP2006533928 A JP 2006533928A JP 2006533928 A JP2006533928 A JP 2006533928A JP 2007509316 A5 JP2007509316 A5 JP 2007509316A5
Authority
JP
Japan
Prior art keywords
output
laser
sub
laser beam
fluence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006533928A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007509316A (ja
JP4787760B2 (ja
Filing date
Publication date
Priority claimed from US10/676,175 external-priority patent/US6912052B2/en
Priority claimed from US10/676,907 external-priority patent/US6894785B2/en
Priority claimed from US10/676,224 external-priority patent/US6873418B1/en
Application filed filed Critical
Priority claimed from PCT/US2004/030339 external-priority patent/WO2005033625A1/fr
Publication of JP2007509316A publication Critical patent/JP2007509316A/ja
Publication of JP2007509316A5 publication Critical patent/JP2007509316A5/ja
Application granted granted Critical
Publication of JP4787760B2 publication Critical patent/JP4787760B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006533928A 2003-09-30 2004-09-15 ガス放電ｍｏｐａレーザのスペクトル解析モジュール Expired - Lifetime JP4787760B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/676,224 2003-09-30
US10/676,175 US6912052B2 (en) 2000-11-17 2003-09-30 Gas discharge MOPA laser spectral analysis module
US10/676,907 US6894785B2 (en) 2003-09-30 2003-09-30 Gas discharge MOPA laser spectral analysis module
US10/676,224 US6873418B1 (en) 2003-09-30 2003-09-30 Optical mountings for gas discharge MOPA laser spectral analysis module
US10/676,907 2003-09-30
US10/676,175 2003-09-30
PCT/US2004/030339 WO2005033625A1 (fr) 2003-09-30 2004-09-15 Module d'analyse spectral a laser mopa a decharge gazeuse

Publications (3)

Publication Number Publication Date
JP2007509316A JP2007509316A (ja) 2007-04-12
JP2007509316A5 true JP2007509316A5 (fr) 2007-11-08
JP4787760B2 JP4787760B2 (ja) 2011-10-05

Family

ID=44693680

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006533928A Expired - Lifetime JP4787760B2 (ja) 2003-09-30 2004-09-15 ガス放電ｍｏｐａレーザのスペクトル解析モジュール
JP2006533929A Expired - Lifetime JP4773968B2 (ja) 2003-09-30 2004-09-15 ガス放電ｍｏｐａレーザのスペクトル解析モジュール

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2006533929A Expired - Lifetime JP4773968B2 (ja) 2003-09-30 2004-09-15 ガス放電ｍｏｐａレーザのスペクトル解析モジュール

Country Status (1)

Country Link
JP (2) JP4787760B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014208111A1 (fr) 2013-06-27 2014-12-31 ギガフォトン株式会社 Dispositif de mesure de faisceau lumineux, dispositif laser et dispositif de séparation de faisceau lumineux
CN111113550A (zh) * 2019-12-12 2020-05-08 奥士康科技股份有限公司 一种pcb板钻孔机校准定位装置
WO2024100848A1 (fr) * 2022-11-10 2024-05-16 ギガフォトン株式会社 Dispositif laser à gaz et procédé pour la fabrication d'un dispositif électronique

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042058A (en) * 1989-03-22 1991-08-20 University Of California Ultrashort time-resolved x-ray source
JPH07159131A (ja) * 1993-12-07 1995-06-23 Nkk Corp エリプソパラメータ測定方法及びエリプソメータ
JP3377058B2 (ja) * 1994-03-18 2003-02-17 富士写真フイルム株式会社 画像記録装置
US5991324A (en) * 1998-03-11 1999-11-23 Cymer, Inc. Reliable. modular, production quality narrow-band KRF excimer laser
JP2000088705A (ja) * 1998-09-11 2000-03-31 Komatsu Ltd エキシマレーザの光モニタ装置
US6539046B2 (en) * 1998-10-02 2003-03-25 Cymer, Inc. Wavemeter for gas discharge laser
JP2000306813A (ja) * 1999-04-22 2000-11-02 Nikon Corp 露光方法及び露光装置
JP2002148123A (ja) * 2000-11-15 2002-05-22 Ushio Sogo Gijutsu Kenkyusho:Kk 露光用レーザ光の波長モニタ
JP2002206915A (ja) * 2001-01-09 2002-07-26 Nikon Corp 面形状測定装置の横座標較正方法および面形状測定装置

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