JP2007286062A - 外部共振器ビーム発生器を備える光共振器ジャイロ - Google Patents
外部共振器ビーム発生器を備える光共振器ジャイロ Download PDFInfo
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
- G01C19/727—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers using a passive ring resonator
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Abstract
【解決手段】光ジャイロの回転速度を決定する方法および装置が提供される。光ジャイロ10は、少なくとも1つの基板34、この基板上に装着された多周波光源(MFLS)、およびMFLSに結合された共振器25を備える。MFLSは、第1の周波数を有する第1の光ビームと、第2の周波数を有し第1の光ビームと位相同期をとられる第2の光ビームとを生成するように構成される。共振器は、中空コアを有する光ファイバコイル24を備える。共振器は、第1および第2の各光ビームの一部を中空コアに通して周回させるように構成される。第1の光ビームの一部は第1の対向伝搬方向に伝搬し、第2の光ビームの一部は第2の対向伝搬方向に伝搬する。第1と第2の周波数の測定差が、光ジャイロの回転速度に比例する周波数偏移を示す。
【選択図】図2
Description
Δf2=fcw−fccw、2=fFSR+ΔfΩ
次式で2つのビート周波数の差を取ることによって、FSR、および関連するどんなドリフトレート誤差も正確に知る必要なしに、回転測定値が得られる。
図5は、図3に示された多周波レーザ発生源アセンブリ52の概略図である。MFLS光学サブアセンブリ60は、マスタレーザ80、第1および第2のスレーブレーザ82、84、光結合器88、90、92、94、96、98、100、および光ファイバ86を備え、光ファイバ86は、レーザ80、82、84のそれぞれの出力端、および光結合器88、90、92、94、96、98、100の間に結合されている。光ファイバ86は、偏波保持単一モードファイバが好ましい。マスタレーザ80は、共振器64のCW入力端に導入されるCWビームを生成し、スレーブレーザ82、84は、共振器64のCCW入力端に導入されるCCWビームを生成する。各CCWビームの一部は、共振器64のCW入力端への導入の前に結合器100によって結合される。光結合器のいくつかは、マスタレーザ80からの光をスレーブレーザ82、84のうちの一方からの光と結合させて、スレーブレーザ82、84をマスタレーザ80と位相同期させるためのフィードバックを行う。例えば、マスタレーザ80によって生成されたCWビームの一部が、光結合器88、90、92、および94を介して、第1のスレーブレーザ82によって生成されたCCWビームの一部と混合され、マスタレーザ80によって生成されたCWビームの一部が、光結合器88、92、96、および98を介して、第2のスレーブレーザ84によって生成されたCCWビームの一部と混合される。
12 第1の波長可変光源
14 第2の波長可変光源
16 第1の光検出器
18 第2の光検出器
20 反射鏡
22 反射鏡
23 圧電変換器(PZT)ハブ
24 中空コア光ファイバコイル、光ファイバコイル
25 共振器
34 基板
40 リサーキュレータ
41 光ファイバコイルの第1の端部
43 光ファイバコイルの第2の端部
50 共振器ジャイロ
52 多周波レーザ発生源(MFLS)アセンブリ
58 多周波レーザ発生源(MFLS)
64 共振器
102 第1の外部共振器レーザ
104 第2の外部共振器レーザ
106 第3の外部共振器レーザ
110 検出器
120 検出器
Claims (3)
- 少なくとも1つの基板(34)と、
前記少なくとも1つの基板上に装着され、第1の周波数を有する第1の光ビーム、および第2の周波数を有する第2の光ビームを生成するように構成され、前記第1の光ビームは前記第2の光ビームと位相同期される、多周波光源(MFLS)(58)と、
前記MFLSに結合された共振器(64)と、
を備え、
前記共振器は、第1および第2の対向伝搬方向を有し、中空コアを有する光ファイバコイル(24)を含み、前記第1および第2の各光ビームの部分を前記中空コアに通して周回させるように構成され、前記第1の光ビームの前記部分は前記第1の対向伝搬方向に伝搬し、前記第2の光ビームの前記部分は前記第2の対向伝搬方向に伝搬し、前記第1と第2の周波数の差は、前記光ジャイロの回転速度に比例する周波数偏移を示す、光ジャイロ(10)。 - 前記共振器に結合され、前記周波数偏移を決定するように構成されたセンサ(110、120)と、
前記センサおよび前記MFLSに結合され、調整可能かつ制御可能なオフセットによって前記第2の周波数を前記第1の周波数からオフセットするように構成された追従回路(66)とをさらに備える、請求項1に記載の光ジャイロ。 - 前記MFLSは、
前記第1の光ビームを生成するように構成された第1の外部共振器レーザ(102)と、
前記第2の光ビームを生成するように構成された第2の外部共振器レーザ(104)と、
前記第1の光ビームと位相同期をとられた第3の光ビームを生成するように構成された第3の外部共振器レーザ(106)と
を備え、
前記第3の光ビームは第3の周波数を有し、前記共振器がさらに、前記第3の光ビームの部分を前記中空コアに通して前記第2の対向伝搬方向に周回させるように構成される、請求項1に記載の光ジャイロ。
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US11/406,939 | 2006-04-18 | ||
US11/406,939 US7463360B2 (en) | 2006-04-18 | 2006-04-18 | Optical resonator gyro with integrated external cavity beam generator |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100640006B1 (ko) * | 2005-10-14 | 2006-11-01 | 한국전자통신연구원 | 광학적 클럭 신호 추출 장치 및 방법 |
US7583384B2 (en) * | 2006-07-27 | 2009-09-01 | Honeywell International, Inc. | High resolution IOC drive and method for driving fiber optic gyroscopes |
US7522284B2 (en) * | 2006-09-29 | 2009-04-21 | Honeywell International Inc. | Optical resonator gyro and method for reducing resonance asymmetry errors |
US7483144B2 (en) * | 2007-03-02 | 2009-01-27 | Honeywell International, Inc. | Apparatus and method for resonant chemical and biological sensing |
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US7680372B2 (en) | 2008-06-27 | 2010-03-16 | Honeywell International Inc. | Micro-optics photonic bandgap fiber coupler |
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US8223341B2 (en) * | 2010-05-28 | 2012-07-17 | Honeywell International Inc. | System and method for enhancing signal-to-noise ratio of a resonator fiber optic gyroscope |
US8274659B2 (en) | 2010-08-30 | 2012-09-25 | Honeywell International Inc. | Resonator fiber optic gyroscopes with reduced rotation rate instability from back reflections |
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Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4135822A (en) * | 1976-01-19 | 1979-01-23 | Massachusetts Institute Of Technology | Laser gyroscope |
US4702600A (en) * | 1984-07-20 | 1987-10-27 | Litef Gmbh | Method and apparatus for measuring angular rate with a passive optical resonator |
JPH01163706A (ja) * | 1987-03-26 | 1989-06-28 | Nippon Denso Co Ltd | 多方向光導波回路 |
US4863272A (en) * | 1988-05-12 | 1989-09-05 | The Charles Stark Draper Laboratory, Inc. | Multi-mode fiber optic resonator gyroscope |
JPH03115917A (ja) * | 1989-06-24 | 1991-05-16 | British Aerospace Plc <Baf> | リング共振器ジヤイロ |
JPH03170016A (ja) * | 1989-09-07 | 1991-07-23 | Honeywell Inc | 二重セロダイン共振器光フアイバジヤイロスコープ |
JPH04500725A (ja) * | 1988-09-15 | 1992-02-06 | ハネウエル・インコーポレーテツド | 偏波回転リング経路を有する受動リング共振器ジヤイロ |
JPH04233410A (ja) * | 1990-08-27 | 1992-08-21 | Standard Elektrik Lorenz Ag | 光ファイバジャイロスコープ |
JPH05272981A (ja) * | 1992-03-25 | 1993-10-22 | Yokogawa Electric Corp | 光ジャイロ |
US5325174A (en) * | 1992-06-23 | 1994-06-28 | Northrop Corporation | Integrated optic gyro with one Bragg transducer |
JP2000146596A (ja) * | 1998-11-10 | 2000-05-26 | Tokyo Koku Keiki Kk | 共振点追従システムおよびこのシステムを用いたリング共振方式光ファイバジャイロ |
US6259089B1 (en) * | 1998-05-15 | 2001-07-10 | Rice Systems, Inc. | Integrated optics rotation sensor |
JP2004132963A (ja) * | 2002-08-20 | 2004-04-30 | Univ Leland Stanford Jr | 光センサ、感知するための方法、光学装置、回転を感知するための方法、光学システム、および干渉計 |
JP2007127650A (ja) * | 2005-11-02 | 2007-05-24 | Honeywell Internatl Inc | 伝送モードrfogおよびrfogで回転を検出する方法 |
JP2007163486A (ja) * | 2005-12-09 | 2007-06-28 | Honeywell Internatl Inc | 共振器ジャイロ内の光源を安定化させるシステムおよび方法 |
Family Cites Families (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4234357A (en) | 1979-07-16 | 1980-11-18 | Trw Inc. | Process for manufacturing emitters by diffusion from polysilicon |
US4315693A (en) | 1979-12-31 | 1982-02-16 | Walker Clifford G | Optical strapdown inertia system |
US4673293A (en) | 1985-01-31 | 1987-06-16 | Honeywell Inc. | Passive cavity gyro bias eliminator |
US5163118A (en) | 1986-11-10 | 1992-11-10 | The United States Of America As Represented By The Secretary Of The Air Force | Lattice mismatched hetrostructure optical waveguide |
US4886345A (en) | 1988-08-05 | 1989-12-12 | Harris Corporation | Electro-optical phase modulator |
GB2221999B (en) | 1988-08-16 | 1992-09-16 | Plessey Co Plc | Optical phase modulator |
US4958898A (en) | 1989-03-15 | 1990-09-25 | The United States Of America As Represented By The Secretary Of The Air Force | Silicon double-injection electro-optic modulator with insulated-gate and method of using same |
EP0393987A3 (en) | 1989-04-19 | 1992-08-05 | British Aerospace Public Limited Company | Ring resonator gyro |
US5143577A (en) | 1991-02-08 | 1992-09-01 | Hoechst Celanese Corporation | Smooth-wall polymeric channel and rib waveguides exhibiting low optical loss |
KR0134763B1 (ko) | 1992-04-21 | 1998-04-23 | 다니이 아끼오 | 광도파로소자와 그 제조방법 |
US5383048A (en) | 1993-02-03 | 1995-01-17 | Seaver; George | Stress-optical phase modulator and modulation system and method of use |
KR960011653B1 (ko) | 1993-04-16 | 1996-08-24 | 현대전자산업 주식회사 | 디램 셀 및 그 제조방법 |
DE69315359T2 (de) | 1993-09-21 | 1998-06-10 | Bookham Technology Ltd | Elektro-optische vorrichtung |
US5429981A (en) | 1994-06-30 | 1995-07-04 | Honeywell Inc. | Method of making linear capacitors for high temperature applications |
US5696662A (en) | 1995-08-21 | 1997-12-09 | Honeywell Inc. | Electrostatically operated micromechanical capacitor |
JP2817703B2 (ja) | 1996-04-25 | 1998-10-30 | 日本電気株式会社 | 光半導体装置 |
US5841931A (en) | 1996-11-26 | 1998-11-24 | Massachusetts Institute Of Technology | Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby |
US5861651A (en) | 1997-02-28 | 1999-01-19 | Lucent Technologies Inc. | Field effect devices and capacitors with improved thin film dielectrics and method for making same |
US6147362A (en) | 1997-03-17 | 2000-11-14 | Honeywell International Inc. | High performance display pixel for electronics displays |
US5917967A (en) | 1997-05-21 | 1999-06-29 | The United States Of America As Represented By The Secretary Of The Army | Techniques for forming optical electronic integrated circuits having interconnects in the form of semiconductor waveguides |
US6418999B1 (en) | 1997-12-26 | 2002-07-16 | Cannon Kabushiki Kaisha | Sample separating apparatus and method, and substrate manufacturing method |
US6108212A (en) | 1998-06-05 | 2000-08-22 | Motorola, Inc. | Surface-mount device package having an integral passive component |
US6381380B1 (en) | 1998-06-24 | 2002-04-30 | The Trustees Of Princeton University | Twin waveguide based design for photonic integrated circuits |
US6270604B1 (en) | 1998-07-23 | 2001-08-07 | Molecular Optoelectronics Corporation | Method for fabricating an optical waveguide |
JP2000124092A (ja) | 1998-10-16 | 2000-04-28 | Shin Etsu Handotai Co Ltd | 水素イオン注入剥離法によってsoiウエーハを製造する方法およびこの方法で製造されたsoiウエーハ |
EP0995971A3 (en) | 1998-10-19 | 2000-10-18 | Canon Kabushiki Kaisha | Gyro and method of operating the same |
GB2343293B (en) | 1998-10-23 | 2003-05-14 | Bookham Technology Ltd | Manufacture of a silicon waveguide structure |
JP4416055B2 (ja) | 1998-12-01 | 2010-02-17 | ローム株式会社 | 強誘電体メモリおよびその製造方法 |
US6323985B1 (en) | 1998-12-30 | 2001-11-27 | Intel Corporation | Mosfet through silicon modulator and method |
US6150266A (en) | 1999-01-28 | 2000-11-21 | Vlsi Technology, Inc. | Local interconnect formed using silicon spacer |
US6690884B1 (en) * | 1999-02-19 | 2004-02-10 | Corvis Corporation | Optical transmission systems including error correction and protection apparatuses and methods |
US6627954B1 (en) | 1999-03-19 | 2003-09-30 | Silicon Wave, Inc. | Integrated circuit capacitor in a silicon-on-insulator integrated circuit |
JP2001111160A (ja) | 1999-04-19 | 2001-04-20 | Canon Inc | 半導体素子の製造方法及び半導体素子、リング共振器型半導体レーザ、ジャイロ |
US6546538B1 (en) | 2000-03-10 | 2003-04-08 | Lsi Logic Corporation | Integrated circuit having on-chip capacitors for supplying power to portions of the circuit requiring high-transient peak power |
FR2810991B1 (fr) | 2000-06-28 | 2004-07-09 | Inst Francais Du Petrole | Procede pour l'hydrogenation de coupes contenant des hydrocarbures et notamment des molecules insaturees contenant au moins deux doubles liaisons ou au moins une triple liaison |
JP4961634B2 (ja) | 2000-07-07 | 2012-06-27 | Kddi株式会社 | 光ゲート装置 |
US6850683B2 (en) | 2000-07-10 | 2005-02-01 | Massachusetts Institute Of Technology | Low-loss waveguide and method of making same |
US6890450B2 (en) | 2001-02-02 | 2005-05-10 | Intel Corporation | Method of providing optical quality silicon surface |
US6603166B2 (en) | 2001-03-14 | 2003-08-05 | Honeywell International Inc. | Frontside contact on silicon-on-insulator substrate |
US6633716B2 (en) | 2001-05-02 | 2003-10-14 | Motorola, Inc. | Optical device and method therefor |
US6690863B2 (en) | 2001-05-17 | 2004-02-10 | Si Optical, Inc. | Waveguide coupler and method for making same |
US6646747B2 (en) | 2001-05-17 | 2003-11-11 | Sioptical, Inc. | Interferometer apparatus and associated method |
US6625348B2 (en) | 2001-05-17 | 2003-09-23 | Optron X, Inc. | Programmable delay generator apparatus and associated method |
US6963118B2 (en) | 2001-05-17 | 2005-11-08 | Sioptical, Inc. | Hybrid active and electronic circuit with evanescent coupling |
US6608945B2 (en) | 2001-05-17 | 2003-08-19 | Optronx, Inc. | Self-aligning modulator method and associated apparatus |
US6658173B2 (en) | 2001-05-17 | 2003-12-02 | Optronx, Inc. | Interferometer and method of making same |
US6947615B2 (en) | 2001-05-17 | 2005-09-20 | Sioptical, Inc. | Optical lens apparatus and associated method |
US6842546B2 (en) | 2001-05-17 | 2005-01-11 | Sioptical, Inc. | Polyloaded optical waveguide device in combination with optical coupler, and method for making same |
US6760498B2 (en) | 2001-05-17 | 2004-07-06 | Sioptical, Inc. | Arrayed waveguide grating, and method of making same |
US6493502B1 (en) | 2001-05-17 | 2002-12-10 | Optronx, Inc. | Dynamic gain equalizer method and associated apparatus |
US6891985B2 (en) | 2001-05-17 | 2005-05-10 | Sioptical, Inc. | Polyloaded optical waveguide devices and methods for making same |
US6526187B1 (en) | 2001-05-17 | 2003-02-25 | Optronx, Inc. | Polarization control apparatus and associated method |
US6690844B2 (en) | 2001-05-17 | 2004-02-10 | Optronx, Inc. | Optical fiber apparatus and associated method |
US6748125B2 (en) | 2001-05-17 | 2004-06-08 | Sioptical, Inc. | Electronic semiconductor control of light in optical waveguide |
US6898352B2 (en) | 2001-05-17 | 2005-05-24 | Sioptical, Inc. | Optical waveguide circuit including passive optical waveguide device combined with active optical waveguide device, and method for making same |
US6654511B2 (en) | 2001-05-17 | 2003-11-25 | Sioptical, Inc. | Optical modulator apparatus and associated method |
US6603889B2 (en) | 2001-05-17 | 2003-08-05 | Optronx, Inc. | Optical deflector apparatus and associated method |
US6912330B2 (en) | 2001-05-17 | 2005-06-28 | Sioptical Inc. | Integrated optical/electronic circuits and associated methods of simultaneous generation thereof |
US6738546B2 (en) | 2001-05-17 | 2004-05-18 | Sioptical, Inc. | Optical waveguide circuit including multiple passive optical waveguide devices, and method of making same |
US6891685B2 (en) | 2001-05-17 | 2005-05-10 | Sioptical, Inc. | Anisotropic etching of optical components |
US6596570B2 (en) | 2001-06-06 | 2003-07-22 | International Business Machines Corporation | SOI device with reduced junction capacitance |
US20030026571A1 (en) | 2001-07-31 | 2003-02-06 | Michael Bazylenko | Method of reducing sidewall roughness of a waveguide |
US6917727B2 (en) | 2001-09-10 | 2005-07-12 | California Institute Of Technology | Strip loaded waveguide integrated with electronics components |
US6816636B2 (en) | 2001-09-12 | 2004-11-09 | Honeywell International Inc. | Tunable optical filter |
US6879751B2 (en) | 2002-01-30 | 2005-04-12 | Sioptical, Inc. | Method and apparatus for altering the effective mode index of an optical waveguide |
IL148716A0 (en) | 2002-03-14 | 2002-09-12 | Yissum Res Dev Co | Control of optical signals by mos (cosmos) device |
US7010208B1 (en) | 2002-06-24 | 2006-03-07 | Luxtera, Inc. | CMOS process silicon waveguides |
CA2395791C (en) | 2002-07-26 | 2012-05-08 | Len Rodels | Fishing reel |
US6919238B2 (en) | 2002-07-29 | 2005-07-19 | Intel Corporation | Silicon on insulator (SOI) transistor and methods of fabrication |
US6888219B2 (en) | 2002-08-29 | 2005-05-03 | Honeywell International, Inc. | Integrated structure with microwave components |
US6845198B2 (en) | 2003-03-25 | 2005-01-18 | Sioptical, Inc. | High-speed silicon-based electro-optic modulator |
US7118682B2 (en) | 2003-03-28 | 2006-10-10 | Sioptical, Inc. | Low loss SOI/CMOS compatible silicon waveguide and method of making the same |
US6993225B2 (en) | 2004-02-10 | 2006-01-31 | Sioptical, Inc. | Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same |
US7020364B2 (en) | 2003-03-31 | 2006-03-28 | Sioptical Inc. | Permanent light coupling arrangement and method for use with thin silicon optical waveguides |
US6897498B2 (en) | 2003-03-31 | 2005-05-24 | Sioptical, Inc. | Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform |
US7000207B2 (en) | 2003-04-10 | 2006-02-14 | Sioptical, Inc. | Method of using a Manhattan layout to realize non-Manhattan shaped optical structures |
US6934444B2 (en) | 2003-04-10 | 2005-08-23 | Sioptical, Inc. | Beam shaping and practical methods of reducing loss associated with mating external sources and optics to thin silicon waveguides |
US6980720B2 (en) | 2003-04-11 | 2005-12-27 | Sioptical, Inc. | Mode transformation and loss reduction in silicon waveguide structures utilizing tapered transition regions |
WO2004095112A2 (en) | 2003-04-21 | 2004-11-04 | Sioptical, Inc. | Cmos-compatible integration of silicon-based optical devices with electronic devices |
CN1788217A (zh) | 2003-04-28 | 2006-06-14 | 斯欧普迪克尔股份有限公司 | 在透镜耦合soi基光学系统中降低波长敏感度的装置 |
WO2005024470A2 (en) | 2003-09-04 | 2005-03-17 | Sioptical, Inc | External grating structures for interfacing wavelength-division-multiplexed optical sources with thin optical waveguides |
US7013067B2 (en) | 2004-02-11 | 2006-03-14 | Sioptical, Inc. | Silicon nanotaper couplers and mode-matching devices |
US7217584B2 (en) | 2004-03-18 | 2007-05-15 | Honeywell International Inc. | Bonded thin-film structures for optical modulators and methods of manufacture |
US7149388B2 (en) | 2004-03-18 | 2006-12-12 | Honeywell International, Inc. | Low loss contact structures for silicon based optical modulators and methods of manufacture |
US7177489B2 (en) | 2004-03-18 | 2007-02-13 | Honeywell International, Inc. | Silicon-insulator-silicon thin-film structures for optical modulators and methods of manufacture |
JP2008517332A (ja) * | 2004-10-19 | 2008-05-22 | シオプティカル インコーポレーテッド | モノリシック集積した光学及び電子構造におけるフィードバック制御としての光検出器構造及び使用 |
-
2006
- 2006-04-18 US US11/406,939 patent/US7463360B2/en active Active
-
2007
- 2007-04-17 EP EP07106302.8A patent/EP1847804B1/en active Active
- 2007-04-18 JP JP2007108822A patent/JP4818979B2/ja not_active Expired - Fee Related
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4135822A (en) * | 1976-01-19 | 1979-01-23 | Massachusetts Institute Of Technology | Laser gyroscope |
US4702600A (en) * | 1984-07-20 | 1987-10-27 | Litef Gmbh | Method and apparatus for measuring angular rate with a passive optical resonator |
JPH01163706A (ja) * | 1987-03-26 | 1989-06-28 | Nippon Denso Co Ltd | 多方向光導波回路 |
US4863272A (en) * | 1988-05-12 | 1989-09-05 | The Charles Stark Draper Laboratory, Inc. | Multi-mode fiber optic resonator gyroscope |
JPH04500725A (ja) * | 1988-09-15 | 1992-02-06 | ハネウエル・インコーポレーテツド | 偏波回転リング経路を有する受動リング共振器ジヤイロ |
JPH03115917A (ja) * | 1989-06-24 | 1991-05-16 | British Aerospace Plc <Baf> | リング共振器ジヤイロ |
JPH03170016A (ja) * | 1989-09-07 | 1991-07-23 | Honeywell Inc | 二重セロダイン共振器光フアイバジヤイロスコープ |
JPH04233410A (ja) * | 1990-08-27 | 1992-08-21 | Standard Elektrik Lorenz Ag | 光ファイバジャイロスコープ |
JPH05272981A (ja) * | 1992-03-25 | 1993-10-22 | Yokogawa Electric Corp | 光ジャイロ |
US5325174A (en) * | 1992-06-23 | 1994-06-28 | Northrop Corporation | Integrated optic gyro with one Bragg transducer |
US6259089B1 (en) * | 1998-05-15 | 2001-07-10 | Rice Systems, Inc. | Integrated optics rotation sensor |
JP2000146596A (ja) * | 1998-11-10 | 2000-05-26 | Tokyo Koku Keiki Kk | 共振点追従システムおよびこのシステムを用いたリング共振方式光ファイバジャイロ |
JP2004132963A (ja) * | 2002-08-20 | 2004-04-30 | Univ Leland Stanford Jr | 光センサ、感知するための方法、光学装置、回転を感知するための方法、光学システム、および干渉計 |
JP2007127650A (ja) * | 2005-11-02 | 2007-05-24 | Honeywell Internatl Inc | 伝送モードrfogおよびrfogで回転を検出する方法 |
JP2007163486A (ja) * | 2005-12-09 | 2007-06-28 | Honeywell Internatl Inc | 共振器ジャイロ内の光源を安定化させるシステムおよび方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010100766A1 (ja) * | 2009-03-04 | 2010-09-10 | 有限会社グローバルファイバオプティックス | 旋光測定装置および旋光測定方法 |
JPWO2010100766A1 (ja) * | 2009-03-04 | 2012-09-06 | 株式会社グローバルファイバオプティックス | 旋光測定装置および旋光測定方法 |
JP2010210617A (ja) * | 2009-03-06 | 2010-09-24 | Honeywell Internatl Inc | 共振器光ファイバジャイロスコープのキャビティ長変調 |
JP2010271308A (ja) * | 2009-05-14 | 2010-12-02 | Honeywell Internatl Inc | 小型共振器光ファイバージャイロスコープ |
JP2010281819A (ja) * | 2009-06-05 | 2010-12-16 | Honeywell Internatl Inc | 共振器光ファイバジャイロスコープにおいて変調歪み速度検知誤差を抑制するための方法及び増幅段階 |
JP2011027739A (ja) * | 2009-07-21 | 2011-02-10 | Honeywell Internatl Inc | 高次空間モードからのバイアス誤差が低減された共振器光ファイバジャイロスコープ(rfog) |
WO2011062114A1 (ja) * | 2009-11-19 | 2011-05-26 | 株式会社アドバンテスト | 信号出力器、複数信号の信号源および複数のレーザ光パルスの出力装置 |
JPWO2011062114A1 (ja) * | 2009-11-19 | 2013-04-04 | 株式会社アドバンテスト | 信号出力器、複数信号の信号源および複数のレーザ光パルスの出力装置 |
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JP4818979B2 (ja) | 2011-11-16 |
US7463360B2 (en) | 2008-12-09 |
EP1847804A1 (en) | 2007-10-24 |
EP1847804B1 (en) | 2017-06-14 |
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