JP2007250554A5 - - Google Patents
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- Publication number
- JP2007250554A5 JP2007250554A5 JP2007130041A JP2007130041A JP2007250554A5 JP 2007250554 A5 JP2007250554 A5 JP 2007250554A5 JP 2007130041 A JP2007130041 A JP 2007130041A JP 2007130041 A JP2007130041 A JP 2007130041A JP 2007250554 A5 JP2007250554 A5 JP 2007250554A5
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- cathode
- structural member
- lithographic system
- heat supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims 23
- 238000000034 method Methods 0.000 claims 8
- 229910052715 tantalum Inorganic materials 0.000 claims 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 3
- 229910000691 Re alloy Inorganic materials 0.000 claims 2
- 229910001362 Ta alloys Inorganic materials 0.000 claims 2
- DZZDTRZOOBJSSG-UHFFFAOYSA-N [Ta].[W] Chemical compound [Ta].[W] DZZDTRZOOBJSSG-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 2
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/337,741 US6448569B1 (en) | 1999-06-22 | 1999-06-22 | Bonded article having improved crystalline structure and work function uniformity and method for making the same |
| US09/337741 | 1999-06-22 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000186628A Division JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007250554A JP2007250554A (ja) | 2007-09-27 |
| JP2007250554A5 true JP2007250554A5 (https=) | 2009-02-12 |
| JP5392995B2 JP5392995B2 (ja) | 2014-01-22 |
Family
ID=23321794
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000186628A Pending JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
| JP2007130041A Expired - Fee Related JP5392995B2 (ja) | 1999-06-22 | 2007-05-16 | 接合品 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000186628A Pending JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6448569B1 (https=) |
| EP (1) | EP1063670B1 (https=) |
| JP (2) | JP2001052594A (https=) |
| KR (1) | KR20010049594A (https=) |
| DE (1) | DE60043373D1 (https=) |
| TW (1) | TW432396B (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9138913B2 (en) * | 2005-09-08 | 2015-09-22 | Imra America, Inc. | Transparent material processing with an ultrashort pulse laser |
| WO2011121565A1 (en) * | 2010-04-02 | 2011-10-06 | Koninklijke Philips Electronics N.V. | Ceramic metal halide lamp with feedthrough comprising an iridium wire |
| SG11201703125WA (en) * | 2014-10-23 | 2017-05-30 | Agency Science Tech & Res | Method of bonding a first substrate and a second substrate |
| GB2583359A (en) * | 2019-04-25 | 2020-10-28 | Aquasium Tech Limited | Electron beam emitting assembly |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB395439A (en) * | 1932-02-17 | 1933-07-20 | Mullard Radio Valve Co Ltd | Improvements relating to thermionic valves |
| US2410822A (en) * | 1942-01-03 | 1946-11-12 | Sperry Gyroscope Co Inc | High frequency electron discharge apparatus |
| US2892740A (en) * | 1957-01-08 | 1959-06-30 | Univ Notre Dame Du Lac | Thermionic emitter and method of making same |
| US3284657A (en) * | 1963-06-03 | 1966-11-08 | Varian Associates | Grain-oriented thermionic emitter for electron discharge devices |
| NL7003279A (https=) * | 1970-03-07 | 1971-09-09 | ||
| US4055780A (en) * | 1975-04-10 | 1977-10-25 | National Institute For Researches In Inorganic Materials | Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride |
| JPS5679828A (en) * | 1979-12-05 | 1981-06-30 | Toshiba Corp | Electron gun |
| CH672860A5 (https=) * | 1986-09-29 | 1989-12-29 | Balzers Hochvakuum | |
| US5042058A (en) | 1989-03-22 | 1991-08-20 | University Of California | Ultrashort time-resolved x-ray source |
| JP3397570B2 (ja) * | 1996-04-02 | 2003-04-14 | 電気化学工業株式会社 | 熱電界放射陰極 |
| WO1997044803A1 (fr) * | 1996-05-21 | 1997-11-27 | Kabushiki Kaisha Toshiba | Structure de cathode, structure de canon a electron, grille pour canon a electron, tube electronique, element chauffant et procede de fabrication de la structure de cathode |
| JPH1131469A (ja) * | 1997-07-08 | 1999-02-02 | Nikon Corp | 電子銃 |
-
1999
- 1999-06-22 US US09/337,741 patent/US6448569B1/en not_active Expired - Lifetime
-
2000
- 2000-06-13 DE DE60043373T patent/DE60043373D1/de not_active Expired - Lifetime
- 2000-06-13 EP EP00305016A patent/EP1063670B1/en not_active Expired - Lifetime
- 2000-06-21 JP JP2000186628A patent/JP2001052594A/ja active Pending
- 2000-06-22 TW TW089112268A patent/TW432396B/zh not_active IP Right Cessation
- 2000-06-22 KR KR1020000034430A patent/KR20010049594A/ko not_active Ceased
-
2007
- 2007-05-16 JP JP2007130041A patent/JP5392995B2/ja not_active Expired - Fee Related
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