JP2007220868A5 - - Google Patents

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Publication number
JP2007220868A5
JP2007220868A5 JP2006039116A JP2006039116A JP2007220868A5 JP 2007220868 A5 JP2007220868 A5 JP 2007220868A5 JP 2006039116 A JP2006039116 A JP 2006039116A JP 2006039116 A JP2006039116 A JP 2006039116A JP 2007220868 A5 JP2007220868 A5 JP 2007220868A5
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JP
Japan
Prior art keywords
substrate
gripping
mounting portion
rotation support
support portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006039116A
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English (en)
Japanese (ja)
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JP2007220868A (ja
JP4873129B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2006039116A priority Critical patent/JP4873129B2/ja
Priority claimed from JP2006039116A external-priority patent/JP4873129B2/ja
Publication of JP2007220868A publication Critical patent/JP2007220868A/ja
Publication of JP2007220868A5 publication Critical patent/JP2007220868A5/ja
Application granted granted Critical
Publication of JP4873129B2 publication Critical patent/JP4873129B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006039116A 2006-02-16 2006-02-16 基板把持装置 Expired - Fee Related JP4873129B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006039116A JP4873129B2 (ja) 2006-02-16 2006-02-16 基板把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006039116A JP4873129B2 (ja) 2006-02-16 2006-02-16 基板把持装置

Publications (3)

Publication Number Publication Date
JP2007220868A JP2007220868A (ja) 2007-08-30
JP2007220868A5 true JP2007220868A5 (enExample) 2009-01-29
JP4873129B2 JP4873129B2 (ja) 2012-02-08

Family

ID=38497821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006039116A Expired - Fee Related JP4873129B2 (ja) 2006-02-16 2006-02-16 基板把持装置

Country Status (1)

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JP (1) JP4873129B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9732416B1 (en) 2007-04-18 2017-08-15 Novellus Systems, Inc. Wafer chuck with aerodynamic design for turbulence reduction
JP4819010B2 (ja) * 2007-09-04 2011-11-16 東京エレクトロン株式会社 処理装置、処理方法および記憶媒体
US8419964B2 (en) 2008-08-27 2013-04-16 Novellus Systems, Inc. Apparatus and method for edge bevel removal of copper from silicon wafers
US8172646B2 (en) * 2009-02-27 2012-05-08 Novellus Systems, Inc. Magnetically actuated chuck for edge bevel removal
JP5902085B2 (ja) * 2009-08-07 2016-04-13 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理チャンバ内で基板を位置決めするための装置及び処理チャンバ内で基板をセンタリングするための方法
JP2013045912A (ja) * 2011-08-25 2013-03-04 Tokyo Electron Ltd 搬送機構
JP2015105167A (ja) * 2013-11-29 2015-06-08 日本板硝子株式会社 ガラス板保持具及びガラス板搬送装置
CN105225995B (zh) * 2014-06-30 2018-03-09 北京北方华创微电子装备有限公司 晶片传输装置和工艺腔室
CN111199909B (zh) * 2018-11-19 2023-06-16 北京北方华创微电子装备有限公司 一种基座组件和半导体加工设备
JP2023083840A (ja) * 2021-12-06 2023-06-16 株式会社ディスコ 中心合わせ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06155213A (ja) * 1992-11-19 1994-06-03 Hitachi Ltd 回転機構
JPH09232406A (ja) * 1996-02-26 1997-09-05 Sumitomo Sitix Corp ウェーハ移し換え治具
JPH1074816A (ja) * 1996-08-29 1998-03-17 Hitachi Techno Eng Co Ltd ウェファ搬送装置
JP2002368066A (ja) * 2001-06-06 2002-12-20 Tokyo Electron Ltd 処理装置

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