JP2007198931A - Displacement magnifying mechanism for electrode measurement probe, and substrate inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a displacement magnifying mechanism capable of moving an electric measurement probe in Z-axis direction, by providing a displacement output end side as a load point with superior amount of magnification movement that is superior in response characteristics and a substrate inspection device. <P>SOLUTION: The displacement magnifying mechanism 11 is constituted of a base part 12; an expansion and contraction body 22, provided with an abutment part 25 abutting against a counter member to make it act as a force point and provided to the side of the base part 12 so as to be subjected freely to expansion and contraction control; and an arm body 32 connected via each fulcrum part 15, interposed to a necessary part including the base part 12 so as to magnify and transfer the amount of displacement, with respect to the Z-axis direction for the side of a displacement output end 57, by receiving pressing force from the side of the expansion and contraction body 22. The substrate inspection device is provided with the displacement magnifying mechanism 11. Accordingly, the amount of displacement, magnified in the Z-axis direction via the arm body 32, can be output for the side of displacement output end where the electric measurement probe P is attached. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a displacement enlarging mechanism for an electric measurement probe and a substrate inspection apparatus capable of quickly moving the electric measurement probe in a more stable state.

  FIG. 8 is an explanatory diagram illustrating a schematic configuration example of the substrate inspection apparatus. Normally, the substrate inspection apparatus 101 includes a fixed arm portion 103 that is fixed on the apparatus main body 102 side, and a length of the fixed arm portion 103. A movable arm 104 that can be freely moved in the X-axis direction along the vertical direction, and a movement in the Y-axis direction along the length direction of the movable arm 104 can be freely arranged. And at least a moving body 105 provided.

  Further, the moving body 105 is provided with an elevating mechanism 107 through an interposition piece 106. By attaching an electric measurement probe 108 to the elevating mechanism 107 side and moving it in the Z-axis direction, the apparatus main body 102 is provided. The electrical measurement probe 108 is brought into contact with a predetermined inspection point of the substrate 109 to be inspected placed on the side, so that necessary electrical measurement can be performed.

  FIG. 9 and FIG. 10 are explanatory views showing a specific example of a lifting mechanism in the Z-axis direction for the electrical measurement probe at that time, and the lifting mechanism 111 shown in FIG. 9 is in the XY-axis direction. The table 112 on which an electrical measurement probe (not shown) is attached at an appropriate position, the one pulley 114 fixed to the motor shaft 113, and the driven rotation are pivotally supported. The other pulley 115 and a belt 116 stretched between these pulleys 114, 115, and a part of the belt 116 is fixed to the table 112 side via a fixing portion 117 and the table 112 is fixed. Can be moved up and down by being driven in the moving direction of the belt 116 while being guided by the linear motion guide 118.

However, the elevating mechanism 111 shown in FIG. 9 is difficult to apply a preferable tension to the belt 116 during assembly work during manufacture, and has the following problems. .
(1) The response characteristics are not good.
(2) Rise is slow.
(3) Noise is generated.
(4) Frictional heat is generated between the belt 116 and the pulleys 114 and 115.
(5) It takes about 4 ms to move 1 mm.

  Further, an elevating mechanism 121 shown in FIG. 10 includes a motor 122 that is freely movable in the X-Y axis direction, a ball screw 124 that is connected to a motor shaft 123 of the motor 122 and is driven to rotate, The table 126 is configured to move forward and backward along the linear guide 125 by the rotation of the ball screw 124, and an electric measurement probe (not shown) is attached to an appropriate position on the table 126 side.

However, the lifting mechanism 121 shown in FIG. 10 has the following problems.
(1) The device is expensive.
(2) Noise is generated.
(3) Since the mass is large, the planar positioning XY moving part also becomes large. (4) It takes about 4 ms to move 1 mm.

On the other hand, as an alternative to the lifting mechanism shown in FIGS. 9 and 10 without the above-described problems, there is a displacement enlarging mechanism disclosed in Patent Document 1 below, for example.
Japanese Patent Laid-Open No. 2001-22445

  FIG. 11 is an explanatory diagram showing an example of a displacement enlarging mechanism disclosed in Patent Document 1. According to FIG. 11A, the base end side is supported by the fixing base 1 via the hinge 3, one end is connected to the distal end side of the arm 5, and the other end is connected to the fixing base 1. A spring 6 and a piezoelectric body 2 capable of pressing a part of the arm 5 against the elasticity of the spring 6 and displacing the distal end side of the arm 5 along a predetermined displacement direction Y are provided. Yes. In this case, the arm 5 is maintained in a state tilted by a predetermined angle θ1 toward the front side in the displacement direction Y by the spring 6 in a state where the piezoelectric body 2 is not expanded and contracted.

  The arm 5 protrudes along a horizontal axis H parallel to the X-axis direction of the orthogonal coordinates XY, and the output displacement end 5a of the displacement magnifying mechanism is located on the tip side.

  Moreover, the piezoelectric body 2 is arranged along the Y-axis direction (displacement direction Y) of the orthogonal coordinates XY, the base end thereof is fixed to the fixed base 1, and the distal end thereof is a pin attached to the arm 5. 4 is connected.

  Therefore, according to the displacement enlarging mechanism shown in FIG. 11, when the piezoelectric body 2 is extended in the Y-axis direction as shown in FIG. 11B, the pressing force corresponding to the extension amount is applied via the pin 4 to the arm 5. As a result, the distal end side of the arm 5 can be displaced along the predetermined displacement direction Y with the hinge 3 as a fulcrum. When the piezoelectric body 2 is contracted in the Y-axis direction, the arm 5 is automatically returned to the original position by the elastic force of the spring 6.

  Therefore, in the case of the displacement magnifying mechanism shown in FIG. 11, the distal end side (load point) of the arm 5 can be operated at high speed under a small and stable state.

  However, in the displacement enlarging mechanism shown in FIG. 11, the extension amount of the piezoelectric body 2 depends on the movement amount on the tip side (load point) of the arm 5. There is an inconvenience that the required amount of movement cannot be applied to the tip side (load point).

  In view of the above-described problems of the prior art, the present invention provides an electric measurement probe capable of moving the electric measurement probe in the Z-axis direction by applying a necessary movement amount excellent in response characteristics to the displacement output end side which is a load point. There is an object to provide a displacement magnifying mechanism and a substrate inspection apparatus.

  The present invention has been made to achieve the above object, and the first invention (displacement enlargement mechanism for electric measurement probe) of the present invention is a base and a contact that abuts against a mating member and acts as a force point. The elastic body is provided with a displacement end, which is a free end thereof, and an expansion / contraction body that is freely arranged to control expansion / contraction on the base side, and a displacement output end side that receives a pressing force from the abutting portion of the expansion / contraction body In order to transmit the displacement amount in the Z-axis direction in an enlarged manner, at least the arm member as the mating member connected via the fulcrum portions interposed in the necessary locations including the base portion is configured. The most important feature is that an enlarged displacement amount in the Z-axis direction can be freely given to the displacement output end side to which the electric measurement probe is attached via the arm body. In this case, the base unit can be attached to a movable body that is freely arranged in the apparatus main body. Moreover, it is preferable that the moving body is disposed so as to freely move in the XY axis direction.

  The arm body includes a displacement input side arm portion that receives a pressing force from the expansion and contraction body, and a displacement output side arm that finally transmits a displacement amount in the Z-axis direction to the displacement output end side. And each arm part is provided with a displacement amount output to the load point side freely via the intervening fulcrum part. The electrical measurement probe can be freely connected to the displacement output end which is a load point of the arm portion on the output side.

  Further, the arm body is configured by the arm portion on the displacement input side positioned below and the arm portion on the displacement output side positioned above the arm portion, and the arm portion on the displacement input side includes: One end portion in the length direction is in contact with the contact portion of the stretchable body, and is connected to the base portion side via a fulcrum portion interposed at a substantially intermediate position near the corresponding contact portion. The arm portion on the displacement output side is connected to one end portion side of the arm portion on the displacement output side via a fulcrum portion interposed on the other end portion, and the arm portion on the displacement output side is connected to the arm portion on the substantially intermediate position via the fulcrum portion. It is also possible to freely connect the electric measurement probe to the other end side as the displacement output end which is connected to the base portion side and is a load point.

  Furthermore, the arm body includes the displacement input side arm portion positioned below and the displacement output side arm portion positioned above the arm portion, and the displacement input side arm portion includes: It is connected to the base part side via a fulcrum part interposed on one end part side in the length direction, and an intermediate position near the one end part comes into contact with the contact part of the expansion / contraction body, and is a load point It is connected to an intermediate position near one end of the arm portion on the displacement output side via a fulcrum portion interposed on the end side, and the arm portion on the displacement output side is supported on the one end portion side. The electric measurement probe may be freely connected to the base portion side through the other end side as the displacement output end which is a load point.

  In addition, the arm body is configured by the displacement input side arm portion positioned above and the displacement output side arm portion positioned below the arm portion and forming a parallel link as a whole. The arm part on the input side is connected to the base part side via a fulcrum part interposed at one end part in the length direction, and a substantially intermediate position thereof is in contact with the abutting part of the expansion / contraction body. It is connected to the arm part side on the displacement output side via a fulcrum part interposed at the other end part which is a point, and the arm part on the displacement output side is connected to the base part via the fulcrum part interposed on one end side. The electrical measurement probe side connection to the displacement output end side that can freely apply an enlarged displacement amount in the Z-axis direction that is connected to the side and that moves substantially straight through a fulcrum part interposed on the other end side Can also be formed freely.

  Further, the arm portion on the displacement output side is composed of an upper arm piece portion, a lower arm piece portion and a vertical arm piece portion forming the parallel link, and via a fulcrum portion interposed near one end thereof. The upper arm piece portion connected to the arm portion side on the displacement input side includes the base portion via a fulcrum portion interposed on one end side and the vertical portion via a fulcrum portion interposed on the other end side. Each of the upper arm portions is connected to the upper arm portion, and the lower arm piece portion is connected to the base portion via a fulcrum portion interposed on one end side and a fulcrum portion interposed on the other end side. The lower end part of the vertical arm piece part may be connected to each other, and the lower end part of the vertical arm piece part may be connected to the electrical measurement probe side as the displacement output end which is the load point.

In addition, the arm body includes an arm portion on a displacement input side including a horizontal piece portion positioned above, and a skew piece piece inclined forward from an open end side of the horizontal piece portion, and a lower portion of the arm portion. And the arm part on the displacement output side that forms a parallel link in its entirety, and the arm part on the displacement input side is interposed on one end side in the length direction of the horizontal piece part A fulcrum portion that is connected to the base portion side through a portion, a position near the one end abuts on the abutting portion of the stretchable body, and is interposed on the open end side of the skewed piece portion that is a load point. Connected to one end of the arm portion on the displacement output side,
The arm part on the displacement output side is connected to the base part side via a fulcrum part interposed on one end side, and expands in the Z-axis direction substantially straight forward via the fulcrum part interposed on the other end side. It is also possible to freely form a connection of the electric measurement probe to the displacement output end side that can freely give the displacement amount.

  In this case, the arm portion on the displacement output side is composed of an upper arm piece portion, a lower arm piece portion and a vertical arm piece portion forming the parallel link, and is interposed on the open end side of the skew piece portion. The upper arm piece connected via the fulcrum part is connected to the base part via the fulcrum part interposed at one end side and the vertical arm via the fulcrum part interposed at the other end side. The lower arm piece part is connected to the base part via a fulcrum part interposed at one end side and the fulcrum part interposed at the other end side, respectively. It is desirable that the lower end portion of the arm piece portion is connected to each other, and the lower end portion of the vertical arm piece portion is connected to the electric measurement probe side as the displacement output end which is the load point.

  Further, in this example, the fulcrum part interposed on one end side in the length direction of the horizontal piece part and the fulcrum part interposed on the open end side of the skew piece part are arranged in substantially the same horizontal direction. It is desirable to position it. Further, the arm portion on the displacement output side can be arranged in the opposite direction to the arm portion on the displacement input side.

  Further, the arm body has a displacement input side arm portion as a vertical side having an upper end side as an open end, and a horizontal side whose one end portion is connected to a lower end portion serving as a load point of the arm portion. The arm portion on the displacement output side is formed in a substantially L shape, and each arm portion is connected to the base portion side via a fulcrum portion interposed in a corner portion connected to each other, and the expansion and contraction is performed. The body has a one-side elastic body in which the abutting portion is brought into contact with one side of the upper end portion of the arm portion on the displacement input side, and the abutting portion is brought into contact with the other side of the upper end portion. The other side stretchable body is configured to be displaced according to the degree of pressing force separately applied from the one side stretchable body and the other side stretchable body to the upper end portion of the arm portion on the displacement input side. The other end portion of the arm portion on the displacement output side that outputs the displacement amount of the lower end portion enlarged is applied to the load. Wherein it is also possible to so as to connected to the electrical measuring probe side as the displacement output end is.

  On the other hand, a second invention (substrate inspection apparatus) comprises the displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 13 with respect to the movable body that is freely movable. The most important feature is that.

  Of the present invention, according to the first invention, in the Z-axis direction with respect to the displacement output end side as a load point to which the electric measurement probe of the arm body is attached by receiving the pressing force from the contact portion of the expansion / contraction body. Therefore, the electrical measurement probe connected to the displacement output end side can be moved in the Z-axis direction with preferable response characteristics. Further, according to the first invention, since the whole mechanism can be made compact, not only can the cost be reduced, but also the weight can be reduced and the movement in a predetermined direction can be accelerated. Can increase the measurement speed.

  Particularly, when the arm portion on the displacement output side constituting the arm body is formed by a parallel link, the electric measurement probe can be moved while further improving the straightness in the Z-axis direction.

  On the other hand, according to the second invention, since the movable body provided in the apparatus main body is provided with the displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 13, its mass is small. Therefore, the planar positioning in a predetermined direction can be made accurate and stable. In addition to eliminating electromagnetic noise, the measurement operation can be speeded up and stabilized, and after positioning in the Z-axis direction, a preload is applied to the displacement output end of the displacement expansion mechanism for electrical measurement probes. Therefore, the settling on the Z-axis side can be improved to improve the response characteristics.

  According to the present invention, the displacement applied from the power point side is enlarged and outputted in the Z-axis direction with respect to the displacement output end side provided with the electric measurement probe used for electrically inspecting the substrate to be inspected. The present invention can be applied to a displacement enlarging mechanism for an electric measurement probe (first invention) and a substrate inspection apparatus (second invention) provided with the displacement enlarging mechanism for an electric measurement probe.

  Among these, the basic configuration of the first invention will be briefly described with reference to FIG. 1 and FIG. 8. A displacement magnifying mechanism for an electric measurement probe (hereinafter abbreviated as “displacement magnifying mechanism”) 11 will be described. For example, a base 12 that can be mounted on a moving body 105 that is freely arranged in the XY axis direction on the apparatus main body 2 shown in FIG. An abutting portion 25 that acts as a free end is provided at the displacement end 24, and the base portion 12 side is freely arranged to control expansion and contraction via the base end portion 23 side. In order to receive the pressing force from the body 22 and the contact portion 25 of the expansion / contraction body 22 and to transmit the displacement amount in the Z-axis direction to the displacement output end 57 side in an enlarged manner, necessary portions including the base portion 12 A mating member connected via each fulcrum 15 (15a to 15c) interposed between It is at least composed of an arm body 32 of Te.

  In this case, the arm body 32 is transmitted with the displacement amount in the Z-axis direction enlarged to the displacement input side arm portion 34 that receives the pressing force from the telescopic body 22 and finally to the displacement output end 57 side. It includes at least two or more arm portions 33 that are integrally connected including the arm body 35 on the displacement output side. By providing such a configuration, the displacement output end as a load point to which the electric measurement probe P is attached can be freely given an enlarged displacement amount in the Z-axis direction via the arm body 32. And can be.

  That is, according to the first example shown in FIG. 1, the arm body 32 includes a displacement input side arm portion 34 positioned below, and a displacement output side arm positioned above the arm portion 34 in a stepped manner. Part 35.

  Of these, the arm 34 on the displacement input side has one end 34a in the length direction in contact with the contact portion 25 of the stretchable body 22, and a fulcrum portion 15a interposed at a substantially intermediate position near the contact portion 25. It is connected to the base part 12 side via the fulcrum part 15b interposed in the other end part 34b that is the load point, and is connected to the one end part 35a side that is the power point of the arm part 35 on the displacement output side. . Therefore, the arm portion 34 on the displacement input side can swing in a seesaw shape in the length direction via the fulcrum portion 15a.

  Further, the arm portion 35 on the displacement output side is connected to the base portion 12 side via a fulcrum portion 15c interposed at a substantially intermediate position, and the other end portion 35b side as the displacement output end 57 which is a load point is electrically connected. It is connected to the measurement probe P side. Therefore, the arm portion 35 on the displacement output side can swing in a seesaw shape in the length direction via the fulcrum portion 15c. Further, a linear motion block 62 that moves up and down along the linear motion rail 61 is pivotally supported on the other end portion 35b of the displacement output side arm portion 35 via a support shaft portion 63. The electric measurement probe P can be attached to an elevating body 64 (linear motion system) that follows the movement of 62 in the Z-axis direction.

  FIG. 2 is a conceptual diagram showing a second example of the first invention. In this example as well, the arm body 33 is positioned below the base part 12 and is supported on the base part 12 side. The input side arm portion 34 and the displacement output side arm portion 35 which are positioned above the displacement input side arm portion 34 and are supported on the base portion 12 side.

  In this case, the arm portion 34 on the displacement input side is connected to the base portion 12 side via a fulcrum portion 15a interposed on the one end portion 34a side in the length direction, and a substantially intermediate position near the one end portion 34a expands and contracts. It contacts the contact portion 25 of the body 22 and is connected to a substantially intermediate position near the one end portion 35a of the arm portion 35 on the displacement output side via a fulcrum portion 15b interposed on the other end portion 34b side which is a load point. Yes. Therefore, the arm portion 34 on the displacement input side can swing in a seesaw shape in the length direction via the fulcrum portion 15a.

  The arm portion 35 on the displacement output side is connected to the base portion 12 side via a fulcrum portion 15c interposed on the one end portion 35a side, and the other end portion 35b side as the displacement output end 57 as a load point is shown in FIG. Are connected to the electric measurement probe P side through a linear motion system having the same configuration as shown in FIG. In this case, the arm portion 35 on the displacement output side can swing in a seesaw shape in the length direction via the fulcrum portion 15c.

  FIG. 3 is a conceptual diagram showing a third example of the first invention. The arm body 32 in this example is positioned above the arm part 34 on the displacement input side located above and below the arm part 34. The arm portion 35 on the displacement output side forms a parallel link as a whole.

  Among these, the displacement input side arm portion 34 is connected to the base portion 12 side via a fulcrum portion 15a interposed in one end portion 34a in the length direction, and a substantially intermediate position thereof is in contact with the elastic body 22. This is a force point that comes into contact with the portion 25, and is connected to the arm portion 35 on the displacement output side via a fulcrum portion 15b interposed in the other end portion 34b that is a load point. Therefore, the arm portion 34 on the displacement input side can swing in a seesaw shape in the length direction via the fulcrum portion 15a.

  In this case, the arm portion 35 on the displacement output side is composed of an upper arm piece portion 36, a lower arm piece portion 37, and a vertical arm piece portion 38 that form parallel links, and the arm portion 34 on the displacement input side. The fulcrum portion 15b is formed between the upper arm piece portion 36 and the upper arm piece portion 36.

  That is, the upper arm piece portion 36 connected as a power point from the arm portion 34 side on the displacement input side via the fulcrum portion 15b interposed near the one end 36a passes through the fulcrum portion 15c interposed on the one end 36a side. The base portion 12 is connected to the upper end portion 38a of the vertical arm piece 38 via a fulcrum portion 15d interposed on the other end 36b side.

  Further, the lower arm piece portion 37 disposed substantially parallel to the upper arm piece portion 36 has a fulcrum interposed on the base portion 12 side and the other end 37b side via a fulcrum portion 15e interposed on the one end 37a. The lower end portion 38b of the vertical arm piece 38 is connected to each other via the portion 15f.

  In this example, the electric measurement probe P is directly attached to the lower end portion 38b of the vertical arm piece portion 38, which is the displacement output end 57, so as to follow the movement of the vertical arm piece portion 38 in the Z-axis direction. . For this reason, the electric measurement probe P is given a straight traveling property in the Z-axis direction via the parallel link formed by the arm portion 35 on the displacement output side.

  FIG. 4 is a conceptual diagram showing a fourth example of the first invention. The arm body 32 in this example includes a horizontal piece 45 located above and a front side from the open end 45a side of the horizontal piece 45. It is composed of a displacement input side arm portion 44 composed of an inclined skew piece portion 46 and a displacement output side arm portion 47 which is positioned below the arm portion 44 and forms a parallel link as a whole. Yes.

  Among these, the displacement-input-side arm portion 44 is connected to the base portion 12 side via a fulcrum portion 15a interposed on the base end 45b side of the horizontal piece portion 45, and the position close to the base end 45b is the stretchable body 22. Is connected to the arm portion 47 side on the displacement output side through a fulcrum portion 15b interposed on the open end 46a side of the skew piece 46, which is a load point. Therefore, the arm portion 44 on the displacement input side can swing in a seesaw shape in the length direction via the fulcrum portion 15a.

  In this case, the arm portion 47 on the displacement output side includes an upper arm piece portion 48, a lower arm piece portion 49, and a vertical arm piece portion 50 that form a parallel link, and the arm portion 44 on the displacement input side. A fulcrum portion 15b is formed between the open end 46a of the skew piece 46 and the position of the upper arm piece 48 close to the base end 48a, which is the load point.

  That is, the upper arm piece portion 48 connected as a power point from the arm portion 44 side on the displacement input side via the fulcrum portion 15b interposed near the base end 48a is connected via the fulcrum portion 15c interposed at the base end 48a. The base portion 12 side and the upper end portion 50a side of the vertical arm piece portion 50 are connected to each other through a fulcrum portion 15d interposed at the tip 48b.

  The lower arm piece 49 arranged substantially parallel to the upper arm piece 48 includes a fulcrum part 15e interposed at the base end 49a and a fulcrum part interposed at the distal end 49b. The lower arm 50b side of the vertical arm piece 50 is connected to each other via 15f.

  In this example, the electric measurement probe P is directly attached to the lower end portion 50b of the vertical arm piece portion 50, which is the displacement output end 57, so as to follow the movement of the vertical arm piece portion 50 in the Z-axis direction. . For this reason, the electric measurement probe P is given straight advanceability in the Z-axis direction via the parallel link formed by the arm portion 47 on the displacement output side, as in the example shown in FIG. .

  FIG. 5 is a conceptual diagram showing a first modification of the fourth example shown in FIG. 4, and a fulcrum part 15 a and a skew piece part interposed on the base end 45 b side in the length direction of the horizontal piece part 45. Unlike the example shown in FIG. 4, the position of the fulcrum portion 15b interposed on the open end 46a side of 46 is positioned in substantially the same horizontal direction, and other configurations are the same as the example shown in FIG. The description is omitted.

  FIG. 6 is a conceptual diagram showing a second modification of the fourth example shown in FIG. 4. In the arm body 32 in this example, the arm portion 47 on the displacement output side is opposite to the arm portion 44 on the displacement input side. The only difference is that they are formed so as to be oriented, and the other basic configuration is the same as that of the example shown in FIG.

  FIG. 7 is a conceptual diagram showing a fifth example of the present invention, and the stretchable body 22 in this example is disposed by combining the one-side pressure stretchable body 22a and the other-side stretchable body 22b.

  Further, the arm body 32 has a displacement input side arm portion 54 as a vertical side with the upper end 54a side as an open end, and a base end 55a side connected to a lower end 54b side serving as a load point of the arm portion 54. The arm portion 55 on the displacement output side as a side has a substantially L shape.

  In this case, the arm body 32 is a connecting portion of the arm portion 54 on the displacement input side and the arm portion 55 on the displacement output side, and is a fulcrum interposed on the corner portion 56 side positioned in the extending direction of the arm portion 55. The arm portion 55 on the displacement output side is connected to the base portion 12 via the portion 15a, and can thereby perform a seesaw-like operation in the length direction via the fulcrum portion 15a.

  Moreover, with respect to the upper end 54a side of the arm portion 54 on the displacement input side, the contact portion 25a of the one side elastic body 22a is provided on one side, and the contact portion 25b of the other side elastic body 22b is provided on the other side. The arrangement relationship is in contact with each other. Therefore, a movement opposite to the pushing direction of the one side elastic body 22a and the other side elastic body 22b can be applied to the lower end 54b side located on the load point side of the arm portion 54 on the displacement input side. Accordingly, in accordance with this movement, an operation that swings in the vertical direction can be performed with respect to the other end portion 55b side of the arm portion 55 on the displacement output side that is the displacement output end 57. Also in this example, the linear motion block 62 that moves up and down along the linear motion rail 61 is pivotally supported via the support shaft portion 63 on the other end 55 b side of the displacement output side arm portion 55. The electric measurement probe P is attached to an elevating body 64 (linear motion system) that follows the movement of the linear motion block 62 in the Z-axis direction.

  Next, the substrate inspection apparatus according to the second aspect of the present invention will be described below together with the operation and effect of the first aspect of the invention described above. As shown in FIG. The entire body is formed by providing the above-described displacement enlarging mechanism 11 to the moving body 105 disposed in the apparatus main body 102 so as to freely move in the X-Y axis direction.

  That is, the displacement magnifying mechanism 11 is attached to the moving body 105 included in the apparatus main body 102 shown in FIG. 8 via the base portion 12, and then the moving body 5 is moved to the position of the inspection point on the substrate 9 to be inspected. -By moving in the Y-axis direction, it can be positioned toward the position of a predetermined inspection point.

  In this case, the displacement enlarging mechanism 11 is light and compact as a whole, and its mass is also small. Therefore, when performing planar positioning in the XY axis direction, the moving body 5 It can move at high speed in an accurate and stable state. Further, the substrate inspection apparatus equipped with the displacement magnifying mechanism 11 can be driven in the Z-axis direction without using a motor. This eliminates the need for processing that eliminates the effects of electromagnetic noise that occurs when using a motor (filter processing in analog circuits and filter processing in software), thereby speeding up and stabilizing measurement work. In addition, since the preload can be applied to the displacement output end side of the displacement magnifying mechanism 11 for the electric measurement probe after the Z-axis direction is positioned, the settling property on the Z-axis side is improved and the response characteristics are improved. Can also be improved.

  If the action and effect of the displacement magnifying mechanism 11 in this case are described in more detail, the displacement magnifying mechanism 11 not only can be made compact in its entirety to reduce the cost, but also its weight can be reduced and the X- The measurement speed can be further increased by speeding up the movement in the Y-axis direction.

  Further, the arm body 32 applies a voltage to, for example, a stretchable body 22 made of a piezoelectric element to extend the displacement end 24 located on the distal end side thereof, and from the contact portion 25 provided in the displacement end 24. An enlarged displacement amount in the Z-axis direction can be applied to the displacement output end 57 side as a load point to which the electric measurement probe P is attached in response to the pressing force.

  This will be described in more detail based on the first example shown in FIG. 1. By applying a voltage to the stretchable body 22 made of a piezoelectric element that constitutes the displacement enlarging mechanism 11, The displaceable end 24 extends, and the contact portion 25 provided in the displaceable end 24 pushes down the one end 34 a of the arm portion 34 on the displacement input side in the arm body 32.

  The arm portion 34 on the displacement input side connected to the base portion 12 side via a fulcrum portion 13a interposed at a substantially intermediate position near the abutment portion 25 has its one end portion 34a pushed down, so that the load point The other end 34b is displaced in the ascending direction.

  The arm portion 35 on the displacement output side has a base portion through one end portion 35a of the displacement input side arm portion 34 via the fulcrum portion 15b and the other end portion 34b of the displacement input side arm 34 at a substantially intermediate position. Since it is connected to the 12 side, the pushed up one end portion 35a serves as a power point, and the other end portion 35b side which is a load point is enlarged and lowered.

  A linear motion block 62 that moves up and down along the linear motion rail 61 is pivotally supported by the other end portion 35b of the arm portion 35 on the displacement output side via a support shaft portion 63. An electric measurement probe P is attached to the elevating body 64 that follows the movement of 62 in the Z-axis direction. Therefore, the non-linear displacement amount given to the one end 34a of the arm portion 34 on the displacement input side is in the Z-axis direction with respect to the electric measurement probe P attached to the other end 35b side of the arm portion 35 on the displacement output side. It is converted into a linear displacement amount expanded to be applied.

  For this reason, the electrical measurement probe P has few non-linear elements and can be moved in the Z-axis direction using not a mechanical drive source but a non-mechanical movement such as electromagnetic distortion as the drive source. That is, the movement of the electrical measurement probe P can be performed, for example, by moving 1 mm in a time of about 1 ms with high responsiveness. Therefore, compared with the conventional mechanism shown in FIG. 9 and FIG. It can be shortened to about 1/4. The electrical measurement probe P is raised by weakening the pressing force applied to the contact portion 25 of the expansion / contraction body 22 (returning the position of the displacement end 24 toward the initial position). Can do.

  Next, the operation and effect of the second example shown in FIG. 2 will be described. Similarly to the example shown in FIG. 1, a voltage is applied to the elastic body 22 made of a piezoelectric element to extend the displacement end 24. The intermediate position near the one end 34a of the arm 34 on the displacement input side is pushed down through the contact portion 25.

  Since the arm 34 on the displacement input side has one end 34a connected to the base 12 through the fulcrum 15a, the other end 34b, which is a load point, is displaced in a descending direction. The other end portion 34b is connected to an intermediate position near the one end portion 35a of the arm portion 35 on the displacement output side via the fulcrum portion 15b, and the position is a force point in the pulling-down direction with respect to the arm portion 35 on the displacement output side. It becomes.

  Since the arm portion 35 on the displacement output side has one end portion 35a connected to the base portion 12 side via the fulcrum portion 15c, the other end portion 35b side, which is a load point, is enlarged and lowered. I will let you.

  A linear motion block 62 that moves up and down along the linear motion rail 61 is pivotally supported by the other end portion 35 b of the arm portion 35 on the displacement output side via a support shaft portion 63. Since the electric measurement probe P is attached to the elevating body 64 that follows the movement of the linear motion block 62 in the Z-axis direction, a non-linear displacement applied to one end 34a of the arm 34 on the displacement input side. The amount is given as an enlarged linear displacement amount in the Z-axis direction to the electric measurement probe P attached to the other end portion 35b side of the arm portion 35 on the displacement output side.

  Therefore, the electrical measurement probe P has few non-linear elements and can be moved in the Z-axis direction using not a mechanical drive source but a non-mechanical movement such as electromagnetic distortion as its drive source. That is, the movement of the electric measurement probe P can be performed, for example, by 1 mm in a time of about 1 ms with high responsiveness, and compared with the conventional mechanism shown in FIGS. 9 and 10. Thus, the travel time can be shortened by about 1/4. In this example as well, the rise of the electric measurement probe P weakens the pressing force applied to the contact portion 25 of the telescopic body 22 (returns the position of the displacement end 24 toward the initial position). ).

  In addition, in the example shown in FIG. 2, the force point for the displacement input side arm portion 34 and the force point for the displacement output side arm portion 35 are determined at intermediate positions near the respective one end portions 34a, 35a. Compared to the example shown in FIG. 1, the amount of displacement can be efficiently expanded in a small space.

  Next, the operation and effect of the third example shown in FIG. 3 will be described. One end 34a of the arm 34 on the displacement input side is connected to the base 12 via the fulcrum 15a. The substantially intermediate position is a force point that contacts the contact portion 25 of the expansion / contraction body 22 made of a piezoelectric element or the like, and the lower surface side of the other end portion 34ba that is a load point is connected to the arm portion 35 on the displacement output side via the fulcrum portion 15b. ing.

  For this reason, the displacement end 24 is displaced in the extending direction by applying a voltage to the expansion / contraction body 22 and the other end is pushed down by pushing down the substantially intermediate position of the arm portion 34 on the displacement input side via the contact portion 25. By setting the portion 33b side as a load point in the direction to be pushed down under the enlarged displacement amount, it can act as a force point of the arm portion 35 on the displacement output side.

  The arm portion 35 on the displacement output side is composed of an upper arm piece portion 36, a lower arm piece portion 37, and a vertical arm piece portion 38 that form a parallel link as a whole. The other end portion 33b of the portion 34 is connected via a fulcrum portion 15b interposed near the one end portion 36a of the upper arm piece portion 36, and serves as its power point.

  Accordingly, when the upper arm piece portion 36 of the arm portion 35 on the displacement output side is pushed down, it is connected to the other end portion 36 b of the upper arm piece portion 36 and the other end portion 37 b of the lower arm piece portion 37. The side arm piece portion 38 functions as a load point in which the linear displacement amount in the descending direction is expanded by the parallel link structure.

  For this reason, an enlarged linear displacement amount in the Z-axis direction can be applied to the electric measurement probe P directly attached to the lower end portion 38b of the vertical arm piece portion 38. In the third example shown in FIG. 3, the displacement output side arm portion 35 forming the parallel link constitutes a linear motion system. Therefore, unlike the examples shown in FIGS. 1 and 2, A linear motion block 62 that is pivotally supported by the lower end portion 38b of the vertical arm piece portion 38 via the linear motion rail 61 and the support shaft portion 63, and a lower end portion 38b of the vertical arm piece portion 38 without using the elevating body 64. The electrical measurement probe P can be directly attached, and the substantial equivalent mass can be reduced to prevent the deterioration of the response more reliably.

  Next, the operation and effect of the fourth example shown in FIG. 4 will be described. The arm portion 44 on the displacement input side is interposed via a fulcrum portion 15 a interposed on the base end 45 b side of the horizontal piece 45. The position close to the base end 45b of the horizontal piece 45 is connected to the base part 12 side, and becomes a force point that comes into contact with the contact part 25 of the elastic body 22 made of a piezoelectric element or the like. It is connected to the arm portion 47 side on the displacement output side via a fulcrum portion 15b interposed on the open end 46a side.

  For this reason, the displacement end 24 is displaced in the extending direction by applying a voltage to the expansion / contraction body 22 and the arm 44 on the displacement input side is pushed down via the contact portion 25 to thereby move the skew piece portion. The open end 46a side of 46 can be made to act as a force point of the arm portion 47 on the displacement output side by setting it as a load point in a direction to be pushed down under an enlarged displacement amount.

  That is, the arm portion 47 on the displacement output side includes an upper arm piece portion 48, a lower arm piece portion 49, and a vertical arm piece portion 50 that form a parallel link. The open end 46a of the skew piece 46 is connected via a fulcrum portion 15b interposed near the base end 48a of the upper arm piece 48, and serves as its power point.

  Accordingly, when the arm portion 44 side on the displacement output side is pushed down by the expansion and contraction body 22, the vertical arm piece portion 50 connected to the tip end 348 b of the upper arm piece portion 48 and the tip end 49 b of the lower arm piece portion 49 is The linear displacement amount in the descending direction by the parallel link structure functions as an enlarged load point.

  For this reason, an enlarged linear displacement amount in the Z-axis direction can be applied to the electric measurement probe P directly attached to the lower end portion 50b of the vertical arm piece portion 50. In the fourth example shown in FIG. 4, since the arm portion 47 on the displacement output side forming the parallel link constitutes a linear motion system, the vertical arm piece is similar to the example shown in FIG. The electrical measurement probe P can be directly attached to the lower end portion 50b of the portion 50, and the substantial equivalent mass can be reduced to prevent the responsiveness from being lowered more reliably.

  Moreover, in the fourth example, the electric measurement probe P side is maintained by continuously pressing the arm portion 44 side on the displacement output side via the open end 46a side of the skew piece 46 of the arm portion 44 on the displacement input side. Reaction force can be generated. In this state, the electric measurement probe P further expands the contact portion 25 of the expansion body 22 and pushes the arm portion 44 side on the displacement input side, thereby increasing the contact pressure and strengthening the rigidity. As a result, the probing operation can be stabilized.

  Next, the operation and effect of the fifth example shown in FIG. 5 will be described. The fifth example shown in FIG. 5 is a first modification of the fourth example shown in FIG. Unlike the example shown in FIG. 4, the fulcrum part 15 a interposed on the base end 45 b side in the length direction of the part 45 and the fulcrum part 15 b interposed on the open end 46 a side of the skew piece 46 are substantially the same. Are arranged so that their positions (heights substantially coincide).

  For this reason, when the displacement end 24 is displaced in the extending direction by applying a voltage to the expansion / contraction body 22 and the horizontal piece 45 side of the arm 44 on the displacement input side is pushed down via the contact portion 25. Reduces the amount of movement on the open end 46a side of the skew piece 46 that is the load point (in the left-right direction in FIG. 4) and increases the amount of movement in the vertical direction accordingly, The amount of displacement to be applied can be increased accordingly. Further, similarly to the fourth example of FIG. 4, the probing operation of the electric measurement probe P can be stabilized.

  Next, the operation and effect of the sixth example shown in FIG. 6 will be described. The sixth example shown in FIG. 6 is a second modification of the fourth example shown in FIG. The arm body 32 is arranged so that the arm portion 47 on the displacement output side is opposite to the arm portion 44 on the displacement input side, unlike the fourth example. For this reason, when the horizontal piece 45 side of the arm 44 on the displacement input side is pushed down, the amount of movement on the open end 46a side of the skew piece 46, which is the load point, and the arm 44 on the displacement output side. The amount of displacement applied to the displacement output end 57 can be increased by offsetting the amount of movement when the side is displaced. Further, similarly to the fourth example of FIG. 4, the probing operation of the electric measurement probe P can be stabilized.

  Finally, the operation and effect of the seventh example shown in FIG. 7 will be described. On the upper end 54a side of the arm portion 54 on the displacement input side, which is the vertical side, one side elastic body 22a on one side thereof. Since the abutment portion 25a is disposed on the other side, the abutment portion 25b of the other expansion / contraction body 22b abuts against the lower end 54b located on the load point side of the arm portion 54 on the displacement input side. The movement opposite to the pushing direction of the one side elastic body 22a and the other side elastic body 22b can be given.

  That is, by making the pressing force of the contact part 25b of the other side elastic body 22b located on the right side in FIG. 7 stronger than the pressing force of the contact part 25a of the left side elastic body 22a, the displacement input side The lower end 54b side, which is the load point of the arm portion 54, can be displaced rightward.

When the lower end 54b side of the arm portion 54 on the displacement input side is displaced rightward, the tip 55b of the arm portion 55 on the displacement output side connected thereto is displaced in a non-linear ascending direction that is the Z-axis direction. It will be displaced by enlarging the amount.

  For this reason, the nonlinear displacement amount given to the upper end 54a side of the arm portion 54 on the displacement input side is attached to the tip 55b side of the arm portion 55 on the displacement output side under the linear motion system including the elevating body 64. It can be given to the electrical measurement probe P as an enlarged linear displacement amount in the Z-axis direction with high rigidity.

  The above is the description of the present invention based on the illustrated example, and the specific content is not limited to this. For example, the base 12 may be a fixed position type. Further, the moving body 5 may be any one that can freely move in a predetermined direction including the XY axis direction. Moreover, in the example shown in FIG. 1, each of the fulcrum part 15b and the fulcrum part 15c can be made into a shaft support structure, or the support shaft part 63 can be connected to each other as a fulcrum part. Further, the arm portion 33 constituting the arm body 32 may be one in which one or more arm portions are further interposed between the arm portion on the displacement input side and the arm portion on the displacement output side.

  Moreover, in the example shown in FIG. 3, the fulcrum part 15b is connected by a pivotal support structure, and the parallel link is not a two-piece structure of the upper arm piece part 36 and the lower arm piece part 37, but one or more more. Three or more configurations may be added. About such a parallel link, it is applicable also to the parallel link shown in FIGS.

  Further, in the example shown in FIG. 7, the left one is on the right side and the right one is on the left side of the bottom surface side of each of the base end portions 23 a and 23 b of the one side elastic body 22 a and the other side elastic body 22 b. By adding a preload that can be pushed out, it is possible to give a more preferable rigidity to the electrical measurement probe P at the time of measurement.

  As the stretchable body 22 used in the present invention, although a piezoelectric element can be suitably used, for example, a structure that can be stretched and contracted using a magnetostrictive element or an electric motor may be provided.

The conceptual diagram which shows the 1st example of this invention. The conceptual diagram which shows the 2nd example of this invention. The conceptual diagram which shows the 3rd example of this invention. The conceptual diagram which shows the 4th example of this invention. The conceptual diagram which shows the 5th example of this invention. The conceptual diagram which shows the 6th example of this invention. The conceptual diagram which shows the 7th example of this invention. Explanatory drawing which shows the schematic structural example of a board | substrate inspection apparatus. Explanatory drawing which shows an example of the moving mechanism to the Z-axis direction of the conventional probe for electrical measurement. Explanatory drawing which shows the other example of the moving mechanism to the Z-axis direction of the conventional probe for electrical measurement. Explanatory drawing which shows an example of the displacement expansion mechanism currently disclosed by patent document 1. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Displacement expansion mechanism for electrical measurement probes 12 Base part 13 (13a-13f) fulcrum part 22 Elastic body 22a One side elastic body 22b Other side elastic body 23, 23a, 23b Base end part 24, 24a, 24b Displacement end 25, 25a, 25b Contact part 32 Arm body 33 Arm part 34 Displacement input side arm part 34a One end part 34b Other end part 35 Displacement output side arm part 35a One end part 35b Other end part 36 Upper arm piece part 36a One end part 36b Other End portion 37 Lower arm piece portion 37a One end portion 37b Other end portion 38 Vertical arm piece portion 38a Upper end portion 38b Lower end portion 44 Displacement input side arm portion 45 Horizontal piece portion 45a Open end 46 Skew piece portion 46a Open end 47 Displacement output side arm portion 48 Upper arm piece portion 48a Base end 48b Tip 49 Lower arm piece portion 49a Base end 49b Tip 50 Vertical Side arm piece portion 50a Upper end portion 50b Lower end portion 54 Displacement input side arm portion 54a Upper end 54b Lower end 55 Displacement output side arm portion 55a Base end 55b Front end 56 Corner portion 57 Displacement output end 61 Linear motion rail 62 Linear motion block 63 Support Shaft 64 Elevator P Electrical measurement probe

Claims (14)

A base portion, a telescopic body that is provided with a contact portion that abuts against a mating member and acts as a force point at a displacement end that is a free end thereof, and the base portion side is freely arranged to control expansion and contraction, and the expansion and contraction In response to a pressing force from the abutting portion of the body, each fulcrum portion interposed at a necessary location including the base portion is transmitted to the displacement output end side in order to enlarge and transmit the displacement amount in the Z-axis direction. It is comprised at least with the arm body as the counterpart material connected through
A displacement magnifying mechanism for an electric measurement probe, characterized in that an enlarged displacement amount in the Z-axis direction can be freely given to the displacement output end side to which the electric measurement probe is attached via the arm body.   The displacement magnifying mechanism for an electric measurement probe according to claim 1, wherein the base portion is attached to a movable body that is freely arranged in the apparatus main body.   The displacement magnifying mechanism for an electric measurement probe according to claim 1, wherein the base portion is attached to the moving body that is freely arranged to move in the XY axis direction. The arm body includes a displacement input side arm portion that receives a pressing force from the expansion and contraction body, and a displacement output side arm that finally transmits a displacement amount in the Z-axis direction to the displacement output end side. And a plurality of arm portions that are integrally connected to each other,
Each of these arm portions is freely arranged to output a displacement amount to the load point side through the interposed fulcrum portion,
The displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 3, wherein the electric measurement probe can be freely connected to the displacement output end which is a load point of the arm portion on the displacement output side. The arm body includes the displacement input side arm portion positioned below, and the displacement output side arm portion positioned above the arm portion,
The arm portion on the displacement input side has one end portion in the length direction in contact with the contact portion of the expansion / contraction body, and the base portion side via a fulcrum portion interposed at a substantially intermediate position near the contact portion. And is connected to one end side of the arm part on the displacement output side through a fulcrum part interposed at the other end which is the load point,
The arm part on the displacement output side is connected to the base part side via a fulcrum part interposed at a substantially intermediate position, and the electric measurement to the other end part side as the displacement output end which is a load point. The displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 4, wherein the probe is freely connected. The arm body includes the displacement input side arm portion positioned below, and the displacement output side arm portion positioned above the arm portion,
The arm portion on the displacement input side is connected to the base portion side via a fulcrum portion interposed on one end portion side in the length direction, and an intermediate position near the one end portion is the contact portion of the expansion / contraction body Is connected to an intermediate position near one end portion of the arm portion on the displacement output side via a fulcrum portion interposed on the other end side which is a load point,
The arm portion on the displacement output side is connected to the base portion side via a fulcrum portion interposed on the one end portion side, and the electric power to the other end portion side as the displacement output end which is a load point. 5. A displacement enlarging mechanism for an electric measurement probe according to claim 1, wherein the measurement probe is freely connected. The arm body is composed of the arm portion on the displacement input side positioned above, and the arm portion on the displacement output side which is positioned below the arm portion and forms a parallel link as a whole.
The arm part on the displacement input side is connected to the base part side via a fulcrum part interposed at one end part in the length direction, and its substantially intermediate position abuts against the abutting part of the telescopic body, It is connected to the arm part side on the displacement output side through a fulcrum part interposed at the other end part which is a load point,
The arm portion on the displacement output side is connected to the base portion side via a fulcrum portion interposed on one end side, and expands in the Z-axis direction substantially straight forward via a fulcrum portion interposed on the other end side. The displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 4, wherein a connection on the electric measurement probe side to the displacement output end side that can freely give the displacement amount is formed freely. The arm part on the displacement output side is composed of an upper arm piece part, a lower arm piece part and a vertical arm piece part forming the parallel link,
The upper arm piece connected to the arm side on the displacement input side via a fulcrum part interposed near one end is connected to the base part and the other end via a fulcrum part interposed on one end side. The upper arm part of the vertical arm piece part is connected to each other via a fulcrum part interposed on the side, and the lower arm piece part is connected to the base part via a fulcrum part interposed on one end side, The lower end of the longitudinal arm piece is connected to each other through a fulcrum part interposed on the other end side,
The displacement magnifying mechanism for an electric measurement probe according to claim 7, wherein the lower end portion of the vertical arm piece is connected to the electric measurement probe side as the displacement output end that is a load point. The arm body includes a horizontal piece portion located above, an arm portion on a displacement input side composed of a skew piece piece forwardly inclined from the open end side of the horizontal piece portion, and a position below the arm portion. It is composed of the arm part on the displacement output side that forms a parallel link in its entirety,
The arm portion on the displacement input side is connected to the base portion side via a fulcrum portion interposed at one end side in the length direction of the horizontal piece portion, and the position near the one end is the contact of the telescopic body. Abutting against the contact portion, and connected to one end of the arm portion on the displacement output side through a fulcrum portion interposed on the open end side of the skew piece as a load point;
The arm part on the displacement output side is connected to the base part side via a fulcrum part interposed on one end side, and expands in the Z-axis direction substantially straight forward via the fulcrum part interposed on the other end side. The displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 4, wherein the electric measurement probe is freely connected to the displacement output end side to which the displacement amount can be applied. The arm part on the displacement output side is composed of an upper arm piece part, a lower arm piece part and a vertical arm piece part forming the parallel link,
The upper arm piece connected via a fulcrum part interposed on the open end side of the skewing piece part is interposed on the base part and the other end side via a fulcrum part interposed on one end side. The upper arm portion is connected to the upper end portion of the vertical arm piece portion via the fulcrum portion, and the lower arm piece portion is connected to the base portion and the other end side via the fulcrum portion interposed on one end side. The lower end of the vertical arm piece is connected to each other through a fulcrum part interposed between
The displacement magnifying mechanism for an electric measurement probe according to claim 9, wherein the lower end portion of the vertical arm piece portion is connected to the electric measurement probe side as the displacement output end which is a load point.   The fulcrum portion interposed on one end side in the length direction of the horizontal piece portion and the fulcrum portion interposed on the open end side of the skew piece portion are positioned in substantially the same horizontal direction. A displacement enlarging mechanism for the electrical measurement probe according to 10.   The displacement magnifying mechanism for an electric measurement probe according to claim 10 or 11, wherein the arm portion on the displacement output side is arranged in a direction opposite to the arm portion on the displacement input side. The arm body is a displacement output as a lateral side in which one end portion is connected to the lower end portion serving as a load point of the arm portion, and the arm portion on the displacement input side as a vertical side having an upper end portion as an open end. The arm part on the side is configured to have a substantially L shape,
These arm parts are connected to the base part side via a fulcrum part interposed in the corner part connected to each other,
The expansion / contraction body has a one-side expansion / contraction body in which the contact portion is in contact with one side of the upper end portion of the arm portion on the displacement input side, and the contact portion is in contact with the other side of the upper end portion. It is composed of the other side stretchable body,
The displacement amount of the lower end portion to be displaced is increased according to the degree of pressing force separately applied to the upper end portion of the arm portion on the displacement input side from the one side elastic body and the other side elastic body. The displacement expansion for the electric measurement probe according to any one of claims 1 to 3, wherein the other end portion of the arm portion on the displacement output side to be output is connected to the electric measurement probe side as the displacement output end which is the load point. mechanism. 14. A substrate inspection apparatus, comprising the displacement magnifying mechanism for an electric measurement probe according to any one of claims 1 to 13 with respect to the movable body arranged in the apparatus main body.

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