JP5184671B2 - Displacement magnifying mechanism for electrical measurement probe and board inspection device - Google Patents

Description

  The present invention relates to a displacement enlarging mechanism for an electric measurement probe and a substrate inspection apparatus capable of quickly moving the electric measurement probe in a more stable state.

FIG. 2 is an explanatory view showing a schematic configuration example of the substrate inspection apparatus. Normally, the substrate inspection apparatus 101 includes a fixed arm portion 103 fixed to the apparatus main body 102 side and the length of the fixed arm portion 103. A movable arm 104 that can be freely moved in the X-axis direction along the vertical direction, and a movement in the Y-axis direction along the length direction of the movable arm 104 can be freely arranged. And at least a moving body 105 provided.

  Further, the moving body 105 is provided with an elevating mechanism 107 through an interposition piece 106. By attaching an electric measurement probe 108 to the elevating mechanism 107 side and moving it in the Z-axis direction, the apparatus main body 102 is provided. The electrical measurement probe 108 is brought into contact with a predetermined inspection point of the substrate 109 to be inspected placed on the side, so that necessary electrical measurement can be performed.

3 and 4 are explanatory views showing a specific example of the raising / lowering mechanism in the Z-axis direction for the electric measurement probe at that time, and the raising / lowering mechanism 111 shown in FIG. 3 is in the XY-axis direction. The table 112 on which an electrical measurement probe (not shown) is attached at an appropriate position, the one pulley 114 fixed to the motor shaft 113, and the driven rotation are pivotally supported. The other pulley 115 and a belt 116 stretched between these pulleys 114, 115, and a part of the belt 116 is fixed to the table 112 side via a fixing portion 117 and the table 112 is fixed. Can be moved up and down by being driven in the moving direction of the belt 116 while being guided by the linear motion guide 118.

However, the elevating mechanism 111 shown in FIG. 3 is difficult to apply a preferable tension to the belt 116 during assembly work during manufacture, and has the following problems. .
(1) The response characteristics are not good.
(2) Rise is slow.
(3) Noise is generated.
(4) Frictional heat is generated between the belt 116 and the pulleys 114 and 115.
(5) It takes about 4 ms to move 1 mm.

Also, the elevating mechanism 121 shown in FIG. 4 includes a motor 122 that is freely movable in the X-Y axis direction, a ball screw 124 that is connected to the motor shaft 123 of the motor 122 and rotates in a driven manner, The table 126 is configured to move forward and backward along the linear guide 125 by the rotation of the ball screw 124, and an electric measurement probe (not shown) is attached to an appropriate position on the table 126 side.

However, the lifting mechanism 121 shown in FIG. 4 has the following problems.
(1) The device is expensive.
(2) Noise is generated.
(3) Since the mass is large, the planar positioning XY moving part also becomes large. (4) It takes about 4 ms to move 1 mm.

On the other hand, as an alternative to the lifting mechanism shown in FIGS. 3 and 4 without the above-mentioned problems, there is a displacement enlarging mechanism disclosed in Patent Document 1 below, for example.
Japanese Patent Laid-Open No. 2001-22445

FIG. 5 is an explanatory view showing an example of a displacement enlarging mechanism disclosed in Patent Document 1. According to FIG. 5 (a), the arm 5 to the proximal side is supported on the fixed base 1 through a hinge 3, one end of which is connected to the arm 5 the distal end side and the other end connected to the fixing base 1 A spring 6 and a piezoelectric body 2 capable of pressing a part of the arm 5 against the elasticity of the spring 6 and displacing the distal end side of the arm 5 along a predetermined displacement direction Y are provided. Yes. In this case, the arm 5 is maintained in a state tilted by a predetermined angle θ1 toward the front side in the displacement direction Y by the spring 6 in a state where the piezoelectric body 2 is not expanded and contracted.

  The arm 5 protrudes along a horizontal axis H parallel to the X-axis direction of the orthogonal coordinates XY, and the output displacement end 5a of the displacement magnifying mechanism is located on the tip side.

  Moreover, the piezoelectric body 2 is arranged along the Y-axis direction (displacement direction Y) of the orthogonal coordinates XY, the base end thereof is fixed to the fixed base 1, and the distal end thereof is a pin attached to the arm 5. 4 is connected.

Therefore, according to the displacement magnifying mechanism shown in FIG. 5, the arm 5 via the expanding the piezoelectric body 2 in the Y-axis direction as shown in FIG. 5 (b), the pressing force pin 4 corresponding to the expansion amount As a result, the distal end side of the arm 5 can be displaced along the predetermined displacement direction Y with the hinge 3 as a fulcrum. When the piezoelectric body 2 is contracted in the Y-axis direction, the arm 5 is automatically returned to the original position by the elastic force of the spring 6.

Therefore, in the case of the displacement magnifying mechanism shown in FIG. 5 , the distal end side (load point) of the arm 5 can be operated at high speed under a small and stable state.

However, in the displacement enlarging mechanism shown in FIG. 5 , the extension amount of the piezoelectric body 2 depends on the movement amount of the tip side (load point) of the arm 5. There is an inconvenience that the required amount of movement cannot be applied to the tip side (load point).

  In view of the above-described problems of the prior art, the present invention provides an electric measuring probe that can quickly move an electric measuring probe in the Z-axis direction by applying a necessary moving amount with excellent response characteristics to a displacement output end side that is a load point. An object is to provide a displacement enlarging mechanism for a measurement probe and a substrate inspection apparatus.

The present invention has been made to achieve the above object, and a first invention (a displacement enlarging mechanism for an electrical measurement probe) is a movable body that is freely arranged to move in the XY axis direction. A base part attached to the base part, and a telescopic body that is provided with a contact part that abuts against a mating member and acts as a power point at a displacement end that is a free end thereof, and the base part can be freely extended and contracted. In order to receive the pressing force from the abutment portion of the expansion and contraction body and to transmit the displacement amount in the Z-axis direction to the displacement output end side, each interposed between the necessary portions including the base portion An enlarged displacement in the Z-axis direction via the arm body is formed at least with the arm body as the mating member connected via a fulcrum, and to the displacement output end side to which the electric measurement probe is attached The displacement enlargement mechanism for electrical measurement probes can be freely applied The arm body is connected to the upper side of the displacement input side receiving the pressing force from the telescopic body , and is connected to the lower side of the arm body via the arm part and the fulcrum part. total consists of an arm portion of the parallel link formed by displacement output side of Ru with the displacement output end, the arm portion of the displacement input side, via a fulcrum portion which is interposed at one end in the longitudinal direction The arm portion side on the displacement output side through a fulcrum portion that is connected to the base portion side, the intermediate position of which is in contact with the abutting portion of the expansion / contraction body, and interposed at the other end that is the load point The arm portion on the displacement output side is connected to the base portion side via a fulcrum portion interposed on one end side, and travels substantially straight through the fulcrum portion interposed on the other end side. The electric measurement probe to the displacement output end side that can freely give an enlarged displacement amount in the direction. The most important features that they have freely form the connection over blanking side.

In this case , the arm portion on the displacement output side is composed of an upper arm piece portion, a lower arm piece portion and a vertical arm piece portion forming the parallel link, and via a fulcrum portion interposed near one end thereof. The upper arm piece portion connected to the arm portion side on the displacement input side is connected to the base portion via a fulcrum portion interposed on one end side and the fulcrum portion interposed on the other end side. The upper arm piece is connected to the upper end part of the vertical arm piece part, and the lower arm piece part is connected to the base part via a fulcrum part interposed on one end side and the fulcrum part interposed on the other end side. And the lower end portion of the vertical arm piece portion is connected to each other, and the lower end portion of the vertical arm piece portion is connected to the electric measurement probe side as the displacement output end which is the load point. .

On the other hand, a second invention (substrate inspection apparatus) is provided with the displacement magnifying mechanism for an electric measurement probe according to claim 1 or 2 with respect to the movable body which is freely arranged in the apparatus main body. The most important feature.

  Of the present invention, according to the first invention, in the Z-axis direction with respect to the displacement output end side as a load point to which the electric measurement probe of the arm body is attached by receiving the pressing force from the contact portion of the expansion / contraction body. Therefore, the electrical measurement probe connected to the displacement output end side can be moved in the Z-axis direction with preferable response characteristics. Further, according to the first invention, since the whole mechanism can be made compact, not only can the cost be reduced, but also the weight can be reduced and the movement in a predetermined direction can be accelerated. Can increase the measurement speed.

  In particular, since the arm portion on the displacement output side constituting the arm body is formed by a parallel link, it is possible to move the electric measurement probe while further improving the straightness in the Z-axis direction.

On the other hand, according to the second invention, since the movable body provided in the apparatus main body is provided with the displacement enlarging mechanism for an electric measurement probe according to any one of claims 11 to 3 , its mass is small. Therefore, the planar positioning in a predetermined direction can be made accurate and stable. In addition to eliminating electromagnetic noise, the measurement operation can be speeded up and stabilized, and after positioning in the Z-axis direction, a preload is applied to the displacement output end of the displacement expansion mechanism for electrical measurement probes. Therefore, the settling on the Z-axis side can be improved to improve the response characteristics.

The conceptual diagram which shows an example of this invention. Explanatory drawing which shows the schematic structural example of a board | substrate inspection apparatus . Explanatory drawing which shows an example of the moving mechanism to the Z-axis direction of the conventional probe for electrical measurement . Explanatory drawing which shows the other example of the moving mechanism to the Z-axis direction of the conventional probe for electrical measurement . Explanatory drawing which shows an example of the displacement expansion mechanism currently disclosed by patent document 1. FIG.

  According to the present invention, the displacement applied from the power point side is enlarged and outputted in the Z-axis direction with respect to the displacement output end side provided with the electric measurement probe used for electrically inspecting the substrate to be inspected. The present invention can be applied to a displacement enlarging mechanism for an electric measurement probe (first invention) and a substrate inspection apparatus (second invention) provided with the displacement enlarging mechanism for an electric measurement probe.

Of these, the basic configuration of the first invention will be briefly described with reference to FIG. 1 and FIG. 2. The electrical measurement probe displacement magnifying mechanism (hereinafter abbreviated as “displacement magnifying mechanism”) 11 will be described. , for example, a mounting freely base portion 12 to the vehicle 105 to be freely arranged the movement of the X-Y axis direction by which the apparatus main body 2 shown in FIG. 2, power point contact with the mating member The elastic body 22 made of, for example, a piezoelectric element or the like, which is provided with the abutting portion 25 to act as the free end thereof at the displacement end 24 which is a free end, and is freely arranged for expansion and contraction control, and the abutting portion 25 of the elastic body 22 In response to the pressing force, the displacement amount in the Z-axis direction is enlarged and transmitted to the displacement output end 57 side via each fulcrum portion 15 (15a to 15f) interposed at a necessary location including the base portion 12. And at least an arm body 32 as a mating member to be connected. To have.

  In this case, the arm body 32 composed of a plurality of arm portions 33 includes a displacement input side arm portion 34 that receives a pressing force from the expansion and contraction body 22, and finally a displacement amount in the Z-axis direction on the displacement output end 57 side. Is constituted by an arm portion 35 on the displacement output side to which is enlarged and transmitted. And by providing such a structure, the displacement output end 57 side as a load point to which the electric measurement probe P is attached is given an enlarged displacement amount in the Z-axis direction via the arm body 32. It can be made freely.

  FIG. 1 is a conceptual diagram showing an example of the first invention. In this example, an arm body 32 is located above a displacement input side arm portion 34 and below the arm portion 34 so as to be entirely arranged. And an arm portion 35 on the displacement output side that forms a parallel link.

  Among these, the displacement input side arm portion 34 is connected to the base portion 12 side via a fulcrum portion 15a interposed in one end portion 34a in the length direction, and a substantially intermediate position thereof is in contact with the elastic body 22. This is a force point that comes into contact with the portion 25, and is connected to the arm portion 35 on the displacement output side via a fulcrum portion 15b interposed in the other end portion 34b that is a load point. Therefore, the arm portion 34 on the displacement input side can swing in a seesaw shape in the length direction via the fulcrum portion 15a.

  In this case, the arm portion 35 on the displacement output side is composed of an upper arm piece portion 36, a lower arm piece portion 37, and a vertical arm piece portion 38 that form parallel links, and the arm portion 34 on the displacement input side. The fulcrum portion 15b is formed between the upper arm piece portion 36 and the upper arm piece portion 36.

  That is, the upper arm piece portion 36 connected as a power point from the arm portion 34 side on the displacement input side via the fulcrum portion 15b interposed near the one end 36a passes through the fulcrum portion 15c interposed on the one end 36a side. The base portion 12 is connected to the upper end portion 38a of the vertical arm piece 38 via a fulcrum portion 15d interposed on the other end 36b side.

  Further, the lower arm piece portion 37 disposed substantially parallel to the upper arm piece portion 36 has a fulcrum interposed on the base portion 12 side and the other end 37b side via a fulcrum portion 15e interposed on the one end 37a. The lower end portion 38b of the vertical arm piece 38 is connected to each other via the portion 15f.

  In this example, the electric measurement probe P is directly attached to the lower end portion 38b of the vertical arm piece portion 38, which is the displacement output end 57, so as to follow the movement of the vertical arm piece portion 38 in the Z-axis direction. . For this reason, the electric measurement probe P is given a straight traveling property in the Z-axis direction via the parallel link formed by the arm portion 35 on the displacement output side.

Next, a substrate inspection apparatus according to the second invention, will be described below together with the action and effect of the first invention having the above structure, a substrate inspection device (not shown), as shown for example in FIG. 2 The entire body is formed by providing the above-described displacement enlarging mechanism 11 to the moving body 105 disposed in the apparatus main body 102 so as to freely move in the X-Y axis direction.

That is, the displacement enlarging mechanism 11 is attached to the moving body 105 included in the apparatus main body 102 shown in FIG. 2 via the base portion 12 and then the moving body 105 is moved to the position of the inspection point on the substrate 109 to be inspected. -By moving in the Y-axis direction, it can be positioned toward the position of a predetermined inspection point.

  In this case, the displacement enlarging mechanism 11 is light and compact as a whole, and its mass is also small. Therefore, when performing planar positioning in the XY axis direction, the moving body 105 It can move at high speed in an accurate and stable state. Further, the substrate inspection apparatus equipped with the displacement magnifying mechanism 11 can be driven in the Z-axis direction without using a motor. This eliminates the need for processing that eliminates the effects of electromagnetic noise that occurs when using a motor (filter processing in analog circuits and filter processing in software), thereby speeding up and stabilizing measurement work. In addition, since the preload can be applied to the displacement output end side of the displacement magnifying mechanism 11 for the electric measurement probe after the Z-axis direction is positioned, the settling property on the Z-axis side is improved and the response characteristics are improved. Can also be improved.

  Here, the operation and effect of the displacement magnifying mechanism 11 will be described in more detail. The displacement magnifying mechanism 11 not only can be made compact as a whole to reduce the cost, but also its weight can be reduced to reduce the X-. The measurement speed can be further increased by speeding up the movement in the Y-axis direction.

  Further, the arm body 32 applies a voltage to, for example, a stretchable body 22 made of a piezoelectric element to extend the displacement end 24 located on the distal end side thereof, and from the contact portion 25 provided in the displacement end 24. An enlarged displacement amount in the Z-axis direction can be applied to the displacement output end 57 side as a load point to which the electric measurement probe P is attached under the pressing force.

For this reason, the electrical measurement probe P has few non-linear elements and can be moved in the Z-axis direction using not a mechanical drive source but a non-mechanical movement such as electromagnetic distortion as the drive source. In other words, movement of the electrical measurement probe P, so the movement of Moto for example 1mm of high response can be performed in the order of 1ms time, the moving time as compared with the conventional mechanism shown in FIGS. 3 and 4 It can be shortened to about 1/4. The electrical measurement probe P is raised by weakening the pressing force applied to the contact portion 25 of the expansion / contraction body 22 (returning the position of the displacement end 24 toward the initial position). Can do.

  The operation and effect will be described in more detail based on the example of the first invention shown in FIG. 1. The arm 34 on the displacement input side is connected to the base 12 with one end 34a via the fulcrum 15a. The substantially intermediate position is a force point that comes into contact with the contact portion 25 of the expansion / contraction body 22 made of a piezoelectric element or the like, and the lower surface side of the other end portion 34ba that is a load point is an arm portion on the displacement output side via the fulcrum portion 15b. 35.

  For this reason, the displacement end 24 is displaced in the extending direction by applying a voltage to the expansion / contraction body 22 and the other end is pushed down by pushing down the substantially intermediate position of the arm portion 34 on the displacement input side via the contact portion 25. By setting the portion 33b side as a load point in the direction to be pushed down under the enlarged displacement amount, it can act as a force point of the arm portion 35 on the displacement output side.

  The arm portion 35 on the displacement output side is composed of an upper arm piece portion 36, a lower arm piece portion 37, and a vertical arm piece portion 38 that form a parallel link as a whole. The other end portion 33b of the portion 34 is connected via a fulcrum portion 15b interposed near the one end portion 36a of the upper arm piece portion 36, and serves as its power point.

  Accordingly, when the upper arm piece portion 36 of the arm portion 35 on the displacement output side is pushed down, it is connected to the other end portion 36 b of the upper arm piece portion 36 and the other end portion 37 b of the lower arm piece portion 37. The side arm piece portion 38 functions as a load point in which the linear displacement amount in the descending direction is expanded by the parallel link structure.

  For this reason, an enlarged linear displacement amount in the Z-axis direction can be applied to the electric measurement probe P directly attached to the lower end portion 38b of the vertical arm piece portion 38. In the example shown in FIG. 1, the displacement output side arm portion 35 forming the parallel link constitutes a linear motion system, so that the electrical measurement probe is provided at the lower end portion 38 b of the vertical side arm piece portion 38. P can be directly attached, and the substantial equivalent mass can be reduced to prevent the decrease in response more reliably.

The above is the description of the present invention based on the illustrated example, and the specific content is not limited to this. For example, as the stretchable body 22 used in the present invention, although a piezoelectric element can be suitably used, for example, a structure that can be stretched and contracted using a magnetostrictive element or an electric motor may be provided.

DESCRIPTION OF SYMBOLS 11 Displacement expansion mechanism for electrical measurement probes 12 Base part 15 (15a-15f) fulcrum part 22 Telescopic body 24 Displacement end 25 Contact part 32 Arm body 33 Arm part 34 Displacement input side arm part 34a One end part 34b Other end part 35 Displacement output side arm portion 35a One end portion 35b Other end portion 36 Upper arm piece portion 36a One end portion 36b Other end portion 37 Lower arm piece portion 37a One end portion 37b Other end portion 38 Vertical arm piece portion 38a Upper end portion 38b Lower end 57 Displacement output terminal P Electrical measurement probe

Claims (3)

A base portion attached to a movable body that is freely arranged to move in the X-Y axis direction, and a contact portion that abuts against a mating member and acts as a force point, provided at a displacement end that is a free end thereof. A telescopic body that is freely arranged to control expansion and contraction on the base part side, and a displacement amount in the Z-axis direction with respect to the displacement output end side by receiving a pressing force from the contact part of the telescopic body To the displacement output end side at least composed of an arm body as the mating member connected via each fulcrum part interposed in a necessary part including the base part to transmit the electric measurement probe Is a displacement magnifying mechanism for an electric measurement probe that can freely give an enlarged displacement amount in the Z-axis direction via the arm body,
The arm body is located above and connected to the displacement input side arm portion that receives the pressing force from the expansion body, and is located below the arm portion and the fulcrum portion , and as a whole is composed of an arm portion of the displacement output side of Ru with the displacement output end to form a parallel link,
The arm part on the displacement input side is connected to the base part side via a fulcrum part interposed at one end part in the length direction, and its substantially intermediate position abuts against the abutting part of the telescopic body, It is connected to the arm part side on the displacement output side through a fulcrum part interposed at the other end part which is a load point,
The arm part on the displacement output side is connected to the base part side via a fulcrum part interposed on one end side, and expands in the Z-axis direction substantially straight forward via the fulcrum part interposed on the other end side. A displacement magnifying mechanism for an electric measurement probe , wherein the electric measurement probe side is freely connected to the displacement output end side so that the displacement amount can be applied . The arm part on the displacement output side is composed of an upper arm piece part, a lower arm piece part and a vertical arm piece part forming the parallel link,
The upper arm piece connected to the arm side on the displacement input side via a fulcrum part interposed near one end is connected to the base part and the other end via a fulcrum part interposed on one end side. The upper arm part of the vertical arm piece part is connected to each other via a fulcrum part interposed on the side, and the lower arm piece part is connected to the base part via a fulcrum part interposed on one end side, The lower end of the longitudinal arm piece is connected to each other through a fulcrum part interposed on the other end side,
Said longitudinal arm piece of the lower end portion of the electrical measurement probe displacement enlarging mechanism according to claim 1, Ru is connected to the electrical measuring probe side as the displacement output which is the load point. A substrate inspection apparatus comprising the displacement measuring mechanism for an electric measurement probe according to claim 1 or 2 for the movable body arranged in the apparatus main body .

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