JP4958139B2 - Displacement magnifying mechanism with displacement final output end and processing apparatus provided with the displacement magnifying mechanism - Google Patents

Description

  The present invention relates to a displacement enlarging mechanism with a displacement final output end that is effective when the front end side of a processing tool including a probe for electric measurement and a grinding tool is brought into contact with a predetermined position of a member to be processed, and the displacement enlarging This is a technique related to a processing apparatus provided with a mechanism.

As a displacement enlarging mechanism, for example, a displacement enlarging mechanism disclosed in Patent Document 1 below is known.
Japanese Patent Laid-Open No. 2001-22445

  FIG. 12 is an explanatory view showing an example of a displacement enlarging mechanism disclosed in Patent Document 1. According to (a), an arm 5 whose proximal end is supported by the fixed base 1 via a hinge 3, a spring whose one end is connected to the distal end side of the arm 5 and whose other end is connected to the fixed base 1. 6 and a piezoelectric body 2 capable of pressing a part of the arm 5 against the elasticity of the spring 6 and displacing the distal end side of the arm 5 along a predetermined displacement direction Y. . In this case, the arm 5 is maintained in a state tilted by a predetermined angle θ1 toward the front side in the displacement direction Y by the spring 6 in a state where the piezoelectric body 2 is not expanded and contracted.

  The arm 5 protrudes along a horizontal axis H parallel to the X-axis direction of the orthogonal coordinates XY, and the output displacement end 5a of the displacement magnifying mechanism is located on the tip side.

  Moreover, the piezoelectric body 2 is arranged along the Y-axis direction (displacement direction Y) of the orthogonal coordinates XY, the base end thereof is fixed to the fixed base 1, and the distal end thereof is a pin attached to the arm 5. 4 is connected.

  Therefore, according to the displacement enlarging mechanism shown in FIG. 12, when the piezoelectric body 2 is extended in the Y-axis direction as shown in FIG. 12B, the pressing force corresponding to the extension amount is applied via the pin 4 to the arm 5. As a result, the distal end side of the arm 5 can be displaced along the predetermined displacement direction Y with the hinge 3 as a fulcrum. When the piezoelectric body 2 is contracted in the Y-axis direction, the arm 5 is automatically returned to the original position by the elastic force of the spring 6.

  Therefore, in the case of the displacement magnifying mechanism shown in FIG. 12, the distal end side (load point) of the arm 5 can be operated at high speed under a small and stable state.

  However, in the displacement enlarging mechanism shown in FIG. 12, since the extension amount of the piezoelectric body 2 depends on the movement amount on the tip side (load point) of the arm 5, if the extension amount of the piezoelectric body 2 is reduced, the arm 5 There is an inconvenience that the required amount of movement cannot be applied to the tip side (load point).

  In view of the above-mentioned problems of the prior art, the present invention provides an extended movement amount rich in response characteristics to the displacement final output end side which is a load point, and at the same time reduces wear of mutual contact parts during displacement. It is an object to provide a displacement magnifying mechanism with a displacement final output end that can be brought into contact with the member to be processed with rigidity under excellent durability, and a processing apparatus equipped with the displacement magnifying mechanism. .

The present invention has been made to achieve the above object, and the first invention (displacement enlargement mechanism with a displacement final output end) of the present invention has an abutting portion that abuts against a mating member and acts as a power point. An elastic body that is fixed in position at the displacement end, which is a free end, and a fulcrum portion that is displaced with a reaction force when it receives a pressing action from the abutting portion of the elastic body on the displacement giving side Displacement with a reaction force when receiving a pressing action from the contact output end side of the displacement start end input side arm body which is the counterpart material fixed as the arm body and the displacement start end input side arm body which is enlarged and displaced Z-axis direction orthogonal to the surface direction of the flat surface of the member to be processed with the rigidity due to the preload generated by the reaction force and the displacement amount being fixed as the arm body on the displacement receiving side through the supporting point portion comprising a displacement final output end that is enlarged output to Constructed a displacement terminal end output side arm member with two arm members and which is placed in contact with each other through the contact output end, the displacement start input arm body, a pressing action from the stretchable side In order to reduce the amount of movement in the sliding direction of the open end which is the contact output end when the contact output end is pushed down, the respective center positions of the contact output end side and the fulcrum portion provided by itself are on substantially the same line. and forming by position, at least the displacement terminal end output side arm member, in the contact the Z-axis direction to the displacement final output end an output end side when the is pressed against the contact of the displacement starting input arm member the most important feature that is provided with a parallel link mechanism for imparting an expanded amount of displacement of the substantially linear direction.

In this case, in order to suppress unnecessary slippage generated when the contact output end side in the displacement terminal end output side arm side was pressed into contact, in the substantially linear direction in the Z axis direction to the contact output end side It is desirable that the parallel link mechanism for applying the enlarged displacement amount is also provided on the displacement start end input side arm body side .

  Furthermore, the displacement terminal output side arm body has a surface height of a contact surface with which the contact output end of the displacement start end input side arm body is in contact with a center height position of the fulcrum portion provided by itself. You can also. Further, the displacement end output side arm body can be arranged with the displacement start end input side arm body and the positional relationship opposite to each other.

  Further, the displacement terminal output side arm body may be provided with a sliding surface having a small friction coefficient in a region of a contact surface with the contact output end of the displacement start end input side arm body.

  Further, the displacement start end input side arm body and the displacement end output side arm body are arranged in parallel in a lame manner with the displacement end output side arm body preceding, and the displacement start end input side arm body includes A pin member having a latching portion protruding in the length direction toward the displacement terminal output side arm body is attached to a portion corresponding to the contact output end, and the parallel link mechanism of the displacement terminal output side arm body is provided. The displacement terminal output side arm body can be freely driven in accordance with the abutment latching state of the latching portion of the pin member disposed in the defining surrounding space.

  Furthermore, it is desirable that the displacement terminal output side arm body is formed using a member having a higher Young's modulus than the displacement terminal output side arm body.

On the other hand, the second invention (processing apparatus) is characterized in that the apparatus main body is provided with the displacement enlarging mechanism with the displacement final output end according to any one of claims 1 to 7 .

Of the present invention, according to the first invention (displacement enlargement mechanism), the reaction force when the displacement start end input side arm body receives a pressing action from the contact portion of the expansion and contraction, and the displacement end output side arm body Is applied to the displacement end output end side as the load point of the displacement end output side arm body by the preload generated by the reaction force when receiving the pressing action from the contact output end side of the displacement start end input side arm body. Along with the accompanying displacement amount can be given. Moreover, the displacement start end input side arm body is formed by positioning the center positions of the contact output end side and the fulcrum portion provided on the displacement body side on substantially the same line, and therefore is pushed down by receiving the pressing action from the expansion body side. When this is done, the amount of movement in the sliding direction of the open end, which is the contact output end, can be reduced. Furthermore, since at least the displacement terminal output side arm body is formed with a parallel link mechanism, the displacement terminal output side arm body has a substantially linear motion direction that is the Z-axis direction with respect to the displacement final output end side of the displacement terminal output side arm body. It is possible to improve the response characteristics by increasing the settling property of. Therefore, when a processing tool including an electrical measurement probe and a grinding tool is attached to the displacement final output end side, an extended movement amount rich in responsiveness is given to the processing tool, and at the same time, with rigidity. It is possible to stably contact the member to be processed. Furthermore, when the displacement start end input side arm body side also has a parallel link mechanism, an enlarged displacement amount in the substantially linear motion direction that is the Z-axis direction can be given to the contact output end side. Suppressing unnecessary slip that occurs when the contact output end side is pressed against the displacement end output side arm body side, thereby reducing wear at the contact portion and providing rigidity with excellent durability. The processing member side can be stably contacted.

Further, according to the second invention (processing apparatus), since the displacement magnifying mechanism according to any one of claims 1 to 7 is provided for the moving body provided in the apparatus main body, the mass thereof may be small. Thus, the planar positioning in a predetermined direction including the XY axis direction can be made accurate and stable. In addition, since it is not necessary to use an electromagnetic motor as a drive source, speeding up and stabilization in the case of measurement processing can be realized by eliminating electromagnetic noise, and the substantially linear motion direction that is the Z- axis direction is positioned. Since a preload can be applied to the displacement final output end side of the displacement magnifying mechanism later, the settling property in the linear motion direction during processing can be improved to improve the response characteristics.

  The present invention provides a displacement final output terminal effective when the front end side of various processing tools including a measuring tool such as an electrical measurement probe and a processing tool such as a grinding tool is brought into contact with a predetermined position of a member to be processed. The present invention can be applied to a displacement magnifying mechanism (first invention) and a processing apparatus (second invention) provided with the displacement magnifying mechanism.

Among these, an outline of the principle concept of the first invention will be described with reference to FIG. Referring to FIG. 11, a displacement enlarging mechanism (hereinafter abbreviated as “displacement enlarging mechanism”) 11 having a displacement final output end according to the first invention is shown in FIG. 11 as an example of a substrate inspection apparatus. The moving body 103 is disposed in the apparatus main body 102 constituting the processing apparatus 101 according to the second aspect of the present invention so as to be freely movable in the X and Y axes, and is mounted on the base 104 provided in the moving body 103. To be placed. Note that reference numeral 105 in the figure denotes a member to be processed taking a substrate to be inspected as an example.

  In this case, the displacement enlarging mechanism 11 includes a stretchable body 12 that contacts the counterpart material and acts as a force point, and an arm body on the displacement giving side that is a counterpart material that is displaced when receiving a pressing action from the stretchable body 12 side. 23, a displacement start end input side arm body 33, and a displacement end end arm body 25 that outputs the enlarged displacement when receiving a pressing contact from the displacement start end input side arm body 33 side. The two arm bodies 22 including the output side arm body 53 constitute the whole.

This will be described in more specifically follow the Figure 1, the as shown in (a), for example elastics 12 consisting of a piezoelectric element abutting portion to act as a power point contact with the mating member 14 is provided at the displacement end 13 which is a free end, and the base end portion 15 is fixed on the base portion 104 side shown in FIG.

  Of the two arm bodies 22, the displacement start end input side arm body 33, which is the displacement giving side arm body 23, is a fulcrum portion 38 that is displaced when a pressing action is applied from the contact portion 14 of the expansion and contraction body 12. The position is fixed to the base unit 104 side shown in FIG.

  In this case, the displacement start end input side arm body 33 is configured by a fixed piece portion 34 and an action piece portion 35 integrated via a fulcrum portion 38, and the action piece portion 35 is located closer to the fulcrum portion 38. A horizontal piece 36 having a base end portion 36a that receives a pressing force from the abutment portion 14 of the stretchable body 12, and extends forward from the horizontal piece 36 and has an open end 37a. And a forward inclined piece 37 having a contact output end 42.

  On the other hand, of the two arm bodies 22, the displacement end output side arm body 53 that is the displacement receiving side arm body 25 is from the contact output end 42 of the displacement start end input side arm body 33 that is the displacement giving side arm body 23. The fixed piece 54 interposing the fulcrum part 59 that is displaced when receiving the pressing contact is disposed and fixed on the base part 104 side shown in FIG.

  In this case, the displacement terminal output side arm body 53 includes a fixed piece portion 54 and an action piece portion 55 integrated via a fulcrum portion 59, and the action piece portion 55 is connected to the fixed piece portion 54. The upper arm piece 56, the lower arm piece 57, and the vertical arm piece 58 that form a parallel link mechanism are formed.

  Further, the displacement terminal output side arm body 53 has a fulcrum portion 59a between the fixed piece portion 54 and the upper arm piece 56, a fixed piece portion 54, and a lower arm piece in order to ensure movement as a parallel link mechanism. 57, a fulcrum part 59b between the upper arm piece 56 and the vertical arm piece 58, and a fulcrum part 59d between the lower arm piece 57 and the vertical arm piece 58. A fulcrum part 59 is provided.

Moreover, In Fig. 1, the lower end portion 58a of the vertical side arm pieces 58 displaced final output end 60 at the displacement terminal end output side arm 53 is positioned, the processing shown in FIG. 11 of the vertical arm piece 58 An interposition piece 61 for attaching an electric measurement probe or the like is directly connected so as to follow the movement in the Z-axis direction which is a direction orthogonal to the surface direction of the flat surface of the member 105 .

FIG. 3 is a conceptual diagram showing a modification of the principle conceptual diagram shown in FIG. According to the figure , the displacement start end input side arm body 33 which is the displacement giving side arm body 23 has an action piece portion 35 similar to the displacement end output side arm body 53 shown in FIG. The upper arm piece 39, the lower arm piece 40, and the vertical arm piece 41 forming a parallel link mechanism are formed.

  In addition, the displacement start end input side arm body 33 has a fulcrum portion 38a between the fixed piece portion 34 and the upper arm piece 39, a fixed piece portion 34, and a lower arm piece in order to ensure movement as a parallel link mechanism. 40, a fulcrum part 38 b between the upper arm piece 39 and the vertical arm piece 41, and a fulcrum part 38 d between the lower arm piece 40 and the vertical arm piece 41. A fulcrum part 38 is provided.

  In this case, the stretchable body 12 abuts against and presses the proximal end portion 39a of the upper arm piece 39 whose abutment portion 14 is located near the fulcrum portion 38a. Further, the contact output end 42 in the displacement start end input side arm body 33 is positioned at the lower end of the vertical side arm piece 41.

FIG. 4 is an explanatory diagram of relevant parts showing the first example of the first invention applied to the principle conceptual diagram shown in FIG. According to the figure, the displacement start end input side arm body 33 which is the displacement giving side arm body 23 is formed such that the contact output end 42 and the fulcrum portion 38 provided therein are positioned on substantially the same line. Yes. The displacement terminal output side arm body 53 is formed in the same manner as the configuration example shown in FIG.

FIG. 6 is a main part explanatory view showing a second example in which the first example of the first invention shown in FIG. 4 is applied to the configuration example of FIG . According to the figure, the contact surface 56 a of the upper arm piece 56 of the displacement end output side arm body 53 with which the contact output end 42 of the displacement start end input side arm body 33 contacts is the center height of the fulcrum part 59 a of the upper arm piece 56. A surface height that is substantially the same height as the vertical position is provided.

7 is an explanatory view showing a third example applied to the first example shown in FIG. 4 and the second example shown in FIG.
The displacement terminal output side arm body 53 which is the displacement receiving side arm body 25 is arranged in a reverse direction to the displacement start end input side arm body 33 which is the displacement giving side arm body 23.

In this case, the displacement start input arm 33, if formed as傾長prior example showing傾片portion 37 before at the operating member 35 in Figure 1 increases, displacement of terminating the output side arm member opposite and became acting piece 55 of the 53 (upper arm piece 56) of the space that can be placed thereunder Ru can be ensured.

FIG. 8 is an explanatory view showing a fourth example of the first invention, wherein a displacement start end input side arm body 33 which is a displacement giving side arm body 23 and a displacement end output which is a displacement receiving side arm body 25. An example of a more preferable structure when the side arm body 53 is arranged under the various patterns described above is shown. According to the figure, the displacement end output side arm body 53 has a small friction coefficient in the region of the contact surface 56a with the contact output end 42 of the displacement start end input side arm body 33, and also has excellent wear resistance. 62 is formed. In this case, the sliding surface 62 is formed by attaching a carbon resin film to the region of the contact surface 56a where the contact output end 42 of the displacement start end input side arm body 33 contacts the upper arm piece 56 of the displacement end output side arm body 53. Further, it can be disposed by forming a slippery coating layer.

FIG. 9 is an explanatory diagram showing a fifth example of the first invention. According to the figure, the displacement start side input side arm body 33 which is the displacement giving side arm body 23 and the displacement end side output side arm body 53 which is the displacement receiving side arm body 25 include the displacement receiving side arm body 53. They are arranged in parallel in a lazy manner.

  Further, the displacement start end input side arm body 33 has a pin member 43 having a latching portion 43a projecting in the length direction toward the displacement end output side arm body 53 at a portion corresponding to the contact output end 42. It is attached.

  In this case, the displacement terminal output side arm body 53 is a surrounding space defined by a parallel link mechanism formed between the fixed piece portion 54, the upper arm piece 56, the lower arm piece 57, and the vertical arm piece 58. 63, and the latching portion 43a of the pin member 43 disposed in the surrounding space 63 is brought into contact with the upper arm piece 56 or the lower arm piece 57 in accordance with the displacement on the displacement starting end input side arm body 33 side. By being hooked, the follower of the displacement terminal output side arm body 53 is freely arranged.

  Next, regarding the processing apparatus according to the second aspect of the present invention, together with the operation and effect of the first aspect having the above configuration, the processing apparatus 101 of FIG. By forming the displacement magnifying mechanism 11 according to the first invention on the side of the moving body 103 arranged in the apparatus main body 102 so as to freely move in the XY axis direction shown in FIG. Has been.

  That is, the displacement magnifying mechanism 11 is attached to the base portion 104 provided in the moving body 103 of the apparatus main body 102 shown in FIG. 11, and then the moving body 103 is moved to the position of the processing point of the processing target member 105 including the substrate to be inspected. And moving in the XY axis direction shown in FIG. 11 can be positioned toward a predetermined processing point.

  In this case, the displacement enlarging mechanism 11 is light and compact as a whole, and its mass is also small. Therefore, when performing planar positioning in the XY axis direction, the moving body 103 is arranged. It can move at high speed in an accurate and stable state. Further, the processing apparatus 101 that performs appropriate processing including the substrate inspection apparatus equipped with the displacement magnifying mechanism 11 can realize speeding up and stabilization of the processing work by eliminating electromagnetic noise, and FIG. Since the pre-load can be applied to the displacement final output end 60 side of the displacement magnifying mechanism 11 after positioning the substantially linear motion direction that is the Z-axis direction shown in FIG. 11, the substantially linear motion direction that is the Z-axis direction shown in FIG. It is possible to improve the response characteristics by increasing the settling property.

  If the action and effect of the displacement magnifying mechanism 11 in this case are described in more detail, the displacement magnifying mechanism 11 not only can be made compact as a whole to reduce costs, but also its weight can be reduced to reduce the weight. The movement in the XY axis direction shown in FIG.

  Further, the displacement start end input side arm body 33 which is the displacement giving side arm body 23 applies a voltage to the expansion / contraction body 12 made of, for example, a piezoelectric element, thereby extending the displacement end 13 located on the distal end side thereof. FIG. 11 shows a displacement final output end 60 side as a load point to which an appropriate processing tool including a probe for electrical measurement is received by receiving a pressing force from the contact portion 14 provided in the displacement end 13. An enlarged displacement amount in the substantially linear direction that is the Z-axis direction can be applied.

This will be described further based on the FIG. 1 in detail, the voltage to the telescopic body 22 formed of a piezoelectric element constituting the displacement magnifying mechanism 11 by applying a displacement end 13 which is located on the distal side The contact portion 14 provided in the displacement end 13 pushes down the proximal end portion 36 a of the horizontal piece 36 in the displacement start end input side arm body 33.

  The displacement start end input side arm body 32 is deformed via a fulcrum portion 38 as shown in FIG. 1 (b) when the base end portion 36a of the horizontal piece 36 is pushed down, and the displacement output end 42 is the front side. The open end 37a of the inclined piece 37 is also displaced downward.

  When the open end 37a of the forward tilting piece 37, which is the displacement output end 42 in the displacement start end input side arm body 32, is displaced downward, it is pushed by this, and the displacement end point is the displacement receiving side arm body 25. The output side arm body 53 is also displaced so as to be driven.

  In this case, since the displacement terminal output side arm body 53 is formed by providing a parallel link mechanism, the displacement end output side arm body 53 is disposed on the displacement final output end 60 side located on the lower end portion 58a side of the vertical arm piece 58 in FIG. The displacement amount can be enlarged and transmitted in a substantially linear motion direction that is the Z-axis direction shown.

  Therefore, when an appropriate processing tool including a probe for electrical measurement and a grinding tool is attached to the displacement final output end 60 side of the displacement terminal output side arm body 53 via the interposed piece 61, the graph of FIG. Thus, the processing tool can be stably brought into contact with the processing point of the member to be processed with the necessary rigidity by following the process as shown in FIG.

  That is, FIG. 2 is a graph plotting the state of relative displacement between the displacement start end input side arm body 33 as the first stage and the displacement end output side arm body 53 as the second stage. According to the graph, the displacement final output end 60 of the displacement terminal output side arm body 53 is slightly moved immediately after the start of the displacement when the expansion body 12 is driven from the initial position (displacement 0) where the expansion body 12 is not driven. Although it is unstable, it turns out that the response is stabilized by the reaction force generated at that time.

In addition, the displacement final output end 60 from when the telescopic body 12 is driven until it is released, that is, the displacement final output end 60 during the expansion displacement, is the first stage of the displacement start end input side arm against the pressing force received from the telescopic body 12 side. Due to the reaction force on the body 33 side and the reaction force on the displacement end output side arm body 53 side with respect to the pressing force received from the contact output end 42 of the displacement start end input side arm body 33, a stable response is obtained under strong rigidity. It turns out to show. Therefore, when various processing tools including an electrical measurement probe and a grinding tool are attached to the displacement final output end 60, a predetermined processing operation including probing using the processing tool can be stably performed. Can do. Such actions and effects obtained from the first example can be obtained in the same manner from the second to fifth examples.

Next, the operation and effect will be described with reference to FIG. 3 showing a modification of the configuration example shown in FIG. 1. Like the configuration example shown in FIG. 1, a voltage is applied to the expansion and contraction body 12 made of a piezoelectric element. The displacement end 13 is displaced in the extending direction, and the contact portion 14 pushes down the displacement start end input side arm body 33 side.

  In this case, the displacement start end input side arm body 33 which is the displacement giving side arm body 23 is formed by providing a parallel link mechanism similarly to the displacement end output side arm body 53 of FIG. The displacement amount can be enlarged and transmitted to the contact output end 42 side of the side arm piece 41 in a substantially linear motion direction that is the Z-axis direction shown in FIG.

  For this reason, the contact output end 42 of the displacement start end input side arm body 33 in FIG. 3 has a sliding direction (X) compared to the movement of the open end 37a which is the contact output end 42 of the displacement start end input side arm body 33 in FIG. Since the displacement end output side arm body 53 can be pushed down by reducing the movement amount in the direction) to a considerable extent, the wear of the contact surface 56a can be reduced accordingly.

Next, a first example of the first invention will be described the specific actions and effects with reference to FIG. 4, a voltage is applied to the telescopic member 12 formed of a piezoelectric element as in the Figure 1 The displacement end 13 is displaced in the extending direction, and the contact portion 14 pushes down the displacement start end input side arm body 33 side.

In addition , the displacement start end input side arm body 33 which is the displacement giving side arm body 23 is arranged such that the position of the contact output end 42 and the center position of the fulcrum portion 38 provided on the displacement start end input side arm body 23 are located on substantially the same line. Yes.

  For this reason, when the displacement start end input side arm body 33 is pushed down, the movement amount in the sliding direction (X direction) of the open end 37a which is the contact output end 42 of the displacement start end input side arm body 33 in FIG. Can be reduced. Therefore, the open end 37a, which is the contact output end 42, increases the amount of displacement in the axial direction (Y direction) orthogonal to the sliding direction (X direction) as shown in FIG. Therefore, the displacement amount can be increased and applied to the displacement final output end 60.

Next, a second example shown in FIG. 6, will be described the operation and effect of the specific, extension direction displacement end 13 by applying a voltage to the telescopic member 12 formed of a piezoelectric element as in the Figure 1 The contact portion 14 pushes down the displacement start end input side arm body 33 side.

In this case, the displacement start-side input-side arm body 33 which is the displacement-giving-side arm body 23 determines the position of the contact output end 42 and the center position of the fulcrum part 38 provided in the same manner as in the first example shown in FIG. They are arranged on substantially the same line.

  Further, the displacement terminal output side arm body 53 formed of a parallel link mechanism has a fulcrum portion 59 provided on the contact surface 56a of the upper arm piece 56 with which the contact output end 42 of the displacement start end input side arm body 32 contacts. (59a) is disposed so as to be substantially the same height as the center height position.

  For this reason, the contact output end 42 of the displacement start end input side arm body 33 can push down the displacement end output side arm body 53 by reducing the amount of movement in the sliding direction (X direction).

  Further, since the surface height of the contact surface 56a of the upper arm piece 56 in the displacement terminal output side arm body 53 is set to be substantially the same height as the center height position of the fulcrum portion 59 (59a) provided therein, before and after the deformation. Compared with the first example, for example, the relative movement distance between the displacement starting end input side arm body 33 and the contact output end 42 with the displacement amount in the X direction on the displacement end output side arm body 53 side being minimized is reduced. Therefore, the wear of the contact surface 56a can be reduced accordingly.

Next, a third example shown in FIG. 7, will be described the operation and effect of the specific, extension direction displacement end 13 by applying a voltage to the telescopic member 12 formed of a piezoelectric element as in the Figure 1 The contact portion 14 pushes down the displacement start end input side arm body 33 side.

  In this case, the displacement end output side arm body 53 is arranged to be opposite to the displacement start end input side arm body 33. For this reason, when the upper arm piece 56 side in the displacement terminal output side arm body 53 is pushed down, the sliding of the open end 37a (contact output end 42) of the forward inclined piece part 37 in the action piece part 35 that is the load point. The movement in the direction (X direction) is the same direction as the movement direction (X direction) when the displacement terminal output side arm body 53 side is displaced in a substantially arc as shown in FIG. The relative distance of is offset. In other words, when the upper arm piece 56 of the displacement end output side arm body 53 is pressed by the open end 37a of the displacement start end input side arm body 33, the X direction of the open end 37a when the displacement start end input side arm body 33 is displaced. Since the movement direction (left direction in the illustrated example) is the same as the movement direction (left direction in the illustrated example) on the displacement terminal output side arm body 53 side, the relative distance between them is offset.

  As a result, the open end 37a (contact output end 42) of the forward inclined piece 37 in the displacement start end input side arm body 33 has a small amount of movement in the sliding direction (X direction). The wear of the contact surface 56a of the upper arm piece 56 in the arm body 53 can be reduced accordingly. In this case, since the displacement start end input side arm body 33 and the displacement end output side arm body 53 are displaced in the same direction, the displacement start end input side arm body with respect to the contact surface 56a on the displacement end output side arm body 53 side. Since the vertical drag on the 33 side is reduced, the friction pressure can be reduced accordingly.

Next, the operation and effect peculiar to the fourth example shown in FIG. 8 will be described. Similarly to the first example shown in FIG. 13 is displaced in the extending direction, and the contact portion 14 pushes down the displacement start end input side arm body 33 side.

  In this case, the upper arm piece 56 in the displacement terminal output side arm body 53 which is the arm body 25 on the displacement receiving side has wear resistance in the region of the contact surface 56a with the contact output end 42 of the displacement start end input side arm body 33. Since the sliding surface 62 having a small friction coefficient is provided, it is possible to smoothly slide the contact output end 42 of the displacement start end input side arm body 33 which is the displacement giving side arm body 23 to suppress the amount of scraping. it can. Even if the sliding surface 62 is scraped off, it can be easily recovered by changing the surface or coating again.

Finally, with respect to the fifth example shown in FIG. 9, the operation and effect peculiar to the fifth example will be described. Similarly to the first example shown in FIG. 13 is displaced in the extending direction, and the contact portion 14 pushes down the displacement start end input side arm body 33 side.

  In this case, the displacement start end input side arm body 33 includes a pin member 43 attached to a portion corresponding to the contact output end 42, and the latching portion 43 a is a parallel link mechanism in the displacement end output side arm body 53. Is arranged in the surrounding space 63 that defines.

  For this reason, as a result of the pin member 43 moving in accordance with the movement of the displacement start end input side arm body 33, the latch member 43 a is brought into contact with the displacement end output side arm body 53, thereby causing the pin member 43 to follow. Can do.

FIG. 10 is an explanatory view showing the movement of the fifth example shown in FIG. 9, in which (a) shows the state of the initial position where the elastic body 12 is not driven, and (b) shows the state of the elastic body 12. The state at the time of the driven displacement is shown, respectively.

  In this case, the displacement start end input side arm body 33 and the displacement end output side arm body 53 are hung so as to be displaced in a direction in which the displacement end output side arm body 53 is pushed up as shown in FIG. The stop portion 43a is disposed in a state where it is in contact with and supported by the upper arm piece 56, thereby setting the initial position. That is, the displacement terminal output side arm body 53 at the initial position can be arranged under a state in which the preload as the reaction force is increased, so that the contact state with respect to the displacement start end input side arm body 33 side is solid. can do.

  When the telescopic body 12 is driven so as to perform a processing operation using a processing tool including an electrical measurement probe and a grinding tool attached to the displacement final output end 60 side of the displacement terminal output side arm body 53, In accordance with the displacement, the latching portion 43a starts to move downward in the illustrated example.

  At this time, the displacement terminal output side arm body 53 is automatically displaced downward in the illustrated example by its own restoring force as a result of releasing the contact support state in the push-up direction by the latching portion 43a. In addition, as the lowering portion 43a is lowered, the latching portion 43a eventually comes into contact with the lower arm piece 58 in the displacement terminal output side arm body 53, and as shown in FIG. Push down to the position to stop.

For this reason, the displacement final output end 60 of the displacement terminal output side arm body 53 can be displaced under a large stroke as compared with the case shown in FIG. Incidentally, when the deformation amount of the fulcrum portion 59 is the same, the displacement final output end 60 of the displacement terminal output side arm body 53 can be displaced with a stroke twice at maximum as compared with the first example. .

Further, in the case of the fifth embodiment shown in FIG. 9, for example, when attempting to obtain the same stroke (displacement) and stroke (displacement amount) of the case shown in FIG. 1, the amount of deformation of the fulcrum portion 59 Since it can reduce, the stress which generate | occur | produces in this fulcrum part 59 can be made small, and the durability can be raised.

  The above is the description of the present invention based on the illustrated example, and the specific content is not limited to this. For example, the displacement start end input side arm body 33 that is the displacement giving side arm body 23 is formed using an appropriate member having a higher elastic coefficient than the displacement end output side arm body 53 that is the displacement receiving side arm body 25. You can also.

  As the stretchable body 12 used in the present invention, although a piezoelectric element can be suitably used, for example, a structure that can be stretched and contracted using a magnetostrictive element or an electric motor may be provided.

FIG. 2 is a conceptual diagram of the principle of the first invention, in which (a) shows the positional relationship under an initial state (standby state), and (b) shows the positional relationship during operation after displacement. Graph showing an initial state (standby state) displacement state at the time of operation is after displaced when the displacement of expansion mechanism shown in FIG. The conceptual diagram which shows the modification of the structural example shown in FIG. FIG. 2 is an explanatory diagram of relevant parts showing a first example of the first invention applied to the principle conceptual diagram shown in FIG. 1 . Explanatory drawing which shows the motion of the contact output end of the displacement start end input side arm body (displacement giving side arm body) in the displacement expansion mechanism of the 1st example shown in FIG. The conceptual diagram which shows the 2nd example about 1st invention. It is a conceptual diagram which shows the 3rd example about 1st invention, (a) is explanatory drawing which shows the positional relationship in the initial state (standby state), (b) is after displacement It is explanatory drawing which expands and shows the positional relationship at the time of a certain action | operation. The conceptual diagram which shows the 4th example about 1st invention. The conceptual diagram which shows the 5th example about 1st invention. The relationship between the pin member provided in the displacement start end input side arm body (displacement giving side arm body) and the displacement end output side arm body (displacement receiving side arm body) in the displacement magnifying mechanism of the fifth example shown in FIG. It is explanatory drawing shown, and (a) is the state which pushed up the displacement termination output side arm body (arm body of the displacement reception side) via the pin material, (b) is the displacement termination output side via the pin material. The state where the arm body (the arm body on the displacement receiving side) is pushed down is shown. Explanatory drawing which shows the schematic structural example of 2nd invention at the time of applying 1st invention to a board | substrate inspection apparatus. Explanatory drawing which shows an example of the displacement expansion mechanism currently disclosed by patent document 1. FIG.

DESCRIPTION OF SYMBOLS 11 Displacement expansion mechanism 12 Telescopic body 13 Displacement end 14 Contact part 22 Arm body 23 Displacement side arm body 25 Displacement reception side arm body 33 Displacement start end input side arm body 34 Fixed piece part 35 Action piece part 36 Horizontal piece 36a Base end portion 37 Forward inclined portion piece 37a Open end 38 (38a, 38b, 38c, 38d) Support point portion 39 Upper arm piece 39a Base end portion 40 Lower arm piece 41 Vertical side arm piece 42 Contact output end 43 Pin material 43a Latching portion 53 Displacement terminal output side arm body 54 Fixed piece portion 55 Working piece portion 56 Upper arm piece 56a Contact surface 57 Lower arm piece 58 Vertical arm piece 58a Lower end portion 59 (59a, 59b, 59c, 59d) Supporting point portion 60 Displacement final output end 61 Interposition piece 62 Sliding surface 63 Surrounding space 101 Processing device 102 Device body 103 Moving body 104 Base 1 5 the member to be processed (substrate to be inspected)

Claims (8)

A telescopic body that is positioned at a displacement end that is a free end of the abutting portion that abuts against a mating member and acts as a force point, and a reaction when the elastic body receives a pressing action from the abutting portion. The displacement starting end input side arm body which is the counterpart material fixed as a displacement giving side arm body via a fulcrum portion which is displaced with force, and the contact output end side of the displacement starting end input side arm body which is enlarged and displaced The position is fixed as an arm body on the displacement receiving side via a fulcrum portion that is displaced with a reaction force when it receives a pressing action from, and the displacement amount is accompanied by rigidity by a preload generated by the reaction force. Displacement terminal output side arm bodies having a displacement final output end that is enlarged and output in the Z-axis direction orthogonal to the surface direction of the flat surface of the member to be processed are arranged in contact with each other via the contact output end side. With two arm bodies,
The displacement start end input side arm body is provided with the contact output provided by itself to reduce the amount of movement in the sliding direction of the open end, which is the contact output end, when pressed by receiving a pressing action from the telescopic body side. While forming each center position of the end side and the fulcrum part on substantially the same line,
At least the displacement terminal end output side arm member, the expansion of the substantially linear direction in the Z axis direction to the displacement final output end the contact output end of the displacement starting input-side arm member when the is pressed against contact A displacement magnifying mechanism with a final displacement output end, characterized in that a parallel link mechanism for applying the amount of displacement is provided. To suppress unnecessary slippage generated when said the contact output end to the displacement terminal end output side arm side is pressed into contact was extended to substantially linear direction in the Z axis direction to the contact output end side The displacement enlarging mechanism with a displacement final output end according to claim 1, wherein the parallel link mechanism for imparting a displacement amount is also provided on the displacement start end input side arm body side. 2. The displacement terminal output side arm body has a surface height of a contact surface with which the contact output end of the displacement start end input side arm body comes in contact with a center height position of the fulcrum portion provided by itself. Or a displacement enlarging mechanism with a displacement final output end according to 2; The displacement magnifying mechanism with a displacement final output end according to any one of claims 1 to 3, wherein the displacement end output side arm body is disposed with the positional relationship of the displacement start end input side arm body reversed . The displacement according to any one of claims 1 to 4, wherein the displacement terminal output side arm body includes a sliding surface having a small friction coefficient in a region of a contact surface with the contact output end of the displacement start end input side arm body. Displacement expansion mechanism with final output end. The displacement start end input side arm body and the displacement end output side arm body are arranged in parallel in a lame manner with the displacement end output side arm body preceding , and the displacement start end input side arm body has the contact output A pin member having a latching portion projecting in the length direction toward the displacement terminal output side arm body is attached to a portion corresponding to the end, and the parallel link mechanism of the displacement terminal output side arm body is defined. claim 1 was freely driven in the displacement terminal end output side arm member in accordance with the contact engaging state of the engaging portion of the arranged pin material enclosed space that, according to any one of 2, 4 Displacement expansion mechanism with displacement final output end. Before SL displacement terminal end output side arm member, the displacement terminal end output side arm member displacement final output end with a displacement enlarging mechanism according to any to 6 of claims 1 was formed using a high Young's modulus member than . A processing apparatus comprising the apparatus main body comprising the displacement magnifying mechanism with a displacement final output end according to any one of claims 1 to 7 .

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