JPH0777944A - Vibrating type tactile display - Google Patents

Vibrating type tactile display

Info

Publication number
JPH0777944A
JPH0777944A JP17975093A JP17975093A JPH0777944A JP H0777944 A JPH0777944 A JP H0777944A JP 17975093 A JP17975093 A JP 17975093A JP 17975093 A JP17975093 A JP 17975093A JP H0777944 A JPH0777944 A JP H0777944A
Authority
JP
Japan
Prior art keywords
contactor
contactors
vibrating
plane
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17975093A
Other languages
Japanese (ja)
Inventor
Yasushi Ikei
寧 池井
Akihisa Ikeno
晃久 池野
Shuichi Fukuda
収一 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP17975093A priority Critical patent/JPH0777944A/en
Publication of JPH0777944A publication Critical patent/JPH0777944A/en
Pending legal-status Critical Current

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  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

PURPOSE:To form a vibrating type tactile display which changes a contact sense to the plane to be contacted by vibrating and driving microcontactors arranged in the form of a plane with an arbitrary timewise and spacewise pattern, thereby synthesizing and displaying a contact sense toward various material bodys including virtual objects. CONSTITUTION:Arrangement in the form of a plane is possible by having the contactors 1 used in common with wires to act also as transmitters of vibration and extending the wires up to the vibrators 4. Further, the arranging planes having an arbitrary area are possible to constitute when units, each of which has the contactors 1 and vibrators 4 bundled in several pieces in the reverse direction, are arranged. Driving is achieved with the contactors 1, piezoelectronic elements for generating the vibration and mechanisms for expanding the displacement thereof. In addition, the timewise and spacewise pattern is controlled by an electronic circuit including a calculator. Further, the structure is simplified when the contactors 1 themselves are constituted of the piezoelectronic elements and integrally molded with the vibrators 4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は,人間が直接又は間接
に皮膚で触れる表面を,微小な単位で振動させることに
より,任意の対象物に触れた感覚を生ぜしめる触覚ディ
スプレイの構成法に関するものである.触覚への刺激提
示とそれによる感覚情報の伝達は,基礎手段的な事象で
あるため,利用分野は極めて広い.例えば,触覚ディス
プレイを用いれば,極限環境(宇宙,原子力,極微領
域,生体内部,その他の危険,侵襲環境)や遠隔地から
の状況伝達,計算機による製品設計時点の評価支援,製
品説明(仮想現実感による表示),障害者福祉,アミュ
ーズメントなどが可能である.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for constructing a tactile display that produces a feeling of touching an arbitrary object by vibrating a surface directly or indirectly contacted by human skin with a minute unit. Is. The presentation of stimuli to the tactile sense and the transmission of sensory information by it are fundamental events, so the fields of application are extremely wide. For example, if you use a tactile display, you can communicate information from extreme environments (space, nuclear power, extremely small areas, inside of living organisms, other hazards, invasive environments) and from remote locations, computer-aided evaluation support at the time of product design, product explanation (virtual reality). Display by feeling), welfare for persons with disabilities, amusement, etc. are possible.

【0002】[0002]

【従来の技術】従来,表面の微細な状態を多様に表示す
ることを目的とした表示装置は,面密度を高めることが
困難なため,あまり試みられていなかった.類似の装置
に点字の表示装置があるが,これは基本的に記号情報の
みを伝達する目的で作られており,表示の密度は非常に
粗い.また,時間的な帯域幅は,記号文字の読み取り時
間に対応するため,数秒のオーダーである.これでは,
多様な対象に触れた感覚を生ぜしめることはできない.
近年の人工現実感の技術は,人工的な刺激を人間の視覚
聴覚の感覚器官に提示することにより,仮想の現実を生
成する手段を与えた.しかし,触覚に対して,とりわけ
表面の微視的状態を,単なる凹凸だけでなく,高帯域の
時間的変化も含めて提示する装置は,本装置の他に実現
されていない.
2. Description of the Related Art Conventionally, display devices intended to display various fine states on the surface have not been attempted because it is difficult to increase the areal density. There is a braille display device in a similar device, but this is basically made for the purpose of transmitting only symbolic information, and the display density is very rough. Also, the temporal bandwidth is on the order of a few seconds because it corresponds to the reading time of the symbol characters. With this,
It is not possible to create the feeling of touching various objects.
Artificial reality technology in recent years has provided a means to generate virtual reality by presenting artificial stimuli to the human visual and auditory sense organs. However, other than the present device, there is no device that presents the microscopic state of the surface to the tactile sense, including not only the ruggedness but also the temporal change in the high band.

【0003】[0003]

【発明が解決しようとする課題】本発明は,人間の体性
感覚の中でも特に皮膚感覚に対する刺激を,密度高く振
動で与えることにより,任意の触感覚情報(記号情報も
含む)を人工的に合成するものである.具体的には,微
小な接触子を高密度で配列すること,十分な刺激強度
(接触子変位・強度)を得ること,任意の時間的空間的
振動パタンを得ることが課題である.従来は,刺激強度
を得ようとすると接触子が大型化して空間密度が得られ
ず,また密度を高くすると,十分な刺激強度(接触子変
位・強度)が得られなかった.
DISCLOSURE OF THE INVENTION The present invention artificially provides arbitrary tactile sensation information (including symbol information) by vibrating human skin somatosensory among human somatosensory sensations with high density. It is a composition. Specifically, the challenges are to arrange minute contacts in high density, to obtain sufficient stimulation strength (contact displacement / strength), and to obtain arbitrary temporal and spatial vibration patterns. In the past, when trying to obtain the stimulus intensity, the contactor became large and spatial density was not obtained, and when the density was increased, sufficient stimulus intensity (contactor displacement / strength) could not be obtained.

【0004】[0004]

【課題を解決するための手段】微小な接触子は,面内で
の空間密度が高いだけでなく,それ自身の振動的な変位
と発生力を十分な大きさとする必要がある.接触子を微
小化する方法は,従来の高精度切削加工,研削加工,放
電加工などでも可能であるが,物理化学的マイクロ加工
(エッチングなどを用いるマイクロフォトファブリケー
ション)が有効である.例えば,シリコンの異方性エッ
チングや,紫外線露光による光造形材料,X線露光を用
いたLIGAプロセスなどによれば,十分な強度を持っ
たまま超高密度な接触子が製造可能である.(接触子ピ
ッチが,数ミクロン程度まではこれらのプロセスで製造
可能) 接触子は,これ自身が振動子である構造が単純で望まし
い.例えば,接触子をワイヤ状の伸縮素子(圧電素子)
で構成し,これを束ねれば端点で面を形成できる.接触
子を駆動する振動子を分離構成する場合は,接触子と振
動子を伝達子(例えばワイヤ)で接続する.この場合,
振動が減衰しないようにワイヤの運動方向を軸線上に拘
束することが必要である.振動子は,人間の皮膚感覚の
中で振動刺激の感度が極大となる周波数範囲を含めるよ
うに,400Hz程度までの帯域を持つ必要がある.圧
電素子を用いれば,この要求を十分満足できる.市販の
圧電素子を用いる場合は,発生力が極めて大きい(数百
N)代わりにその変位が小さい(数十ミクロン)ため,
変位の拡大が必要である.変位を拡大する部分には,て
こを構成する板状の変位拡大機構を用いることができ
る.任意の時間的空間的パタンを生成するには,電子論
理回路,または計算機からなる駆動制御部を用いる.
[Means for Solving the Problems] A minute contactor must have not only a high spatial density in the plane but also sufficient vibrational displacement and generated force of itself. The contact can be miniaturized by conventional high-precision cutting, grinding, and electrical discharge machining, but physicochemical micromachining (microphotofabrication using etching) is effective. For example, by using anisotropic etching of silicon, photolithography material by UV exposure, LIGA process using X-ray exposure, etc., it is possible to manufacture ultra-high-density contacts with sufficient strength. (The contact pitch can be manufactured by these processes up to a few microns) The contact itself is desirable because it has a simple structure. For example, if the contactor is a wire-shaped expandable element (piezoelectric element)
The surface can be formed by the end points if they are bundled together. When the oscillator that drives the contactor is configured separately, the contactor and oscillator are connected by a transmitter (for example, a wire). in this case,
It is necessary to constrain the wire movement direction on the axis so that the vibration is not damped. The oscillator needs to have a band up to about 400 Hz so as to include the frequency range where the sensitivity of the vibration stimulus is maximum in the human skin sensation. If a piezoelectric element is used, this requirement can be sufficiently satisfied. When using a commercially available piezoelectric element, the generated force is extremely large (hundreds of N), but its displacement is small (tens of microns), so
It is necessary to increase the displacement. A plate-shaped displacement magnifying mechanism that constitutes a lever can be used for the portion that magnifies the displacement. To generate an arbitrary time-spatial pattern, a drive controller consisting of an electronic logic circuit or a computer is used.

【0005】[0005]

【作用】本振動形触覚ディスプレイの表面に触れると,
接触子の振動が皮膚伝わり,多様な接触感覚を生ずる.
さらに,接触部の皮膚,例えば指先の運動を計測し,そ
れに連動させて,動的に振動パタンを制御すると,多様
な対象に能動的に触れた場合の感触を得ることができ
る.この場合,視覚に対してその対象を同時に提示(映
像表示ディスプレイによる)すると,対象への接触感が
著しく高まる.
[Operation] When you touch the surface of this vibrating tactile display,
Vibration of the contactor is transmitted to the skin and various contact sensations are generated.
Furthermore, by measuring the movement of the skin of the contact area, for example, the fingertip, and controlling the vibration pattern dynamically by interlocking with it, it is possible to obtain the feel when various objects are actively touched. In this case, when the target is presented to the visual sense at the same time (by a video display), the sense of contact with the target is significantly increased.

【0006】[0006]

【実施例】【Example】

[実施例1] 図1に示す場合は,接触子(1)を振動
の伝達子であるワイヤで兼ね,ワイヤを振動子(4)で
振動させる構造である.接触子であるワイヤは,接触子
支持枠(2)に開けた穴から先端を露出させる.また,
接触子は面状に等間隔で配置されている.図2は,図1
の場合の接触子の1列を示している.この1列を上下に
重ね,接触子の長さを各列毎に変えれば,図1の構造を
作ることが出来る.振動子(4)は,固定ネジなどで互
いに連結して,接触子支持枠に対して相対的に固定す
る.図3と図4は,接触子(1)および振動子(4)を
並べる際のもう1つの方法を示している.図1の実施例
では,右上方向に接触子の数を延長すると,接触子
(1)の軸線方向,つまり上下方向へのディスプレイの
高さが,振動子(4)の高さとその数に比例して大きく
なる.図3の平面図と図4の正面図は,これを防ぐ配置
方法を示している.これは,接触子(1)および振動子
(4)を逆向きに合わせた1つのユニットを表してい
る.このユニットの高さは,含まれる素子の数で決ま
り,有限である.このユニットを平面図3の平面内で,
2次元的に並べれば,無限個の接触子の配列が得られ
る.ただし,この場合,接触子はユニット毎に千鳥配列
になる.しかし,接触子が十分に小さければ,効果は実
質的に等間隔の配置と変わらない.振動子(4)の第1
の実施例を図5に示す.この場合は圧電素子(6)で変
位を発生し,それを変位拡大機構(5)で拡大してい
る.この場合,変位拡大機構(5)は単純支持梁による
てこである.振動子(4)の第2の実施例を図6に示
す.この場合,圧電素子(6)の変位を切り欠き構造に
よる2段階のてこで拡大している.振動子(4)の第3
の実施例を図7に示す.この場合も,圧電素子(6)の
変位を切り欠き構造による2段階のてこで拡大してい
る.この配置では,図6の場合に比べて,変位拡大機構
の高さ(接触子(1)の軸線方向に向かう長さ)を短く
構成でき,また圧電素子(6)を変位拡大機構の左側に
置く際の位置に制限が少なくなる利点がある. [実施例2] 図8に示す場合は,接触子(1)が振動
子でもある実施例である.この場合,例えば振動子を圧
電素子で製造し,軸線方向に伸縮するような部品とす
る.接触子(1)は,上端において接触子支持枠(2)
のメッシュから接触部を露出する.また,下端において
接触子支持枠(2)に連結された筺体構造に固定する.
接触子から電源線を引き出し,これに制御された駆動電
圧を加える.なお,上の各実施例において,各接触子の
接触面は,矩形断面,円形断面に限定されない.さら
に,接触子が並ぶ面は平面に限らず,一般に曲面でよ
い.また,その曲率も可変とすることができる.その場
合は,振動変位ではないから,通常のスライド変位機構
を用いることが可能である.例えば支持枠が,接触子毎
に分離されてスライドすることになる.また,指先など
に取り付けた場合,その絶対座標位置を空間センサなど
で検出し,多様な対象に触れる場合の条件を触覚ディス
プレイ表示に反映させることが有効である.
[Embodiment 1] In the case shown in FIG. 1, the contactor (1) is also a wire that is a vibration transmitter, and the wire is vibrated by a vibrator (4). The tip of the wire, which is a contactor, is exposed through the hole formed in the contactor support frame (2). Also,
The contacts are arranged in a plane at equal intervals. 2 is shown in FIG.
This shows one row of contacts in the case of. The structure shown in Fig. 1 can be created by stacking this one row vertically and changing the contact length for each row. The oscillator (4) is connected to each other with fixing screws and fixed relatively to the contact support frame. 3 and 4 show another method for arranging the contactor (1) and the vibrator (4). In the embodiment of FIG. 1, when the number of contacts is extended in the upper right direction, the height of the display in the axial direction of the contacts (1), that is, the vertical direction, is proportional to the height of the vibrator (4) and the number thereof. And grow bigger. The plan view of FIG. 3 and the front view of FIG. 4 show an arrangement method for preventing this. This represents one unit in which the contactor (1) and the oscillator (4) are set in opposite directions. The height of this unit is finite, as determined by the number of elements included. This unit in the plane of the plan view 3,
If arranged two-dimensionally, an array of infinite number of contacts can be obtained. However, in this case, the contacts are staggered for each unit. However, if the contacts are small enough, the effect is virtually the same as the equidistant placement. First of oscillator (4)
An example of is shown in FIG. In this case, displacement is generated by the piezoelectric element (6) and it is magnified by the displacement magnifying mechanism (5). In this case, the displacement magnifying mechanism (5) is a lever with a simple support beam. A second embodiment of the oscillator (4) is shown in FIG. In this case, the displacement of the piezoelectric element (6) is magnified by a two-step lever with a notch structure. Third of oscillator (4)
An example of is shown in FIG. In this case as well, the displacement of the piezoelectric element (6) is expanded by a two-step lever with a notch structure. In this arrangement, the height of the displacement magnifying mechanism (the length of the contactor (1) in the axial direction) can be made shorter than in the case of FIG. 6, and the piezoelectric element (6) is arranged on the left side of the displacement magnifying mechanism. There is an advantage that there are less restrictions on the position when placing. Example 2 The case shown in FIG. 8 is an example in which the contactor (1) is also a vibrator. In this case, for example, the vibrator is made of a piezoelectric element and is made a component that expands and contracts in the axial direction. The contactor (1) has a contactor support frame (2) at the upper end.
The contact part is exposed from the mesh. The lower end is fixed to the housing structure connected to the contactor support frame (2).
A power supply line is drawn from the contactor and a controlled drive voltage is applied to this. In each of the above embodiments, the contact surface of each contact is not limited to a rectangular cross section or a circular cross section. Furthermore, the surface on which the contacts are lined up is not limited to a flat surface, but generally a curved surface. Also, its curvature can be made variable. In that case, a normal slide displacement mechanism can be used because it is not a vibration displacement. For example, the support frame will slide for each contact. Moreover, when it is attached to a fingertip, it is effective to detect the absolute coordinate position with a space sensor and reflect the conditions when touching various objects on the tactile display.

【0007】[0007]

【発明の効果】本発明は以上のような構成であり,これ
を使用するときは接触子(1)を皮膚に直接,あるいは
間接に触れさせ,表示したい対象に応じた時間的空間的
振動パタンを発生させ,振動刺激を皮膚に伝達する.こ
れにより,その対象に触れた時の感触,面のきめ,ある
いは伝えたい記号情報を知覚させることが出来る.さら
に接触した皮膚の時間的空間的運動の状態に応じて提示
パタンを制御し,視覚に対する映像提示と連動表示する
と,極めて現実に近い接触感覚が得られる.
EFFECTS OF THE INVENTION The present invention has the above-described structure. When using the present invention, the contactor (1) is brought into direct or indirect contact with the skin, and a temporal and spatial vibration pattern according to the object to be displayed. Is generated and the vibration stimulus is transmitted to the skin. This makes it possible to perceive the touch when touching the object, the texture of the surface, or the symbol information that you want to convey. Furthermore, if the presentation pattern is controlled according to the state of the temporal and spatial motion of the contacted skin and displayed in conjunction with visual image presentation, a contact sensation that is extremely close to reality can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例1の斜視図である.一部分の
断面を示した.この場合,全体はこれらの単純な連続で
ある.
FIG. 1 is a perspective view of a first embodiment of the present invention. A partial cross section is shown. In this case, the whole is a simple sequence of these.

【図2】 本発明の実施例1の接触子(1)の1列部分
の抜き書きである.
FIG. 2 is an outline drawing of the one-row portion of the contact (1) of the first embodiment of the present invention.

【図3】 本発明の接触子(1)および振動子(3)の
もう1つの配列の方法を示す平面図である.実際には,
この単位を面状に繰り返し展開する.
FIG. 3 is a plan view showing another method of arranging the contactor (1) and the vibrator (3) of the present invention. actually,
Repeat this unit in a plane.

【図4】 本発明の接触子(1)および振動子(3)の
もう1つの配列の方法を示す正面図である.
FIG. 4 is a front view showing another method of arranging the contactor (1) and the vibrator (3) of the present invention.

【図5】 本発明の接触子(1)および振動子(3)の
詳細平面図である.変位拡大機構(6)の第1の実施例
である.
FIG. 5 is a detailed plan view of the contactor (1) and the vibrator (3) of the present invention. It is a first embodiment of the displacement magnifying mechanism (6).

【図6】 本発明の接触子(1)および振動子(3)の
詳細平面図である.変位拡大機構(6)の第2の実施例
である.
FIG. 6 is a detailed plan view of the contactor (1) and the vibrator (3) of the present invention. It is a second embodiment of the displacement magnifying mechanism (6).

【図7】 本発明の接触子(1)および振動子(3)の
詳細平面図である.変位拡大機構(6)の第3の実施例
である.
FIG. 7 is a detailed plan view of the contactor (1) and the vibrator (3) of the present invention. It is a third embodiment of the displacement magnifying mechanism (6).

【図8】 本発明の実施例2の斜視図である.一部を切
り欠いた図面である.分かりやすさのため拡大して描い
ている.接触子(1)は,この場合振動子を兼ねる.
FIG. 8 is a perspective view of a second embodiment of the present invention. This is a partially cutaway drawing. It is drawn enlarged for clarity. In this case, the contactor (1) also serves as a vibrator.

【符号の説明】[Explanation of symbols]

1 接触子 2 接触子支持枠 3 伝達子 4 振動子 5 変位拡大機構 6 圧電素子 7 電源線 8 駆動制御部 1 Contact Element 2 Contact Element Support Frame 3 Transmitter 4 Transducer 5 Displacement Enlarging Mechanism 6 Piezoelectric Element 7 Power Supply Line 8 Drive Control Section

───────────────────────────────────────────────────── フロントページの続き (72)発明者 池井 寧 東京都多摩市落合6−6−3 グリーンコ ープ落合 503 (72)発明者 池野 晃久 東京都日野市豊田3−36−2 コーポ西豊 田 103 (72)発明者 福田 収一 東京都武蔵野市吉祥寺東町3−29−5 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Nei Ikei 6-6-3 Ochiai, Tama-shi, Tokyo 503 (72) Inventor Akihisa Ikeno 3-36-2 Toyota, Hino-shi, Tokyo Corp Nishitoyo田 103 (72) Inventor Shuichi Fukuda 3-29-5 Kichijoji Higashicho, Musashino City, Tokyo

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 面状に配列された微小な接触子を,任意
の時間的空間的パタンで振動駆動することより,その面
に対する接触感覚が変わる振動形触覚ディスプレイ.
1. A vibrating tactile display in which the sense of contact with a surface is changed by vibrating minute contact elements arranged in a plane with an arbitrary temporal and spatial pattern.
【請求項2】 接触子を振動の伝達子であるワイヤで兼
ね,このワイヤを振動子まで延長する,請求項1の振動
形触覚ディスプレイ.
2. The vibrating tactile display according to claim 1, wherein the contact also serves as a wire that is a vibration transmitter, and the wire is extended to the vibrator.
【請求項3】 接触子を伝達子と別に製作し,振動伝達
子と接合した,請求項1の振動形触覚ディスプレイ.
3. The vibrating tactile display according to claim 1, wherein the contactor is manufactured separately from the transmitter and is joined to the vibration transmitter.
【請求項4】 接触子を振動させるための振動子を,圧
電素子とその変位を拡大する機構で構成する,請求項1
の振動形触覚ディスプレイ.
4. A vibrator for vibrating a contactor is composed of a piezoelectric element and a mechanism for magnifying its displacement.
Vibrating tactile display.
JP17975093A 1993-06-14 1993-06-14 Vibrating type tactile display Pending JPH0777944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17975093A JPH0777944A (en) 1993-06-14 1993-06-14 Vibrating type tactile display

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17975093A JPH0777944A (en) 1993-06-14 1993-06-14 Vibrating type tactile display

Publications (1)

Publication Number Publication Date
JPH0777944A true JPH0777944A (en) 1995-03-20

Family

ID=16071225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17975093A Pending JPH0777944A (en) 1993-06-14 1993-06-14 Vibrating type tactile display

Country Status (1)

Country Link
JP (1) JPH0777944A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032112A1 (en) * 1997-01-20 1998-07-23 John Christian Doughty Nissen Sensory communication apparatus
EP0857396A1 (en) * 1995-10-25 1998-08-12 Gilbert Rene Gonzales Tactile communication device and method
GB2366903A (en) * 2000-06-14 2002-03-20 Abbas Haydari Controlled multi-vibrator matrix.
JP2007075751A (en) * 2005-09-15 2007-03-29 Sony Corp Tactile sensation offering mechanism and electronic equipment equipped with tactile sensation offering mechanism
JP2007198931A (en) * 2006-01-27 2007-08-09 Hioki Ee Corp Displacement magnifying mechanism for electrode measurement probe, and substrate inspection device
JP2009526308A (en) * 2006-02-07 2009-07-16 ソシエテ ドゥ テクノロジー ミシュラン Contact detector with piezoelectric sensor
US8800390B2 (en) 2006-02-07 2014-08-12 Michelin Recherche Et Technique S.A. Contact detector with piezoelectric sensor

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0857396A1 (en) * 1995-10-25 1998-08-12 Gilbert Rene Gonzales Tactile communication device and method
EP0857396A4 (en) * 1995-10-25 1998-08-19
WO1998032112A1 (en) * 1997-01-20 1998-07-23 John Christian Doughty Nissen Sensory communication apparatus
GB2366903A (en) * 2000-06-14 2002-03-20 Abbas Haydari Controlled multi-vibrator matrix.
GB2366903B (en) * 2000-06-14 2005-01-05 Abbas Haydari A controlled matrix multi-vibrator device
JP2007075751A (en) * 2005-09-15 2007-03-29 Sony Corp Tactile sensation offering mechanism and electronic equipment equipped with tactile sensation offering mechanism
JP2007198931A (en) * 2006-01-27 2007-08-09 Hioki Ee Corp Displacement magnifying mechanism for electrode measurement probe, and substrate inspection device
JP2009526308A (en) * 2006-02-07 2009-07-16 ソシエテ ドゥ テクノロジー ミシュラン Contact detector with piezoelectric sensor
JP4759061B2 (en) * 2006-02-07 2011-08-31 ソシエテ ド テクノロジー ミシュラン Contact detector with piezoelectric sensor
US8413519B2 (en) 2006-02-07 2013-04-09 Compagnie Generale Des Etablissements Michelin Contact detector with piezoelectric sensor
US8800390B2 (en) 2006-02-07 2014-08-12 Michelin Recherche Et Technique S.A. Contact detector with piezoelectric sensor

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