JP2007180519A - 太陽電池素子の製造方法 - Google Patents
太陽電池素子の製造方法 Download PDFInfo
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- JP2007180519A JP2007180519A JP2006315439A JP2006315439A JP2007180519A JP 2007180519 A JP2007180519 A JP 2007180519A JP 2006315439 A JP2006315439 A JP 2006315439A JP 2006315439 A JP2006315439 A JP 2006315439A JP 2007180519 A JP2007180519 A JP 2007180519A
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- 238000005530 etching Methods 0.000 claims abstract description 102
- 238000007788 roughening Methods 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims description 162
- 239000007789 gas Substances 0.000 claims description 91
- 238000001020 plasma etching Methods 0.000 claims description 14
- 230000006378 damage Effects 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 230000009257 reactivity Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 112
- 239000010408 film Substances 0.000 description 32
- 239000012535 impurity Substances 0.000 description 30
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 28
- 238000009792 diffusion process Methods 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 13
- 238000001312 dry etching Methods 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 12
- 150000003254 radicals Chemical class 0.000 description 11
- 230000009471 action Effects 0.000 description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 10
- 238000009210 therapy by ultrasound Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000000460 chlorine Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 4
- 238000010306 acid treatment Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- -1 nitrogen ions Chemical class 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
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- 238000007639 printing Methods 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
【解決手段】第1のチャンバ内に太陽電池素子用の基体を配置し、第1のガスを供給して前記基体の一主面をエッチングすることで、エッチング残渣を付着させつつ前記一主面を粗面化する粗面化工程と、第2のチャンバの内部に前記基体を配置し、前記第1のガスより低反応性の第2のガスを供給し、前記第2のガスをプラズマ状態とすることによって、前記一主面に残存する前記エッチング残渣を除去する残渣除去工程と、を含むようにした。
【選択図】図1
Description
図1は本実施の形態に係る太陽電池素子の製造方法を用いて形成される太陽電池素子10の構成を概略的に示す断面模式図である。図1に示すように、太陽電池素子10は、表面側(受光面側)に表面凹凸構造2を有する半導体基板1と、半導体基板1の該表面側に形成されてなる表面側不純物拡散層3と、半導体基板1の裏面側に形成されてなる裏面側不純物拡散層(BSF)4と、反射防止膜5と、表面電極6と、取出電極7aと集電電極7bとからなる裏面電極7とから、主として構成される。
次に、本実施の形態に係る太陽電池素子の製造方法において特徴的である、表面凹凸構造2の形成について、詳細に説明する。
2:表面凹凸構造
3:表面不純物拡散層
4:裏面不純物拡散層
5:反射防止膜
6:表面電極
7:裏面電極
7a:取出電極
7b:集電電極
11:マスフローコントローラ
12:RF電極
13:圧力調整器
14:真空ポンプ
15:RF電源
16:アース
17:チャンバ
21:エッチング残渣
22:ピラー部
23:表面凹凸構造の突起部
Claims (8)
- 第1のチャンバ内に太陽電池素子用の基体を配置し、第1のガスを供給して前記基体の一主面をエッチングすることで、エッチング残渣を付着させつつ前記一主面を粗面化する粗面化工程と、
第2のチャンバの内部に前記基体を配置し、前記第1のガスより低反応性の第2のガスを供給し、前記第2のガスをプラズマ状態とすることによって、前記一主面に残存する前記エッチング残渣を除去する残渣除去工程と、
を含むことを特徴とする太陽電池素子の製造方法。 - 前記第1のチャンバと前記第2のチャンバとに、同一のチャンバを用いることを特徴とする請求項1に記載の太陽電池素子の製造方法。
- 前記粗面化工程と前記残渣除去工程との間に、前記チャンバの内部を真空引きする減圧工程を含むことを特徴とする請求項2に記載の太陽電池素子の製造方法。
- 前記粗面化工程は、反応性イオンエッチングにより行われることを特徴とする請求項1ないし請求項3のいずれかに記載の太陽電池素子の製造方法。
- 前記第2のガスが、1族から16族、及び18族に属する元素のうち少なくとも1種類以上の元素からなるガスであることを特徴とする請求項1ないし請求項4のいずれかに記載の太陽電池素子の製造方法。
- 前記第2のガスが、不活性ガスを含むことを特徴とする請求項5に記載の太陽電池素子の製造方法。
- 前記第2のガスが、酸素を含むことを特徴とする請求項5に記載の太陽電池素子の製造方法。
- 太陽電池素子用の基体を準備する工程と、
前記基体を第1のチャンバ内に配置する工程と、
前記第1のチャンバ内で第1のガスを用いた反応性イオンエッチングにより前記基体の一主面をエッチングする工程と、
前記一主面がエッチングされた前記基体を第2のチャンバの内部に配置する工程と、
前記第2のチャンバ内に前記第1のガスより低反応性の第2のガスを供給する工程と、
前記第2のガスをプラズマ状態として、前記エッチング工程によって前記一主面に残存するエッチング残渣を衝突破壊により除去する工程と、
を含むことを特徴とする太陽電池素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006315439A JP5064767B2 (ja) | 2005-11-29 | 2006-11-22 | 太陽電池素子の製造方法 |
US11/564,155 US20070128761A1 (en) | 2005-11-29 | 2006-11-28 | Manufacturing Method of Solar Cell Element |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2005343731 | 2005-11-29 | ||
JP2005343731 | 2005-11-29 | ||
JP2006315439A JP5064767B2 (ja) | 2005-11-29 | 2006-11-22 | 太陽電池素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007180519A true JP2007180519A (ja) | 2007-07-12 |
JP5064767B2 JP5064767B2 (ja) | 2012-10-31 |
Family
ID=38119291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006315439A Expired - Fee Related JP5064767B2 (ja) | 2005-11-29 | 2006-11-22 | 太陽電池素子の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20070128761A1 (ja) |
JP (1) | JP5064767B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012521078A (ja) * | 2009-03-17 | 2012-09-10 | アイメック | プラズマテクスチャ方法 |
KR20130068968A (ko) * | 2011-12-16 | 2013-06-26 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
JP2017017331A (ja) * | 2008-01-23 | 2017-01-19 | ゾルファイ フルーオル ゲゼルシャフト ミット ベシュレンクテル ハフツングSolvay Fluor GmbH | 太陽電池の製造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI449183B (zh) * | 2007-06-13 | 2014-08-11 | Schott Solar Ag | 半導體元件及製造金屬半導體接點之方法 |
KR20110138142A (ko) * | 2009-03-17 | 2011-12-26 | 로트 운트 라우 악치엔게젤샤프트 | 기판 처리 장치 및 기판 처리 방법 |
US20120178262A1 (en) * | 2009-09-18 | 2012-07-12 | Solvay Fluor Gmbh | Process for the manufacture of wafers for solar cells at ambient pressure |
CN101976703B (zh) * | 2010-07-28 | 2011-12-14 | 常州天合光能有限公司 | 降低表面复合减反膜电池的工艺 |
KR101624989B1 (ko) * | 2010-09-10 | 2016-05-27 | 주식회사 원익아이피에스 | 태양전지기판의 표면처리방법 및 태양전지 제조방법 |
KR20120110728A (ko) * | 2011-03-30 | 2012-10-10 | 한화케미칼 주식회사 | 태양 전지 및 이의 제조 방법 |
CN102751380A (zh) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | 一种太阳电池的制绒工艺 |
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2006
- 2006-11-22 JP JP2006315439A patent/JP5064767B2/ja not_active Expired - Fee Related
- 2006-11-28 US US11/564,155 patent/US20070128761A1/en not_active Abandoned
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