JP2007170958A5 - - Google Patents
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- Publication number
- JP2007170958A5 JP2007170958A5 JP2005368372A JP2005368372A JP2007170958A5 JP 2007170958 A5 JP2007170958 A5 JP 2007170958A5 JP 2005368372 A JP2005368372 A JP 2005368372A JP 2005368372 A JP2005368372 A JP 2005368372A JP 2007170958 A5 JP2007170958 A5 JP 2007170958A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- microchip
- glass
- manufacturing
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005422 blasting Methods 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005368372A JP4695977B2 (ja) | 2005-12-21 | 2005-12-21 | マイクロチップ及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005368372A JP4695977B2 (ja) | 2005-12-21 | 2005-12-21 | マイクロチップ及びその製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007170958A JP2007170958A (ja) | 2007-07-05 |
JP2007170958A5 true JP2007170958A5 (enrdf_load_stackoverflow) | 2008-12-11 |
JP4695977B2 JP4695977B2 (ja) | 2011-06-08 |
Family
ID=38297716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005368372A Expired - Fee Related JP4695977B2 (ja) | 2005-12-21 | 2005-12-21 | マイクロチップ及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4695977B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5137007B2 (ja) * | 2007-11-14 | 2013-02-06 | ローム株式会社 | マイクロチップ |
JP5974429B2 (ja) | 2011-07-20 | 2016-08-23 | ソニー株式会社 | 複合材料構造物及びその製造方法 |
JP5814054B2 (ja) * | 2011-09-26 | 2015-11-17 | 信越石英株式会社 | 微小中空流路を有する石英ガラス物品の製造方法 |
US10133156B2 (en) | 2012-01-10 | 2018-11-20 | Apple Inc. | Fused opaque and clear glass for camera or display window |
EP2859409B1 (en) * | 2012-06-08 | 2021-07-21 | Apple Inc. | Fused opaque and clear glass for camera or display window |
WO2016121929A1 (ja) * | 2015-01-30 | 2016-08-04 | 株式会社ニコン | 流体デバイス、温度制御装置、温度制御方法、核酸増幅装置および核酸増幅方法 |
JP7342839B2 (ja) * | 2020-10-27 | 2023-09-12 | 信越化学工業株式会社 | 合成石英ガラス基板の加工方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07114148B2 (ja) * | 1987-12-23 | 1995-12-06 | シャープ株式会社 | マイクロ波吸収発熱材料 |
JP4540160B2 (ja) * | 1999-12-27 | 2010-09-08 | 京セラ株式会社 | 黒色系焼結石英 |
JP4773035B2 (ja) * | 2000-06-28 | 2011-09-14 | スリーエム イノベイティブ プロパティズ カンパニー | 強化サンプル処理装置、システムおよび方法 |
SE0004297D0 (sv) * | 2000-11-23 | 2000-11-23 | Gyros Ab | Device for thermal cycling |
JP2004053345A (ja) * | 2002-07-18 | 2004-02-19 | Tosoh Quartz Corp | 平面型フローセル、その製造方法、及び測定方法 |
JP4411390B2 (ja) * | 2004-04-12 | 2010-02-10 | 独立行政法人産業技術総合研究所 | マイクロ液流制御方法及び制御装置 |
-
2005
- 2005-12-21 JP JP2005368372A patent/JP4695977B2/ja not_active Expired - Fee Related
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