FR2955852B1 - Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane - Google Patents

Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane

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Publication number
FR2955852B1
FR2955852B1 FR1050631A FR1050631A FR2955852B1 FR 2955852 B1 FR2955852 B1 FR 2955852B1 FR 1050631 A FR1050631 A FR 1050631A FR 1050631 A FR1050631 A FR 1050631A FR 2955852 B1 FR2955852 B1 FR 2955852B1
Authority
FR
France
Prior art keywords
vitroceramic
ceramic
glass
microcanal
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1050631A
Other languages
English (en)
Other versions
FR2955852A1 (fr
Inventor
Antoine Bisson
Thierry Dannoux
Anne Paris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to FR1050631A priority Critical patent/FR2955852B1/fr
Priority to EP11702124.6A priority patent/EP2528853B1/fr
Priority to US13/522,388 priority patent/US9573803B2/en
Priority to PCT/US2011/022849 priority patent/WO2011094486A2/fr
Priority to CN201180007136.XA priority patent/CN102762491B/zh
Publication of FR2955852A1 publication Critical patent/FR2955852A1/fr
Application granted granted Critical
Publication of FR2955852B1 publication Critical patent/FR2955852B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00824—Ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00831—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00858—Aspects relating to the size of the reactor
    • B01J2219/0086—Dimensions of the flow channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00873—Heat exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
FR1050631A 2010-01-29 2010-01-29 Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane Active FR2955852B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1050631A FR2955852B1 (fr) 2010-01-29 2010-01-29 Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane
EP11702124.6A EP2528853B1 (fr) 2010-01-29 2011-01-28 Assemblage de couches de verre plates sur couches structurées
US13/522,388 US9573803B2 (en) 2010-01-29 2011-01-28 Assembly of flat on structured glass layers
PCT/US2011/022849 WO2011094486A2 (fr) 2010-01-29 2011-01-28 Ensemble plat sur couches de verre structurées
CN201180007136.XA CN102762491B (zh) 2010-01-29 2011-01-28 在结构玻璃层上的平坦层的组件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1050631A FR2955852B1 (fr) 2010-01-29 2010-01-29 Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane

Publications (2)

Publication Number Publication Date
FR2955852A1 FR2955852A1 (fr) 2011-08-05
FR2955852B1 true FR2955852B1 (fr) 2015-09-18

Family

ID=43032959

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1050631A Active FR2955852B1 (fr) 2010-01-29 2010-01-29 Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane

Country Status (5)

Country Link
US (1) US9573803B2 (fr)
EP (1) EP2528853B1 (fr)
CN (1) CN102762491B (fr)
FR (1) FR2955852B1 (fr)
WO (1) WO2011094486A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10532354B2 (en) * 2013-07-16 2020-01-14 Vanderbilt University Multicompartment layered and stackable microfluidic bioreactors and applications of same
CN104144745B (zh) * 2011-11-30 2017-03-08 康宁股份有限公司 流体模块永久堆叠件组件和方法
US20140318706A1 (en) * 2011-11-30 2014-10-30 Corning Incorporated Method to align covers on structured layers and resulting devices
CA3006063A1 (fr) * 2015-11-24 2017-06-01 Vanderbilt University Bioreacteurs micro-fluidiques empilables et superposes a compartiments multiples et leurs applications
FR3051195B1 (fr) * 2016-05-11 2018-05-18 Universite Grenoble Alpes Puce de co-culture cellulaire et son procede de fabrication

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6600558B2 (en) 2000-08-22 2003-07-29 Nippon Telegraph And Telephone Corporation Micro-fluidic cell for optical detection of gases and method for producing same
US7044196B2 (en) * 2003-01-31 2006-05-16 Cooligy,Inc Decoupled spring-loaded mounting apparatus and method of manufacturing thereof
WO2004076056A2 (fr) * 2003-02-26 2004-09-10 Lake Shore Cryotronics Inc. Reacteur chimique microfluidique pour la fabrication de nanoparticules produites chimiquement
EP1547676A1 (fr) 2003-12-24 2005-06-29 Corning Incorporated Microdispositif avec avec membrane poreuse et son procédé de fabrication
WO2005090227A1 (fr) 2004-03-23 2005-09-29 Casio Computer Co., Ltd. Structure de pile et méthode de fabrication
DE102005041505B3 (de) 2005-09-01 2007-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Abformen von Strukturen
EP1979080A4 (fr) * 2005-12-31 2011-10-05 Corning Inc Capteurs de diaphragme en verre pour microreacteur
US20070154666A1 (en) * 2005-12-31 2007-07-05 Coonan Everett W Powder injection molding of glass and glass-ceramics
EP2266690A1 (fr) 2006-05-11 2010-12-29 Corning Incorporated Microréacteur à haut débit avec contrôle de température et procédés
ES2350653T3 (es) * 2007-02-28 2011-01-25 Corning Incorporated Método para fabricar dispositivos microfluídicos.
CN101580227B (zh) 2009-06-22 2011-04-27 浙江大学 带微凸台阵列结构的自热型醇类重整制氢微通道反应器

Also Published As

Publication number Publication date
FR2955852A1 (fr) 2011-08-05
WO2011094486A3 (fr) 2012-02-23
US9573803B2 (en) 2017-02-21
US20120288417A1 (en) 2012-11-15
WO2011094486A2 (fr) 2011-08-04
EP2528853A2 (fr) 2012-12-05
CN102762491A (zh) 2012-10-31
CN102762491B (zh) 2016-03-16
EP2528853B1 (fr) 2018-12-19

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