JP2007158184A - Solid photographing device - Google Patents

Solid photographing device Download PDF

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JP2007158184A
JP2007158184A JP2005353772A JP2005353772A JP2007158184A JP 2007158184 A JP2007158184 A JP 2007158184A JP 2005353772 A JP2005353772 A JP 2005353772A JP 2005353772 A JP2005353772 A JP 2005353772A JP 2007158184 A JP2007158184 A JP 2007158184A
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solid
state imaging
imaging device
package
package body
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JP4708175B2 (en
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Shin Hayasaka
伸 早坂
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Fujifilm Corp
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Fujifilm Corp
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<P>PROBLEM TO BE SOLVED: To prevent an bedewing more effectively in a solid photographing device, where its chip-form solid photographing element is sealed in an airtight manner by its sealing package. <P>SOLUTION: The sealing package 10 for sealing the solid photographing element 20, in an airtight manner comprises a package body 11, leads 12, and heat radiating plates 13. The package body 11 is formed in the shape of a recess to surround the top surface of the solid photographing element 20 which includes its light-receiving surface 21 so as to surround its respective side surfaces. Each lead 12 is fastened to each inner wall-surface of the package body 11 and is connected electrically with each electrode pad 22 of the solid photographic element 20. Each heat-radiating plate 13 is fastened to each inner wall-surface of the package body 11 and is abutted against a portion of the top surface of the solid photographic element 20, wherefrom its light-receiving surface 21 is excluded. The sealing package 10 seals in an airtight manner the solid photographic element 20 by filling a resin into the space between the solid photographic element 20 and the package body 11 wherefrom at least its light-receiving surface 21 is excluded. The heat-radiating plates 13 conduct the heat generated from the solid photographic element 20 to the package body 11 and reduces the temperature difference between the solid photographing element 20 and the sealing package 10. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、チップ状の固体撮像素子が封止パッケージによって気密封止されてなる固体撮像装置に関する。   The present invention relates to a solid-state imaging device in which a chip-shaped solid-state imaging device is hermetically sealed by a sealing package.

CCD(Charge Coupled Device)イメージセンサ等のチップ状の固体撮像素子を封止する封止方式として、気密封止方式がある。これは一般に、封止パッケージのベースとなるパッケージ本体に収納用の凹部を一体に形成し、この凹部の底面に、受光面が上向きとなるように固体撮像素子を固着したうえで、凹部の開口を塞ぐように、パッケージ本体に透明な蓋体(リッド)を接着剤を用いて接合することにより、封止を行うものである。   As a sealing method for sealing a chip-shaped solid-state imaging device such as a CCD (Charge Coupled Device) image sensor, there is an airtight sealing method. In general, a concave portion for storage is integrally formed on a package body that is a base of a sealed package, and a solid-state image sensor is fixed to the bottom surface of the concave portion so that a light receiving surface faces upward, and then the opening of the concave portion is formed. Sealing is performed by bonding a transparent lid (lid) to the package body using an adhesive so as to close the package.

ところで、このような気密封止方式の固体撮像装置では、固体撮像素子の受光面に結露が生じることが問題である。この結露の防止に関して、特許文献1において、リッドと受光面との間に透明樹脂を充填する技術が開示されているが、これでは、光の透過率が小さくなり、感度が低下するといった問題がある。   By the way, in such a hermetic sealing type solid-state imaging device, there is a problem that condensation occurs on the light receiving surface of the solid-state imaging element. Regarding the prevention of this dew condensation, Patent Document 1 discloses a technique of filling a transparent resin between the lid and the light receiving surface, but this causes a problem that the light transmittance is reduced and the sensitivity is lowered. is there.

そこで、その他の方法として、外部から封止空間内への水分の進入を防ぐ技術(特許文献2,3参照)や、発熱する固体撮像素子の温度を下げる技術(特許文献4参照)が提案されている。特許文献2では、パッケージ本体のリッドの接合部に凹凸を形成することで、接合面積を拡大し、耐湿性(外部からの水分の浸入を防止する性能)を向上させている。特許文献3では、パッケージ本体のリッドの接合部に、吸湿性接着剤と低透湿性接着剤を用いて接着を行うことで、耐湿性を向上させるとともに、封止空間内に残存する水分を減少させている。特許文献4では、パッケージ本体の外側面に、金属製放熱フィンを設けることで、固体撮像素子の温度を下げている。
特開平6−151643号公報 特開平10−247695号公報 特開平11−145337号公報 特開2004−146530号公報
Therefore, as other methods, a technique for preventing moisture from entering the sealed space from the outside (see Patent Documents 2 and 3) and a technique for reducing the temperature of the solid-state imaging element that generates heat (see Patent Document 4) are proposed. ing. In Patent Document 2, by forming irregularities in the joint portion of the lid of the package body, the joint area is expanded and the moisture resistance (performance to prevent the ingress of moisture from the outside) is improved. In Patent Document 3, the moisture resistance is improved and moisture remaining in the sealed space is reduced by bonding the lid of the package body using a hygroscopic adhesive and a low moisture-permeable adhesive. I am letting. In Patent Document 4, the temperature of the solid-state imaging device is lowered by providing a metal radiating fin on the outer surface of the package body.
Japanese Patent Laid-Open No. 6-151643 Japanese Patent Laid-Open No. 10-247695 JP-A-11-145337 JP 2004-146530 A

本発明は、上記従来文献に記載の技術に比して、より効果的に結露を防止することができる固体撮像装置を提供することを目的とする。   An object of the present invention is to provide a solid-state imaging device capable of preventing dew condensation more effectively than the technique described in the above-mentioned conventional document.

上記目的を達成するために、本発明の固体撮像装置は、矩形チップ状の固体撮像素子と、この固体撮像素子を気密封止する封止パッケージとを備えた固体撮像装置において、前記封止パッケージは、前記固体撮像素子の受光面を含む上面、およびその各側面を囲うように凹状に形成されたパッケージ本体と、このパッケージ本体に固着され、前記固体撮像素子の電極パッドに電気的に接続されるリードと、このパッケージ本体に固着され、前記受光面を除く前記固体撮像素子の上面の一部に当接する放熱板とを有し、少なくとも前記受光面を除いた前記固体撮像素子と前記パッケージ本体との間に樹脂を充填することにより前記固体撮像素子を気密封止していることを特徴とする。これにより、固体撮像素子と封止パッケージとの温度差が減少する。   In order to achieve the above object, the solid-state imaging device of the present invention is a solid-state imaging device comprising a rectangular chip-shaped solid-state imaging device and a sealed package for hermetically sealing the solid-state imaging device. Is an upper surface including the light receiving surface of the solid-state imaging device, and a package body formed in a concave shape so as to surround each side surface thereof, and is fixed to the package body and electrically connected to an electrode pad of the solid-state imaging device. And a heat sink fixed to the package body and contacting a part of the upper surface of the solid-state image sensor excluding the light-receiving surface, and at least the solid-state image sensor and the package body excluding the light-receiving surface The solid-state imaging device is hermetically sealed by filling a resin between the two. Thereby, the temperature difference between the solid-state imaging device and the sealed package is reduced.

なお、前記放熱板は、金属製であることが好ましい。また、前記放熱板は、前記受光部の周囲に当接するように形成された枠状部を備えることが好ましい。また、前記リードが実装基板に接合された際に、前記放熱板は、この実装基板に接触して熱を放出することが好ましい。これらにより、放熱性が高まる。   In addition, it is preferable that the said heat sink is metal. Moreover, it is preferable that the said heat sink is provided with the frame-shaped part formed so that it might contact | abut the circumference | surroundings of the said light-receiving part. Further, it is preferable that when the lead is bonded to the mounting substrate, the heat radiating plate contacts the mounting substrate and releases heat. These improve heat dissipation.

また、前記樹脂と接触する前記放熱板あるいは前記パッケージ本体の表面に、凹部が設けられていることが好ましい。これにより、樹脂とパッケージ本体との密着性が高まる。   Moreover, it is preferable that the recessed part is provided in the surface of the said heat sink which contacts the said resin, or the said package main body. Thereby, the adhesiveness of resin and a package main body increases.

また、前記樹脂は、前記固体撮像素子の裏面を覆っていることが好ましい。また、前記固体撮像素子の裏面を覆う前記樹脂の表面に、所定の情報が印字された印字板が貼り付けられていることが好ましい。   The resin preferably covers the back surface of the solid-state image sensor. Moreover, it is preferable that the printing board on which predetermined information was printed is affixed on the surface of the said resin which covers the back surface of the said solid-state image sensor.

また、前記固体撮像素子はCCDイメージセンサであって、前記放熱板は、出力アンプ上に当接していることが好ましい。出力アンプは発熱量が大きく、これにより、放熱性が高まる。   Further, it is preferable that the solid-state imaging device is a CCD image sensor, and the heat sink is in contact with an output amplifier. The output amplifier generates a large amount of heat, which increases heat dissipation.

本発明の固体撮像装置によれば、固体撮像素子と封止パッケージとの温度差を減少させ、結露を防止することができる。また、受光面から外部までのパスが固体撮像素子の側部を介するため長く、その側部には樹脂が充填されるので、結露の起因となる湿気の進入を低減することができる。さらに、放熱板は、固体撮像素子の上面に当接し、固体撮像素子の上下方向の取り付け位置基準板として機能するので、固体撮像素子の封止パッケージに対する取り付け精度を向上させることができる。   According to the solid-state imaging device of the present invention, it is possible to reduce the temperature difference between the solid-state imaging device and the sealed package and prevent condensation. In addition, since the path from the light receiving surface to the outside passes through the side portion of the solid-state imaging element, and the side portion is filled with resin, it is possible to reduce the ingress of moisture causing condensation. Furthermore, since the heat sink abuts on the upper surface of the solid-state imaging device and functions as a mounting position reference plate in the vertical direction of the solid-state imaging device, the mounting accuracy of the solid-state imaging device with respect to the sealed package can be improved.

図1において、矩形チップ状の固体撮像素子20を気密封止するための封止パッケージ10は、透明プラスティック製のパッケージ本体11と、パッケージ本体11に固着された複数のリード12および放熱板13とからなる。パッケージ本体11は、矩形平板状の上部と、これを取り囲む矩形平板状の4つの側部とからなる凹状の蓋部材であり、固体撮像素子20の受光面21を含む上面、およびその各側面を囲う。なお、パッケージ本体11の材質は、プラスティックに限られず、ガラスとしてもよい。また、パッケージ本体11は、光を受光面21に入射させるために、少なくとも受光面21に対向する部分が透明であれば、その他の部分は不透明であってもよい。   In FIG. 1, a sealed package 10 for hermetically sealing a rectangular chip-shaped solid-state imaging device 20 includes a package body 11 made of transparent plastic, a plurality of leads 12 and a heat radiating plate 13 fixed to the package body 11. Consists of. The package main body 11 is a concave lid member composed of a rectangular flat plate-shaped upper portion and four rectangular flat plate-shaped side portions surrounding the rectangular flat plate-shaped upper portion, and includes an upper surface including the light receiving surface 21 of the solid-state imaging device 20 and each side surface thereof. Enclose. The material of the package body 11 is not limited to plastic, and may be glass. The package body 11 may be opaque if at least a portion facing the light receiving surface 21 is transparent so that light enters the light receiving surface 21.

リード12は、金属製(銅合金系、ニッケル合金系など)であり、短冊状の基部12cと、基部12cに対してほぼ垂直に曲げ加工されたインナーリード部12aおよびアウターリード部12bとからなる。インナーリード部12aは、パッケージ本体11上部の内壁面に、基部12cは、パッケージ本体11側部の内壁面に、アウターリード部12bは、その下端面にそれぞれ固着されている。   The lead 12 is made of metal (copper alloy type, nickel alloy type, etc.), and includes a strip-like base portion 12c, and an inner lead portion 12a and an outer lead portion 12b that are bent substantially perpendicularly to the base portion 12c. . The inner lead portion 12a is fixed to the inner wall surface of the upper portion of the package body 11, the base portion 12c is fixed to the inner wall surface of the side of the package body 11, and the outer lead portion 12b is fixed to the lower end surface thereof.

放熱板13は、金属製(銅合金系、ニッケル合金系など)であり、矩形開口13aが形成された矩形状の枠状部13bと、枠状部13bに対してほぼ直角に曲げ加工された2つの側部13cと、各側部13cの端部に対してほぼ直角に曲げ加工された端部13dとからなる。枠状部13bは、パッケージ本体11上部の内壁面に、側部13cは、リード12が形成されていないパッケージ本体11側部の内壁面に、端部13dは、その下端面にそれぞれ固着されている。   The heat radiating plate 13 is made of metal (copper alloy type, nickel alloy type, etc.), and is bent at a substantially right angle to the rectangular frame-shaped part 13b in which the rectangular opening 13a is formed, and the frame-shaped part 13b. It consists of two side portions 13c and an end portion 13d bent at a substantially right angle with respect to the end portions of each side portion 13c. The frame portion 13b is fixed to the inner wall surface of the upper portion of the package body 11, the side portion 13c is fixed to the inner wall surface of the side of the package body 11 where the leads 12 are not formed, and the end portion 13d is fixed to the lower end surface thereof. Yes.

各リード12は、固体撮像素子20の上面に形成された各電極パッド22に対応するように配置されている。放熱板13は、固体撮像素子20の上面に形成された受光面21と電極パッド22とを除く部分に対応するように配置されており、矩形開口13aから受光面21を露呈させる。なお、固体撮像素子20は、シリコン製の半導体チップであり、撮像素子として、CCDイメージセンサやCMOSイメージセンサなどが構成されている。   Each lead 12 is disposed so as to correspond to each electrode pad 22 formed on the upper surface of the solid-state imaging device 20. The heat radiating plate 13 is disposed so as to correspond to a portion excluding the light receiving surface 21 and the electrode pad 22 formed on the upper surface of the solid-state imaging device 20, and exposes the light receiving surface 21 from the rectangular opening 13a. The solid-state imaging device 20 is a silicon semiconductor chip, and a CCD image sensor, a CMOS image sensor, or the like is configured as the imaging device.

図2は、固体撮像素子20を封止パッケージ10によって気密封止してなるパッケージユニット(固体撮像装置)2の断面を示す。図2(A)は、図1のX方向に沿う縦断面図であり、図2(B)は、図1のY方向に沿う縦断面図である。   FIG. 2 shows a cross section of a package unit (solid-state imaging device) 2 formed by hermetically sealing the solid-state imaging element 20 with a sealing package 10. 2A is a vertical cross-sectional view along the X direction in FIG. 1, and FIG. 2B is a vertical cross-sectional view along the Y direction in FIG.

固体撮像素子20は、電極パッド22が導電性接着剤30を介してインナーリード部12aにボンディングされることによって封止パッケージ10内に固着されるとともに、固体撮像素子20の上面は、放熱板13の枠状部13bに当接している。固体撮像素子20と封止パッケージ10との間(少なくとも受光面21を除く)には、樹脂31が充填されており、この樹脂31は、固体撮像素子20の裏面も覆っている。この固体撮像素子20の裏面側には、樹脂31を介して、所定の情報(製品名、ロット番号、ウエハ番号など)が印字(マーキング)されたプラスティック製または金属製の印字板32が貼り付けられている。なお、樹脂31は、湿気の進入を防止するために、低透湿性樹脂であることが好ましい。   The solid-state imaging device 20 is fixed in the sealed package 10 by bonding the electrode pad 22 to the inner lead portion 12a via the conductive adhesive 30, and the upper surface of the solid-state imaging device 20 is disposed on the heat radiating plate 13. Is in contact with the frame-like portion 13b. A resin 31 is filled between the solid-state imaging device 20 and the sealed package 10 (at least excluding the light receiving surface 21). The resin 31 also covers the back surface of the solid-state imaging device 20. A plastic or metal printing plate 32 on which predetermined information (product name, lot number, wafer number, etc.) is printed (marked) is attached to the back surface side of the solid-state imaging device 20 through a resin 31. It has been. The resin 31 is preferably a low moisture-permeable resin in order to prevent moisture from entering.

アウターリード部12bは、外部に露呈しており、パッケージユニット2の外部端子として機能する。アウターリード部12bは、パッケージユニット2を所定の実装基板(不図示)に実装する際に半田付け等で接続される。また、放熱板13の端部13dも外部に露呈しており、パッケージユニット2が実装基板に実装された際に、端部13dは実装基板に接触する。   The outer lead portion 12 b is exposed to the outside and functions as an external terminal of the package unit 2. The outer lead portion 12b is connected by soldering or the like when the package unit 2 is mounted on a predetermined mounting substrate (not shown). Further, the end 13d of the heat radiating plate 13 is also exposed to the outside, and when the package unit 2 is mounted on the mounting board, the end 13d contacts the mounting board.

パッケージユニット2は、撮像動作によって固体撮像素子20に生じた熱を放熱板13を介してパッケージ本体11に伝えるとともに、この熱は放熱板13を介して実装基板に放出されるので、固体撮像素子20と封止パッケージ10との温度差を減少させ、結露を防止することができる。また、受光面21から外部までのパスが固体撮像素子20の側部を介するため長く、そのパスには樹脂31が充填されているので、受光面21上へ湿気が進入しにくい。この構造も結露の防止に寄与する。   Since the package unit 2 transmits heat generated in the solid-state image pickup device 20 by the image pickup operation to the package body 11 through the heat radiating plate 13, and this heat is released to the mounting substrate through the heat radiating plate 13, the solid-state image pickup device. The temperature difference between 20 and the sealed package 10 can be reduced, and condensation can be prevented. Further, the path from the light receiving surface 21 to the outside is long because it passes through the side portion of the solid-state imaging device 20, and the path is filled with the resin 31, so moisture hardly enters the light receiving surface 21. This structure also contributes to prevention of condensation.

また、放熱板13の枠状部13bは、図2(A)のように、リード12のインナーリード部12aより厚く形成されており、固体撮像素子20を取り付ける際にその上面に当接するので、放熱板13は、固体撮像素子20の上下方向の取り付け位置基準板として機能する。これにより、上下方向の取り付け精度が向上し、固体撮像素子20の封止パッケージ10に対する平坦性(チップ平坦度)が向上する。   Further, as shown in FIG. 2A, the frame-like portion 13b of the heat radiating plate 13 is formed to be thicker than the inner lead portion 12a of the lead 12, and contacts the upper surface when the solid-state imaging device 20 is attached. The heat sink 13 functions as an attachment position reference plate in the vertical direction of the solid-state image sensor 20. Thereby, the mounting accuracy in the vertical direction is improved, and the flatness (chip flatness) of the solid-state imaging device 20 with respect to the sealed package 10 is improved.

なお、放熱板13は、光の反射を防止し、不要光が受光面21に入射することのないように、黒色または表面が黒色にコーティングされたものであることが好ましい。また、固体撮像素子20がCCDイメージセンサとして構成されている場合、撮像動作時の発熱量は、信号電荷を電圧信号に変換する出力アンプ(不図示)が最も大きいため、放熱板13は、少なくともこの出力アンプ上に当接するように配置されていることが好ましい。   In addition, it is preferable that the heat sink 13 is black or the surface is coated with black so that reflection of light is prevented and unnecessary light does not enter the light receiving surface 21. When the solid-state imaging device 20 is configured as a CCD image sensor, the amount of heat generated during the imaging operation is the largest in an output amplifier (not shown) that converts a signal charge into a voltage signal. It is preferable to be disposed so as to abut on the output amplifier.

また、図3は、樹脂31に接触する放熱板13の表面に、凹部33を設けた例を示す。この凹部33により、放熱板13と樹脂31との密着性が向上する。凹部33の外形は、円形、矩形、溝状などの適宜形状であってよい。また、凹部33は、樹脂31に接触する部分であれば、パッケージ本体11の表面に設けてもよい。   FIG. 3 shows an example in which a recess 33 is provided on the surface of the heat dissipation plate 13 in contact with the resin 31. The recess 33 improves the adhesion between the heat radiating plate 13 and the resin 31. The outer shape of the recess 33 may be an appropriate shape such as a circle, a rectangle, or a groove. The recess 33 may be provided on the surface of the package body 11 as long as it is a part that contacts the resin 31.

次に、図4を用いてパッケージユニット2の製造方法(固体撮像素子20の封止方法)を説明する。図4(A)に示すように、まず、封止パッケージ10を、開口部を上向きにした状態で、リード12のインナーリード部12aに導電性接着剤30を塗布する。次いで、図4(B)に示すように、固体撮像素子20の受光面21を下向きにして、電極パッド22をインナーリード部12aに対応させるようにアライメントしながら、封止パッケージ10内に積載する。このとき、固体撮像素子20の表面は、放熱板13の枠状部13bに当接する。   Next, a method for manufacturing the package unit 2 (a method for sealing the solid-state imaging element 20) will be described with reference to FIG. As shown in FIG. 4A, first, a conductive adhesive 30 is applied to the inner lead portion 12a of the lead 12 with the opening of the sealed package 10 facing upward. Next, as shown in FIG. 4B, the light receiving surface 21 of the solid-state imaging device 20 faces downward, and the electrode pads 22 are stacked in the sealed package 10 while being aligned so as to correspond to the inner lead portions 12a. . At this time, the surface of the solid-state imaging device 20 comes into contact with the frame-like portion 13 b of the heat radiating plate 13.

次いで、導電性接着剤30を硬化させ、固体撮像素子20を封止パッケージ10に固着させた後、図4(C)に示すように、固体撮像素子20と封止パッケージ10との間(少なくとも受光面21を除く)を埋めるとともに、固体撮像素子20の裏面を覆うように、樹脂31を充填し、さらに、充填された樹脂31の表面に、印字板32を貼り付ける。そして、樹脂31を硬化させた後、レーザやインクなどで印字板32に印字を行う。   Next, after the conductive adhesive 30 is cured and the solid-state imaging device 20 is fixed to the sealed package 10, as shown in FIG. 4C, the solid-state imaging device 20 and the sealed package 10 are at least (at least The resin 31 is filled so as to cover the back surface of the solid-state imaging device 20 and the printing plate 32 is attached to the surface of the filled resin 31. Then, after the resin 31 is cured, printing is performed on the printing plate 32 with a laser or ink.

この方法では、工程の早い段階で、固体撮像素子20の受光面21が気密封止されるので、受光面21上への塵埃の混入が低減し、工程起因のキズなどが防止される。   In this method, the light-receiving surface 21 of the solid-state imaging device 20 is hermetically sealed at an early stage of the process, so that dust contamination on the light-receiving surface 21 is reduced and scratches caused by the process are prevented.

なお、上記実施形態では、インナーリード部12aと電極パッド22とを導電性接着剤30を用いて接合しているが、これに限定されず、半田などを用いて接合を行ってもよい。   In the above embodiment, the inner lead portion 12a and the electrode pad 22 are bonded using the conductive adhesive 30, but the present invention is not limited to this, and bonding may be performed using solder or the like.

また、この接合に、異方性導電接着剤を用いることも効果的である。図4(A)での導電性接着剤30の塗布に代えて、図5に示す領域40に、複数のインナーリード部12aをまたぐように異方性導電接着剤し、図4(B)と同様にして、インナーリード部12a上に、異方性導電接着剤を介して電極パッド22を押し付ける。この押圧によって、異方性導電接着剤は上下方向に導電性が発生し、対応するインナーリード部12aと電極パッド22とを導通させる。異方性導電接着剤は横方向には導電性を有さないので、インナーリード部12a間、または電極パッド22間をショートさせることはない。異方性導電接着剤を用いることにより、上記の接着剤の塗布工程が簡単化される。   It is also effective to use an anisotropic conductive adhesive for this joining. Instead of applying the conductive adhesive 30 in FIG. 4A, an anisotropic conductive adhesive is applied to the region 40 shown in FIG. 5 so as to straddle the plurality of inner lead portions 12a. Similarly, the electrode pad 22 is pressed onto the inner lead portion 12a via an anisotropic conductive adhesive. By this pressing, the anisotropic conductive adhesive is conductive in the vertical direction, and the corresponding inner lead portion 12a and the electrode pad 22 are electrically connected. Since the anisotropic conductive adhesive does not have conductivity in the lateral direction, the inner lead portions 12a or the electrode pads 22 are not short-circuited. By using an anisotropic conductive adhesive, the above-described adhesive application process is simplified.

また、上記異方性導電接着剤に代えて、厚さ方向にのみ導電性を有する異方性導電性テープを用いることも効果的である。この異方性導電性テープを図5に示す領域40に、複数のインナーリード部12aをまたぐように貼り付け、電極パッド22上に半田などでバンプを形成した固体撮像素子20を押圧すればよい。   It is also effective to use an anisotropic conductive tape having conductivity only in the thickness direction in place of the anisotropic conductive adhesive. This anisotropic conductive tape may be attached to the region 40 shown in FIG. 5 so as to straddle the plurality of inner lead portions 12a, and the solid-state imaging device 20 having bumps formed on the electrode pads 22 with solder or the like may be pressed. .

さらに、放熱板13と固体撮像素子20との接触性および放熱性を確実にするために、固体撮像素子20の上面に当接する枠状部13bの表面に異方性導電性テープを貼り付けてもよい。また、枠状部13bの表面に、熱伝導性および低透湿性を有する絶縁性接着剤を塗布することも効果的である。   Furthermore, in order to ensure the contact and heat dissipation between the heat sink 13 and the solid-state image sensor 20, an anisotropic conductive tape is attached to the surface of the frame-like portion 13b that contacts the upper surface of the solid-state image sensor 20. Also good. It is also effective to apply an insulating adhesive having thermal conductivity and low moisture permeability to the surface of the frame portion 13b.

また、上記実施形態では、固体撮像素子20の裏面側に印字板32を設けているが、印字板32は必ずしも設ける必要はない。印字板32を設けない場合には、充填された樹脂31の表面にレーザなどで直接印字を行えばよい。   Moreover, in the said embodiment, although the printing board 32 is provided in the back surface side of the solid-state image sensor 20, the printing board 32 does not necessarily need to be provided. When the printing plate 32 is not provided, printing may be performed directly on the surface of the filled resin 31 with a laser or the like.

また、上記実施形態では、リード12および放熱板13を、封止パッケージ10の内壁に沿って配置し、封止パッケージ10の下端部を基板との実装面としているが、リード12および放熱板13の形状、およびパッケージ本体11への配置方式は適宜変更してよい。   Moreover, in the said embodiment, although the lead | read | reed 12 and the heat sink 13 are arrange | positioned along the inner wall of the sealing package 10, and the lower end part of the sealing package 10 is made into the mounting surface with a board | substrate, the lead 12 and the heat sink 13 The shape and the arrangement method on the package body 11 may be changed as appropriate.

図6は、リード12および放熱板13の変形例であり、リード12の基部12cと、放熱板13の側部13cとを封止パッケージ10の外面に露呈させたものである。以上は、表面実装型パッケージを例示しているが、さらに、図7は、リード12のアウターリード部12bを下向きに真っ直ぐ伸ばした、挿入実装型パッケージの一種であるDIP(Dual Inline Package)を例示している。   FIG. 6 shows a modification of the lead 12 and the heat radiating plate 13 in which the base portion 12 c of the lead 12 and the side portion 13 c of the heat radiating plate 13 are exposed on the outer surface of the sealed package 10. The above is an example of a surface mount package, and FIG. 7 further illustrates a DIP (Dual Inline Package), which is a type of insertion mount package, in which the outer lead portion 12b of the lead 12 is straightened downward. is doing.

固体撮像素子およびその封止パッケージの外観斜視図である。It is an external appearance perspective view of a solid-state image sensor and its sealing package. パッケージユニットの縦断面図であり、(A)は図1のX方向に沿う断面、(B)は図1のY方向に沿う断面を示す。It is a longitudinal cross-sectional view of a package unit, (A) shows the cross section which follows the X direction of FIG. 1, (B) shows the cross section which follows the Y direction of FIG. 放熱板の表面に凹部を設けた例を示す断面図である。It is sectional drawing which shows the example which provided the recessed part in the surface of the heat sink. パッケージユニットの製造方法を説明する断面図であり、(A)は接着剤の塗布工程、(B)は固体撮像素子のアライメント工程、(C)は樹脂の充填工程を示す。It is sectional drawing explaining the manufacturing method of a package unit, (A) shows the application | coating process of an adhesive agent, (B) shows the alignment process of a solid-state image sensor, (C) shows the filling process of resin. 異方性導電接着剤の塗布領域、および異方性導電テープの貼着領域を示す斜視図である。It is a perspective view which shows the application | coating area | region of an anisotropic conductive adhesive, and the sticking area | region of an anisotropic conductive tape. リードおよび放熱板を封止パッケージの外側面に露呈させた例を示す縦断面図であり、(A)は図1のX方向に沿う断面、(B)は図1のY方向に沿う断面を示す。It is a longitudinal cross-sectional view which shows the example which exposed the lead | read | reed and the heat sink to the outer surface of the sealing package, (A) is a cross section in the X direction of FIG. 1, (B) is a cross section in the Y direction of FIG. Show. リードのアウターリード部を下向きに伸ばした例を示す縦断面図であり、(A)は図1のX方向に沿う断面、(B)は図1のY方向に沿う断面を示す。It is a longitudinal cross-sectional view which shows the example which extended the outer lead part of the lead | read | reed downward, (A) is a cross section along the X direction of FIG. 1, (B) shows the cross section along the Y direction of FIG.

符号の説明Explanation of symbols

2 パッケージユニット(固体撮像装置)
10 封止パッケージ
11 パッケージ本体
12 リード
12a インナーリード部
12b アウターリード部
12c 基部
13 放熱板
13a 矩形開口
13b 枠状部
13c 側部
13d 端部
20 固体撮像素子
21 受光面
22 電極パッド
30 導電性接着剤
31 樹脂
32 印字板
33 凹部
2 Package unit (solid-state imaging device)
DESCRIPTION OF SYMBOLS 10 Sealing package 11 Package body 12 Lead 12a Inner lead part 12b Outer lead part 12c Base part 13 Heat sink 13a Rectangular opening 13b Frame-like part 13c Side part 13d End part 20 Solid-state image sensor 21 Light-receiving surface 22 Electrode pad 30 Conductive adhesive 31 Resin 32 Printing board 33 Recess

Claims (8)

矩形チップ状の固体撮像素子と、この固体撮像素子を気密封止する封止パッケージとを備えた固体撮像装置において、
前記封止パッケージは、前記固体撮像素子の受光面を含む上面、およびその各側面を囲うように凹状に形成されたパッケージ本体と、このパッケージ本体に固着され、前記固体撮像素子の電極パッドに電気的に接続されるリードと、このパッケージ本体に固着され、前記受光面を除く前記固体撮像素子の上面の一部に当接する放熱板とを有し、少なくとも前記受光面を除いた前記固体撮像素子と前記パッケージ本体との間に樹脂を充填することにより前記固体撮像素子を気密封止していることを特徴とする固体撮像装置。
In a solid-state imaging device comprising a rectangular chip-shaped solid-state imaging device and a sealing package for hermetically sealing the solid-state imaging device,
The sealed package includes an upper surface including a light receiving surface of the solid-state imaging device, a package body formed in a concave shape so as to surround each side surface thereof, and is fixed to the package body, and is electrically connected to an electrode pad of the solid-state imaging device. Connected to the package main body, and a heat radiating plate fixed to the package body and abutting on a part of the upper surface of the solid-state image sensor excluding the light-receiving surface, and at least the solid-state image sensor excluding the light-receiving surface A solid-state image pickup device, wherein the solid-state image pickup element is hermetically sealed by filling a resin between the main body and the package body.
前記放熱板は、金属製であることを特徴とする請求項1記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein the heat radiating plate is made of metal. 前記放熱板は、前記受光部の周囲に当接するように形成された枠状部を備えることを特徴とする請求項1または2記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein the heat radiating plate includes a frame-like portion formed so as to abut on the periphery of the light receiving portion. 前記リードが実装基板に接合された際に、前記放熱板は、この実装基板に接触して熱を放出することを特徴とする請求項1ないし3いずれか記載の固体撮像装置。   4. The solid-state imaging device according to claim 1, wherein when the lead is bonded to the mounting substrate, the heat dissipation plate contacts the mounting substrate and emits heat. 5. 前記樹脂と接触する前記放熱板あるいは前記パッケージ本体の表面に、凹部が設けられていることを特徴とする請求項1ないし4いずれか記載の固体撮像装置。   5. The solid-state imaging device according to claim 1, wherein a concave portion is provided on a surface of the heat radiating plate or the package main body that is in contact with the resin. 前記樹脂は、前記固体撮像素子の裏面を覆っていることを特徴とする請求項1ないし5いずれか記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein the resin covers a back surface of the solid-state imaging element. 前記固体撮像素子の裏面を覆う前記樹脂の表面に、所定の情報が印字された印字板が貼り付けられていることを特徴とする請求項6記載の固体撮像装置。   The solid-state imaging device according to claim 6, wherein a printing plate on which predetermined information is printed is attached to a surface of the resin that covers a back surface of the solid-state imaging element. 前記固体撮像素子はCCDイメージセンサであって、前記放熱板は、出力アンプ上に当接していることを特徴とする請求項1ないし7いずれか記載の固体撮像装置。   8. The solid-state image pickup device according to claim 1, wherein the solid-state image pickup element is a CCD image sensor, and the heat radiating plate is in contact with an output amplifier.
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JP2012238666A (en) * 2011-05-10 2012-12-06 Seiko Instruments Inc Optical sensor and method for manufacturing optical sensor
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Publication number Priority date Publication date Assignee Title
JP2011198863A (en) * 2010-03-17 2011-10-06 Nikon Corp Solid-state imaging device
JP2012238666A (en) * 2011-05-10 2012-12-06 Seiko Instruments Inc Optical sensor and method for manufacturing optical sensor
JP2018050031A (en) * 2016-07-28 2018-03-29 フラウンホーファー−ゲゼルシャフト・ツール・フェルデルング・デル・アンゲヴァンテン・フォルシュング・アインゲトラーゲネル・フェライン Patterned layer composite material

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