JP2006319124A - Solid state imaging apparatus - Google Patents

Solid state imaging apparatus Download PDF

Info

Publication number
JP2006319124A
JP2006319124A JP2005140115A JP2005140115A JP2006319124A JP 2006319124 A JP2006319124 A JP 2006319124A JP 2005140115 A JP2005140115 A JP 2005140115A JP 2005140115 A JP2005140115 A JP 2005140115A JP 2006319124 A JP2006319124 A JP 2006319124A
Authority
JP
Japan
Prior art keywords
solid
state imaging
imaging device
flexible wiring
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005140115A
Other languages
Japanese (ja)
Inventor
Shin Hayasaka
伸 早坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP2005140115A priority Critical patent/JP2006319124A/en
Publication of JP2006319124A publication Critical patent/JP2006319124A/en
Pending legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To improve the heat dissipation characteristics of a solid state imaging device chip. <P>SOLUTION: In a solid state imaging apparatus 1 wherein the solid state imaging device chip 2 is contained in a box-shaped package 3, the solid state imaging device chip 2 is pinched by a bent flexible wiring board 6, and the flexible wiring board 6 is stuck on the inside of the box-shaped package 3. The solid state imaging device chip 2 and lead terminals 5 of the box-shaped package 3 are electrically connected using lead wiring 7 of the flexible wiring board 6. Thus, the lead wiring 7 can be utilized not only as the electric connection but also as the heat dissipation path for the chip 2, so that the heat dissipation characteristics of the chip is improved. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は固体撮像素子チップを箱形パッケージ内に収納した固体撮像装置に係り、特に、固体撮像素子チップの放熱性能の向上を図った固体撮像装置に関する。   The present invention relates to a solid-state image pickup device in which a solid-state image pickup device chip is housed in a box-shaped package, and more particularly to a solid-state image pickup device that improves heat dissipation performance of the solid-state image pickup device chip.

下記特許文献1,2に記載されている固体撮像装置は、中央部に窓が設けられたフレキシブル配線基板の前記窓を挟んで固体撮像素子チップの受光面とガラス基板とを対面させ、固体撮像素子チップの受光面周辺部分に設けられた電極パッドをフレキシブル配線基板の配線に接続すると共に封止樹脂にて両者間を密着させ、フレキシブル配線基板とその背面側に配置されたガラス基板とを接着剤で密着させ、固体撮像素子チップをパッケージ化している。   The solid-state imaging devices described in the following Patent Documents 1 and 2 are configured so that the light-receiving surface of the solid-state imaging device chip and the glass substrate face each other with the window of the flexible wiring board provided with a window at the center. The electrode pads provided on the periphery of the light receiving surface of the element chip are connected to the wiring of the flexible wiring board, and the two are adhered to each other with a sealing resin, and the flexible wiring board and the glass substrate disposed on the back side thereof are bonded. The solid-state image sensor chip is packaged by closely adhering with an agent.

斯かる構造の固体撮像装置は、構造が簡易なため安価に製造できるという利点を持つが、固体撮像素子チップが外部に露出するため、固体撮像素子チップが衝撃で破損しないように取り扱う必要がある。このため、通常は、下記特許文献3に記載されている様に、固体撮像素子チップを樹脂内に封止したり、箱形パッケージ内に収納したりするのが普通である。   The solid-state imaging device having such a structure has an advantage that the structure is simple and can be manufactured at a low cost. However, since the solid-state imaging device chip is exposed to the outside, it is necessary to handle the solid-state imaging device chip so as not to be damaged by impact. . For this reason, normally, as described in Patent Document 3 below, the solid-state imaging device chip is usually sealed in a resin or housed in a box-shaped package.

特開平7―99214号公報JP-A-7-99214 特開平8―148666号公報JP-A-8-148666 特開平6―132441号公報JP-A-6-132441

近年の固体撮像素子は高画素化(多画素化)が進展すると共に動作クロックの高周波化が進み、発熱量が増大してきている。このため、固体撮像素子チップを箱形パッケージ内に収納する構造を採用したとき、固体撮像素子チップの発熱を効率的にパッケージやパッケージ外部に熱伝導させ固体撮像素子チップの冷却を図る必要がある。   In recent years, solid-state imaging devices have increased in number of pixels (multiple pixels) and have increased in operation clock frequency, and the amount of heat generation has increased. For this reason, when the structure in which the solid-state image sensor chip is housed in the box-shaped package is adopted, it is necessary to efficiently conduct heat generated from the solid-state image sensor chip to the package or the outside of the package to cool the solid-state image sensor chip. .

本発明の目的は、固体撮像素子チップの発熱を効率的に放熱することができる固体撮像装置を提供することにある。   An object of the present invention is to provide a solid-state imaging device capable of efficiently dissipating heat generated by a solid-state imaging element chip.

本発明の固体撮像装置は、箱形パッケージ内に固体撮像素子チップを収納した固体撮像装置において、折り曲げたフレキシブル配線基板により前記固体撮像素子チップを挟み該フレキシブル配線基板を前記箱形パッケージ内に貼り付け該フレキシブル配線基板のリード配線を用いて前記固体撮像素子チップと該箱形パッケージのリード端子とを電気接続したことを特徴とする。   The solid-state imaging device of the present invention is a solid-state imaging device in which a solid-state imaging device chip is housed in a box-shaped package, and the flexible wiring substrate is attached to the box-shaped package by sandwiching the solid-state imaging device chip between folded flexible wiring substrates. The solid-state imaging device chip and the lead terminal of the box-shaped package are electrically connected using the lead wiring of the flexible wiring board.

本発明の固体撮像装置の前記フレキシブル配線基板には前記固体撮像素子チップの受光面に整合する貫通窓が設けられ前記リード配線が前記受光面の周囲に設けられた電極パッドに電気接続されることを特徴とする。   The flexible wiring board of the solid-state imaging device of the present invention is provided with a through window that matches the light-receiving surface of the solid-state imaging element chip, and the lead wiring is electrically connected to an electrode pad provided around the light-receiving surface. It is characterized by.

本発明の固体撮像装置は、前記フレキシブル配線基板の前記箱形パッケージ内への貼り付け面に開口が設けられることを特徴とする。   The solid-state imaging device according to the present invention is characterized in that an opening is provided on a surface where the flexible wiring board is attached to the box package.

本発明の固体撮像装置の前記フレキシブル配線基板の表裏の両面に粘着材が塗布されていることを特徴とする。   The adhesive material is apply | coated to both the front and back of the said flexible wiring board of the solid-state imaging device of this invention, It is characterized by the above-mentioned.

本発明の固体撮像装置の前記リード配線の線幅が前記固体撮像素子チップに設けられた電極パッドと同程度であることを特徴とする。   The line width of the lead wiring of the solid-state imaging device of the present invention is approximately the same as the electrode pad provided on the solid-state imaging device chip.

本発明の固体撮像装置の前記フレキシブル配線基板の前記固体撮像素子チップ裏面に接触する部分のうち該固体撮像素子チップに形成されているアンプ部に対応する部分に表裏を貫通する金属板が設けられていることを特徴とする。   In the solid-state imaging device according to the present invention, a metal plate penetrating the front and back is provided in a portion corresponding to the amplifier portion formed on the solid-state imaging element chip in the portion of the flexible wiring board that contacts the back surface of the solid-state imaging element chip. It is characterized by.

本発明によれば、従来のワイヤーボンディングによる電気接続と比較して、フレキシブル配線基板内のリード配線を固体撮像素子チップの放熱路としても利用でき、固体撮像素子チップの冷却性能の向上を図ることが可能となる。また、ワイヤーボンディングが不要となり、このためインナーリードも不要となるため、固体撮像装置の製造コストの低減と装置の小型化も達成できる。   According to the present invention, compared with the conventional electrical connection by wire bonding, the lead wiring in the flexible wiring board can be used as a heat radiation path of the solid-state image sensor chip, and the cooling performance of the solid-state image sensor chip is improved. Is possible. Further, since wire bonding is not required and inner leads are not required, the manufacturing cost of the solid-state imaging device can be reduced and the size of the device can be reduced.

以下、本発明の一実施形態について、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図1は、本発明の一実施形態に係る固体撮像装置の断面模式図である。本実施形態に係る固体撮像装置1は、固体撮像素子チップ2と、開口を有し内部に固体撮像素子チップ2を収納する箱形のセラミック製パッケージ3と、パッケージ3の開口を密閉する透明ガラス板4とを備える。尚、本実施形態で用いる固体撮像素子はCCD型(水平転送路の出力段にフローティングディフュージョンアンプが有るもの)を想定しているが、CMOS型などの他の型式の固体撮像素子にも本発明を適用可能である。   FIG. 1 is a schematic cross-sectional view of a solid-state imaging device according to an embodiment of the present invention. A solid-state imaging device 1 according to the present embodiment includes a solid-state imaging device chip 2, a box-shaped ceramic package 3 that has an opening and accommodates the solid-state imaging device chip 2, and a transparent glass that seals the opening of the package 3. A plate 4. The solid-state image pickup device used in the present embodiment is assumed to be a CCD type (having a floating diffusion amplifier at the output stage of the horizontal transfer path), but the present invention also applies to other types of solid-state image pickup devices such as a CMOS type. Is applicable.

セラミック製パッケージ3の底面部には複数のアウターリード端子5が形成されており、各アウターリード端子5の端部がパッケージ3の外側に露出する様に延設されている。固体撮像素子チップ2を挟むように折り曲げられ固体撮像素子チップ2に密着されたフレキシブル配線基板6がパッケージ3内に収納されることで、固体撮像素子チップ2の表面に設けられた電極パッド2aがフレキシブル配線基板6内のリード配線7を通してアウターリード端子5に電気的に接続される構成になっている。   A plurality of outer lead terminals 5 are formed on the bottom surface of the ceramic package 3, and the end portions of the outer lead terminals 5 are extended so as to be exposed to the outside of the package 3. The flexible wiring board 6 that is bent so as to sandwich the solid-state image sensor chip 2 and is in close contact with the solid-state image sensor chip 2 is housed in the package 3, so that the electrode pads 2 a provided on the surface of the solid-state image sensor chip 2 are formed. The lead wire 7 in the flexible wiring board 6 is electrically connected to the outer lead terminal 5 through the lead wire 7.

図2は、折り曲げてない状態のフレキシブル配線基板6の断面模式図であり、図3は、フレキシブル配線基板6の底面模式図である。尚、図3では、リード配線7はフレキシブル配線基板6の内部に設けられるため本来は点線で図示すべきであるが、パターンを明示するために実線で表示する(以下、図4,図5,図6,図7も同様である。)。   FIG. 2 is a schematic cross-sectional view of the flexible wiring board 6 that is not bent, and FIG. 3 is a schematic bottom view of the flexible wiring board 6. In FIG. 3, since the lead wiring 7 is provided inside the flexible wiring board 6, it should be illustrated with a dotted line, but it is displayed with a solid line to clearly indicate the pattern (hereinafter, FIG. 4, FIG. The same applies to FIGS. 6 and 7.)

シート状に形成された黒色の絶縁材でなるフレキシブル配線基板6の所定位置には、固体撮像素子チップ2の受光面に整合する貫通窓11と、折り曲げられたとき貫通窓11とほぼ整合する貫通窓12とが穿設されている。   At a predetermined position of the flexible wiring board 6 made of a black insulating material formed in a sheet shape, a through window 11 that matches the light receiving surface of the solid-state imaging device chip 2 and a through hole that substantially matches the through window 11 when folded. A window 12 is drilled.

フレキシブル配線基板6内には金属製の多数のリード配線7が設けられており、各リード配線7は、フレキシブル配線基板6の表面に露出する端部7aとフレキシブル配線基板6の裏面に露出する端部7bを有する。各端部7aは貫通窓11の周りに配置され、各端部7bは貫通窓12の周りに配置される。また、フレキシブル配線基板6の、固体撮像素子チップ2に形成された出力段アンプの形成位置に整合する位置には、表面から裏面に貫通する金属板13が設けられる。尚、図示する例では、各リード配線7は単層構造になっているが、多層に分けて形成しても良い。   A large number of metal lead wirings 7 are provided in the flexible wiring board 6, and each lead wiring 7 has an end portion 7 a exposed on the surface of the flexible wiring board 6 and an end exposed on the back surface of the flexible wiring board 6. Part 7b. Each end 7 a is arranged around the through window 11, and each end 7 b is arranged around the through window 12. Further, a metal plate 13 penetrating from the front surface to the back surface is provided at a position of the flexible wiring board 6 that matches the formation position of the output stage amplifier formed on the solid-state imaging device chip 2. In the illustrated example, each lead wiring 7 has a single layer structure, but may be formed in multiple layers.

斯かる構成の固体撮像装置を組み立てる場合には、先ず図2に示す様に、フレキシブル配線基板6の貫通窓12を覆うように固体撮像素子チップ2の裏面をフレキシブル配線基板6に貼り付ける。この貼り付けは、例えば、表裏面に粘着材が塗布されたフレキシブル配線基板6を用いることで容易に行うことができる。   When the solid-state imaging device having such a configuration is assembled, first, as shown in FIG. 2, the back surface of the solid-state imaging device chip 2 is attached to the flexible wiring board 6 so as to cover the through window 12 of the flexible wiring board 6. This affixing can be easily performed by using, for example, the flexible wiring board 6 having an adhesive material applied to the front and back surfaces.

次に、矢印Aに示すようにフレキシブル配線基板6を折り曲げ、固体撮像素子チップ2の表面にフレキシブル配線基板6を貼り付ける。このとき、貫通窓11が固体撮像素子チップ2の受光面に整合するようにし、且つ、各リード端子7の夫々の端部7aが固体撮像素子チップ2の受光面周りに設けられた各電極パッド2aに電気的に接触する様に導電性接着剤で接着する。また、金属板13が出力段アンプ位置に密着する様にする。   Next, the flexible wiring board 6 is bent as indicated by an arrow A, and the flexible wiring board 6 is attached to the surface of the solid-state imaging element chip 2. At this time, the through-holes 11 are aligned with the light receiving surface of the solid-state image sensor chip 2, and the respective end portions 7a of the respective lead terminals 7 are electrode pads provided around the light-receiving surface of the solid-state image sensor chip 2. It adheres with a conductive adhesive so that it may be in electrical contact with 2a. Further, the metal plate 13 is brought into close contact with the output stage amplifier position.

次に、上記の様に折り曲げられ固体撮像素子チップ2を間に挟持したフレキシブル配線基板6をパッケージ3内の底面に貼り付ける。このとき、リード端子7の各端部7bが、パッケージ3内のアウターリード端子5の各端部と電気的に接触する様に導電性接着剤で接着する。   Next, the flexible wiring board 6 bent as described above and sandwiching the solid-state imaging element chip 2 is attached to the bottom surface in the package 3. At this time, each end 7 b of the lead terminal 7 is bonded with a conductive adhesive so as to be in electrical contact with each end of the outer lead terminal 5 in the package 3.

最後に、パッケージ3の開口を透明ガラス板4で密封し、固体撮像装置1が完成する。尚、パッケージ3内部の空きスペースを透明樹脂で埋めても良い。   Finally, the opening of the package 3 is sealed with the transparent glass plate 4 to complete the solid-state imaging device 1. The empty space inside the package 3 may be filled with a transparent resin.

本実施形態による固体撮像装置によれば、フレキシブル配線基板6を用いて固体撮像素子チップ2の電極パッド2aとアウターリード端子5とを接続するため、従来必要であった電極パッドとインナーリード端子との間のボンディング工程が不要となり、組み立て作業の容易化と低コスト化を図ることができると共に、インナーリードが不要なため装置の小型化を図ることも可能になる。   According to the solid-state imaging device according to the present embodiment, the electrode pad 2a of the solid-state imaging device chip 2 and the outer lead terminal 5 are connected using the flexible wiring board 6, and thus the electrode pads and inner lead terminals that are conventionally required are connected. The bonding process between the two is not necessary, and the assembly work can be facilitated and the cost can be reduced. Also, since the inner lead is unnecessary, the apparatus can be downsized.

更に、本実施形態の固体撮像装置では、ボンディングで用いる金線に比べ太く熱容量の大きいリード配線7を用いて固体撮像素子チップ2の電極パッド2aとアウターリード端子5とを接続するため、リード配線7を放熱路として固体撮像素子チップ2の放熱を図ることが可能となる。しかも、電極パッド2と同程度の幅広のリード配線7を用いることで、更に、厚手のリード配線7とすることで、金属製放熱路の放熱容量を増大させることができ、一層の放熱性能の向上を図ることが可能となる。   Furthermore, in the solid-state imaging device of the present embodiment, the lead wiring 7 is connected to the outer lead terminal 5 and the electrode pad 2a of the solid-state imaging device chip 2 using the lead wiring 7 that is thicker than the gold wire used for bonding and has a large heat capacity. Heat radiation of the solid-state imaging device chip 2 can be achieved using 7 as a heat radiation path. In addition, by using a lead wire 7 that is as wide as the electrode pad 2, and by using a thick lead wire 7, the heat dissipation capacity of the metal heat dissipation path can be increased. It is possible to improve.

また、固体撮像素子チップ2で一番発熱が大きい出力段アンプ部分が、金属板13を介しパッケージ3に接触するため、アンプ部分の発熱が金属板13を介してパッケージ3に効率的に熱伝導され、チップ2の放熱性能が向上する。   In addition, since the output stage amplifier portion that generates the largest amount of heat in the solid-state imaging device chip 2 contacts the package 3 via the metal plate 13, the heat generated in the amplifier portion efficiently conducts heat to the package 3 via the metal plate 13. As a result, the heat dissipation performance of the chip 2 is improved.

更にまた、本実施形態の固体撮像装置では、厚さのあるフレキシブル配線基板6を介して固体撮像素子チップ2の底面をパッケージ3に貼り付けるため、パッケージ3にあおり(非平行度)が存在していても、このあおり分をフレキシブル配線基板6の厚みによって吸収することができる。しかも、本実施形態では、貫通穴12を設けているため、あおりが大きくてもこのあおりをフレキシブル配線基板6が容易に吸収でき、パッケージ3のあおりが固体撮像素子チップ2に与える影響を更に低減することができる。   Furthermore, in the solid-state imaging device of the present embodiment, since the bottom surface of the solid-state imaging device chip 2 is attached to the package 3 through the flexible wiring board 6 having a thickness, the package 3 has a side (non-parallelism). Even so, this tilt can be absorbed by the thickness of the flexible wiring board 6. Moreover, in this embodiment, since the through hole 12 is provided, even if the tilt is large, the flexible wiring board 6 can easily absorb the tilt, and the influence of the tilt of the package 3 on the solid-state image sensor chip 2 is further reduced. can do.

フレキシブル配線基板6の構成は、図2,図3に示す構成の実施形態に限るものではない。図4,図5,図6,図7は、夫々異なる実施形態に係るフレキシブル配線基板6の平面模式図である。固体撮像素子チップを包むときの折り曲げ位置を「X」,「Y」で示している。尚、図1〜図3に示す部材と同様の部材には同一符号を付して説明する。   The configuration of the flexible wiring board 6 is not limited to the embodiment shown in FIGS. 4, 5, 6, and 7 are schematic plan views of flexible wiring boards 6 according to different embodiments. The folding position when the solid-state image sensor chip is wrapped is indicated by “X” and “Y”. In addition, the same code | symbol is attached | subjected and demonstrated to the member similar to the member shown in FIGS. 1-3.

図4のフレキシブル配線基板6では、フレキシブル配線基板6の中央6aに固体撮像素子チップの裏面を載せ、位置X,Yでフレキシブル配線基板6の左右を夫々折り曲げる。このとき、折り曲げた後のフレキシブル配線基板6の左右端部6b,6c間は、固体撮像素子チップの受光面を遮らないように離間する寸法になっている。   In the flexible wiring board 6 of FIG. 4, the back surface of the solid-state imaging device chip is placed on the center 6a of the flexible wiring board 6, and the left and right sides of the flexible wiring board 6 are bent at positions X and Y, respectively. At this time, the left and right end portions 6b and 6c of the flexible wiring board 6 after being bent are spaced apart so as not to block the light receiving surface of the solid-state imaging device chip.

図5のフレキシブル配線基板6は、図4に比べて、中央に貫通穴11を設けた点が異なる。この貫通窓11は、パッケージに貼り付けるときのあおり吸収のためでもよく、あるいは、貫通窓11を固体撮像素子受光面の開口としても良い。   5 differs from FIG. 4 in that a through hole 11 is provided at the center. The through window 11 may be used to absorb tilt when affixed to the package, or the through window 11 may be an opening of the light receiving surface of the solid-state imaging device.

図6のフレキシブル配線基板6は、図3と同様に2つ折りにして固体撮像素子チップを包み込む構成であるが、固体撮像素子チップの底面の大部分が当接する広い面積位置にフレキシブル配線基板6の表裏を貫通する金属板14が設けられている。これにより、固体撮像素子チップ2の裏面が金属板14を介してパッケージ3に熱接続されるため、放熱特性の更なる向上を図ることが可能となる。   The flexible wiring board 6 in FIG. 6 is configured to be folded in half and enclose the solid-state imaging element chip in the same manner as in FIG. 3, but the flexible wiring board 6 is placed in a wide area position where most of the bottom surface of the solid-state imaging element chip abuts. A metal plate 14 penetrating the front and back is provided. Thereby, since the back surface of the solid-state imaging device chip 2 is thermally connected to the package 3 via the metal plate 14, it is possible to further improve the heat dissipation characteristics.

図7のフレキシブル配線基板6は、図6に比べて、金属板14を切り欠いた構成とし、金属板14の切り欠いた位置に貫通窓12を設け、あおり吸収性能を向上させている点が異なる。   The flexible wiring board 6 of FIG. 7 has a configuration in which the metal plate 14 is cut out as compared with FIG. 6, and a through window 12 is provided at the notched position of the metal plate 14 to improve the tilt absorption performance. Different.

図4〜図7の夫々フレキシブル配線基板6では、リード配線7を細く図示しているが、隣接リード配線と接触しない様に幅広にするほど、放熱路としての特性が向上することはいうまでもない。   Each of the flexible wiring boards 6 of FIGS. 4 to 7 shows the lead wiring 7 thin, but it goes without saying that the characteristic as a heat radiation path is improved as the width is increased so as not to contact the adjacent lead wiring. Absent.

図8は、図5に示すフレキシブル配線基板6を用いて組み立てた固体撮像装置の断面模式図である。貫通窓11を固体撮像素子チップ2の受光面側に配置している。   FIG. 8 is a schematic cross-sectional view of a solid-state imaging device assembled using the flexible wiring board 6 shown in FIG. The through window 11 is disposed on the light receiving surface side of the solid-state image sensor chip 2.

図9は、図4に示すフレキシブル配線基板6を用いて組み立てた固体撮像装置の断面模式図である。フレキシブル配線基板6を図4に示すX,Y位置で折り曲げたとき、端部6b,6c間が離間して固体撮像素子チップ2の受光面を覆わない寸法になっている。尚、この実施形態では、パッケージ3底部にパッケージ底部を貫通する複数のビア9がアウターリード端子として設けられており、各ビア9に、フレキシブル配線基板6のリード配線端部7bが電気的に接触する構成になっている。   FIG. 9 is a schematic cross-sectional view of a solid-state imaging device assembled using the flexible wiring board 6 shown in FIG. When the flexible wiring board 6 is bent at the X and Y positions shown in FIG. 4, the end portions 6 b and 6 c are separated from each other and do not cover the light receiving surface of the solid-state imaging device chip 2. In this embodiment, a plurality of vias 9 passing through the bottom of the package 3 are provided as outer lead terminals at the bottom of the package 3, and the lead wiring end 7 b of the flexible wiring board 6 is in electrical contact with each via 9. It is configured to do.

以上述べた各実施形態によれば、フレキシブル配線基板6内に設けた金属製リード配線7によって、電気接続ばかりでなく固体撮像素子チップの放熱も図れるため、固体撮像素子チップを効率的に冷却することが可能となる。また、インナーリード端子やボンディングが不要なため、製造コストの低減や装置の小型化も図ることが可能となる。   According to each embodiment described above, the metal lead wiring 7 provided in the flexible wiring board 6 can not only make electrical connection but also dissipate heat from the solid-state imaging element chip, so that the solid-state imaging element chip is efficiently cooled. It becomes possible. Further, since inner lead terminals and bonding are not required, it is possible to reduce manufacturing costs and downsize the apparatus.

本発明に係る固体撮像装置は、固体撮像素子チップの放熱性能が向上すると共に製造コストの低減や装置の小型化を図ることが可能となるため、デジタルカメラや携帯電話機等に搭載する固体撮像装置として有用である。   The solid-state imaging device according to the present invention improves the heat dissipation performance of the solid-state imaging device chip, and can reduce the manufacturing cost and the size of the device. Useful as.

本発明の一実施形態に係る固体撮像装置の断面模式図である。It is a cross-sectional schematic diagram of the solid-state imaging device which concerns on one Embodiment of this invention. 図1に示すフレキシブル配線基板の断面模式図である。It is a cross-sectional schematic diagram of the flexible wiring board shown in FIG. 図2に示すフレキシブル配線基板の平面図である。It is a top view of the flexible wiring board shown in FIG. 本発明の別実施形態に係るフレキシブル配線基板の平面図である。It is a top view of the flexible wiring board concerning another embodiment of the present invention. 本発明の更に別実施形態に係るフレキシブル配線基板の平面図である。It is a top view of the flexible wiring board concerning another embodiment of the present invention. 本発明の更に別実施形態に係るフレキシブル配線基板の平面図である。It is a top view of the flexible wiring board concerning another embodiment of the present invention. 本発明の更に別実施形態に係るフレキシブル配線基板の平面図である。It is a top view of the flexible wiring board concerning another embodiment of the present invention. 本発明の別実施形態に係る固体撮像装置の断面模式図である。It is a cross-sectional schematic diagram of the solid-state imaging device which concerns on another embodiment of this invention. 本発明の更に別実施形態に係る固体撮像装置の断面模式図である。It is a cross-sectional schematic diagram of the solid-state imaging device which concerns on another embodiment of this invention.

符号の説明Explanation of symbols

1 固体撮像装置
2 固体撮像素子チップ
2a 電極パッド
3 箱形パッケージ
4 透明ガラス
5 アウターリード端子
6 フレキシブル配線基板
6a フレキシブル配線基板中央部
6b,6c フレキシブル配線基板端部
7 金属製のリード端子
7a,7b リード端子端部
9 ビア
11,12 貫通窓
13 金属板
DESCRIPTION OF SYMBOLS 1 Solid-state imaging device 2 Solid-state image pick-up element chip 2a Electrode pad 3 Box-shaped package 4 Transparent glass 5 Outer lead terminal 6 Flexible wiring board 6a Flexible wiring board center part 6b, 6c Flexible wiring board edge part 7 Metal lead terminals 7a, 7b Lead terminal end 9 Via 11, 12 Through window 13 Metal plate

Claims (6)

箱形パッケージ内に固体撮像素子チップを収納した固体撮像装置において、折り曲げたフレキシブル配線基板により前記固体撮像素子チップを挟み該フレキシブル配線基板を前記箱形パッケージ内に貼り付け該フレキシブル配線基板のリード配線を用いて前記固体撮像素子チップと該箱形パッケージのリード端子とを電気接続したことを特徴とする固体撮像装置。   In a solid-state imaging device in which a solid-state imaging device chip is housed in a box-shaped package, the solid-state imaging device chip is sandwiched between folded flexible wiring substrates, and the flexible wiring substrate is attached in the box-shaped package. A solid-state image pickup device, wherein the solid-state image pickup device chip and the lead terminal of the box-shaped package are electrically connected with each other. 前記フレキシブル配線基板には前記固体撮像素子チップの受光面に整合する貫通窓が設けられ前記リード配線が前記受光面の周囲に設けられた電極パッドに電気接続されることを特徴とする請求項1に記載の固体撮像装置。   2. The flexible wiring board is provided with a through window that is aligned with a light receiving surface of the solid-state imaging device chip, and the lead wiring is electrically connected to an electrode pad provided around the light receiving surface. The solid-state imaging device described in 1. 前記フレキシブル配線基板の前記箱形パッケージ内への貼り付け面に開口が設けられることを特徴とする請求項1または請求項2に記載の固体撮像装置。   The solid-state imaging device according to claim 1, wherein an opening is provided on a surface where the flexible wiring board is attached to the box-shaped package. 前記フレキシブル配線基板の表裏の両面に粘着材が塗布されていることを特徴とする請求項1乃至請求項3のいずれかに記載の固体撮像装置。   The solid-state imaging device according to any one of claims 1 to 3, wherein an adhesive material is applied to both front and back surfaces of the flexible wiring board. 前記リード配線の線幅が前記固体撮像素子チップに設けられた電極パッドと同程度であることを特徴とする請求項1乃至請求項4のいずれかに記載の固体撮像装置。   5. The solid-state imaging device according to claim 1, wherein a line width of the lead wiring is approximately the same as an electrode pad provided on the solid-state imaging element chip. 前記フレキシブル配線基板の前記固体撮像素子チップ裏面に接触する部分のうち該固体撮像素子チップに形成されているアンプ部に対応する部分に表裏を貫通する金属板が設けられていることを特徴とする請求項1乃至請求項5のいずれかに記載の固体撮像装置。   Of the portion of the flexible wiring board that contacts the back surface of the solid-state imaging device chip, a portion corresponding to the amplifier portion formed on the solid-state imaging device chip is provided with a metal plate penetrating the front and back. The solid-state imaging device according to any one of claims 1 to 5.
JP2005140115A 2005-05-12 2005-05-12 Solid state imaging apparatus Pending JP2006319124A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005140115A JP2006319124A (en) 2005-05-12 2005-05-12 Solid state imaging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005140115A JP2006319124A (en) 2005-05-12 2005-05-12 Solid state imaging apparatus

Publications (1)

Publication Number Publication Date
JP2006319124A true JP2006319124A (en) 2006-11-24

Family

ID=37539525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005140115A Pending JP2006319124A (en) 2005-05-12 2005-05-12 Solid state imaging apparatus

Country Status (1)

Country Link
JP (1) JP2006319124A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045447A (en) * 2008-08-08 2010-02-25 Sharp Corp Solid state imaging apparatus and electronic apparatus including the same
JP2010045446A (en) * 2008-08-08 2010-02-25 Sharp Corp Wiring board, solid state imaging apparatus and electronic apparatus
JP2010045445A (en) * 2008-08-08 2010-02-25 Sharp Corp Solid state imaging apparatus and electronic apparatus including the same
CN102854714A (en) * 2012-08-16 2013-01-02 浙江宇视科技有限公司 Heat dissipation device of zoom camera

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045447A (en) * 2008-08-08 2010-02-25 Sharp Corp Solid state imaging apparatus and electronic apparatus including the same
JP2010045446A (en) * 2008-08-08 2010-02-25 Sharp Corp Wiring board, solid state imaging apparatus and electronic apparatus
JP2010045445A (en) * 2008-08-08 2010-02-25 Sharp Corp Solid state imaging apparatus and electronic apparatus including the same
CN102854714A (en) * 2012-08-16 2013-01-02 浙江宇视科技有限公司 Heat dissipation device of zoom camera

Similar Documents

Publication Publication Date Title
KR101122344B1 (en) Semiconductor image sensor module, manufacturing method of semiconductor image sensor module, camera and manufacturing method of camera
JP2008091714A (en) Semiconductor device
JP4036694B2 (en) Multilayer semiconductor device
JP2008219704A (en) Semiconductor device
JP2005347442A (en) Semiconductor device
JP2004134710A (en) Semiconductor device and its manufacturing method, optical module and its manufacturing method, circuit board, and electronic device
JP2006319124A (en) Solid state imaging apparatus
US6573608B2 (en) Semiconductor device with layered semiconductor chips
JP2010147382A (en) Electronic device
JP2006339291A (en) Hollow package, semiconductor device using the same and solid-state image pickup device
JP2008227653A (en) Semiconductor device having imaging element
JP2006120996A (en) Circuit module
JP2009111334A (en) Optical device and method of manufacturing the same, and semiconductor device
JPH0846134A (en) Semiconductor device
JP4708175B2 (en) Solid-state imaging device
JP2817712B2 (en) Semiconductor device and mounting method thereof
JPS63190363A (en) Power package
WO2011108051A1 (en) Semiconductor device
TWM448054U (en) Packaging structure of image-sensing chip
JP2007194441A (en) Semiconductor device for image sensor and its manufacturing method
JP2004134875A (en) Optical module and manufacturing method thereof, circuit board, and electronic apparatus
JP2014103270A (en) Semiconductor module
WO2021241053A1 (en) Solid-state imaging device and electronic apparatus
JP2011109225A (en) Semiconductor device
JP7335902B2 (en) semiconductor equipment

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20061127

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20071108

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20071115

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20071122