JP2007157822A - Adhesive sheet and holding jig - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesive sheet that can be easily and accurately mounted to the specified location of a base material and can also be removed easily from the base material, and also to provide a holding jig provided with the same adhesive sheet. <P>SOLUTION: In this adhesive sheet, a non-adhesive part or a weak adhesive part and a strong adhesive part are provided at the front surface that is loaded to the base material 20 including a ventilation hole 21 for ventilating a gas, the strong adhesive part adhesively holds an object to be adhered 30, the non-adhesive part of the weak adhesive part is protruded from the base material 20 or the strong adhesive part is depressed to the side of the base material 20 by pressuring or exhausting the gas from the ventilating hole 21, and the object to be adhered 30 can be separated. The adhesive sheet 10 comprises, at the area near the end part of the adhesive sheet 10, an X direction regulation part 11 and a Y direction regulation part 12 for positioning in the X direction and Y direction for the specified location of the base material 20, in the virtual XY coordinates in the flat surface. The holding jig 1 is provided with the adhesive sheet 10 and the base material 20 including the ventilating hole 21 for supplying the gas in order to fix the adhesive sheet 10. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an adhesive sheet and a holding jig, and more particularly to an adhesive sheet that can be easily attached to and removed from a substrate, and a holding jig provided with the adhesive sheet.

  Conventionally, in the manufacturing process and transport process of electronic parts such as silicon wafers, flexible printed boards, glass plates for large screen display devices, ceramic capacitors, coil filters, etc. Since the electronic component or the like is easily damaged and is not easily fixed at a specific position and is likely to fall down, a holding jig or the like that can hold these thin plate-like objects or electronic components is generally used. As such a holding jig, for example, “in a substrate holding chuck for holding a substrate by vacuum suction, a wall body that forms a negative pressure when the substrate is vacuum-sucked; A substrate holding chuck characterized in that it includes a plurality of auxiliary supports that suppress deformation, and at least one of the wall body and the auxiliary supports is protruded from the surface of the glass substrate. (See Patent Document 1).

  However, since the substrate holding chuck fixes the substrate by vacuum suction, it is necessary to always perform vacuum suction during the manufacturing process and / or transporting, especially when the mass of the substrate is large. The structure and manufacturing method of the holder itself are complicated and expensive. Further, when the substrate is fixed by vacuum suction, the substrate and the wall or auxiliary support come into contact with each other, and the substrate may be damaged by the wall or auxiliary support. Therefore, there is a need for a holding jig that can hold an adherend with sufficient holding force and can easily remove the adherend without damaging the adherend, even with a simple structure. It was.

JP 2000-286329 A

  As a holding jig having a simple structure, the applicant can hold the adherend with sufficient holding force and can easily remove the adherend without damaging the adherend. A base portion having at least one convex body, a peripheral wall portion that surrounds the outer periphery of the convex body, a top portion of the convex body, and a top portion and a lower surface of the peripheral wall portion, and is fixed to the upper surface. A component holder having a pressure-sensitive adhesive sheet member having a pressure-sensitive adhesive portion, and a vent hole communicating with the gap portion formed by the pressure-sensitive adhesive sheet member, the base portion, and the peripheral wall portion, corresponding to the top of the convex body A weak adhesive part or a non-adhesive part having an adhesive strength weaker than that of the adhesive part is formed on the upper surface portion of the adhesive sheet member, and the gas in the gap part is sucked from the outside through the vent hole. The adhesive sheet member It has devised a component holders. ", Wherein a portion corresponding to the gap portion was made to elastically deform the lower surface side of the base portion (see Japanese Patent Application No. 2004-141761 specification).

  In this component holder, the portion corresponding to the gap portion of the pressure-sensitive adhesive sheet member is elastically deformed to the lower surface side of the base portion, so that the adhesive force is weaker than the pressure-sensitive adhesive portion formed on the upper surface portion of the pressure-sensitive adhesive sheet member. It is necessary to attach the adhesive sheet member to the base portion so that the weakly adhesive portion or the non-adhesive portion having the shape corresponds to the top of the convex body accurately. However, since the pressure-sensitive adhesive sheet member is set to be thin and has flexibility, it is difficult to accurately mount the pressure-sensitive adhesive sheet member at a specific position of the base portion. On the other hand, the pressure-sensitive adhesive sheet member is damaged, or the component holder whose pressure-sensitive adhesive surface of the pressure-sensitive adhesive sheet member is reduced cannot reliably hold the thin plate or the electronic component. It needs to be replaced. However, for example, the pressure-sensitive adhesive sheet once mounted on the base portion by a method of immersing the pressure-sensitive adhesive sheet member in a solvent, a method of inserting a sharp tool such as a knife or a spatula into the mounting surface of the base portion and the pressure-sensitive adhesive sheet member, etc. It is not easy to remove the member. Further, the base part may be damaged by the sharp tool.

  The component holder described in the specification of Japanese Patent Application No. 2004-141761 has not been disclosed yet, and is not a technology that can be a prior art of the present invention, but in order to assist a sufficient understanding of the present invention, It was quoted and explained.

  An object of the present invention is to provide an adhesive sheet that can be accurately and easily attached to a specific position of a substrate and can be easily detached from the substrate.

  Another object of the present invention is to provide a holding jig that can attach an adhesive sheet to a specific position of a substrate accurately and easily and can easily remove the adhesive sheet from the substrate.

As means for solving the above problems,
Claim 1 has a non-adhesive part or a weak adhesive part and a strong adhesive part on the surface, which is attached to a substrate having a vent hole through which gas flows, and adheres an object to be adhered to the strong adhesive part. Injecting gas from the vent hole and causing the non-adhesive part or weak adhesive part to protrude from the base, or exhausting gas from the vent hole, causing the strong adhesive part to sink into the base side. The pressure-sensitive adhesive sheet can be separated from the object to be adhered and held in the strong adhesive portion, in the vicinity of the end of the adhesive sheet, in a virtual XY coordinate on a plane, An adhesive sheet characterized by having an X-direction restricting portion and a Y-direction restricting portion that can be positioned in the X direction and the Y direction with respect to a specific position,
A second aspect of the present invention is a holding jig comprising: the pressure-sensitive adhesive sheet according to claim 1; and a base body having a vent hole that fixes the pressure-sensitive adhesive sheet and circulates gas.
According to a third aspect of the present invention, the base body further includes a peripheral wall portion and at least one convex body formed in an internal space surrounded by the peripheral wall portion, and the vent hole includes the peripheral wall portion and the convex body. The holding jig according to claim 2, wherein the holding jig communicates with a gap between the holding jig and
The holding jig according to claim 2 or 3, wherein the base body further includes a matching portion that matches the X-direction regulating portion and the Y-direction regulating portion in the adhesive sheet. It is.

  According to the pressure-sensitive adhesive sheet according to the present invention, an X-direction regulating portion that can be positioned in the X-direction and the Y-direction with respect to a specific position of the base in the virtual XY coordinates on the plane in the vicinity of the end of the pressure-sensitive adhesive sheet. Since the adhesive sheet is attached to the substrate, the adhesive sheet is attached to the substrate by bringing the X-direction restricting portion and the Y-direction restricting portion into contact with the substrate. It is possible to prevent displacement in the direction and / or Y direction, and it is possible to mount the substrate accurately and easily at a specific position. Further, according to this pressure-sensitive adhesive sheet, when the pressure-sensitive adhesive sheet is removed from the substrate, the X-direction restriction portion and / or the Y-direction restriction portion is formed starting from the X-direction restriction portion and / or the Y-direction restriction portion. By peeling off from the end, it can be easily removed without damaging the substrate.

  Further, according to the holding jig according to the present invention, since the adhesive sheet according to the present invention is provided, the adhesive sheet can be accurately and easily attached to a specific position of the substrate, and the adhesive sheet is mounted on the substrate. Can be easily removed.

  The adhesive sheet and holding jig which are one Example of this invention are demonstrated with reference to FIGS. The holding jig 1A is used when manufacturing and transporting an adherend, and as shown in FIG. 3, the holding jig 1A includes a base body 20A shown in FIG. 1 and an adhesive sheet 10A shown in FIG. Become.

  As shown in FIG. 1, the base body 20 </ b> A has a vent hole 21 through which a gas flows, a peripheral wall portion 22, and four convex bodies 24 formed in an internal space 23 surrounded by the peripheral wall portion 22. And it is formed in a substantially square shape. The peripheral wall portion 22 and the convex body 24 together support and fix the adhesive sheet 10A described later.

  As shown in FIGS. 1 and 3, the vent hole 21 communicates with a gap 29 between the peripheral wall portion 22 and the convex body 24 and the outside of the base body 20 </ b> A, and a compression device such as a compressor (externally installed) Or a suction device such as a vacuum pump (not shown). The hole diameter of the vent hole 21 is set to a hole diameter that can achieve both high compression efficiency or suction efficiency and the strength of the base body 20A. The vent hole 21 is formed so as to extend from the surface of the base body 20A to the back surface side to a predetermined position and from there to extend to the side surface of the base body 20A, but penetrates from the front surface of the base body 20A to the back surface. May be formed.

  The peripheral wall portion 22 is formed as a convex frame on the peripheral edge of the base body 20A, and has a top surface 25 for supporting and fixing the adhesive sheet on the upper portion thereof. An inner space 23 having an open upper surface is formed by the surface of the peripheral wall portion 22 and the base body 20A.

  As shown in FIG. 1, a total of four convex bodies 24 are formed in the internal space 23, apart from the peripheral wall portion 22, with two substantially vertical and horizontal spaces. All of the four convex bodies 24 are formed in a substantially square prismatic shape having substantially the same height as the peripheral wall portion 22. Thus, if the surrounding wall part 22 and each convex-shaped body 24 are formed in the substantially same height, an adhesive sheet can be reliably supported and fixed to 20 A of base | substrates. The size of the convex body 24 (the upper surface thereof) may be any size as long as it can securely fix the adhesive sheet and can support the adhesive sheet holding the adherend. The number is determined according to the number of 24, the adherend, the arrangement pattern of the weakly or non-adhesive part and the strong adhesive part of the adhesive sheet, and the like.

  The base body 20A is formed of a material having a strength that does not deform even when gas is injected from the vent hole 21 or exhausted, such as carbon steel, stainless steel, Examples thereof include metals such as aluminum alloys and nickel alloys, porous materials such as porous ceramics, resins, glasses, and composites thereof. The base 20A is preferably formed of stainless steel or an aluminum alloy from the viewpoint of workability and operability. When the base body 20A is formed of a porous material, the air holes 21 do not need to be specifically formed, but the side surface and the bottom surface of the base body 20A need to be sealed.

  The magnitude | size of 20 A of base | substrates is designed by the desired magnitude | size according to a use and the to-be-adhered thing mentioned later. The thickness of the base 20A only needs to be able to support and fix the pressure-sensitive adhesive sheet 10A, and is appropriately determined according to the application. For example, a thickness of about several mm or more is selected.

  As long as the base 20A can be formed of the above-described material, the manufacturing method thereof is not particularly limited, and examples thereof include vacuum molding, injection molding, and mold molding. The vent hole 21 may be excavated separately. The base body 20A is preferably formed integrally with the peripheral wall portion 22 and the convex body 24, but can also be manufactured separately.

  As shown in FIG. 2, the adhesive sheet 10 </ b> A can be positioned in the X direction and the Y direction with respect to a specific position of the base body 20 </ b> A in virtual XY coordinates on a plane at each of the four corners. 11A and a Y-direction restricting portion 12A. When attaching the adhesive sheet 10A to the base body 20A, the X direction restricting part 11A and the Y direction restricting part 12A prevent the adhesive sheet 10A from shifting in the X direction and the Y direction in the virtual XY coordinates on the plane. At the same time, it becomes a starting point when removing the adhesive sheet 10A from the base body 20A.

  As shown in FIG. 2, four X-direction regulating portions 11A are provided as the legs of the columnar body or wall-like body at each of both end portions on the side surface extending in the Y direction of the adhesive sheet 10A. As shown in FIG. 2, four Y-direction restricting portions 12A are provided as legs of a columnar body or a wall-like body at each of both end portions on the side surface extending in the X direction of the adhesive sheet 10A. The X-direction regulating portion 11A and the Y-direction regulating portion 12A provided at each corner of the adhesive sheet 10A are integrated at the corner. In other words, the X-direction restricting portion 11A and the Y-direction restricting portion 12A are each a vertical columnar body or wall-like body having an angle of about 90 ° so as to cover each corner portion of the adhesive sheet 10A. It is provided as a leg. In addition, 11 A of X direction control parts and 12 A of Y direction control parts are provided in the position which can mount | wear with the adhesive sheet 10A in the specific position in the base | substrate 20A.

  The X-direction restricting portion 11A and the Y-direction restricting portion 12A can prevent the adhesive sheet 10A from shifting in the X direction and the Y direction, and may be any size that can serve as a starting point when removing the adhesive sheet 10A. For example, as shown in FIG. 3, the height of the X-direction restricting portion 11A and the Y-direction restricting portion 12A, that is, the length of the leg of the column or wall-like body is longer than the thickness of the adhesive sheet 10A. In addition, it is preferable to be formed shorter than the thickness of the base body 20A. In addition, since the X-direction restricting portion 11A and the Y-direction restricting portion 12A serve as starting points when the adhesive sheet 10A is removed, it is preferable that all surfaces be weakly adhesive portions or non-adhesive portions.

As shown in FIG. 2, the pressure-sensitive adhesive sheet 10 </ b> A has a sea-island structure having an island portion 13 made of a non-adhesive portion or a weakly-adhesive portion and a sea portion 14 made of a strong-adhesive portion on the surface. When the pressure-sensitive adhesive sheet 10A has the sea-island structure on its surface, it is possible to easily hold and remove the adherend to be described later. Here, the strong adhesive portion is a portion having an adhesive force sufficient to hold the adherend, for example, an adhesive force of 1 to 60 (g / mm ² ). When the strong adhesive portion has an adhesive strength in the above range, the adherend can be reliably held on the adhesive sheet 10A. The weak adhesive part is a part having an adhesive force weaker than that of the strong adhesive part, for example, an adhesive force exceeding 0 (g / mm ² ) and less than 1 (g / mm ² ). When the weak adhesive portion has an adhesive strength in the above range, the object to be adhered held by the strong adhesive portion on the adhesive sheet 10A can be easily removed. A non-adhesive part is a part which does not have adhesive force substantially. If the adhesive sheet has a non-adhesive part, the article to be adhered held by the strong adhesive part on the adhesive sheet 10A can be removed very easily.

The adhesive strength in the strong adhesive part and the weak adhesive part is determined as follows. First, an adsorption fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate for horizontally fixing the adhesive sheet 10A, and a cylinder having a diameter of 10 mm at the tip of the measurement unit A load measuring device equipped with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) to which a contact made of stainless steel (SUS304) is attached is prepared. An adhesive sheet is fixed on this test stand, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, the contact attached to the load measuring device is lowered at a speed of 20 mm / min until it comes into contact with the measurement site of the strong adhesion part or the weak adhesion part. Press for 3 seconds perpendicularly to the measurement site with a load of. Here, the predetermined load is set to 25 g / mm ² . Next, the contact is pulled away from the site to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is taken as the adhesive strength of the strong adhesive portion or the weak adhesive portion. This measurement method may be performed manually, but may be performed automatically using, for example, a device such as a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.). .

  The sea-island structure has a structure in which island portions 13 composed of weakly-adhesive portions or non-adhesive portions are arranged in a grid pattern on the sea portion 14 composed of strongly-adhesive portions. The adhesive part has an area ratio of 20 to 95% with respect to the entire area of the adhesive holding part that holds the object to be adhered. When the area ratio of the weakly-adhesive part or the non-adhesive part is within this range, the adherend can be held on the adhesive sheet 10A with sufficient holding force, and the adherend to be held on the adhesive sheet 10A can be It can be easily removed.

  The adhesive sheet 10A has a strong adhesive portion on the back surface. When the back surface has a strong adhesive portion, the adhesive sheet 10A can be easily and firmly attached to the base 20A.

  The pressure-sensitive adhesive sheet 10A has a thickness of about 0.05 to 2 mm, and the surface thereof should be smooth. If the thickness of the pressure-sensitive adhesive sheet 10A is less than 0.05 mm, the mechanical strength of the pressure-sensitive adhesive sheet 10A itself may be lowered, and the durability of the pressure-sensitive adhesive sheet 10A itself may not be sufficient. The adhesive sheet 10A is less likely to be elastically deformed, and the adherend may not be easily removed from the adhesive sheet 10A. When the surface of the adhesive sheet 10A is smooth, the adhesive strength of the strong adhesive portion or the weak adhesive portion can be made uniform. The adhesive sheet 10A may be set in a shape and size different from the base body 20A, but is usually set in the same shape and substantially the same size as the base body 20A.

  The adhesive sheet 10A is formed of a strong adhesive material, a weak adhesive material, or a non-adhesive material. Examples of the strong adhesive material include various elastomers such as silicone rubber, fluorine rubber, urethane elastomer, natural rubber, and styrene-butadiene copolymer elastomer. Silicone rubber and fluorine having excellent strength and weather resistance System rubber is good. Among these, it is particularly preferable to have a rubber hardness (JIS K 6253 [durometer A]) of about 5 to 60. If the rubber hardness is less than 5, the adhesive strength may become too strong, while if it exceeds 60, the adhesive strength may become too weak. As said silicone rubber, the silicone rubber composition containing hardening | curing agents, such as organopolysiloxane, a silica type filler, and a peroxide, is mentioned, for example. As such a silicone rubber composition, for example, trade names “KE-520U”, “KE-530U” and the like are available from Shin-Etsu Chemical Co., Ltd. Examples of the fluorine rubber include a fluorine rubber containing a vinylidene fluoride / hexafluoropropylene copolymer, a filler such as carbon, a crosslinking aid such as trialisocyanate, and a curing agent such as peroxide. A composition. As such a fluorinated rubber composition, for example, trade names “DC-2050”, “DC-2260” and the like are available from Daikin Industries, Ltd. Examples of the weak adhesive material or non-adhesive material include weakly adhesive or non-adhesive silicone resin, fluorine resin, urethane resin, and the like.

  The adhesive sheet 10A may be formed separately from the X-direction restricting portion 11A and the Y-direction restricting portion 12A and adhered to the adhesive sheet, but for example, by a molding method such as injection molding, vacuum molding, mold molding, etc. It is preferable that the X direction restricting portion 11A and the Y direction restricting portion 12A are integrally formed. In order to form a sea-island structure on the surface of the adhesive sheet 10A, for example, it is formed into a sheet using a strong adhesive material, and (1) a masking member having a desired arrangement pattern is placed on the surface of the sheet portion And (2) a method of applying a weakly-adhesive material or a non-adhesive material to a portion where a weakly-adhesive part or a non-adhesive part is formed, (3) A method of roughening the surface of the part that forms the weakly-adhesive part or the non-adhesive part, (4) It is molded into a sheet shape using the weakly-adhesive material or the non-adhesive material, and the part that forms the strong adhesive part is strong Examples include a method of applying an adhesive material.

  Next, a method for attaching the adhesive sheet 10A to the base body 20A will be described. As will be described later, the holding jig 1A makes it possible to separate the adherend to be adhered and held in the strong adhesive portion of the adhesive sheet 10A by causing the strong adhesive portion of the adhesive sheet 10A to sink to the base 20A side. Since it is a holding jig, it adheres to a specific position in the X direction and Y direction in the base 20A such that the weakly sticky part or non-sticky part of the adhesive sheet 10A corresponds exactly to the upper part of the convex body 24 in the base 20A. It is necessary to attach the adhesive sheet 10A. In order to attach the adhesive sheet 10A to a specific position of the base 20A, first, as shown in FIG. 4A, the adhesive sheet 10A is warped upward to form an X-direction regulating portion formed on the adhesive sheet 10A. 11A and Y-direction restricting portion 12A each have at least one, preferably two, that is, at least one, preferably two adjacent legs, of a bowl-shaped column or wall-like body match the corner of base 20A. Let By this agreement state, the adhesive sheet 10A can be positioned in the X direction and the Y direction with respect to the base body 20A, and can be regulated from shifting in the X direction and the Y direction. Next, as shown in FIG. 4B, the adhesive sheet 10A warped upward is gradually placed on the base body 10A while maintaining this coincidence state, and finally formed on the adhesive sheet 10A. The remaining X direction restricting portion 11A and Y direction restricting portion 12A are aligned with the corners of the base 20A. The X-direction restricting portion 11A and the Y-direction restricting portion 12A are provided at each corner of the adhesive sheet 10A, and as described above, the adhesive sheet 10A is formed to be approximately the same size as the base 20A. Thus, according to this attachment method, it is possible to easily prepare the holding jig 1A in which the adhesive sheet 10A is mounted at a specific position of the base body 20A. Therefore, according to the adhesive sheet 10A according to the present invention, the X-direction restricting portion 11A and the Y-direction restricting portion 12A are provided, and the X-direction restricting portion 11A and the Y-direction restricting portion are attached when the adhesive sheet 10A is attached to the base 20A. By aligning the portion 12A with the corner portion of the base body 20A, the adhesive sheet 10A is positioned with respect to the base body 20A, and it is possible to regulate the occurrence of displacement in the X direction and the Y direction. Therefore, the adhesive sheet 10A can be attached to the specific position of the base body 20A accurately and easily.

  A method for removing the adhesive sheet 10A from the base 20A will be described. In order to remove the adhesive sheet 10A from the base body 20A, first, at least one, preferably two, each of the X direction restricting part 11A and the Y direction restricting part 12A of the adhesive sheet 10A attached to the base 20A, that is, a saddle type Grab at least one, preferably two adjacent ones, of the column or wall-like body with a tool or hand. As shown in FIG. 3, the X direction restricting portion 11 </ b> A and the Y direction restricting portion 12 </ b> A protrude from the base body 20 </ b> A, and therefore can be easily and reliably grasped by a tool or a hand. Next, the adhesive sheet 10A is lifted upward from the base body 20A, starting from the gripped X-direction restriction part 11A and the Y-direction restriction part 12A, and peeled off little by little from the base body 20A. In this way, the adhesive sheet 10A can be removed from the base body 20A. Therefore, according to the adhesive sheet 10A according to the present invention, the X-direction restricting part 11A and the Y-direction restricting part 12A are formed from the X-direction restricting part 11A and the Y-direction restricting part 12A. By peeling off from the end, it can be easily removed without scratching the base body 20A.

  Next, the operation of the holding jig 1A will be described. The adherend to be adhered and held by the holding jig 1A is advantageously a thin plate, an electronic component or the like that is easily damaged or damaged, or a small and difficult to handle. Examples of the thin plate-like material include a silicon wafer, a flexible printed board, and a glass plate for a large screen display device. Examples of the electronic component include a ceramic capacitor and a coil filter.

  In the holding jig 1A, when the object to be adhered 30 is adhered and held during the manufacturing process and / or during transportation, the object to be adhered 30 is placed on the adhesive sheet 10A of the holding jig 1A shown in FIG. Put. In this initial state, as shown in FIG. 5 (a), the sea part 14 that is a strong adhesive part of the adhesive sheet 10 </ b> A is in close contact with the bottom surface of the article 30 to be adhered. The adhesive sheet 10A is adhesively held. Therefore, the adherend 30 is adhesively held by the holding jig 1A with sufficient adhesive force, and the adherend 30 can be supplied to the manufacturing process together with the holding jig 1A, or can be transported. Thus, since the adherend 30 is simply held on the adhesive sheet 10A and is held by the holding jig 1A, the holding jig 1A has a simple configuration, is small and has low energy, and is to be bonded. 30 can be adhesively held.

  On the other hand, in the holding jig 1A, when removing the adherend to be adhered 30 after completion of the manufacturing process and / or after conveyance between the manufacturing processes, as shown in FIG. A suction device or the like (not shown) installed outside the jig 1A is connected to the vent hole 21, the gas in the closed space 26 formed by the base body 20A and the adhesive sheet 10A is exhausted, and the closed space 26 is discharged. The inside is depressurized or vacuumed. Then, the sea portion 14, which is the strong adhesive portion of the adhesive sheet 10 </ b> A having elasticity, is elastically deformed against the adhesive force with the adherend 30 and sinks into the closed space 26. In this exhausted state, the sea portion 14 that is a strong adhesion portion on the upper surface of the adhesive sheet 10 </ b> A is separated from the bottom surface of the adherend 30. As a result, the adherend 30 is only in contact with the island portion 13 that is the weakly adhesive portion or the non-adhesive portion of the adhesive sheet 10A, and is no longer adhesively held. Accordingly, the object to be adhered 30 can be removed by tilting the holding jig 1A with a slight force or by the weight of the object to be adhered 30, and when the object to be adhered 30 is removed, Can be reliably prevented from being deformed or damaged.

  In the holding jig 1A, the adherend 30 is easily held and removed by repeating the initial state and the exhaust state in this manner.

  An adhesive sheet and a holding jig according to another embodiment of the present invention will be described with reference to FIGS. The holding jig 1B is used when manufacturing and transporting an object to be bonded, and as shown in FIG. 8, includes a base body 20B shown in FIG. 6 and an adhesive sheet 10B shown in FIG. Become.

  As shown in FIG. 6, the base body 20 </ b> B is a plate-like body having a vent hole 21. It is preferable that the surface of the base body 20B be formed flat. Moreover, the base body 20B has a sign portion 27 that coincides with the X-direction restricting portion 11B and the Y-direction restricting portion 12B in the adhesive sheet 10B described later. The sign part 27 may be coincident with the X direction restricting part 11B and the Y direction restricting part 12B. According to the shape, size, number, etc. of the X direction restricting part 11B and the Y direction restricting part 12B, Number etc. are decided. As shown in FIG. 6, the matching portion 27 in the base body 20 </ b> B is recessed in the side surface of the base body 20 </ b> B corresponding to the X direction restricting portion 11 </ b> B and the Y direction restricting portion 12 </ b> B. The adhesive sheet 10B is mounted at a specific position of the base body 20B described later when the sign part 27 coincides with the X-direction restricting part 11B and the Y-direction restricting part 12B. It is a position. The material of the base 20B is basically the same as that of the base 20A.

  As shown in FIG. 7, the adhesive sheet 10 </ b> B can be positioned in the X direction with respect to a specific position of the base body 20 </ b> B near each corner adjacent to the X direction on the back surface in a virtual XY coordinate on the plane. X-direction restricting portion that has a Y-direction restricting portion 12B and can be positioned in the Y-direction with respect to a specific position of the base body 20B, in the vicinity of the end portion of the corner portion where the Y-direction restricting portion 12B is formed. 11B. The position where the X direction restricting part 11B and the Y direction restricting part 12B are formed is the back surface of the adhesive sheet 10B, and when the sign part 27 coincides with the X direction restricting part 11B and the Y direction restricting part 12B, This is a position where the adhesive sheet 10B can be mounted at a specific position on the base body 20B. As shown in FIG. 7, two X-direction restricting portions 11B and two Y-direction restricting portions 12B are provided as pillars or wall-like legs. When the adhesive sheet 10B is attached to the base body 20B together with the matching part 27, the X-direction restricting part 11B and the Y-direction restricting part 12B have the adhesive sheet 10B in the X direction and the Y direction in virtual XY coordinates on a plane. While preventing it from shifting, it becomes a starting point when removing the adhesive sheet 10B from the base body 20B.

  The X direction restricting portion 11B and the Y direction restricting portion 12B can prevent the adhesive sheet 10B from shifting in the X direction and the Y direction, and may be any size that can be a starting point when removing the adhesive sheet 10B. For example, as shown in FIG. 8, the heights of the X direction restricting portion 11B and the Y direction restricting portion 12B, that is, the lengths of the legs of the columnar body or the wall-like body are formed shorter than the thickness of the base body 20B. It is better. Moreover, since the X direction control part 11B and the Y direction control part 12B become a starting point at the time of removing the adhesive sheet 10B, it is preferable that all the surfaces be a weak adhesive part or a non-adhesive part.

  As shown in FIG. 7, the pressure-sensitive adhesive sheet 10 </ b> B has a sea-island structure on its surface, which has a sea portion 14 composed of a non-adhesive portion or a weakly-adhesive portion and an island portion 13 composed of a strong adhesive portion. When the adhesive sheet 10B has the sea-island structure on its surface, it is possible to easily hold and remove the adherend to be described later. Here, the adhesive strength of the strong adhesive portion, the weak adhesive portion, and the non-adhesive portion is the same as the adhesive strength of the strong adhesive portion, the weak adhesive portion, and the non-adhesive portion in the adhesive sheet 10A.

  The array pattern of the sea-island structure in the base 20B, the area ratio, thickness, manufacturing method, etc. of the weakly or non-adhesive part are the same as those of the base 20A. The base body 20B is formed into a sheet shape using the weakly-adhesive material or the non-adhesive material, and is formed by a method such as applying a strong-adhesive material to a portion where the strong-adhesive portion is formed. It may be an adhesive part or a non-adhesive part.

  As will be described later, since the holding jig 1B press-fits a gas between the base body 20B and the adhesive sheet 10B, the adhesive layer 28 that firmly fixes the base body 20B and the adhesive sheet 10B is adhered to the base body 20B. It is good to provide in the surface of the base | substrate 20B corresponding to the peripheral part of the base | substrate 20B, and the strong adhesion part of the adhesive sheet | seat 10B between the adhesive sheets 10B.

  Next, a method for attaching the adhesive sheet 10B to the base body 20B will be described. As will be described later, the holding jig 1B press-fits a gas from the air hole 21, and causes the weakly adhesive portion or the non-adhesive portion of the adhesive sheet 10B to protrude from the base 20B, thereby causing the strong adhesive portion of the adhesive sheet 10B. Since this is a holding jig that enables separation of the adherend to be adhered, the weakly adhesive part or non-adhesive part of the adhesive sheet 10B is accurately positioned above the opening of the vent hole 21 formed in the base body 20B. It is necessary to attach the adhesive sheet 10B to specific positions in the X direction and the Y direction on the base body 20B. In order to attach the adhesive sheet 10B to a specific position of the base 20B, basically, the same method as that for attaching the adhesive sheet 10A to the base 20A is performed. First, the adhesive sheet 10B is warped upward, and the X-direction restricting portion 11B and the Y-direction restricting portion 12B formed on the adhesive sheet 10B, that is, the legs of the columnar body or wall-like body are formed on the side surface of the base body 20B. The X direction restricting portion 11B, the Y direction restricting portion 12B and the sign portion 27 are made to coincide with each other. By this agreement state, the adhesive sheet 10B can be positioned in the X direction and the Y direction with respect to the base body 20B, and can be prevented from shifting in the X direction and the Y direction. The adhesive composition is applied in advance to the peripheral surface of the base 20B and the surface corresponding to the strong adhesive part of the adhesive sheet 10B. Next, in the same manner as in the case of the base body 20A, the adhesive sheet 10B warped upward is gradually placed on the base body 10B while maintaining this matching state. As described above, the X-direction restricting portion 11B and the Y-direction restricting portion 12B and the sign portion 27 of the adhesive sheet 10B are provided at specific positions, and the adhesive sheet 10B is substantially the same size as the base body 20B. Therefore, according to this attachment method, it is possible to easily prepare the holding jig 1B in which the adhesive sheet 10B is mounted at a specific position of the base body 20B. Therefore, according to the adhesive sheet 10B according to the present invention, the X-direction restricting portion 11B and the Y-direction restricting portion 12B are provided, and the X-direction restricting portion 11B and the Y-direction restricting portion are attached when the adhesive sheet 10B is attached to the base 20B. By aligning the portion 12B with the sign portion 27 of the base body 20B, the adhesive sheet 10B is positioned in the X direction and the Y direction with respect to the base body 20B, and it is possible to regulate the occurrence of displacement in the X direction and the Y direction. . Therefore, the adhesive sheet 10B can be mounted accurately and easily at a specific position of the base body 20B.

  A method for removing the adhesive sheet 10B from the base body 20B will be described. The method for removing the adhesive sheet 10B from the base body 20B is basically the same as the method for removing the adhesive sheet 10A from the base body 20A. First, the X-direction restricting portion 11B and the Y-direction restricting portion 12B of the adhesive sheet 10B attached to the base body 20B, that is, the surfaces of the legs of the columnar or wall-like body are pushed upward while being manually pressed. The X-direction restricting portion 11B and the Y-direction restricting portion 12B are flush with the side surface of the base body 20B, but the X-direction restricting portion 11B and the Y-direction restricting portion 12B are weakly adhesive portions or non-adhesive portions. The close contact state between the X direction restricting portion 11B and the Y direction restricting portion 12B and the sign portion 27 is not so strong, and the X direction restricting portion 11B and the Y direction restricting portion 12B can be easily pushed upward. Next, the adhesive sheet 10B is lifted upward from the base body 20B, starting from the pushed-up X-direction restriction part 11A and Y-direction restriction part 12A, and peeled off little by little from the base body 20B. In this way, the adhesive sheet 10B can be removed from the base body 20B. Therefore, according to the adhesive sheet 10B according to the present invention, the adhesive sheet 10B in which the X direction restricting part 11B and the Y direction restricting part 12B are formed starting from the X direction restricting part 11B and the Y direction restricting part 12B. By peeling off from the end, it can be easily removed without scratching the base body 20B.

  Next, the operation of the holding jig 1B will be described. In the holding jig 1B, when the adherend 30 is adhered and held during the manufacturing process and / or during transportation, the adherend 30 is placed on the adhesive sheet 10B of the holding jig 1B shown in FIG. Put. In this initial state, as shown in FIG. 9A, the island portion 13 that is the strong adhesive portion of the adhesive sheet 10B is in close contact with the bottom surface of the adherend 30. The adhesive sheet 10B is adhesively held. Therefore, the adherend 30 is adhesively held by the holding jig 1B with sufficient adhesive force, and the adherend 30 can be supplied to the manufacturing process together with the holding jig 1B, or can be transported. As described above, the holding jig 1B can hold the adherend 30 with a simple configuration and a small size and low energy, like the holding jig 1A.

  On the other hand, in the holding jig 1B, when removing the object 30 to be adhered and held after completion of the manufacturing process and / or after conveyance between the manufacturing processes, as shown in FIG. A compression device or the like (not shown) installed outside the jig 1B is connected to the vent hole 21, and a gas is press-fitted between the base body 20B and the adhesive sheet 10B. Then, in the adhesive sheet 10B having elasticity, the sea part 14 that is not bonded by the adhesive layer 28 is elastically deformed against the adhesive force between the object 30 and the island part 13 that is a strong adhesive part, and the base body 20B. Bulge from the surface of the. In this press-fitted state, the island portion 13 which is a strong adhesion portion on the upper surface of the adhesive sheet 10 </ b> B is separated from the bottom surface of the adherend 30. As a result, the adherend 30 is only in contact with the weakly adhesive part or the non-adhesive part 14 of the adhesive sheet 10B, and is no longer adhesively held. Accordingly, the object to be adhered 30 can be removed by tilting the holding jig 1B with a slight force or by the weight of the object to be adhered 30, and when the object to be adhered 30 is removed, Can be reliably prevented from being deformed or damaged.

  In the holding jig 1B, the adherend 30 is easily held and removed by repeating the initial state and the press-fitted state in this way.

  The X direction restricting portion 11A and the Y direction restricting portion 12A are formed at each corner of the adhesive sheet 10A. In the present invention, the X direction restricting portion 11A and the Y direction restricting portion 12A are at least one It may be formed at the corner, and is preferably formed at two or more corners. For example, the adhesive sheet 10C shown by Fig.10 (a) is mentioned. This adhesive sheet 10C is the same as the adhesive sheet 10A except that the X-direction restricting portion 11A and the Y-direction restricting portion 12A in the adhesive sheet 10A are formed at two adjacent corners, respectively.

  The X direction restricting portions 11A and 11B and the Y direction restricting portions 12A and 12B are formed in the vicinity of the corners of the adhesive sheets 10A and 10B. In the present invention, the X direction restricting portion and the Y direction restricting portion are formed. As long as the position is near the edge of the adhesive sheet, it may not be near the corner. For example, the adhesive sheet 10D shown by FIG.10 (b) is mentioned. This adhesive sheet 10D has two Y-direction restricting portions 12A in the adhesive sheet 10C continuously, one Y-direction restricting portion 12D extending over the entire side surface extending in the X direction in the adhesive sheet 10D, and The adhesive sheet 10A is the same as the adhesive sheet 10A except that two X-direction restricting portions 11A are formed integrally with the Y-direction restricting portion 12D.

  The X direction restricting portions 11A to 11D and the Y direction restricting portions 12A to 12D are all columnar bodies or wall-like bodies. In the present invention, the X direction restricting portion and the Y direction restricting portion are particularly shaped. It is not limited, For example, a prismatic body, a cylindrical body, a rod-shaped body, etc. may be sufficient. Further, each of the X-direction restricting portions 11A to 11D and the Y-direction restricting portions 12A to 12D is a single columnar body or wall-like body. In the present invention, the X-direction restricting portion and the Y-direction restricting portion are used. Each part may be configured such that a plurality of pillars or wall-like bodies are arranged at intervals.

  The X-direction restricting portion 11A and the Y-direction restricting portions 12A and 12D are both formed on the side surface of the adhesive sheet, but, like the X-direction restricting portion 11B and the Y-direction restricting portion 12B, the back surface of the adhesive sheet. The X-direction restricting portion 11B and the Y-direction restricting portion 12B may be formed on the side surface of the adhesive sheet similarly to the X-direction restricting portion 11A and the Y-direction restricting portion 12A. It may be formed.

  The pressure-sensitive adhesive sheets 10A to 10D are all formed in a substantially square shape, but in the present invention, the shape of the pressure-sensitive adhesive sheet is not particularly limited, and for example, a polygon such as a quadrangle, a pentagon, a hexagon, or a circle , Oval, indefinite, or a combination of these. For example, as circular adhesive sheets, adhesive sheets 10E and 10F shown in FIG. This adhesive sheet 10E is formed in a disc shape, and at the periphery thereof, a columnar or wall-like X-direction regulating portion 11E and Y-direction regulating portion 12E are fixed points of the X-direction regulating portion 11E and the center point of the disc. Is formed such that the angle θ at which the line connecting the line connecting the fixed point of the Y direction restricting portion 12E and the center point of the disk intersects is about 90 °. In the adhesive sheet 10E, the intersecting angle may be about 45 to 135 °. In addition, the adhesive sheet 10F is formed in a disc shape, and extends along the peripheral edge of the adhesive sheet 10F to a length of about ¼ of the peripheral edge. A restricting portion 15 is formed. In this pressure-sensitive adhesive sheet 10F, the length in which the X-direction regulating portion / Y-direction regulating portion 15 extends may be about 1/5 to 1/2 of the peripheral edge portion. In the case where the adhesive sheet is formed in a circular shape, such as the adhesive sheets 10E and 10F, the X-direction restricting portion 11E or the Y-direction restricting portion 12E is used in order to achieve the object of the present invention. At least one of the surfaces (the surface that comes into contact with the base), or a part of the surface that comes into contact with the base in the X-direction restricting portion / Y-direction restricting portion 15 may have adhesiveness, or the adhesiveness It is preferable to provide a circumferential direction restricting portion, such as a protrusion, for preventing the adhesive sheet from moving in the circumferential direction of the substrate on the surface or peripheral side surface of the substrate on which the sheet is mounted.

  The adhesive sheets 10A to 10D are all formed in a substantially square shape like the bases 20A and 20B. However, in the present invention, the adhesive sheets 10A to 10D may not be formed in the same shape as the base, for example, a substantially square shape. An adhesive sheet such as a circle or an ellipse may be attached to the substrate.

  In the pressure-sensitive adhesive sheet 10A and the pressure-sensitive adhesive sheet 10B, an island portion 13 composed of a strong adhesive portion, a weak adhesive portion, or a non-adhesive portion is formed on the sea portion 14 composed of a weak adhesive portion, a non-adhesive portion or a strong adhesive portion. However, in this invention, the sea-island structure is not limited to this, and the sea-island structure is not limited to this. The island part which consists of a part or a weak adhesion part or a non-adhesion part may be a sea-island structure arranged in a rod shape, a sea-island structure arranged radially or concentrically. In addition, the sea part and the island part in these sea-island structures may be formed in a polygon such as a square, rectangle, pentagon, hexagon, circle, ring, ellipse, indefinite shape, or a combination thereof. Good.

  The base body 20A is used in a holding jig 1A of a type in which the strong adhesive portion of the adhesive sheet 10A is depressed on the base body 20A side. In this invention, the base body 20A projects a weak adhesive portion or a non-adhesive portion. It may be used for a type of holding jig.

  The base body 20A and the base body 20B are formed in a substantially square shape. The shape of the base body may vary depending on the shape of the adherend, the manufacturing process, handleability, and the like, for example, a square, pentagon, hexagon, etc. It may be formed in a square shape, a circular shape, an oval shape, an indeterminate shape, or a combination of these.

  You may provide the recessed part for making it easy to remove an adhesive sheet in the side surface of the said base | substrate 20A, and the side surface of the base | substrate 20B.

FIG. 1 is a schematic perspective view showing an example of a base body having a peripheral wall portion and a convex body. FIG. 2 is a schematic perspective view showing an example of an adhesive sheet. FIG. 3 is a schematic perspective view showing a holding jig including the base shown in FIG. 1 and the adhesive sheet shown in FIG. FIG. 4 is an explanatory diagram for explaining a method of attaching the adhesive sheet to the base, and FIG. 4A is a diagram showing a matching state in which the X-direction restricting portion 11A and the Y-direction restricting portion 12A are matched with the base 20. FIG. 4B is a diagram showing a state in which the adhesive sheet is attached to the base body while maintaining the coincidence state. 5 is a schematic cross-sectional view taken along line AA in FIG. 3, FIG. 5 (a) is a schematic cross-sectional view showing an initial state of the holding jig, and FIG. 5 (b) is a schematic view of the holding jig. It is a schematic sectional drawing which shows an exhaust state. FIG. 6 is a schematic perspective view showing an example of a substrate having a flat surface. FIG. 7 is a schematic perspective view illustrating an example of an adhesive sheet. FIG. 8 is a schematic perspective view showing a holding jig including the base shown in FIG. 6 and the adhesive sheet shown in FIG. 9 is a schematic cross-sectional view taken along line AA in FIG. 8, FIG. 9 (a) is a schematic cross-sectional view showing an initial state of the holding jig, and FIG. 9 (b) is a drawing of the holding jig. It is a schematic sectional drawing which shows a press-fit state. FIG. 10 is a schematic perspective view showing a modification of the adhesive sheet. FIG. 11 is a schematic perspective view showing a modification of the adhesive sheet.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Holding jig 10 Adhesive sheet 11 X direction control part 12 Y direction control part 13 Island part 14 Sea part 15 X direction control part and Y direction control part 20 Base | substrate 21 Vent hole 22 Perimeter wall part 23 Internal space 24 Convex-like body 25 Top surface 26 Closed space 27 Matching portion 28 Adhesive layer 29 Gap

Claims (4)

A surface having a non-adhesive part or a weakly adhesive part and a strong adhesive part, which is attached to a substrate having a vent hole for circulating a gas, adheres an object to be adhered to the strong adhesive part, and from the vent hole By injecting gas and causing the non-adhesive part or weak adhesive part to protrude from the base, or by exhausting the gas from the vent and causing the strong adhesive part to sink to the base side, A pressure-sensitive adhesive sheet capable of separating the adherend to be adhered and held in the strong adhesive part,
In the vicinity of the end portion of the adhesive sheet, an X-direction restricting portion and a Y-direction restricting portion that can be positioned in the X direction and the Y direction with respect to a specific position of the base in a virtual XY coordinate on a plane. Adhesive sheet characterized. The pressure-sensitive adhesive sheet according to claim 1;
A holding jig comprising: a base having a vent hole for fixing the adhesive sheet and circulating gas.   The base body further includes a peripheral wall portion and at least one convex body formed in an internal space surrounded by the peripheral wall portion, and the vent hole is formed in a gap portion between the peripheral wall portion and the convex body. The holding jig according to claim 2, wherein the holding jig is communicated. 4. The holding jig according to claim 2, wherein the base further has a matching portion that matches the X-direction regulating portion and the Y-direction regulating portion in the adhesive sheet.

Images