JP4849595B2 - Holding jig - Google Patents

Description

The present invention relates to a holding jig, and more particularly relates to a holding jig capable it is possible to hold the object to be adhesive material with sufficient holding force, easily removed.

  Conventionally, in the production of electronic components such as silicon wafers, flexible printed boards, glass plates for large screen display devices, ceramic capacitors, coil filters, etc., the thin plates are easily damaged, Since electronic parts and the like are difficult to fix in place and easily fall over, generally, these thin plate-like objects or electronic parts are fixed to a holding jig or the like, for example, a polishing process, a pattern forming process, a dicing process, etc. A manufacturing process or conveyance between manufacturing processes is performed.

  These thin plate-like objects or electronic components are held by a holding jig during the manufacturing process and / or during transportation between the manufacturing processes, and are held after the completion of the manufacturing process and / or after transportation. Removed from the jig. Therefore, the holding jig is required to have a characteristic of securely holding a thin plate-like object or an electronic component and a characteristic capable of easily removing the thin plate-like object or the electronic component when necessary.

  As such a holding jig, for example, in a substrate holding chuck that holds a substrate by vacuum suction, a wall body that forms a negative pressure when the substrate is vacuum-sucked, and deformation of the substrate at the time of vacuum suction is performed. A substrate holding chuck (see Patent Document 1), comprising: a plurality of auxiliary support bodies to be suppressed, wherein at least the auxiliary support body among the wall body and the auxiliary support body is formed to protrude on the surface of the glass substrate. A small component holding jig characterized in that at least the surface portion is formed of a rubber elastic material having adhesiveness, and the small component can be held tightly on the elastic material surface by the adhesive force (see Patent Document 2). Etc.

  However, since the substrate holding chuck fixes the substrate by vacuum suction, it is necessary to always perform vacuum suction during the manufacturing process and / or transporting, especially when the mass of the substrate is large. The structure and manufacturing method of the holder itself are complicated and expensive. Further, the substrate may be damaged by the auxiliary support.

  On the other hand, since the holding jig has adhesiveness on the entire surface of the elastic member, the entire surface of the small component is brought into close contact with the surface of the elastic member, and in particular, the thin plate is in close contact with the surface of the elastic member. There is a problem that the area is large and it is difficult to remove these small parts and thin plate-like objects from the elastic member when necessary. Therefore, it is necessary to remove the small component and the thin plate with a large force over the adhesive force, and the small component and the thin plate may be deformed, or may be damaged such as cracking or chipping.

JP 2000-286329 A Japanese Patent Publication No. 07-093247

An object of the present invention is to provide a holding jig that can hold an adherend with a sufficient holding force and can easily remove the adherend.

As means for solving the problems,
Claim 1 includes a base having a vent hole through which gas flows and an adhesive sheet fixed on the base, and the adhesive sheet has a non-adhesive portion or an adhesive force in the following measurement method on its surface. Adhesive strength difference between 1 to 60 (g / mm ² ) between the weak adhesive portion of less than 1 g / mm ² and the non-adhesive portion or the weak adhesive portion stronger than the adhesive strength of the weak adhesive portion. The non-adhesive part or the weak adhesive part and the strong adhesive part, wherein the area ratio of the non-adhesive part or the weak adhesive part with respect to the surface area of the surface is 20 to 95%. A holding jig having a sea-island structure in which one of the sea is the sea and the other is the island ,
In the first aspect of the present invention, the pressure-sensitive adhesive sheet has a weak adhesive portion or a non-adhesive portion protruding, or a strong adhesive portion is depressed, and the adherend adhered to the surface can be detached. It is a holding jig as described ,
Claim 3 is the holding jig according to claim 1 or 2 , wherein the strong adhesive portion has an adhesive force of 1 to 60 (g / mm ² ) in the measurement method according to claim 1 .
According to a fourth aspect of the present invention, the base body includes a peripheral wall portion formed as a convex frame at a peripheral edge portion thereof, and a convex body formed in an internal space surrounded by the peripheral wall portion, and the adhesive sheet includes the adhesive sheet The holding jig according to any one of claims 1 to 3, wherein the non-adhesive portion or the weak adhesive portion is supported and fixed by the peripheral wall portion and the convex body so that the non-adhesive portion or the weak adhesive portion is positioned on the convex body. And
Claim 5 is the holding jig according to any one of claims 1 to 3 , wherein the base is a plate-like body having a flat surface, and the strong adhesive portion is bonded and fixed .
According to a sixth aspect of the present invention, the base has a peripheral wall portion formed as a convex frame at a peripheral portion thereof, and a convex body formed in an internal space surrounded by the peripheral wall portion, and the adhesive sheet is The holding jig according to any one of claims 1 to 3, wherein the strong adhesion portion is supported and fixed by the peripheral wall portion and the convex body so that the strong adhesive portion is positioned on the convex body .
Claim 7 is the pressure-sensitive adhesive sheet according to any one of claims 1 to 6 , wherein the pressure-sensitive adhesive sheet is formed of silicone rubber or fluorine-based rubber .
The pressure-sensitive adhesive sheet according to any one of claims 1 to 7 , wherein the pressure-sensitive adhesive sheet has a center line average roughness Ra (JIS B 0601-1982) of 0.8 μm or less. It is.

<Measuring method> Using a load measuring device equipped with a digital force gauge with a stainless steel contactor having a 10 mm diameter column at the tip of the measuring section, the measurement environment was a temperature of 21 ± 1 ° C. and a humidity of 50 ± 5. The contactor is lowered until it comes into contact with the portion to be measured of the elastic member at a descending speed of 20 mm / min. ² The contactor is pressed against the measurement site for 3 seconds with a load of. Next, the contact is pulled away from the portion to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is defined as the adhesive strength.

  In the pressure-sensitive adhesive sheet according to the present invention, the weakly-adhesive part or non-adhesive part and the strong-adhesive part existing on the surface form a sea-island structure. It is possible to hold the object with sufficient adhesive force, and when the strong adhesive part and the weak adhesive part or the non-adhesive part constituting the sea-island structure are elastically deformed, the strong adhesive part is pulled from the adherend. Can be peeled off.

  According to the holding jig according to the present invention provided with the adhesive sheet, the object to be adhered can be held with a sufficient adhesive force by the strong adhesive part of the adhesive sheet during the manufacturing process and / or during transportation. In addition, after completion of the manufacturing process and / or after conveyance between the manufacturing processes, etc., the gas is charged or sucked through the air holes, and the weakly adhesive part or the non-adhesive part of the adhesive sheet is projected, Alternatively, the strong adhesive portion of the adhesive sheet can be depressed and the strong adhesive portion can be peeled off from the adherend by elastically deforming any one of the strong adhesive portion and the weak adhesive portion or the non-adhesive portion.

  Therefore, according to the pressure-sensitive adhesive sheet according to the present invention and the holding jig according to the present invention provided with the pressure-sensitive adhesive sheet, the object to be bonded can be held with a sufficient holding force, and the object to be bonded can be easily removed. Can be removed. Moreover, according to the adhesive sheet and holding jig which concern on this invention, when removing a to-be-adhered object from an adhesive sheet, it can prevent reliably that a to-be-adhered object deform | transforms or is damaged.

  The adhesive sheet according to the present invention and the holding jig according to the present invention provided with the adhesive sheet will be described below.

  The pressure-sensitive adhesive sheet according to the present invention includes a weakly-adhesive part or a non-adhesive part and a strong-adhesive part on the surface, and either the weakly-adhesive part or the non-adhesive part and the strong-adhesive part is the sea, and the other One of the characteristics is that it has a sea-island structure. The pressure-sensitive adhesive sheet holds the adherend to be described later, and easily releases the hold of the adherend by any one of the weakly-adhesive portion, the non-adhesive portion, and the strong-adhesive portion being elastically deformed.

The strong adhesive portion is a portion having an adhesive force sufficient to hold the adherend. Therefore, when the adherend is placed on the surface of the adhesive sheet, the strong adhesive portion has a sufficient adhesive force to hold the adherend when the surface is inclined at least 90 degrees. It is preferable to have it. In particular, when the adhesive sheet is rotated 180 degrees so that the surface of the adhesive sheet faces downward, the adhesive force sufficient to hold the adherend, that is, per unit area of the adherend It is preferable to have an adhesive force (g / mm ² ) greater than its own weight (g / mm ² ). When the strong adhesive portion has the above-described adhesive strength, the adherend can be reliably held on the adhesive sheet. Although the specific adhesive force of a strong adhesion part is determined according to the own weight of the to-be-adhered thing hold | maintained at an adhesive sheet, a magnitude | size, etc., it is 1-60 (g / mm < ² >), for example. well, 2~40 (g / mm ²⁾ is still more often, particularly good in the range of 4~20 (g / mm ^2).

The weak adhesive portion is a portion having an adhesive strength weaker than the adhesive strength of the strong adhesive portion. In order to easily remove the object to be adhered held on the adhesive sheet by the strong adhesion part, the weak adhesion part has at least 90% of the surface when the object to be adhered is placed on the surface. It is preferable to have such an adhesive strength that it cannot hold the object to be adhered when it is tilted at a degree. Specific adhesion of the weak adhesive portion, for example greater than ^{0 (g / mm 2),} 1 (g / mm 2) than the that of well greater than ^{0 (g / mm 2),} 0.7 (G / mm ² ) or less is better, more preferably 0 (g / mm ² ) and 0.5 (g / mm ² ) or less.

  The non-adhesive portion is a portion having substantially no adhesive force. When the adhesive sheet has a non-adhesive part, the adherend to be adhered to the adhesive sheet held by the strong adhesive part can be removed very easily.

Here, the adhesive strength in the strong adhesive portion and the weak adhesive portion is determined as follows. First, a suction fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate for horizontally fixing the adhesive sheet, and a cylinder with a diameter of 10 mm at the tip of the measurement unit. A load measuring device provided with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) with a contact made of stainless steel (SUS304) made is prepared. An adhesive sheet is fixed on this test stand, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, the contact attached to the load measuring device is lowered at a speed of 20 mm / min until it comes into contact with the measurement site of the strong adhesion part or the weak adhesion part. Press for 3 seconds perpendicularly to the measurement site with a load of. Here, the predetermined load is set to 25 g / mm ² . Next, the contact is pulled away from the site to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is taken as the adhesive strength of the strong adhesive portion or the weak adhesive portion. This measurement method may be performed manually, for example, using a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.) or the like. .

The weak adhesive part or the non-adhesive part and the strong adhesive part preferably have a difference in adhesive strength of 1 to 60 (g / mm ² ). When the difference in the adhesive strength is within this range, the adherend can be held on the adhesive sheet with a sufficient holding force, and the adherend to be held on the adhesive sheet can be easily removed. The difference in the adhesive strength is more preferably ^{2 to} 40 (g / mm ² ), and particularly preferably 4 to 20 (g / mm ² ). When the difference in the adhesive force is within these ranges, the adherend can be held on the adhesive sheet with sufficient holding force, and the adherend to be held on the adhesive sheet can be removed very easily. it can.

  The pressure-sensitive adhesive sheet according to the present invention has the sea-island structure on its surface. The sea-island structure may be a sea-island structure in which any one of the weakly-adhesive part or the non-adhesive part and the strong-adhesive part is the sea and the other is an island. Can be mentioned. In the sea-island structure in the adhesive sheet 10A shown in FIG. 1, the island portions 11 having a total of four rectangles are formed in the sea portion 12 in a grid pattern, each having a substantially uniform interval and two vertically and horizontally. It is a structure. The sea-island structure in the adhesive sheet 10B shown in FIG. 2 (a) is the same grid-like structure as the sea-island structure shown in FIG. 1 except that the size and number of the island portions 11 are different. The sea-island structure in the adhesive sheet 10 </ b> C shown in FIG. 3 is a structure in which three extending island parts 11 are formed in the sea part 12 in substantially parallel. The sea-island structure in the adhesive sheet 10D shown in FIG. 3A is a structure in which circular island portions 11 are radially formed in the sea portion 12, and in the adhesive sheet 10E shown in FIG. The sea-island structure is a structure in which circular island portions 11 are concentrically formed in the sea portion 12, and the sea-island structure in the adhesive sheet 10F shown in FIG. The portion 12 is a structure formed in a radial pattern according to an arbitrary curvature.

  The island part may be a weak adhesive part and / or a non-adhesive part, or a strong adhesive part. Therefore, the sea part may be a strong adhesive part, a weak adhesive part and / or a non-adhesive part. It may be an adhesive part. Whether the island part is a strong adhesive part or a weak adhesive part and / or a non-adhesive part can be determined according to the type, mass, purpose of use of the holding jig, and the like.

  In the sea-island structure, it is preferable that the area ratio of the island part or the sea part to be the weakly adhesive part or the non-adhesive part is 20 to 95% with respect to the total area of the sea-island structure. When the area ratio of the weakly adhesive part or the non-adhesive part is within this range, the adherend can be held on the adhesive sheet with a sufficient holding force, and the adherend to be held on the adhesive sheet can be easily Can be removed. The area ratio of the weakly adhesive part or non-adhesive part is more preferably 40 to 90%, and particularly preferably 50 to 80%. When the area ratio of the weakly adhesive part or the non-adhesive part is within this range, the adherend can be held on the adhesive sheet with sufficient holding force, and the adherend to be held on the adhesive sheet can be extremely It can be easily removed.

  Here, the area ratio of the weakly-adhesive part or the non-adhesive part is the ratio of the area of the island part or the sea part, which is the weakly-adhesive part or the non-adhesive part, to the total area of the island part and the sea part. The area ratio of the weakly adhesive part or the non-adhesive part can be calculated by obtaining the total area and the area of the island part or the sea part by a known method. In addition, in a holding jig (for example, a holding jig having a base shown in FIG. 5 (a)), the strong adhesive portion of the adhesive sheet is depressed to remove the object to be adhered to the surface of the adhesive sheet. In the adhesive sheet to be supported and fixed, the area ratio of the weakly adhesive part or the non-adhesive part excludes the peripheral part of the adhesive sheet located at the upper part of the peripheral wall part in the base to be described later. It is calculated as a ratio to the total area of the island part and the sea part in the part surrounded by the part.

  The pressure-sensitive adhesive sheet preferably has a thickness of about 0.05 to 2 mm and has a center line average roughness Ra (JIS B 0601-1982) of 0.8 μm or less. If the thickness of the pressure-sensitive adhesive sheet is less than 0.05 mm, the mechanical strength of the pressure-sensitive adhesive sheet itself is lowered, and the durability of the pressure-sensitive adhesive sheet itself may not be sufficient. The sheet is less likely to be elastically deformed, and the adherend may not be easily removed from the adhesive sheet. When the center line average roughness of the adhesive sheet is within the above range, the adhesive force of the strong adhesive part or the weak adhesive part in the adhesive sheet can be adjusted uniformly.

  The strong adhesive part of the adhesive sheet, particularly the adhesive sheet, can be formed by various elastomers such as silicone rubber, fluorine rubber, urethane elastomer, natural rubber, styrene-butadiene copolymer elastomer, etc., but the strength, weather resistance It is good to form with the silicone rubber and fluorine rubber which were excellent in the property. Among these, it is particularly preferable to have a rubber hardness (JIS K 6253 [durometer A]) of about 5 to 60. If the rubber hardness is less than 5, the adhesive strength may become too strong, while if it exceeds 60, the adhesive strength may become too weak.

  As said silicone rubber, the silicone rubber composition containing hardening | curing agents, such as organopolysiloxane, a silica type filler, and a peroxide, is mentioned, for example. As such a silicone rubber composition, for example, trade names “KE-520U”, “KE-530U” and the like are available from Shin-Etsu Chemical Co., Ltd. Examples of the fluorine rubber include a fluorine rubber containing a vinylidene fluoride / hexafluoropropylene copolymer, a filler such as carbon, a crosslinking aid such as trialisocyanate, and a curing agent such as peroxide. A composition. As such a fluorinated rubber composition, for example, trade names “DC-2050”, “DC-2260” and the like are available from Daikin Industries, Ltd.

  An adhesive sheet is formed by a well-known method, for example using the said material. In order to form a weakly adhesive part or a non-adhesive part on the surface of the formed sheet, for example, (1) a masking member having a desired pattern is placed on the surface of the sheet with a release film interposed therebetween, and masking is performed. (2) Adhesive material with weak adhesiveness (for example, silicone resin, fluororesin, urethane resin, etc.) on the part that forms weakly adhesive part or non-adhesive part Or the method of apply | coating the non-adhesive material without adhesiveness, (3) The method of roughening the surface of the part which forms a weak adhesion part or a non-adhesion part, etc. are mentioned.

  An adhesive sheet may be formed by a well-known method, for example using the said adhesive material with weak adhesiveness, or the said non-adhesive material without adhesiveness. In order to form the strong adhesion part on the surface of the formed sheet, for example, a method of applying the material to the part where the strong adhesion part is formed can be mentioned.

  The pressure-sensitive adhesive sheet according to the present invention can be formed into an arbitrary shape according to the shape of the adherend, its manufacturing process, handleability, etc., for example, a polygon such as a quadrangle, a pentagon, a hexagon, a circle, etc. , An elliptical shape, an indeterminate shape, or a combination of these, and the shape may be the same as or different from the shape of the substrate described later.

  Moreover, although the island part 11 shown by FIGS. 1-3 is formed in square, a rectangle, circular, or a ring shape, this island part is polygons, such as a pentagon and a hexagon, an ellipse, an indeterminate form, or You may form in the shape etc. which combined these.

  The adhesive sheet may have an adhesive part on the back surface.

  The holding jig according to the present invention is used when manufacturing and transporting an adherend, and as shown in FIG. 4, as shown in FIG. And the adhesive sheet 10 to be fixed.

  It is advantageous that the adherend to be held by the holding jig is a thin plate, an electronic component or the like that is easily broken or damaged, or a small and difficult to handle. Examples of the thin plate-like material include a silicon wafer, a flexible printed board, and a glass plate for a large screen display device. Examples of the electronic component include a ceramic capacitor and a coil filter.

  The base body 20 has a vent hole 21 through which a gas flows. The ventilation hole 21 communicates between the base 20 and the adhesive sheet 10 and the outside of the base 20, and a compression device such as a compressor (not shown) or the like installed outside, or a suction device such as a vacuum pump ( (Not shown). The hole diameter of the vent hole 21 is preferably increased within a range in which both high compression efficiency or suction efficiency and the strength of the base body 20 can be achieved, and can be set to about 0.2 to 3 mm, for example. As shown in FIG. 4, the air holes 21 may be formed so as to extend from the surface of the base body 20 to a predetermined position on the back surface side and from there to the side surface of the base body 20. It may be formed so as to penetrate from the surface 20 to the back surface.

  The substrate 20 only needs to be able to support and fix the adhesive sheet 10 on its surface. Examples thereof include substrates 20A and 20B shown in FIG.

  As shown in FIG. 5A, the base body 20 </ b> A has a peripheral wall portion 22, four convex bodies 24 formed in an internal space 23 surrounded by the peripheral wall portion 22, and a vent hole 21. ing. The adhesive sheet can be supported and fixed by the peripheral wall portion 22 and the convex body 24. As shown in FIG. 5A, the peripheral wall portion 22 is formed as a convex frame at the peripheral edge portion of the base body 20A, and has a top surface 25 for supporting and fixing the adhesive sheet on the upper portion thereof. . An inner space 23 having an open upper surface is formed by the surface of the peripheral wall portion 22 and the base body 20A.

  As shown in FIG. 5 (a), the convex body 24 is separated from the peripheral wall portion 22 in the internal space 23, and is provided with a substantially uniform interval, two vertically and two horizontally, for a total of four, It is formed so as to match the pattern of the sea-island structure in the adhesive sheet. All of the four convex bodies 24 are formed in a substantially square prismatic shape having substantially the same height as the peripheral wall portion 22. Thus, if the surrounding wall part 22 and each convex-shaped body 24 are formed in the substantially same height, an adhesive sheet can be reliably supported and fixed to 20 A of base | substrates. The size of the convex body 24 (the upper surface thereof) may be any size as long as it can securely fix the adhesive sheet and can support the adhesive sheet holding the adherend. Although it is determined according to the number 24, the adherend, etc., it is formed in the peripheral wall portion 22 and the internal space 23 surrounded by the peripheral wall portion 22 as in the base body 20A shown in FIG. In the base body having the convex body 24, the size of the convex body 24 is preferably set to a size corresponding to the area ratio of the weakly adhesive part or the non-adhesive part of the adhesive sheet.

  As shown in FIG. 5B, the base body 20 </ b> B is a plate-like body having the air holes 21. It is preferable that the surface of the base body 20B be formed flat.

  The base body 20 can be formed in a plate-like body such as a polygon such as a substantially square, a rectangle, a pentagon, and a hexagon, a circle, an ellipse, an indeterminate shape, or a combination thereof. The thickness of the substrate 20 may be appropriately determined depending on the application, and may be about 50 μm or more when simply transporting the adherend, and about several mm or more when used in the manufacturing process of the adherend. I just need it.

  The base 20 is formed of a material having a strength that does not deform even when a gas is inserted between the base 20 and the adhesive sheet 10 or when the gas is sucked. , Carbon steel, stainless steel, aluminum alloy, nickel alloy and other metals, porous materials such as porous ceramics, resin, glass, and composites thereof. The base 20 is preferably formed of stainless steel or aluminum alloy from the viewpoint of workability and operability. When the base body 20 is formed of a porous material, the air holes 21 do not need to be specifically formed, but the side surface and the bottom surface of the base body 20 need to be sealed.

  If the base | substrate 20 can be formed in a desired shape with the said material, the manufacturing method will not be specifically limited, For example, vacuum molding, injection molding, metal mold | molding etc. are mentioned. The vent hole 21 may be excavated separately. The base body 20A is preferably formed integrally with the peripheral wall portion 22 and the convex body 24, but can also be manufactured separately. That is, the peripheral wall portion 22 and the convex body 24 may be separately manufactured and fixed on the surface of the base body 20A. For example, the base body 20A may form a peripheral wall portion as a frame body having an opening portion, and a flat plate-like body may be fitted into the opening portion, and a member formed in a prism shape may be a peripheral edge of the flat plate-like body. It may be fixed to the part.

  The holding jig fixes the adhesive sheet 10 on the base 20 by providing an adhesive layer on the back surface of the adhesive sheet 10 and / or by providing an adhesive layer on the back surface of the adhesive sheet 10 or the base 20. Made up.

  The holding jig formed in this way is charged or sucked with a gas between the base 20 and the adhesive sheet 10 through the vent hole 21 to weakly adhere to the adhesive sheet or not. It is possible to easily remove the adherend to be adhered to the surface by protruding the adhesive part or by denting the strong adhesive part. Here, the pressure between the substrate 20 and the adhesive sheet 10 is increased to such an extent that the weak adhesive portion or the non-adhesive portion protrudes over the adhesive strength of the strong adhesive portion, or the adhesive strength of the strong adhesive portion. The pressure is reduced to such an extent that the strong adhesive part is depressed.

  In the holding jig, when the adherend is to be held during the manufacturing process and / or during transportation, the adherend is placed on the adhesive sheet. Since this pressure-sensitive adhesive sheet has a strong adhesive portion on the surface, it can be securely held only by placing the adherend, and therefore no special means for holding the adherend is required. It is possible to hold an object to be adhered with a simple configuration and a small size and low energy.

  In the holding jig, when removing the held adherend after completion of the manufacturing process and / or after conveyance between the manufacturing processes, as described above, the weakly sticking part or the non-sticking part is protruded, or , Sink the strong adhesive part. If it does so, a strong adhesion part will be separated from to-be-adhered thing, and an to-be-adhered object will contact a weak adhesion part or a non-adhesion part. Therefore, it is possible to easily remove the adherend from the adhesive sheet by tilting the holding jig with a slight force or by the weight of the adherend, and when removing the adherend, It is possible to reliably prevent the adhesive from being deformed or damaged.

  Next, a holding jig 1A according to an embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 6, the holding jig 1 </ b> A includes a base body 20 </ b> A shown in FIG. 5A and an adhesive sheet 10 </ b> A shown in FIG. 1.

The base body 20 </ b> A is formed in a substantially square plate shape using stainless steel or an aluminum alloy, and has nine vent holes 21. The adhesive sheet 10A is formed into a substantially square sheet of silicone rubber or fluorine rubber, and both surfaces thereof are adhesive. On one surface of the adhesive sheet 10A, a weakly adhesive part or a non-adhesive part whose adhesive strength has been weakened by UV irradiation is located as the island part 11 and above the top surface 25 of the peripheral wall part 22 in the base 20A. It is formed as a peripheral edge. That is, the adhesive sheet 10A has a sea-island structure of a sea part 12 of a strong adhesive part and an island part 11 of a weak adhesive part or a non-adhesive part inside the peripheral part of the weak adhesive part or the non-adhesive part on the surface. And the area ratio of the island part 11 which is the weak adhesion part or non-adhesion part formed inside the said peripheral part with respect to the surface area of the part enclosed by the said peripheral part is set to 20 to 95%. The sea portion 12 that is the strong adhesion portion is obtained when the holding jig 1A is rotated 180 degrees so that the surface is downward when the adherend 30 is placed on the surface of the adhesive sheet 10A. The adhesive object 30 has sufficient adhesive strength to be held. The strong adhesive part and the weak adhesive part or non-adhesive part of the adhesive sheet 10 </ ^b > A have a difference in adhesive strength between 1 and 60 (g / mm ² ).

  As shown in FIGS. 6 and 7A, the holding jig 1A has a closed space 26 formed by the peripheral wall portion 22, the convex body 24, and the adhesive sheet 10A.

  The operation of the holding jig 1A will be described. As an initial state of the holding jig 1A, as shown in FIGS. 6 and 7A, an adherend 30 is placed on the adhesive sheet 10A. In this initial state, since the sea portion 12 that is a strong adhesive portion is in close contact with the bottom surface of the adherend 30, the adherend 30 is held by the adhesive sheet 10 </ b> A. Therefore, the adherend 30 is held by the holding jig 10A with sufficient adhesive force, and the adherend 30 can be supplied to the manufacturing process together with the holding jig 10A, or can be transported. Thus, since the adherend 30 is simply held on the adhesive sheet 10A and is held by the holding jig 10A, the holding jig 1A has a simple configuration, is small in size, and has low energy. Can be held.

  On the other hand, when the object to be adhered 30 is removed from the holding jig 10A after the manufacturing process is finished or after the conveyance, as shown in FIG. 7B, a suction device or the like installed outside the holding jig 1A ( (Not shown) is connected to the vent hole 21, the gas in the closed space 26 is sucked, and the closed space 26 is depressurized or vacuumed. If it does so, the sea part 12 which is the strong adhesion part of 10 A of adhesive sheets which have elasticity will elastically deform against the adhesive force with the to-be-adhered object 10, and will be depressed in the obstruction | occlusion space 26. FIG. In this suction state, the sea portion 12 that is a strong adhesion portion on the upper surface of the adhesive sheet 10 </ b> A is separated from the bottom surface of the adherend 30. As a result, the adherend 30 is only held on the island part 11 which is the weakly adhesive part or the non-adhesive part of the adhesive sheet 10A, and is no longer held. Therefore, the object to be adhered 30 can be removed by tilting the holding jig 10A with a slight force or by the weight of the object to be adhered 30, and when the object to be adhered 30 is removed, Can be reliably prevented from being deformed or damaged.

  In the holding jig 1A, the sticking object 30 is easily held and removed by repeating the initial state and the suction state in this manner.

  Next, a holding jig 1B according to another embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 8, the holding jig 1B includes a base body 20B shown in FIG. 5B and an adhesive sheet 10G.

The base body 20B is formed in a substantially square plate shape with a flat surface made of stainless steel or aluminum alloy. The adhesive sheet 10G is formed into a substantially square sheet of silicone rubber or fluorine rubber, and both surfaces thereof are adhesive. One surface of the pressure-sensitive adhesive sheet 10G has a weakly adhesive part or a non-adhesive part whose adhesive strength is weakened by UV irradiation as a sea part 12, and a total of nine island parts 11 each having a substantially uniform interval and three vertically and horizontally. Is formed in a grid pattern. That is, as shown in FIG. 8, the adhesive sheet 10G has a grid-like sea-island structure with island portions 11 of strong adhesion portions and sea portions 12 of weak adhesion portions or non-adhesion portions, as shown in FIG. The area ratio of the sea portion 12 is set to 20 to 95%. When the adherend 30 is placed on the surface of the adhesive sheet 10G, the island portion 11 is rotated when the holding jig 1B is rotated 180 degrees so that the surface faces downward. Has sufficient adhesive strength to be retained. The strong adhesive part and the weak adhesive part or the non-adhesive part of the adhesive sheet 10G have a difference in adhesive strength between 1 and 60 (g / mm ² ).

  As shown in FIG. 9, the holding jig 1 </ b> B has the adhesive sheet 10 </ b> G on the base body 20 </ b> B via an adhesive layer 27 provided at a position corresponding to the peripheral edge of the base body 20 </ b> B and the island portion 11. It is fixed by bonding. Therefore, in the adhesive sheet 10G, the sea part 12 of the weakly adhesive part or the non-adhesive part can be elastically deformed, and this part is provided with the function of removing the object 30 from the adhesive sheet and the air hole 21. It functions as a flow path for the gas that has entered.

  The holding jig 1B is provided with a safety valve (not shown) for adjusting the amount of gas injected. As a result, the amount of gas charged between the base body 20B and the adhesive sheet 10G can be adjusted, and the adhesive sheet 10G can be prevented from being elastically deformed excessively, so that stable expansion and contraction is always realized. It becomes possible to do.

  The operation of the holding jig 1B will be described. As an initial state of the holding jig 1B, as shown in FIGS. 8 and 9A, an adherend 30 is placed on the adhesive sheet 10G. In this initial state, since the island part 11 which is a strong adhesion part is closely_contact | adhered to the bottom face of the to-be-adhered object 30, the to-be-adhered object 30 is hold | maintained at the adhesive sheet 10G. Therefore, the adherend 30 is held by the holding jig 10G with sufficient adhesive force, and the adherend 30 can be supplied to the manufacturing process together with the holding jig 10A, or can be transported. In addition, the holding jig 1B can hold the adherend 30 with a simple configuration, a small size and low energy, similarly to the holding jig 1A.

  On the other hand, when the object to be adhered 30 is removed from the holding jig 10G after completion of the manufacturing process or after conveyance, as shown in FIG. 9B, a compression device or the like installed outside the holding jig 10G ( (Not shown) is connected to the vent hole 21, and a gas is charged between the base body 20B and the adhesive sheet 10G. Then, in the adhesive sheet 10G having elasticity, the sea part 12 that is not bonded by the adhesive layer 27 is elastically deformed against the adhesive force between the object 30 and the island part 11 that is the strong adhesive part, and the base body 20B. Bulge from the surface of the. In this charged state, the island portion 11 that is a strong adhesion portion on the upper surface of the adhesive sheet 10 </ b> G is separated from the bottom surface of the adherend 30. As a result, the adherend 30 is merely held on the weakly or non-adhesive portion 12 of the adhesive sheet 10G and is no longer held. Accordingly, the object to be adhered 30 can be removed by tilting the holding jig 10G with a slight force or by the weight of the object to be adhered 30, and when the object to be adhered 30 is removed, Can be reliably prevented from being deformed or damaged.

  In the holding jig 1B, the adherend 30 is easily held and removed by repeating the initial state and the charging state in this manner.

  Furthermore, a holding jig 1C according to another embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 10, the holding jig 1 </ b> C includes a base body 20 </ b> A shown in FIG. 5A and an adhesive sheet 10 </ b> A shown in FIG. 1. This adhesive sheet 10A is an adhesive sheet 10A that constitutes the holding jig 1A except that it has a sea-island structure of an island part 11 of a strong adhesive part and a sea part 12 of a weak adhesive part or a non-adhesive part. And basically the same.

  As shown in FIGS. 10 and 11 (a), the holding jig 1C is disposed on the base 20A via an adhesive layer 27 provided on the top surface 25 of the peripheral wall portion 22 and the top surface of the convex body 24. The adhesive sheet 10A is bonded and fixed. The holding jig 1C has a closed space 26 formed by the peripheral wall portion 22, the convex body 24, and the adhesive sheet 10A. Further, the adhesive sheet 10 </ b> A has a weakly adhesive part or a non-adhesive part of the sea portion 12 that can be elastically deformed, and this part is provided with a function of removing the article to be adhered 30 from the adhesive sheet 10 </ b> A and the air hole 21. It functions as a flow path for the charged gas. The holding jig 1C is provided with a safety valve (not shown) similar to the holding jig 1B. Therefore, as shown in FIGS. 10 and 11, the holding jig 1 </ b> C is basically the same as the structure and operation of the holding jig 1 </ b> B except that it has a closed space 26.

  Although the holding jigs 1A, 1B, and 1C as one embodiment of the present invention have been described above, the holding jigs 1A, 1B, and 1C are not limited to the above description contents, and are within the scope of the present invention. The design can be changed as appropriate.

  For example, the holding jigs 1A, 1B, and 1C can hold a plurality of objects to be adhered according to the shape of the object to be adhered, and are formed to have high versatility. A plurality of island portions 11 forming the sea-island structure are formed. However, in the holding jig according to the present invention, one island portion may be formed.

  In addition, the holding jigs 1A, 1B, and 1C have an adhesive force sufficient to hold an object to be adhered even if the adhesive sheet 10 constituting them is rotated 180 degrees. The object to be adhered may be held in the placed state on the upper side, or the object to be adhered may be held in a suspended state with the adhesive sheet on the lower side.

  Further, each of the holding jigs 1A, 1B, and 1C holds one object to be bonded, but may hold one object to be bonded with a plurality of holding jigs.

  In the holding jigs 1B and 1C, the thickness of the island part in the adhesive sheet may be formed thinner than the thickness of the sea part. In this case, since the thinly formed island portion is easily elastically deformed, when removing the object to be adhered from the adhesive sheet, the amount of gas charged between the base and the adhesive sheet is reduced. be able to. Such an adhesive sheet can be manufactured by integral molding, or can be manufactured by laminating a second sheet member in which a plurality of through portions having a predetermined shape are formed on the first sheet member. it can.

  Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to the examples.

Example 1
A base body 20A shown in FIG. 5A was manufactured using stainless steel. However, in the base body 20A, a total of 324 convex bodies 24, each 18 in the vertical and horizontal directions, were formed. The size of the manufactured base 20A was 100 mm in length, 100 mm in width, and 6 mm in thickness. In addition, the magnitude | size of the convex-shaped body 24 was adjusted so that it might become the area ratio of the weak adhesion part in the adhesive sheet mentioned later.

Next, 10.0 parts by mass of a silicone raw rubber composed of an alkenyl group-containing polyorganosiloxane of 5 mol% of methyl vinyl siloxane units and 95 mol% of dimethyl vinyl siloxane units, H (CH ₃ ) ₂ SiO — ((CH ₃ ) ₂ SiO ) SiH bond-containing polyorganosiloxane crosslinking agent composed of _18- Si (CH ₃ ) ₂ H, 5.7 parts by mass, (CH ₃ ) SiO _0.5 unit / SiO ₂ unit, (CH ₃ ) SiO _0.5 50.0 parts by mass of a polyorganosiloxane pressure-sensitive adhesive having a unit / SiO ₂ unit molar ratio of 0.85, 0.3 parts by mass of a 2-ethylhexanol solution of chloroplatinic acid such that the platinum amount is 10 ppm, and silica powder 10 Curing a composition containing 0.1 part by mass of a reaction control agent comprising 1 part by mass of 1-ethynylcyclohexanol by a conventional method And formed into a sheet having a length of 100 mm, a width of 100 mm, and a thickness of 0.5 mm. Next, a masking member having a pattern that matches the pattern of the convex body 24 of the base body 20A is placed on the molded sheet with a release film interposed therebetween, and ultraviolet rays are irradiated from above the masking member, thereby the base body 20A. A weak adhesive portion was formed in a portion located above the top surface 25 of the peripheral wall portion 22 and a portion located above the convex body 24 of the base body 20A. The intensity of ultraviolet rays was 2000 mJ / cm ² and the irradiation time was 2 minutes. Thus, 10 A of adhesive sheets were produced. The surface roughness Ra (JIS B 0601-1982) of the pressure-sensitive adhesive sheet 10A was 0.8 μm or less.

  The produced adhesive sheet 10A was placed on the base 20A and fixed to the base 20A, and a holding jig A of the same type as the holding jig 1A shown in FIG. 6 was produced.

(Examples 2 to 4)
In the composition, the compounding amount of the polyorganosiloxane pressure-sensitive adhesive is changed to 45 parts by mass, 30 parts by mass and 15 parts by mass, and the irradiation amount and irradiation of ultraviolet rays so that the adhesive strength of the weak adhesion part shown in Table 1 is obtained. Holding jigs B to D were produced in the same manner as in Example 1 except that the time was changed.
(Example 5)
Except that the number of convex bodies 24 in the base body 20A is 1089 in total, 33 vertically and horizontally, and a masking member having a pattern matching the arrangement pattern of the convex bodies 24 is used to irradiate ultraviolet rays. In the same manner as in Example 2, a holding jig E was produced.
(Example 6)
Except for using a masking member prepared to have a pattern area that is slightly larger than the arrangement pattern of the convex bodies 24 in the masking member and having an area ratio shown in Table 1, the same as in Example 2, A holding jig F was produced.
(Examples 7 and 8)
The total number of convex bodies 24 in the base body 20A is 25 in the vertical and horizontal directions of 625 and 10 in the vertical and horizontal directions, respectively, and a masking member having a pattern that matches the arrangement pattern of these convex bodies 24 is used. Then, holding jigs G and H were produced in the same manner as in Example 2 except that ultraviolet rays were irradiated.
(Examples 9 to 12)
Holding jigs I to L were manufactured in the same manner as in Example 2 except that the irradiation time of the ultraviolet rays applied to the adhesive sheet 10A was changed to 1 minute, 2.5 minutes, 5 minutes, and 7 minutes.

(Comparative Example 1)
A holding jig M was produced in the same manner as in Example 1 except that the entire surface of the adhesive sheet was irradiated with ultraviolet rays.
(Comparative Example 2)
A holding jig N was produced in the same manner as in Example 2 except that the adhesive sheet was not irradiated with ultraviolet rays.

In the pressure-sensitive adhesive sheet thus produced, the area ratio (%) of the weakly-adhesive part relative to the surface area (640 mm ² ) of the part surrounded by the peripheral part, excluding the peripheral part, was calculated. The adhesive strength of the weak adhesive portion was measured according to the measurement method, and the difference in adhesive strength between the strong adhesive portion and the weak adhesive portion was calculated. The results are shown in Table 1. In the measurement method, the measurement environment was set to a temperature of 21 ° C. and a humidity of 50%, and the measurement sites were nine.

  Next, a silicon wafer (76.2 g) having a diameter of 76.2 mm and a thickness of 0.28 mm is placed on the produced adhesive sheets of the holding jigs A to N, and the holding jigs A to N are tilted. The adhesiveness of the holding jig was evaluated. As a result, the holding jig M of Comparative Example 1 could not hold the silicon wafer at all. In the holding jig E of Example 5, the silicon wafer could not be held with sufficient adhesive force. On the other hand, in the holding jigs A to D, F, and N of Examples 1 to 4, 6 to 12 and Comparative Example 2, the silicon wafer is held with sufficient adhesive force even if the holding jig is inverted 180 degrees. It had been.

  Next, a vacuum pump is connected to the vent hole 21 of the base body 20A in the holding jigs A to L and N that can hold the silicon wafer, the closed space 26 is decompressed, and the ease of removing the silicon wafer is evaluated. did. Evaluation is made in five stages of 1, 2, 3, 4, and 5 in order of difficulty in removing the silicon wafer. Evaluation 1 is evaluated when it is difficult to remove the silicon wafer and it is often damaged when removing the silicon wafer. 2 indicates that the silicon wafer can be removed relatively easily, evaluation 3 indicates that the silicon wafer can be easily removed, and evaluation 4 or higher indicates that the silicon wafer can be removed very easily. The results are shown in Table 1.

  Shin-Etsu Chemical Co., Ltd., trade name “KE-971U” weakly or non-adhesive silicone rubber is molded into a sheet, and the surface is made by Shin-Etsu Chemical Co., Ltd., trade name “X Except that the strong adhesive part was formed by using the strong adhesive silicone rubber of “34-632A / B”, the difference in adhesive strength and the strong adhesive of the strong adhesive part and the weak adhesive part as in Examples 1 to 12, respectively. An adhesive sheet having a part area ratio was prepared, and a base body 20B having a smooth surface was prepared to prepare each holding jig of the same type as the holding jig 1B shown in FIG. The adhesiveness and ease of removal of each produced holding jig were similarly evaluated. As a result, the same results as those of Examples 1 to 12 were obtained.

FIG. 1 is a schematic perspective view showing an example of an adhesive sheet. FIG. 2 is a schematic top view showing an example of an adhesive sheet, FIG. 2 (a) is a schematic top view showing an example of an adhesive sheet having a grid-like sea-island structure, and FIG. It is a schematic top view which shows an example of the adhesive sheet | seat which has a substantially parallel rod-shaped sea-island structure. FIG. 3 is a schematic top view showing an example of an adhesive sheet, FIG. 3 (a) is a schematic top view showing an example of an adhesive sheet having a radial sea-island structure, and FIG. 3 (b) is a concentric circle shape. FIG. 3C is a schematic top view showing an example of an adhesive sheet having a radial sea-island structure according to an arbitrary curvature. FIG. 4 is a schematic perspective view showing an example of a holding jig. FIG. 5 is a schematic perspective view showing an example of the base, FIG. 5 (a) is a schematic perspective view showing an example of the base having a peripheral wall portion and a convex body, and FIG. 5 (b) has a flat surface. It is a schematic perspective view which shows an example of a base | substrate. FIG. 6 is a schematic perspective view showing an example of a holding jig. 7 is a schematic cross-sectional view taken along line AA in FIG. 6, FIG. 7 (a) is a schematic cross-sectional view showing an initial state of the holding jig, and FIG. 7 (b) is a schematic view of the holding jig. It is a schematic sectional drawing which shows a suction state. FIG. 8 is a schematic perspective view showing an example of a holding jig. 9 is a schematic cross-sectional view taken along line AA in FIG. 8, FIG. 9 (a) is a schematic cross-sectional view showing an initial state of the holding jig, and FIG. 9 (b) is a drawing of the holding jig. It is a schematic sectional drawing which shows a charging state. FIG. 10 is a schematic perspective view showing an example of a holding jig. 11 is a schematic cross-sectional view taken along the line AA in FIG. 10, FIG. 11 (a) is a schematic cross-sectional view showing an initial state of the holding jig, and FIG. 11 (b) is a drawing of the holding jig. It is a schematic sectional drawing which shows a charging state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Holding jig 10 Adhesive sheet 11 Island part 12 Sea part 20 Base | substrate 21 Vent hole 22 Peripheral wall part 23 Internal space 24 Convex-like body 25 Top surface 26 Closed space 27 Adhesive layer 30 Adhesive object

Claims (8)

  A base having a vent hole for circulating gas and an adhesive sheet fixed on the base,
  The adhesive sheet has a non-adhesive part or 1 g / mm adhesive strength in the following measurement method on its surface. ² The difference in adhesive strength between the non-adhesive portion and the weak adhesive portion is 1 to 60 (g / mm) stronger than the weak adhesive portion and less than the weak adhesive portion. ² The non-adhesive part or the weak adhesive part, and the area ratio of the non-adhesive part or the weak adhesive part with respect to the surface area of the surface is 20 to 95%. A holding jig having a sea-island structure in which one of the strong adhesive portions is the sea and the other is an island.
<Measuring method> Using a load measuring device equipped with a digital force gauge with a stainless steel contactor having a 10 mm diameter column at the tip of the measuring section, the measurement environment was a temperature of 21 ± 1 ° C. and a humidity of 50 ± 5. The contactor is lowered until it comes into contact with the portion to be measured of the elastic member at a descending speed of 20 mm / min. ² The contactor is pressed against the measurement site for 3 seconds with a load of. Next, the contact is pulled away from the portion to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is defined as the adhesive strength.   The holding treatment according to claim 1, wherein the adhesive sheet has a weak adhesive part or a non-adhesive part protruding, or a strong adhesive part is depressed, and the object to be adhered adhered to the surface can be detached. Ingredients.   The strong adhesive portion has an adhesive strength in the measurement method according to claim 1 of 1 to 60 (g / mm). ² The holding jig according to claim 1 or 2. The base body has a peripheral wall portion formed as a convex frame at a peripheral portion thereof, and a convex body formed in an internal space surrounded by the peripheral wall portion,
The adhesive sheet is supported and fixed by the peripheral wall portion and the convex body so that the non-adhesive portion or the weak adhesive portion is positioned on the convex body. The holding jig according to the item.   The holding jig according to any one of claims 1 to 3, wherein the base is a plate-like body having a flat surface, and the strong adhesive portion is bonded and fixed. The base body has a peripheral wall portion formed as a convex frame at a peripheral portion thereof, and a convex body formed in an internal space surrounded by the peripheral wall portion,
The holding | maintenance of any one of Claims 1-3 with which the said adhesive sheet is supported and fixed by the said surrounding wall part and the said convex body so that the said strong adhesion part may be located on the said convex body. jig. The pressure-sensitive adhesive sheet according to any one of claims 1 to 6, wherein the pressure-sensitive adhesive sheet is formed of silicone rubber or fluorine-based rubber.   The pressure-sensitive adhesive sheet according to claim 1, wherein the pressure-sensitive adhesive sheet has a center line average roughness Ra (JIS B 0601-1982) of 0.8 μm or less.

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